{"id":"https://openalex.org/W2618053036","doi":"https://doi.org/10.3390/s17061194","title":"In-Process Atomic-Force Microscopy (AFM) Based Inspection","display_name":"In-Process Atomic-Force Microscopy (AFM) Based Inspection","publication_year":2017,"publication_date":"2017-05-31","ids":{"openalex":"https://openalex.org/W2618053036","doi":"https://doi.org/10.3390/s17061194","mag":"2618053036","pmid":"https://pubmed.ncbi.nlm.nih.gov/28561747"},"language":"en","primary_location":{"id":"doi:10.3390/s17061194","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s17061194","pdf_url":"https://www.mdpi.com/1424-8220/17/6/1194/pdf?version=1496211310","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/17/6/1194/pdf?version=1496211310","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5074703746","display_name":"Samir Mekid","orcid":"https://orcid.org/0000-0003-2448-1497"},"institutions":[{"id":"https://openalex.org/I134085113","display_name":"King Fahd University of Petroleum and Minerals","ror":"https://ror.org/03yez3163","country_code":"SA","type":"education","lineage":["https://openalex.org/I134085113"]}],"countries":["SA"],"is_corresponding":true,"raw_author_name":"Samir Mekid","raw_affiliation_strings":["Mechanical Engineering Department, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia"],"raw_orcid":"https://orcid.org/0000-0003-2448-1497","affiliations":[{"raw_affiliation_string":"Mechanical Engineering Department, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia","institution_ids":["https://openalex.org/I134085113"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5074703746"],"corresponding_institution_ids":["https://openalex.org/I134085113"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.183,"has_fulltext":true,"cited_by_count":4,"citation_normalized_percentile":{"value":0.55447456,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":95},"biblio":{"volume":"17","issue":"6","first_page":"1194","last_page":"1194"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14117","display_name":"Integrated Circuits and Semiconductor Failure Analysis","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.8169954419136047},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.7761971354484558},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.6282824277877808},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5924913883209229},{"id":"https://openalex.org/keywords/nanolithography","display_name":"Nanolithography","score":0.5883492231369019},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.5507173538208008},{"id":"https://openalex.org/keywords/scanning-probe-microscopy","display_name":"Scanning probe microscopy","score":0.4581533670425415},{"id":"https://openalex.org/keywords/microscopy","display_name":"Microscopy","score":0.41557827591896057},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.2737698554992676},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.25606638193130493},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.24183756113052368},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.20661970973014832},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.13289377093315125}],"concepts":[{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.8169954419136047},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.7761971354484558},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.6282824277877808},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5924913883209229},{"id":"https://openalex.org/C162117346","wikidata":"https://www.wikidata.org/wiki/Q1106386","display_name":"Nanolithography","level":4,"score":0.5883492231369019},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.5507173538208008},{"id":"https://openalex.org/C36628996","wikidata":"https://www.wikidata.org/wiki/Q907287","display_name":"Scanning probe microscopy","level":2,"score":0.4581533670425415},{"id":"https://openalex.org/C147080431","wikidata":"https://www.wikidata.org/wiki/Q1074953","display_name":"Microscopy","level":2,"score":0.41557827591896057},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.2737698554992676},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.25606638193130493},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.24183756113052368},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.20661970973014832},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.13289377093315125},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s17061194","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s17061194","pdf_url":"https://www.mdpi.com/1424-8220/17/6/1194/pdf?version=1496211310","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:28561747","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/28561747","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:779977b18a7d46cda7911274c3ccf351","is_oa":true,"landing_page_url":"https://doaj.org/article/779977b18a7d46cda7911274c3ccf351","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 17, Iss 6, p 1194 (2017)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:4342870","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/5490694","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/17/6/1194/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s17061194","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 17; Issue 6; Pages: 1194","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s17061194","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s17061194","pdf_url":"https://www.mdpi.com/1424-8220/17/6/1194/pdf?version=1496211310","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.41999998688697815,"display_name":"Quality Education","id":"https://metadata.un.org/sdg/4"}],"awards":[{"id":"https://openalex.org/G5602722385","display_name":null,"funder_award_id":"12-NAN3021-04","funder_id":"https://openalex.org/F4320322997","funder_display_name":"King Abdulaziz City for Science and Technology"},{"id":"https://openalex.org/G5629675845","display_name":null,"funder_award_id":"12-NAN 3021-04","funder_id":"https://openalex.org/F4320322997","funder_display_name":"King Abdulaziz City for Science and Technology"}],"funders":[{"id":"https://openalex.org/F4320322323","display_name":"King Fahd University of Petroleum and Minerals","ror":"https://ror.org/03yez3163"},{"id":"https://openalex.org/F4320322997","display_name":"King Abdulaziz City for Science and Technology","ror":"https://ror.org/05tdz6m39"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2618053036.pdf","grobid_xml":"https://content.openalex.org/works/W2618053036.grobid-xml"},"referenced_works_count":11,"referenced_works":["https://openalex.org/W1016307285","https://openalex.org/W1994636736","https://openalex.org/W2018205956","https://openalex.org/W2026291540","https://openalex.org/W2040352903","https://openalex.org/W2053768230","https://openalex.org/W2090033816","https://openalex.org/W2143890247","https://openalex.org/W2155427403","https://openalex.org/W2313409301","https://openalex.org/W2519051404"],"related_works":["https://openalex.org/W2007767700","https://openalex.org/W3012007250","https://openalex.org/W2039969115","https://openalex.org/W1971644457","https://openalex.org/W2159726941","https://openalex.org/W4394584065","https://openalex.org/W1646861040","https://openalex.org/W2212622322","https://openalex.org/W2029367975","https://openalex.org/W1993703324"],"abstract_inverted_index":{"A":[0],"new":[1],"in-process":[2],"atomic-force":[3],"microscopy":[4],"(AFM)":[5],"based":[6],"inspection":[7],"is":[8,65,108],"presented":[9],"for":[10,14,32,115],"nanolithography":[11],"to":[12,37,68,76,84],"compensate":[13],"any":[15,78],"deviation":[16,79],"such":[17],"as":[18],"instantaneous":[19],"degradation":[20],"of":[21,93,104],"the":[22,29,39,46,53,69,81,90,94],"lithography":[23,33,62],"probe":[24,47,63,71,98],"tip.":[25],"Traditional":[26],"method":[27,87],"used":[28],"AFM":[30,70],"probes":[31],"work":[34],"and":[35,50,101,117],"retract":[36],"inspect":[38],"obtained":[40],"feature":[41],"but":[42],"this":[43],"practice":[44],"degrades":[45],"tip":[48,99],"shape":[49],"hence,":[51],"affects":[52],"measurement":[54],"quality.":[55],"This":[56,86],"paper":[57],"suggests":[58],"a":[59,111],"second":[60],"dedicated":[61],"that":[64,89],"positioned":[66],"back-to-back":[67],"under":[72],"two":[73],"synchronized":[74],"controllers":[75],"correct":[77],"in":[80,96,110],"process":[82],"compared":[83],"specifications.":[85],"shows":[88],"quality":[91],"improvement":[92],"nanomachining,":[95],"progress":[97],"wear,":[100],"better":[102],"understanding":[103],"nanomachining.":[105],"The":[106],"system":[107],"hosted":[109],"recently":[112],"developed":[113],"nanomanipulator":[114],"educational":[116],"research":[118],"purposes.":[119]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2019,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}