{"id":"https://openalex.org/W2734490038","doi":"https://doi.org/10.3390/s17092061","title":"Thermal Flow Sensors for Harsh Environments","display_name":"Thermal Flow Sensors for Harsh Environments","publication_year":2017,"publication_date":"2017-09-08","ids":{"openalex":"https://openalex.org/W2734490038","doi":"https://doi.org/10.3390/s17092061","mag":"2734490038","pmid":"https://pubmed.ncbi.nlm.nih.gov/28885595"},"language":"en","primary_location":{"id":"doi:10.3390/s17092061","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s17092061","pdf_url":"https://www.mdpi.com/1424-8220/17/9/2061/pdf?version=1504876604","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"review","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/17/9/2061/pdf?version=1504876604","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5032968028","display_name":"V.R. Balakrishnan","orcid":"https://orcid.org/0000-0002-6073-4829"},"institutions":[{"id":"https://openalex.org/I11701301","display_name":"Griffith University","ror":"https://ror.org/02sc3r913","country_code":"AU","type":"education","lineage":["https://openalex.org/I11701301"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Vivekananthan Balakrishnan","raw_affiliation_strings":["Queensland Micro- and Nanotechnology Centre, Griffith University, Brisbane 4111, QLD, Australia"],"affiliations":[{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University, Brisbane 4111, QLD, Australia","institution_ids":["https://openalex.org/I11701301"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024560510","display_name":"Hoang\u2010Phuong Phan","orcid":"https://orcid.org/0000-0002-1724-5667"},"institutions":[{"id":"https://openalex.org/I11701301","display_name":"Griffith University","ror":"https://ror.org/02sc3r913","country_code":"AU","type":"education","lineage":["https://openalex.org/I11701301"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Hoang-Phuong Phan","raw_affiliation_strings":["Queensland Micro- and Nanotechnology Centre, Griffith University, Brisbane 4111, QLD, Australia"],"affiliations":[{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University, Brisbane 4111, QLD, Australia","institution_ids":["https://openalex.org/I11701301"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040091554","display_name":"Toan Dinh","orcid":"https://orcid.org/0000-0002-7489-9640"},"institutions":[{"id":"https://openalex.org/I11701301","display_name":"Griffith University","ror":"https://ror.org/02sc3r913","country_code":"AU","type":"education","lineage":["https://openalex.org/I11701301"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Toan Dinh","raw_affiliation_strings":["Queensland Micro- and Nanotechnology Centre, Griffith University, Brisbane 4111, QLD, Australia"],"affiliations":[{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University, Brisbane 4111, QLD, Australia","institution_ids":["https://openalex.org/I11701301"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064713378","display_name":"Dzung Viet Dao","orcid":"https://orcid.org/0000-0002-6348-0879"},"institutions":[{"id":"https://openalex.org/I11701301","display_name":"Griffith University","ror":"https://ror.org/02sc3r913","country_code":"AU","type":"education","lineage":["https://openalex.org/I11701301"]}],"countries":["AU"],"is_corresponding":false,"raw_author_name":"Dzung Dao","raw_affiliation_strings":["School of Engineering, Griffith University, Gold Coast 4222, QLD, Australia"],"affiliations":[{"raw_affiliation_string":"School of Engineering, Griffith University, Gold Coast 4222, QLD, Australia","institution_ids":["https://openalex.org/I11701301"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5012833011","display_name":"Nam\u2010Trung Nguyen","orcid":"https://orcid.org/0000-0003-3626-5361"},"institutions":[{"id":"https://openalex.org/I11701301","display_name":"Griffith University","ror":"https://ror.org/02sc3r913","country_code":"AU","type":"education","lineage":["https://openalex.org/I11701301"]}],"countries":["AU"],"is_corresponding":true,"raw_author_name":"Nam-Trung Nguyen","raw_affiliation_strings":["Queensland Micro- and Nanotechnology Centre, Griffith University, Brisbane 4111, QLD, Australia"],"affiliations":[{"raw_affiliation_string":"Queensland Micro- and Nanotechnology Centre, Griffith University, Brisbane 