{"id":"https://openalex.org/W2519982592","doi":"https://doi.org/10.3390/s16091479","title":"Mechatronic Development and Vision Feedback Control of a Nanorobotics Manipulation System inside SEM for Nanodevice Assembly","display_name":"Mechatronic Development and Vision Feedback Control of a Nanorobotics Manipulation System inside SEM for Nanodevice Assembly","publication_year":2016,"publication_date":"2016-09-14","ids":{"openalex":"https://openalex.org/W2519982592","doi":"https://doi.org/10.3390/s16091479","mag":"2519982592","pmid":"https://pubmed.ncbi.nlm.nih.gov/27649180"},"language":"en","primary_location":{"id":"doi:10.3390/s16091479","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s16091479","pdf_url":"https://www.mdpi.com/1424-8220/16/9/1479/pdf?version=1473836223","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/16/9/1479/pdf?version=1473836223","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5008979930","display_name":"Zhan Yang","orcid":"https://orcid.org/0000-0002-3063-4819"},"institutions":[{"id":"https://openalex.org/I3923682","display_name":"Soochow University","ror":"https://ror.org/05t8y2r12","country_code":"CN","type":"education","lineage":["https://openalex.org/I3923682"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhan Yang","raw_affiliation_strings":["Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China","Jiangsu Key Laboratory for Advanced Robotics, Soochow University, Suzhou 215123, China"],"affiliations":[{"raw_affiliation_string":"Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China","institution_ids":["https://openalex.org/I3923682"]},{"raw_affiliation_string":"Jiangsu Key Laboratory for Advanced Robotics, Soochow University, Suzhou 215123, China","institution_ids":["https://openalex.org/I3923682"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100622131","display_name":"Yaqiong Wang","orcid":"https://orcid.org/0009-0008-0684-4294"},"institutions":[{"id":"https://openalex.org/I3923682","display_name":"Soochow University","ror":"https://ror.org/05t8y2r12","country_code":"CN","type":"education","lineage":["https://openalex.org/I3923682"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yaqiong Wang","raw_affiliation_strings":["Jiangsu Key Laboratory for Advanced Robotics, Soochow University, Suzhou 215123, China"],"affiliations":[{"raw_affiliation_string":"Jiangsu Key Laboratory for Advanced Robotics, Soochow University, Suzhou 215123, China","institution_ids":["https://openalex.org/I3923682"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088808615","display_name":"Bin Yang","orcid":"https://orcid.org/0000-0002-4151-7028"},"institutions":[{"id":"https://openalex.org/I113940042","display_name":"Shanghai University","ror":"https://ror.org/006teas31","country_code":"CN","type":"education","lineage":["https://openalex.org/I113940042"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bin Yang","raw_affiliation_strings":["School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China"],"affiliations":[{"raw_affiliation_string":"School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200072, China","institution_ids":["https://openalex.org/I113940042"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100393105","display_name":"Guanghui Li","orcid":"https://orcid.org/0000-0002-0742-9729"},"institutions":[{"id":"https://openalex.org/I3923682","display_name":"Soochow University","ror":"https://ror.org/05t8y2r12","country_code":"CN","type":"education","lineage":["https://openalex.org/I3923682"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guanghui Li","raw_affiliation_strings":["Jiangsu Key Laboratory for Advanced Robotics, Soochow University, Suzhou 215123, China"],"affiliations":[{"raw_affiliation_string":"Jiangsu Key Laboratory for Advanced Robotics, Soochow University, Suzhou 215123, China","institution_ids":["https://openalex.org/I3923682"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100765926","display_name":"Tao Chen","orcid":"https://orcid.org/0000-0003-3550-2310"},"institutions":[{"id":"https://openalex.org/I3923682","display_name":"Soochow University","ror":"https://ror.org/05t8y2r12","country_code":"CN","type":"education","lineage":["https://openalex.org/I3923682"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Tao Chen","raw_affiliation_strings":["Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China","Jiangsu Key Laboratory for Advanced