{"id":"https://openalex.org/W2772247353","doi":"https://doi.org/10.3390/s17122842","title":"High-Speed Focus Inspection System Using a Position-Sensitive Detector","display_name":"High-Speed Focus Inspection System Using a Position-Sensitive Detector","publication_year":2017,"publication_date":"2017-12-08","ids":{"openalex":"https://openalex.org/W2772247353","doi":"https://doi.org/10.3390/s17122842","mag":"2772247353","pmid":"https://pubmed.ncbi.nlm.nih.gov/29292722"},"language":"en","primary_location":{"id":"doi:10.3390/s17122842","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s17122842","pdf_url":"https://www.mdpi.com/1424-8220/17/12/2842/pdf?version=1512723511","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/17/12/2842/pdf?version=1512723511","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5065002688","display_name":"Binh Xuan Cao","orcid":"https://orcid.org/0000-0002-1331-0636"},"institutions":[{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]},{"id":"https://openalex.org/I88761825","display_name":"Korea University of Science and Technology","ror":"https://ror.org/000qzf213","country_code":"KR","type":"education","lineage":["https://openalex.org/I88761825"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Binh Cao","raw_affiliation_strings":["Department of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Korea","Department of Nano-Mechatronics, Korea University of Science and Technology (UST), Daejeon 34113, Korea"],"raw_orcid":"https://orcid.org/0000-0002-1331-0636","affiliations":[{"raw_affiliation_string":"Department of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Korea","institution_ids":["https://openalex.org/I4210111434"]},{"raw_affiliation_string":"Department of Nano-Mechatronics, Korea University of Science and Technology (UST), Daejeon 34113, Korea","institution_ids":["https://openalex.org/I88761825"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102745583","display_name":"Phuong H. Hoang","orcid":"https://orcid.org/0000-0002-2150-9231"},"institutions":[{"id":"https://openalex.org/I157485424","display_name":"Korea Advanced Institute of Science and Technology","ror":"https://ror.org/05apxxy63","country_code":"KR","type":"education","lineage":["https://openalex.org/I157485424"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Phuong Hoang","raw_affiliation_strings":["Department of Material Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Material Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Korea","institution_ids":["https://openalex.org/I157485424"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013953552","display_name":"Sanghoon Ahn","orcid":"https://orcid.org/0000-0001-5429-7653"},"institutions":[{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Sanghoon Ahn","raw_affiliation_strings":["Department of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Korea","institution_ids":["https://openalex.org/I4210111434"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014053867","display_name":"Heeshin Kang","orcid":"https://orcid.org/0009-0007-2502-0883"},"institutions":[{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Heeshin Kang","raw_affiliation_strings":["Department of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Korea","institution_ids":["https://openalex.org/I4210111434"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072115560","display_name":"Jeng-o Kim","orcid":null},"institutions":[{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jengo Kim","raw_affiliation_strings":["Department of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Korea","institution_ids":["https://openalex.org/I4210111434"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5112355008","display_name":"Jiwhan Noh","orcid":null},"institutions":[{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]},{"id":"https://openalex.org/I88761825","display_name":"Korea University of Science and Technology","ror":"https://ror.org/000qzf213","country_code":"KR","type":"education","lineage":["https://openalex.org/I88761825"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Jiwhan Noh","raw_affiliation_strings":["Department of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Korea","Department of Nano-Mechatronics, Korea University of Science and Technology (UST), Daejeon 34113, Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Korea","institution_ids":["https://openalex.org/I4210111434"]},{"raw_affiliation_string":"Department of Nano-Mechatronics, Korea University of Science and Technology (UST), Daejeon 34113, Korea","institution_ids":["https://openalex.org/I88761825"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5112355008"],"corresponding_institution_ids":["https://openalex.org/I4210111434","https://openalex.org/I88761825"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.7024,"has_fulltext":true,"cited_by_count":12,"citation_normalized_percentile":{"value":0.77788632,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":97},"biblio":{"volume":"17","issue":"12","first_page":"2842","last_page":"2842"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13114","display_name":"Image Processing Techniques and Applications","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2214","display_name":"Media Technology"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13114","display_name":"Image Processing Techniques and Applications","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2214","display_name":"Media Technology"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10638","display_name":"Optical measurement and interference techniques","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11517","display_name":"Advanced optical system design","score":0.9973999857902527,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/focus","display_name":"Focus (optics)","score":0.8253164291381836},{"id":"https://openalex.org/keywords/detector","display_name":"Detector","score":0.7346192002296448},{"id":"https://openalex.org/keywords/position","display_name":"Position (finance)","score":0.6225180625915527},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5884090065956116},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.5126835107803345},{"id":"https://openalex.org/keywords/automated-x-ray-inspection","display_name":"Automated X-ray inspection","score":0.4810336232185364},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.4574008584022522},{"id":"https://openalex.org/keywords/interface","display_name":"Interface (matter)","score":0.4468492269515991},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.430908203125},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.3324270248413086},{"id":"https://openalex.org/keywords/image-processing","display_name":"Image