4111, QLD, Australia","institution_ids":["https://openalex.org/I11701301"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5012833011"],"corresponding_institution_ids":["https://openalex.org/I11701301"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":4.8549,"has_fulltext":false,"cited_by_count":95,"citation_normalized_percentile":{"value":0.95729911,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":90,"max":100},"biblio":{"volume":"17","issue":"9","first_page":"2061","last_page":"2061"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T13928","display_name":"Advanced Sensor Technologies Research","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13251","display_name":"Electrical and Thermal Properties of Materials","score":0.9976999759674072,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectronics","display_name":"Microelectronics","score":0.7151821851730347},{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.6399797797203064},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5129587054252625},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.49660950899124146},{"id":"https://openalex.org/keywords/flow","display_name":"Flow (mathematics)","score":0.4934738874435425},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.437019944190979},{"id":"https://openalex.org/keywords/aerospace","display_name":"Aerospace","score":0.41412535309791565},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.37876805663108826},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.35937777161598206},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3302863836288452},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2757052779197693},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.23905310034751892},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.21009668707847595}],"concepts":[{"id":"https://openalex.org/C187937830","wikidata":"https://www.wikidata.org/wiki/Q175403","display_name":"Microelectronics","level":2,"score":0.7151821851730347},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.6399797797203064},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5129587054252625},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.49660950899124146},{"id":"https://openalex.org/C38349280","wikidata":"https://www.wikidata.org/wiki/Q1434290","display_name":"Flow (mathematics)","level":2,"score":0.4934738874435425},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.437019944190979},{"id":"https://openalex.org/C167740415","wikidata":"https://www.wikidata.org/wiki/Q2876213","display_name":"Aerospace","level":2,"score":0.41412535309791565},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.37876805663108826},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.35937777161598206},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3302863836288452},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2757052779197693},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.23905310034751892},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.21009668707847595},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":7,"locations":[{"id":"doi:10.3390/s17092061","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s17092061","pdf_url":"https://www.mdpi.com/1424-8220/17/9/2061/pdf?version=1504876604","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:28885595","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/28885595","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:eprints.usq.edu.au:38206","is_oa":false,"landing_page_url":null,"pdf_url":null,"source":{"id":"https://openalex.org/S4306400692","display_name":"University of Southern Queensland ePrints (University of Southern Queensland)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I185523456","host_organization_name":"University of Southern Queensland","host_organization_lineage":["https://openalex.org/I185523456"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"acceptedVersion","is_accepted":true,"is_published":false,"raw_source_name":"","raw_type":"Article (Commonwealth Reporting Category C)"},{"id":"pmh:oai:doaj.org/article:1c60163a9bf54590a5b6202690500390","is_oa":true,"landing_page_url":"https://doaj.org/article/1c60163a9bf54590a5b6202690500390","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 17, Iss 9, p 2061 (2017)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/17/9/2061/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s17092061","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 