Robotics, Soochow University, Suzhou 215123, China"],"affiliations":[{"raw_affiliation_string":"Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China","institution_ids":["https://openalex.org/I3923682"]},{"raw_affiliation_string":"Jiangsu Key Laboratory for Advanced Robotics, Soochow University, Suzhou 215123, China","institution_ids":["https://openalex.org/I3923682"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102365000","display_name":"Masahiro Nakajima","orcid":null},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masahiro Nakajima","raw_affiliation_strings":["Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028713186","display_name":"Lining Sun","orcid":"https://orcid.org/0000-0001-5557-3509"},"institutions":[{"id":"https://openalex.org/I3923682","display_name":"Soochow University","ror":"https://ror.org/05t8y2r12","country_code":"CN","type":"education","lineage":["https://openalex.org/I3923682"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lining Sun","raw_affiliation_strings":["Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China","Jiangsu Key Laboratory for Advanced Robotics, Soochow University, Suzhou 215123, China"],"affiliations":[{"raw_affiliation_string":"Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China","institution_ids":["https://openalex.org/I3923682"]},{"raw_affiliation_string":"Jiangsu Key Laboratory for Advanced Robotics, Soochow University, Suzhou 215123, China","institution_ids":["https://openalex.org/I3923682"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5065569192","display_name":"Toshio Fukuda","orcid":"https://orcid.org/0000-0002-3885-7152"},"institutions":[{"id":"https://openalex.org/I125839683","display_name":"Beijing Institute of Technology","ror":"https://ror.org/01skt4w74","country_code":"CN","type":"education","lineage":["https://openalex.org/I125839683","https://openalex.org/I890469752"]},{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["CN","JP"],"is_corresponding":false,"raw_author_name":"Toshio Fukuda","raw_affiliation_strings":["Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan","Intelligent Robotics Institute, School of Mechatronic Engineering, Beijing Institute of Technology, Beijing 100081, China"],"affiliations":[{"raw_affiliation_string":"Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan","institution_ids":["https://openalex.org/I60134161"]},{"raw_affiliation_string":"Intelligent Robotics Institute, School of Mechatronic Engineering, Beijing Institute of Technology, Beijing 100081, China","institution_ids":["https://openalex.org/I125839683"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":8,"corresponding_author_ids":["https://openalex.org/A5100765926"],"corresponding_institution_ids":["https://openalex.org/I3923682"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":1.1116,"has_fulltext":true,"cited_by_count":15,"citation_normalized_percentile":{"value":0.77039176,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":97},"biblio":{"volume":"16","issue":"9","first_page":"1479","last_page":"1479"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10074","display_name":"Carbon Nanotubes in Composites","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10074","display_name":"Carbon Nanotubes in Composites","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14089","display_name":"Nanotechnology research and applications","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9959999918937683,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanorobotics","display_name":"Nanorobotics","score":0.9709287881851196},{"id":"https://openalex.org/keywords/nanodevice","display_name":"Nanodevice","score":0.7991131544113159},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.7580575346946716},{"id":"https://openalex.org/keywords/mechatronics","display_name":"Mechatronics","score":0.554239809513092},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.5313706398010254},{"id":"https://openalex.org/keywords/nanomanufacturing","display_name":"Nanomanufacturing","score":0.49540960788726807},{"id":"https://openalex.org/keywords/carbon-nanotube","display_name":"Carbon