{"id":"https://openalex.org/W2406454062","doi":"https://doi.org/10.3390/s16050711","title":"Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer","display_name":"Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer","publication_year":2016,"publication_date":"2016-05-18","ids":{"openalex":"https://openalex.org/W2406454062","doi":"https://doi.org/10.3390/s16050711","mag":"2406454062","pmid":"https://pubmed.ncbi.nlm.nih.gov/27213376"},"language":"en","primary_location":{"id":"doi:10.3390/s16050711","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s16050711","pdf_url":"https://www.mdpi.com/1424-8220/16/5/711/pdf?version=1463566480","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/16/5/711/pdf?version=1463566480","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5056251690","display_name":"Yonggang Yin","orcid":"https://orcid.org/0000-0001-6782-9495"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yonggang Yin","raw_affiliation_strings":["Department of Precision Instrument, Tsinghua University, Beijing 100084, China"],"affiliations":[{"raw_affiliation_string":"Department of Precision Instrument, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101702513","display_name":"Boqian Sun","orcid":"https://orcid.org/0000-0002-3308-8024"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Boqian Sun","raw_affiliation_strings":["Department of Precision Instrument, Tsinghua University, Beijing 100084, China"],"affiliations":[{"raw_affiliation_string":"Department of Precision Instrument, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5023046572","display_name":"Fengtian Han","orcid":"https://orcid.org/0000-0001-8425-6764"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Fengtian Han","raw_affiliation_strings":["Department of Precision Instrument, Tsinghua University, Beijing 100084, China"],"affiliations":[{"raw_affiliation_string":"Department of Precision Instrument, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5023046572"],"corresponding_institution_ids":["https://openalex.org/I99065089"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":1.8643,"has_fulltext":true,"cited_by_count":21,"citation_normalized_percentile":{"value":0.8665187,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":"16","issue":"5","first_page":"711","last_page":"711"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.7311067581176758},{"id":"https://openalex.org/keywords/proof-mass","display_name":"Proof mass","score":0.7193905115127563},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.5563948750495911},{"id":"https://openalex.org/keywords/levitation","display_name":"Levitation","score":0.5417547821998596},{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.512612521648407},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.5101044774055481},{"id":"https://openalex.org/keywords/stiffness","display_name":"Stiffness","score":0.5028972029685974},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.4948388934135437},{"id":"https://openalex.org/keywords/suspension","display_name":"Suspension (topology)","score":0.4665864109992981},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.4493553638458252},{"id":"https://openalex.org/keywords/coupling","display_name":"Coupling (piping)","score":0.4462875723838806},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.43990617990493774},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.39054349064826965},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.34159839153289795},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.2806914448738098},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.22035688161849976},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.20501470565795898},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.1804409623146057},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.16717830300331116},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.1557723879814148},{"id":"https://openalex.org/keywords/magnet","display_name":"Magnet","score":0.12914767861366272},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.09801730513572693}],"concepts":[{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.7311067581176758},{"id":"https://openalex.org/C2780330379","wikidata":"https://www.wikidata.org/wiki/Q16990023","display_name":"Proof mass","level":3,"score":0.7193905115127563},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.5563948750495911},{"id":"https://openalex.org/C27838914","wikidata":"https://www.wikidata.org/wiki/Q740997","display_name":"Levitation","level":3,"score":0.5417547821998596},{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.512612521648407},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.5101044774055481},{"id":"https://openalex.org/C2779372316","wikidata":"https://www.wikidata.org/wiki/Q569057","display_name":"Stiffness","level":2,"score":0.5028972029685974},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.4948388934135437},{"id":"https://openalex.org/C105341887","wikidata":"https://www.wikidata.org/wiki/Q1307987","display_name":"Suspension (topology)","level":3,"score":0.4665864109992981},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.4493553638458252},{"id":"https://openalex.org/C131584629","wikidata":"https://www.wikidata.org/wiki/Q4308705","display_name":"Coupling (piping)","level":2,"score":0.4462875723838806},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.43990617990493774},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.39054349064826965},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.34159839153289795},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.2806914448738098},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.22035688161849976},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.20501470565795898},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.1804409623146057},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.16717830300331116},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.1557723879814148},{"id":"https://openalex.org/C16389437","wikidata":"https://www.wikidata.org/wiki/Q11421","display_name":"Magnet","level":2,"score":0.12914767861366272},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.09801730513572693},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C202444582","wikidata":"https://www.wikidata.org/wiki/Q837863","display_name":"Pure mathematics","level":1,"score":0.0},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C5961521","wikidata":"https://www.wikidata.org/wiki/Q746083","display_name":"Homotopy","level":2,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s16050711","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s16050711","pdf_url":"https://www.mdpi.com/1424-8220/16/5/711/pdf?version=1463566480","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:27213376","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/27213376","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:84561112678e43dd922fa6f61e8bc95d","is_oa":true,"landing_page_url":"https://doaj.org/article/84561112678e43dd922fa6f61e8bc95d","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 