17; Issue 9; Pages: 2061","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:5620666","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/5620666","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:research-repository.griffith.edu.au:10072/352464","is_oa":true,"landing_page_url":"http://hdl.handle.net/10072/352464","pdf_url":null,"source":{"id":"https://openalex.org/S4306402548","display_name":"Griffith Research Online (Griffith University, Queensland, Australia)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I11701301","host_organization_name":"Griffith University","host_organization_lineage":["https://openalex.org/I11701301"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Journal article"}],"best_oa_location":{"id":"doi:10.3390/s17092061","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s17092061","pdf_url":"https://www.mdpi.com/1424-8220/17/9/2061/pdf?version=1504876604","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2734490038.pdf","grobid_xml":"https://content.openalex.org/works/W2734490038.grobid-xml"},"referenced_works_count":133,"referenced_works":["https://openalex.org/W72781872","https://openalex.org/W199741023","https://openalex.org/W228674275","https://openalex.org/W317212471","https://openalex.org/W597707195","https://openalex.org/W603192908","https://openalex.org/W1521947150","https://openalex.org/W1548375161","https://openalex.org/W1558285529","https://openalex.org/W1595407518","https://openalex.org/W1644227841","https://openalex.org/W1751492183","https://openalex.org/W1972039953","https://openalex.org/W1972091828","https://openalex.org/W1973769726","https://openalex.org/W1975256625","https://openalex.org/W1975631503","https://openalex.org/W1981977495","https://openalex.org/W1982003030","https://openalex.org/W1985080846","https://openalex.org/W1985374978","https://openalex.org/W1992663677","https://openalex.org/W1994312980","https://openalex.org/W1997351902","https://openalex.org/W2000611026","https://openalex.org/W2002108675","https://openalex.org/W2003235533","https://openalex.org/W2004275377","https://openalex.org/W2008654583","https://openalex.org/W2013125204","https://openalex.org/W2014913938","https://openalex.org/W2014980053","https://openalex.org/W2017037584","https://openalex.org/W2017222782","https://openalex.org/W2023288568","https://openalex.org/W2023612681","https://openalex.org/W2026743049","https://openalex.org/W2026863120","https://openalex.org/W2036116820","https://openalex.org/W2037288032","https://openalex.org/W2040608787","https://openalex.org/W2040889158","https://openalex.org/W2041431299","https://openalex.org/W2041940265","https://openalex.org/W2044085968","https://openalex.org/W2044493915","https://openalex.org/W2045507222","https://openalex.org/W2046093900","https://openalex.org/W2047649702","https://openalex.org/W2048519559","https://openalex.org/W2049900425","https://openalex.org/W2051656855","https://openalex.org/W2051793518","https://openalex.org/W2052851480","https://openalex.org/W2054459654","https://openalex.org/W2054801131","https://openalex.org/W2059650171","https://openalex.org/W2062025879","https://openalex.org/W2062166555","https://openalex.org/W2066582523","https://openalex.org/W2069153680","https://openalex.org/W2069796872","https://openalex.org/W2069823564","https://openalex.org/W2070692222","https://openalex.org/W2073130744","https://openalex.org/W2073195371","https://openalex.org/W2075537735","https://openalex.org/W2076375748","https://openalex.org/W2079778677","https://openalex.org/W2080778299","https://openalex.org/W2083034534","https://openalex.org/W2084377018","https://openalex.org/W2086129055","https://openalex.org/W2090467041","https://openalex.org/W2091017083","https://openalex.org/W2096268752","https://openalex.org/W2104886584","https://openalex.org/W2105241399","https://openalex.org/W2106353571","https://openalex.org/W2110243492","https://openalex.org/W2111090479","https://openalex.org/W2112121874","https://openalex.org/W2112470986","https://openalex.org/W2114099678","https://openalex.org/W2115210903","https://openalex.org/W2115584060","https://openalex.org/W2120287183","https://openalex.org/W2123388746","https://openalex.org/W2125523061","https://openalex.org/W2125569995","https://openalex.org/W2126180885","https://openalex.org/W2128948489","https://openalex.