nanotube","score":0.49154552817344666},{"id":"https://openalex.org/keywords/kinematics","display_name":"Kinematics","score":0.46856382489204407},{"id":"https://openalex.org/keywords/robotics","display_name":"Robotics","score":0.4263274371623993},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.4061705768108368},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.37062305212020874},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.34692731499671936},{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.32522204518318176},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.29707229137420654},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.25580161809921265},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.1867876946926117},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.15755486488342285},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.11551937460899353}],"concepts":[{"id":"https://openalex.org/C187911381","wikidata":"https://www.wikidata.org/wiki/Q587024","display_name":"Nanorobotics","level":2,"score":0.9709287881851196},{"id":"https://openalex.org/C2909374376","wikidata":"https://www.wikidata.org/wiki/Q2726733","display_name":"Nanodevice","level":2,"score":0.7991131544113159},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.7580575346946716},{"id":"https://openalex.org/C28704281","wikidata":"https://www.wikidata.org/wiki/Q180165","display_name":"Mechatronics","level":2,"score":0.554239809513092},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.5313706398010254},{"id":"https://openalex.org/C46312889","wikidata":"https://www.wikidata.org/wiki/Q950502","display_name":"Nanomanufacturing","level":2,"score":0.49540960788726807},{"id":"https://openalex.org/C513720949","wikidata":"https://www.wikidata.org/wiki/Q1778729","display_name":"Carbon nanotube","level":2,"score":0.49154552817344666},{"id":"https://openalex.org/C39920418","wikidata":"https://www.wikidata.org/wiki/Q11476","display_name":"Kinematics","level":2,"score":0.46856382489204407},{"id":"https://openalex.org/C34413123","wikidata":"https://www.wikidata.org/wiki/Q170978","display_name":"Robotics","level":3,"score":0.4263274371623993},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.4061705768108368},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.37062305212020874},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.34692731499671936},{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.32522204518318176},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.29707229137420654},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.25580161809921265},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.1867876946926117},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.15755486488342285},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.11551937460899353},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s16091479","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s16091479","pdf_url":"https://www.mdpi.com/1424-8220/16/9/1479/pdf?version=1473836223","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:27649180","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/27649180","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:123dde9760384925b21b7863f150cea3","is_oa":true,"landing_page_url":"https://doaj.org/article/123dde9760384925b21b7863f150cea3","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 16, Iss 9, p 1479 (2016)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/16/9/1479/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s16091479","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 16; Issue 9; Pages: 1479","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:5038756","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/5038756","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s16091479","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s16091479","pdf_url":"https://www.mdpi.com/1424-8220/16/9/1479/pdf?version=1473836223","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320335773","display_name":"National High-tech Research and Development