16, Iss 5, p 711 (2016)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:3848367","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/4883402","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/16/5/711/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s16050711","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 16; Issue 5; Pages: 711","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s16050711","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s16050711","pdf_url":"https://www.mdpi.com/1424-8220/16/5/711/pdf?version=1463566480","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G1121271761","display_name":null,"funder_award_id":"Program","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G2087396116","display_name":null,"funder_award_id":"China","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G3317480652","display_name":null,"funder_award_id":"Science","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G391238517","display_name":null,"funder_award_id":", and","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5994120800","display_name":null,"funder_award_id":"Natural","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6415691591","display_name":null,"funder_award_id":"91436107","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G7566905828","display_name":null,"funder_award_id":"61374207","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G8548876308","display_name":null,"funder_award_id":"20130002110031","funder_id":"https://openalex.org/F4320336024","funder_display_name":"Specialized Research Fund for the Doctoral Program of Higher Education of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320322392","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549"},{"id":"https://openalex.org/F4320336024","display_name":"Specialized Research Fund for the Doctoral Program of Higher Education of China","ror":null}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2406454062.pdf","grobid_xml":"https://content.openalex.org/works/W2406454062.grobid-xml"},"referenced_works_count":26,"referenced_works":["https://openalex.org/W1964712691","https://openalex.org/W1965634225","https://openalex.org/W1972161853","https://openalex.org/W1989790471","https://openalex.org/W2001268004","https://openalex.org/W2007690744","https://openalex.org/W2014734857","https://openalex.org/W2036068840","https://openalex.org/W2053501221","https://openalex.org/W2064851354","https://openalex.org/W2064896272","https://openalex.org/W2064939120","https://openalex.org/W2085887459","https://openalex.org/W2088069642","https://openalex.org/W2111516955","https://openalex.org/W2138918281","https://openalex.org/W2142600636","https://openalex.org/W2150897308","https://openalex.org/W2156497463","https://openalex.org/W2157006816","https://openalex.org/W2165443125","https://openalex.org/W2166307549","https://openalex.org/W2333343475","https://openalex.org/W2342528432","https://openalex.org/W2613728859","https://openalex.org/W6680797657"],"related_works":["https://openalex.org/W2356006086","https://openalex.org/W1973973903","https://openalex.org/W2545168295","https://openalex.org/W4234814094","https://openalex.org/W2365897603","https://openalex.org/W2156308897","https://openalex.org/W4303613760","https://openalex.org/W2361871310","https://openalex.org/W2417246878","https://openalex.org/W1982154684"],"abstract_inverted_index":{"A":[0],"micromachined":[1],"electrostatically-suspended":[2],"accelerometer":[3,206],"(MESA)":[4],"is":[5,50,89,183,225,234],"a":[6,93,150,169,194],"kind":[7],"of":[8,17,73,124,202,230],"three-axis":[9,204],"inertial":[10],"sensor":[11,233],"based":[12],"on":[13],"fully-contactless":[14],"electrostatic":[15,80,162],"suspension":[16,141,177],"the":[18,24,55,62,78,98,104,109,122,133,156,203,231,238,242],"proof":[19],"mass":[20,63],"(PM).":[21],"It":[22,224],"has":[23],"potential":[25,191],"to":[26,52,65,97,154,185,236],"offer":[27],"broad":[28],"bandwidth,":[29],"high":[30,187],"sensitivity,":[31],"wide":[32],"dynamic":[33],"range":[34],"and,":[35],"thus,":[36],"would":[37],"be":[38,66,136,180],"perfectly":[39],"suited":[40],"for":[41,190,246],"land":[42],"seismic":[43,248],"acquisition.":[44,250],"Previous":[45],"experiments":[46],"showed":[47],"that":[48,132,168,227],"it":[49,88],"hard":[51],"lift":[53],"up":[54,138],"PM":[56,134],"successfully":[57],"during":[58],"initial":[59,110,145],"levitation":[60,111],"as":[61,193],"needs":[64],"levitated":[67,137],"simultaneously":[68],"in":[69,161],"all":[70],"six":[71],"degrees":[72],"freedom":[74],"(DoFs).":[75],"By":[76],"analyzing":[77],"coupling":[79,100,106],"forces":[81],"and":[82,107,175,213,219,240],"torques":[83],"between":[84],"three":[85],"lateral":[86,126],"axes,":[87],"found":[90],"there":[91],"exists":[92],"self-locking":[94],"zone":[95],"due":[96],"cross-axis":[99,105],"effect.":[101],"To":[102],"minimize":[103,155],"solve":[108],"problem,":[112],"this":[113],"paper":[114],"proposes":[115],"an":[116],"effective":[117],"control":[118],"scheme":[119],"by":[120],"delaying":[121],"operation":[123,142],"one":[125],"actuator.":[127],"The":[128,164,198,216],"experimental":[129],"result":[130],"demonstrates":[131],"can":[135,179],"with":[139],"six-DoF":[140],"at":[143],"any":[144],"position.":[146],"We":[147],"also":[148],"propose":[149],"feed-forward":[151],"compensation":[152],"approach":[153],"negative":[157],"stiffness":[158,178],"effect":[159],"inherent":[160],"suspension.":[163],"experiment":[165],"results":[166,218],"demonstrate":[167],"more":[170],"broadband":[171],"linear":[172,205],"amplitude-frequency":[173],"response":[174],"higher":[176],"achieved,":[181],"which":[182],"crucial":[184],"maintain":[186],"vector":[188],"fidelity":[189],"use":[192],"three-component":[195],"MEMS":[196,232],"geophone.":[197],"preliminary":[199],"performance":[200],"tests":[201],"were":[207],"conducted":[208],"under":[209],"normal":[210],"atmospheric":[211],"pressure":[212],"room":[214],"temperature.":[215],"main":[217],"noise":[220,243],"analysis":[221],"are":[222],"presented.":[223],"shown":[226],"vacuum":[228],"packaging":[229],"essential":[235],"extend":[237],"bandwidth":[239],"lower":[241],"floor,":[244],"especially":[245],"low-noise":[247],"data":[249]},"counts_by_year":[{"year":2024,"cited_by_count":2},{"year":2022,"cited_by_count":7},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":6}],"updated_date":"2026-03-20T23:20:44.827607","created_date":"2025-10-10T00:00:00"}