processing","score":0.23659616708755493},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.17817968130111694},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.11489057540893555},{"id":"https://openalex.org/keywords/image","display_name":"Image (mathematics)","score":0.11269053816795349}],"concepts":[{"id":"https://openalex.org/C192209626","wikidata":"https://www.wikidata.org/wiki/Q190909","display_name":"Focus (optics)","level":2,"score":0.8253164291381836},{"id":"https://openalex.org/C94915269","wikidata":"https://www.wikidata.org/wiki/Q1834857","display_name":"Detector","level":2,"score":0.7346192002296448},{"id":"https://openalex.org/C198082294","wikidata":"https://www.wikidata.org/wiki/Q3399648","display_name":"Position (finance)","level":2,"score":0.6225180625915527},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5884090065956116},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.5126835107803345},{"id":"https://openalex.org/C146920229","wikidata":"https://www.wikidata.org/wiki/Q2278114","display_name":"Automated X-ray inspection","level":4,"score":0.4810336232185364},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.4574008584022522},{"id":"https://openalex.org/C113843644","wikidata":"https://www.wikidata.org/wiki/Q901882","display_name":"Interface (matter)","level":4,"score":0.4468492269515991},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.430908203125},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.3324270248413086},{"id":"https://openalex.org/C9417928","wikidata":"https://www.wikidata.org/wiki/Q1070689","display_name":"Image processing","level":3,"score":0.23659616708755493},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17817968130111694},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.11489057540893555},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.11269053816795349},{"id":"https://openalex.org/C10138342","wikidata":"https://www.wikidata.org/wiki/Q43015","display_name":"Finance","level":1,"score":0.0},{"id":"https://openalex.org/C162324750","wikidata":"https://www.wikidata.org/wiki/Q8134","display_name":"Economics","level":0,"score":0.0},{"id":"https://openalex.org/C129307140","wikidata":"https://www.wikidata.org/wiki/Q6795880","display_name":"Maximum bubble pressure method","level":3,"score":0.0},{"id":"https://openalex.org/C157915830","wikidata":"https://www.wikidata.org/wiki/Q2928001","display_name":"Bubble","level":2,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C173608175","wikidata":"https://www.wikidata.org/wiki/Q232661","display_name":"Parallel computing","level":1,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s17122842","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s17122842","pdf_url":"https://www.mdpi.com/1424-8220/17/12/2842/pdf?version=1512723511","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:29292722","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/29292722","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:5e1b2c4196ba46429a0667ccf9d3efc4","is_oa":true,"landing_page_url":"https://doaj.org/article/5e1b2c4196ba46429a0667ccf9d3efc4","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 17, Iss 12, p 2842 (2017)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/17/12/2842/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s17122842","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 17; Issue 12; Pages: 2842","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:5751675","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/5751675","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s17122842","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s17122842","pdf_url":"https://www.mdpi.com/1424-8220/17/12/2842/pdf?version=1512723511","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9","score":0.41999998688697815}],"awards":[{"id":"https://openalex.org/G6200960335","display_name":null,"funder_award_id":"NK202B","funder_id":"https://openalex.org/F4320322098","funder_display_name":"Korea Institute of Machinery and Materials"}],"funders":[{"id":"https://openalex.org/F4320322098","display_name":"Korea Institute of Machinery and Materials","ror":"https://ror.org/01qcq9d74"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2772247353.pdf","grobid_xml":"https://content.openalex.org/works/W2772247353.grobid-xml"},"referenced_works_count":19,"referenced_works":["https://openalex.org/W1200844083","https://openalex.org/W1979367763","https://openalex.org/W1986718366","https://openalex.org/W1994362032","https://openalex.org/W1997597617","https://openalex.org/W2002815206","https://openalex.org/W2003440067","https://openalex.org/W2006220292","https://openalex.org/W2021440377","https://openalex.org/W2028850903","https://openalex.org/W2040717288","https://openalex.org/W2055977718","https://openalex.org/W2058490142","https://openalex.org/W2082913007","https://openalex.org/W2123497742","https://openalex.org/W2140898547","https://openalex.org/W2168331997","https://openalex.org/W2613722531","https://openalex.org/W2731887838"],"related_works":["https://openalex.org/W2366906938","https://openalex.org/W2349391998","https://openalex.org/W4205655149","https://openalex.org/W2012531322","https://openalex.org/W2000775715","https://openalex.org/W2795393339","https://openalex.org/W2074467390","https://openalex.org/W2626393719","https://openalex.org/W2174745845","https://openalex.org/W2359093779"],"abstract_inverted_index":{"Precise":[0],"and":[1,36,47,56,86,111,113,129],"rapid":[2],"focus":[3,38,69,107],"detection":[4,18],"is":[5,23,89,96,109,114],"an":[6],"essential":[7],"operation":[8],"in":[9,62,119],"several":[10],"manufacturing":[11],"processes":[12],"employing":[13],"high-intensity":[14],"lasers.":[15],"However,":[16],"the":[17,42,63,68,78,93,99,120],"resolution":[19],"of":[20,44,82,123],"existing":[21],"methods":[22],"notably":[24],"low.":[25],"This":[26],"paper":[27],"proposes":[28],"a":[29,33,57,83],"technique":[30],"that":[31],"provides":[32],"rapid-response,":[34],"high-precision,":[35],"high-resolution":[37],"inspection":[39,108],"system":[40,64,104],"on":[41,77],"basis":[43],"geometrical":[45],"optics":[46],"advanced":[48],"optical":[49,100],"instruments.":[50],"An":[51],"ultrafast":[52],"interface":[53],"position":[54,70],"detector":[55],"single-slit":[58],"mask":[59],"are":[60,81],"used":[61],"to":[65],"precisely":[66],"signal":[67],"with":[71],"high":[72,84],"resolution.":[73],"The":[74,102],"reflected":[75],"images":[76],"image":[79],"sensor":[80],"quality,":[85],"this":[87],"quality":[88],"maintained":[90],"persistently":[91],"when":[92],"target":[94],"surface":[95],"shifted":[97],"along":[98],"axis.":[101],"proposed":[103],"developed":[105],"for":[106,116],"simple":[110],"inexpensive,":[112],"appropriate":[115],"practical":[117],"use":[118],"industrial":[121],"production":[122],"sophisticated":[124],"structures":[125],"such":[126],"as":[127],"microcircuits":[128],"microchips.":[130]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}