Program","ror":null}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2519982592.pdf","grobid_xml":"https://content.openalex.org/works/W2519982592.grobid-xml"},"referenced_works_count":27,"referenced_works":["https://openalex.org/W1633007112","https://openalex.org/W1873254291","https://openalex.org/W1934567899","https://openalex.org/W1973613041","https://openalex.org/W1981565754","https://openalex.org/W1993531853","https://openalex.org/W2007115778","https://openalex.org/W2012820405","https://openalex.org/W2015375147","https://openalex.org/W2018858346","https://openalex.org/W2046886473","https://openalex.org/W2048254810","https://openalex.org/W2070975983","https://openalex.org/W2081144566","https://openalex.org/W2115176060","https://openalex.org/W2120659809","https://openalex.org/W2122986958","https://openalex.org/W2135219925","https://openalex.org/W2146597111","https://openalex.org/W2208700947","https://openalex.org/W2304845708","https://openalex.org/W2321019643","https://openalex.org/W2331382291","https://openalex.org/W2332872502","https://openalex.org/W2472743159","https://openalex.org/W2562989926","https://openalex.org/W4213218959"],"related_works":["https://openalex.org/W2148220661","https://openalex.org/W4387506400","https://openalex.org/W4389371367","https://openalex.org/W2330742805","https://openalex.org/W2940066522","https://openalex.org/W4385817008","https://openalex.org/W2017539251","https://openalex.org/W2038432010","https://openalex.org/W2519982592","https://openalex.org/W2038162006"],"abstract_inverted_index":{"Carbon":[0],"nanotubes":[1,272],"(CNT)":[2],"have":[3,268],"been":[4,239],"developed":[5,70],"in":[6,38,117],"recent":[7],"decades":[8],"for":[9,30,50,71,231],"nanodevices":[10],"such":[11],"as":[12,180],"nanoradios,":[13],"nanogenerators,":[14],"carbon":[15,271],"nanotube":[16],"field":[17],"effect":[18],"transistors":[19],"(CNTFETs)":[20],"and":[21,53,123,153,227],"so":[22],"on,":[23],"indicating":[24],"that":[25,270],"the":[26,39,56,77,118,133,166,172,181,185,189,202,213,235,244,253],"application":[27,242],"of":[28,41,58,73,80,165,174,177,188,193,196,212,243,252,256],"CNTs":[29],"nanoscale":[31],"electronics":[32],"may":[33],"play":[34],"a":[35,47,62,81,104,108,124],"key":[36],"role":[37],"development":[40],"nanotechnology.":[42],"Nanorobotics":[43,86],"manipulation":[44,64,225,247,255,281],"systems":[45],"are":[46,88,142],"promising":[48],"method":[49],"nanodevice":[51],"construction":[52],"assembly.":[54],"For":[55],"purpose":[57],"constructing":[59],"three-dimensional":[60],"CNTFETs,":[61],"nanorobotics":[63,246,280],"system":[65,248],"with":[66,93,136,146,278],"16":[67],"DOFs":[68,95,112],"was":[69,263],"nanomanipulation":[72],"nanometer-scale":[74],"objects":[75],"inside":[76,234],"specimen":[78],"chamber":[79,237],"scanning":[82],"electron":[83],"microscope":[84],"(SEM).":[85],"manipulators":[87,199],"assembled":[89],"into":[90],"four":[91,94,111,198,261],"units":[92],"(X-Y-Z-\u03b8)":[96],"individually.":[97],"The":[98,208,224,265],"rotational":[99,126],"one":[100,127],"is":[101,131,169,215],"actuated":[102,143],"by":[103,144,218,221,249],"picomotor.":[105],"That":[106],"means":[107],"manipulator":[109],"has":[110],"including":[113],"three":[114],"linear":[115,151],"motions":[116],"X,":[119],"Y,":[120],"Z":[121],"directions":[122],"360-degree":[125],"(X-Y-Z-\u03b8":[128],"stage,":[129],"\u03b8":[130],"along":[132],"direction":[134],"rotating":[135],"X":[137],"or":[138],"Y":[139],"axis).":[140],"Manipulators":[141],"picomotors":[145],"better":[147],"than":[148],"30":[149],"nm":[150],"resolution":[152],"<1":[154],"micro-rad":[155],"rotary":[156],"resolution.":[157],"Four":[158],"vertically":[159],"installed":[160],"AFM":[161],"cantilevers":[162],"(the":[163],"axis":[164,173],"cantilever":[167],"tip":[168],"vertical":[170],"to":[171,183],"electronic":[175],"beam":[176],"SEM)":[178],"served":[179],"end-effectors":[182,214],"facilitate":[184],"real-time":[186],"observation":[187],"operations.":[190],"A":[191],"series":[192],"kinematic":[194],"derivations":[195],"these":[197],"based":[200],"on":[201],"Denavit-Hartenberg":[203],"(D-H)":[204],"notation":[205],"were":[206,238],"established.":[207],"common":[209],"working":[210],"space":[211],"2.78":[216],"mm":[217,220],"4.39":[219],"6":[222],"mm.":[223],"strategy":[226],"vision":[228],"feedback":[229],"control":[230],"multi-manipulators":[232],"operating":[233],"SEM":[236],"discussed.":[240],"Finally,":[241],"designed":[245],"successfully":[250,275],"testing":[251],"pickup-and-place":[254],"an":[257],"individual":[258],"CNT":[259],"onto":[260],"probes":[262],"described.":[264],"experimental":[266],"results":[267],"shown":[269],"can":[273],"be":[274],"picked":[276],"up":[277],"this":[279],"system.":[282]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":3},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":3},{"year":2016,"cited_by_count":2}],"updated_date":"2026-03-20T23:20:44.827607","created_date":"2025-10-10T00:00:00"}