{"id":"https://openalex.org/W2489644780","doi":"https://doi.org/10.3390/s16081191","title":"Micromechanical Characterization of Polysilicon Films through On-Chip Tests","display_name":"Micromechanical Characterization of Polysilicon Films through On-Chip Tests","publication_year":2016,"publication_date":"2016-07-28","ids":{"openalex":"https://openalex.org/W2489644780","doi":"https://doi.org/10.3390/s16081191","mag":"2489644780","pmid":"https://pubmed.ncbi.nlm.nih.gov/27483268"},"language":"en","primary_location":{"id":"doi:10.3390/s16081191","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s16081191","pdf_url":"https://www.mdpi.com/1424-8220/16/8/1191/pdf?version=1469701602","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/16/8/1191/pdf?version=1469701602","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5062298943","display_name":"Ramin Mirzazadeh","orcid":"https://orcid.org/0000-0002-1157-2982"},"institutions":[{"id":"https://openalex.org/I93860229","display_name":"Politecnico di Milano","ror":"https://ror.org/01nffqt88","country_code":"IT","type":"education","lineage":["https://openalex.org/I93860229"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Ramin Mirzazadeh","raw_affiliation_strings":["Dipartimento di Ingegneria Civile e Ambientale, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, Italy"],"raw_orcid":"https://orcid.org/0000-0002-1157-2982","affiliations":[{"raw_affiliation_string":"Dipartimento di Ingegneria Civile e Ambientale, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, Italy","institution_ids":["https://openalex.org/I93860229"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5038863364","display_name":"Saeed Eftekhar Azam","orcid":"https://orcid.org/0000-0001-8153-5506"},"institutions":[{"id":"https://openalex.org/I93860229","display_name":"Politecnico di Milano","ror":"https://ror.org/01nffqt88","country_code":"IT","type":"education","lineage":["https://openalex.org/I93860229"]}],"countries":["IT"],"is_corresponding":false,"raw_author_name":"Saeed Eftekhar Azam","raw_affiliation_strings":["Dipartimento di Ingegneria Civile e Ambientale, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, Italy"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Dipartimento di Ingegneria Civile e Ambientale, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, Italy","institution_ids":["https://openalex.org/I93860229"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5063219013","display_name":"Stefano Mariani","orcid":"https://orcid.org/0000-0001-5111-9800"},"institutions":[{"id":"https://openalex.org/I93860229","display_name":"Politecnico di Milano","ror":"https://ror.org/01nffqt88","country_code":"IT","type":"education","lineage":["https://openalex.org/I93860229"]}],"countries":["IT"],"is_corresponding":true,"raw_author_name":"Stefano Mariani","raw_affiliation_strings":["Dipartimento di Ingegneria Civile e Ambientale, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, Italy"],"raw_orcid":"https://orcid.org/0000-0001-5111-9800","affiliations":[{"raw_affiliation_string":"Dipartimento di Ingegneria Civile e Ambientale, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, Italy","institution_ids":["https://openalex.org/I93860229"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5063219013"],"corresponding_institution_ids":["https://openalex.org/I93860229"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":3.3475,"has_fulltext":true,"cited_by_count":28,"citation_normalized_percentile":{"value":0.92694535,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":"16","issue":"8","first_page":"1191","last_page":"1191"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7332267165184021},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6849988698959351},{"id":"https://openalex.org/keywords/stiffness","display_name":"Stiffness","score":0.5433034300804138},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5132455825805664},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.503551185131073},{"id":"https://openalex.org/keywords/inertia","display_name":"Inertia","score":0.44195547699928284},{"id":"https://openalex.org/keywords/modulus","display_name":"Modulus","score":0.42762428522109985},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.35076382756233215},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.30238768458366394},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.17274579405784607},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.13559988141059875},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.0934167206287384}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7332267165184021},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6849988698959351},{"id":"https://openalex.org/C2779372316","wikidata":"https://www.wikidata.org/wiki/Q569057","display_name":"Stiffness","level":2,"score":0.5433034300804138},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5132455825805664},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.503551185131073},{"id":"https://openalex.org/C110407247","wikidata":"https://www.wikidata.org/wiki/Q122508","display_name":"Inertia","level":2,"score":0.44195547699928284},{"id":"https://openalex.org/C193867417","wikidata":"https://www.wikidata.org/wiki/Q6889814","display_name":"Modulus","level":2,"score":0.42762428522109985},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.35076382756233215},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.30238768458366394},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.17274579405784607},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.13559988141059875},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0934167206287384},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":6,"locations":[{"id":"doi:10.3390/s16081191","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s16081191","pdf_url":"https://www.mdpi.com/1424-8220/16/8/1191/pdf?version=1469701602","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:27483268","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/27483268","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:4138b309880845d48b190aeecd4d851b","is_oa":true,"landing_page_url":"https://doaj.org/article/4138b309880845d48b190aeecd4d851b","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 