org/W2129457039","https://openalex.org/W2132875926","https://openalex.org/W2138957011","https://openalex.org/W2142537619","https://openalex.org/W2143673553","https://openalex.org/W2146712786","https://openalex.org/W2153285711","https://openalex.org/W2155302769","https://openalex.org/W2158049648","https://openalex.org/W2160911924","https://openalex.org/W2161967407","https://openalex.org/W2162146174","https://openalex.org/W2162875321","https://openalex.org/W2165706125","https://openalex.org/W2167811980","https://openalex.org/W2169264665","https://openalex.org/W2171849451","https://openalex.org/W2178269323","https://openalex.org/W2199367745","https://openalex.org/W2250075826","https://openalex.org/W2357375250","https://openalex.org/W2467189231","https://openalex.org/W2488091471","https://openalex.org/W2530396472","https://openalex.org/W2549071775","https://openalex.org/W2567330260","https://openalex.org/W2613041977","https://openalex.org/W2617597472","https://openalex.org/W2621625311","https://openalex.org/W2625063024","https://openalex.org/W4230178598","https://openalex.org/W4246888662","https://openalex.org/W4251321038","https://openalex.org/W4298054724","https://openalex.org/W6608957688","https://openalex.org/W6654244546","https://openalex.org/W6654352219","https://openalex.org/W6660450510","https://openalex.org/W6674499305","https://openalex.org/W6729085696","https://openalex.org/W6739369239"],"related_works":["https://openalex.org/W1981400123","https://openalex.org/W3016525403","https://openalex.org/W1520169471","https://openalex.org/W3206835165","https://openalex.org/W2527728814","https://openalex.org/W1986765550","https://openalex.org/W4225795411","https://openalex.org/W2809744190","https://openalex.org/W2380711420","https://openalex.org/W2276669580"],"abstract_inverted_index":{"Flow":[0],"sensing":[1,101,151,179],"in":[2,11,145],"hostile":[3],"environments":[4],"is":[5,126,153,171],"of":[6,44,50,53,121,167,176],"increasing":[7],"interest":[8,45],"for":[9,26,155,193],"applications":[10],"the":[12,48,115,150,156,162,165,168,172,183],"automotive,":[13],"aerospace,":[14],"and":[15,17,23,56,82,100,108],"chemical":[16],"resource":[18],"industries.":[19],"There":[20],"are":[21],"thermal":[22,35,63,92,123,133,141],"non-thermal":[24,33],"approaches":[25],"high-temperature":[27,178,194],"flow":[28,36,64,93,124,136,142],"measurement.":[29],"Compared":[30],"to":[31,47,69,90,114],"their":[32],"counterparts,":[34],"sensors":[37,65,96,125,143],"have":[38,66,87,190],"recently":[39],"attracted":[40],"a":[41],"great":[42],"deal":[43],"due":[46],"ease":[49],"fabrication,":[51],"lack":[52],"moving":[54],"parts":[55],"higher":[57],"sensitivity.":[58,137],"In":[59],"recent":[60],"years,":[61],"various":[62,98,186],"been":[67,88,191],"developed":[68,192],"operate":[70],"at":[71],"temperatures":[72],"above":[73],"500":[74],"\u00b0C.":[75],"Microelectronic":[76],"technologies":[77],"such":[78,103,131],"as":[79,104,132],"silicon-on-insulator":[80],"(SOI),":[81],"complementary":[83],"metal-oxide":[84],"semiconductor":[85],"(CMOS)":[86],"used":[89],"make":[91],"sensors.":[94],"Thermal":[95],"with":[97],"heating":[99],"materials":[102],"metals,":[105],"semiconductors,":[106],"polymers":[107],"ceramics":[109],"can":[110],"be":[111],"selected":[112],"according":[113],"targeted":[116],"working":[117],"temperature.":[118],"The":[119,138],"performance":[120],"these":[122],"evaluated":[127],"based":[128],"on":[129],"parameters":[130],"response":[134],"time,":[135],"data":[139],"from":[140],"reviewed":[144],"this":[146],"paper":[147,163],"indicate":[148],"that":[149],"principle":[152],"suitable":[154],"operation":[157],"under":[158],"harsh":[159],"environments.":[160],"Finally,":[161],"discusses":[164],"packaging":[166,188],"sensor,":[169],"which":[170],"most":[173],"important":[174],"aspect":[175],"any":[177],"application.":[180,195],"Other":[181],"than":[182],"conventional":[184],"wire-bonding,":[185],"novel":[187],"techniques":[189]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":10},{"year":2024,"cited_by_count":7},{"year":2023,"cited_by_count":15},{"year":2022,"cited_by_count":14},{"year":2021,"cited_by_count":10},{"year":2020,"cited_by_count":8},{"year":2019,"cited_by_count":20},{"year":2018,"cited_by_count":8},{"year":2017,"cited_by_count":1}],"updated_date":"2026-04-05T17:49:38.594831","created_date":"2025-10-10T00:00:00"}