16, Iss 8, p 1191 (2016)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/16/8/1191/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s16081191","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 16; Issue 8; Pages: 1191","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:5017357","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/5017357","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:re.public.polimi.it:11311/1006285","is_oa":true,"landing_page_url":"http://hdl.handle.net/11311/1006285","pdf_url":null,"source":{"id":"https://openalex.org/S4306400312","display_name":"Virtual Community of Pathological Anatomy (University of Castilla La Mancha)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I79189158","host_organization_name":"University of Castilla-La Mancha","host_organization_lineage":["https://openalex.org/I79189158"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":{"id":"doi:10.3390/s16081191","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s16081191","pdf_url":"https://www.mdpi.com/1424-8220/16/8/1191/pdf?version=1469701602","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2489644780.pdf","grobid_xml":"https://content.openalex.org/works/W2489644780.grobid-xml"},"referenced_works_count":56,"referenced_works":["https://openalex.org/W586922167","https://openalex.org/W1598338247","https://openalex.org/W1619754772","https://openalex.org/W1634483801","https://openalex.org/W1968669537","https://openalex.org/W1974540827","https://openalex.org/W2001530708","https://openalex.org/W2004485981","https://openalex.org/W2006392541","https://openalex.org/W2013213973","https://openalex.org/W2015997459","https://openalex.org/W2018045805","https://openalex.org/W2019298987","https://openalex.org/W2020259230","https://openalex.org/W2021577396","https://openalex.org/W2022943710","https://openalex.org/W2023375282","https://openalex.org/W2028370895","https://openalex.org/W2032309405","https://openalex.org/W2033139576","https://openalex.org/W2035756086","https://openalex.org/W2038194363","https://openalex.org/W2051988743","https://openalex.org/W2057957007","https://openalex.org/W2062758573","https://openalex.org/W2073117938","https://openalex.org/W2074277011","https://openalex.org/W2081947075","https://openalex.org/W2086791048","https://openalex.org/W2087640292","https://openalex.org/W2099393353","https://openalex.org/W2111719210","https://openalex.org/W2111787305","https://openalex.org/W2116357047","https://openalex.org/W2126736494","https://openalex.org/W2130363011","https://openalex.org/W2140590741","https://openalex.org/W2140592267","https://openalex.org/W2141585124","https://openalex.org/W2145583077","https://openalex.org/W2149600126","https://openalex.org/W2153895406","https://openalex.org/W2157763436","https://openalex.org/W2160337655","https://openalex.org/W2162010030","https://openalex.org/W2163134732","https://openalex.org/W2163653975","https://openalex.org/W2316047349","https://openalex.org/W2319713950","https://openalex.org/W2499842843","https://openalex.org/W2548754734","https://openalex.org/W2612956293","https://openalex.org/W2951896087","https://openalex.org/W2986027862","https://openalex.org/W3098377803","https://openalex.org/W4231742330"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W2319192085","https://openalex.org/W1763916368","https://openalex.org/W2391127530","https://openalex.org/W1979758163","https://openalex.org/W2045074154","https://openalex.org/W2346208161","https://openalex.org/W2751944553"],"abstract_inverted_index":{"When":[0],"the":[1,9,20,30,34,47,62,75,90,94,110,115,122,127,129,144,154,157,177,184],"dimensions":[2],"of":[3,23,33,64,80,93,105,143,169,173,179],"polycrystalline":[4],"structures":[5],"become":[6],"comparable":[7],"to":[8,38,49,87,98,151,161],"average":[10],"grain":[11],"size,":[12],"some":[13],"reliability":[14],"issues":[15],"can":[16],"be":[17,39],"reported":[18,165],"for":[19,121,153,166],"moving":[21,145],"parts":[22],"inertial":[24],"microelectromechanical":[25],"systems":[26],"(MEMS).":[27],"Not":[28],"only":[29],"overall":[31,91],"behavior":[32,63],"device":[35],"turns":[36],"out":[37],"affected":[40],"by":[41,114],"a":[42,102,167],"large":[43],"scattering,":[44],"but":[45],"also":[46,149],"sensitivity":[48],"imperfections":[50],"gets":[51],"enhanced.":[52],"In":[53],"this":[54],"work,":[55],"through":[56],"on-chip":[57],"tests,":[58],"we":[59],"experimentally":[60],"investigate":[61],"thin":[65],"polysilicon":[66],"samples":[67,172],"using":[68],"standard":[69,99],"electrostatic":[70],"actuation/sensing.":[71],"The":[72],"discrepancy":[73],"between":[74],"target":[76],"and":[77,176],"actual":[78],"responses":[79],"each":[81],"sample":[82],"has":[83,132,147],"then":[84],"been":[85,133,148],"exploited":[86],"identify:":[88],"(i)":[89],"stiffness":[92],"film":[95,171],"and,":[96],"according":[97],"continuum":[100],"elasticity,":[101],"morphology-based":[103],"value":[104],"its":[106],"Young's":[107],"modulus;":[108],"(ii)":[109],"relevant":[111],"over-etch":[112],"induced":[113],"fabrication":[116],"process.":[117],"To":[118],"properly":[119],"account":[120,152],"aforementioned":[123],"stochastic":[124],"features":[125,187],"at":[126],"micro-scale,":[128],"identification":[130],"procedure":[131],"based":[134],"on":[135,183],"particle":[136],"filtering.":[137],"A":[138],"simple":[139],"analytical":[140],"reduced-order":[141],"model":[142],"structure":[146],"developed":[150],"nonlinearities":[155],"in":[156],"electrical":[158],"field,":[159],"up":[160],"pull-in.":[162],"Results":[163],"are":[164,188],"set":[168],"ten":[170],"constant":[174],"slenderness,":[175],"effects":[178],"different":[180],"actuation":[181],"mechanisms":[182],"identified":[185],"micromechanical":[186],"thoroughly":[189],"discussed.":[190]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":2},{"year":2019,"cited_by_count":6},{"year":2018,"cited_by_count":4},{"year":2017,"cited_by_count":7},{"year":2016,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}