{"id":"https://openalex.org/W2338809313","doi":"https://doi.org/10.3390/s16040538","title":"Multi-Repeated Projection Lithography for High-Precision Linear Scale Based on Average Homogenization Effect","display_name":"Multi-Repeated Projection Lithography for High-Precision Linear Scale Based on Average Homogenization Effect","publication_year":2016,"publication_date":"2016-04-14","ids":{"openalex":"https://openalex.org/W2338809313","doi":"https://doi.org/10.3390/s16040538","mag":"2338809313","pmid":"https://pubmed.ncbi.nlm.nih.gov/27089348"},"language":"en","primary_location":{"id":"doi:10.3390/s16040538","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s16040538","pdf_url":"https://www.mdpi.com/1424-8220/16/4/538/pdf?version=1460628065","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/16/4/538/pdf?version=1460628065","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5002613289","display_name":"Dongxu Ren","orcid":"https://orcid.org/0000-0002-9052-606X"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Dongxu Ren","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China"],"raw_orcid":"https://orcid.org/0000-0002-9052-606X","affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076568855","display_name":"Huiying Zhao","orcid":"https://orcid.org/0000-0001-9429-3016"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Huiying Zhao","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5063648803","display_name":"Chupeng Zhang","orcid":null},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chupeng Zhang","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022812550","display_name":"Daocheng Yuan","orcid":"https://orcid.org/0000-0002-5975-745X"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Daocheng Yuan","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5066092045","display_name":"Jianpu Xi","orcid":"https://orcid.org/0000-0003-0472-9256"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jianpu Xi","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091688695","display_name":"Xueliang Zhu","orcid":"https://orcid.org/0000-0001-8019-9336"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xueliang Zhu","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009924190","display_name":"Xinxing Ban","orcid":"https://orcid.org/0000-0002-9715-9047"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xinxing Ban","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031543602","display_name":"Longchao Dong","orcid":null},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Longchao Dong","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110358206","display_name":"Yawen Gu","orcid":null},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yawen Gu","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5016699732","display_name":"Chunye Jiang","orcid":null},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chunye Jiang","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi\u2019an Jiaotong University, Xi\u2019an 710049, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China","institution_ids":["https://openalex.org/I87445476"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5002613289"],"corresponding_institution_ids":["https://openalex.org/I87445476"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.5346,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.68932666,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"16","issue":"4","first_page":"538","last_page":"538"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/photolithography","display_name":"Photolithography","score":0.802945613861084},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.7238532900810242},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.6592256426811218},{"id":"https://openalex.org/keywords/projection","display_name":"Projection (relational algebra)","score":0.4948098063468933},{"id":"https://openalex.org/keywords/grating","display_name":"Grating","score":0.47320765256881714},{"id":"https://openalex.org/keywords/homogenization","display_name":"Homogenization (climate)","score":0.46776172518730164},{"id":"https://openalex.org/keywords/linear-scale","display_name":"Linear scale","score":0.4632481336593628},{"id":"https://openalex.org/keywords/critical-dimension","display_name":"Critical dimension","score":0.46177470684051514},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.43925046920776367},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.3109975755214691},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.27925366163253784},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.23962518572807312}],"concepts":[{"id":"https://openalex.org/C105487726","wikidata":"https://www.wikidata.org/wiki/Q622938","display_name":"Photolithography","level":2,"score":0.802945613861084},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.7238532900810242},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.6592256426811218},{"id":"https://openalex.org/C57493831","wikidata":"https://www.wikidata.org/wiki/Q3134666","display_name":"Projection (relational algebra)","level":2,"score":0.4948098063468933},{"id":"https://openalex.org/C2777813233","wikidata":"https://www.wikidata.org/wiki/Q1527816","display_name":"Grating","level":2,"score":0.47320765256881714},{"id":"https://openalex.org/C2778722038","wikidata":"https://www.wikidata.org/wiki/Q17030643","display_name":"Homogenization (climate)","level":3,"score":0.46776172518730164},{"id":"https://openalex.org/C170122806","wikidata":"https://www.wikidata.org/wiki/Q1914828","display_name":"Linear scale","level":2,"score":0.4632481336593628},{"id":"https://openalex.org/C207789793","wikidata":"https://www.wikidata.org/wiki/Q3028070","display_name":"Critical dimension","level":2,"score":0.46177470684051514},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.43925046920776367},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.3109975755214691},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.27925366163253784},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.23962518572807312},{"id":"https://openalex.org/C130217890","wikidata":"https://www.wikidata.org/wiki/Q47041","display_name":"Biodiversity","level":2,"score":0.0},{"id":"https://openalex.org/C18903297","wikidata":"https://www.wikidata.org/wiki/Q7150","display_name":"Ecology","level":1,"score":0.0},{"id":"https://openalex.org/C13280743","wikidata":"https://www.wikidata.org/wiki/Q131089","display_name":"Geodesy","level":1,"score":0.0},{"id":"https://openalex.org/C205649164","wikidata":"https://www.wikidata.org/wiki/Q1071","display_name":"Geography","level":0,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s16040538","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s16040538","pdf_url":"https://www.mdpi.com/1424-8220/16/4/538/pdf?version=1460628065","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:27089348","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/27089348","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:20c44c39c5bb4fd4b363d07d57eccc50","is_oa":true,"landing_page_url":"https://doaj.org/article/20c44c39c5bb4fd4b363d07d57eccc50","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 16, Iss 4, p 538 (2016)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/16/4/538/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s16040538","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 16; Issue 4; Pages: 538","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:4851052","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/4851052","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s16040538","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s16040538","pdf_url":"https://www.mdpi.com/1424-8220/16/4/538/pdf?version=1460628065","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.9100000262260437,"id":"https://metadata.un.org/sdg/7"}],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":false},"content_urls":{"pdf":"https://content.openalex.org/works/W2338809313.pdf"},"referenced_works_count":15,"referenced_works":["https://openalex.org/W975876592","https://openalex.org/W1964853712","https://openalex.org/W1981168774","https://openalex.org/W2016655858","https://openalex.org/W2026496693","https://openalex.org/W2027095538","https://openalex.org/W2042489539","https://openalex.org/W2048220190","https://openalex.org/W2065315663","https://openalex.org/W2087132361","https://openalex.org/W2106551223","https://openalex.org/W2168308005","https://openalex.org/W2501873590","https://openalex.org/W2502925949","https://openalex.org/W6676140285"],"related_works":["https://openalex.org/W3190396005","https://openalex.org/W2128131036","https://openalex.org/W2149415078","https://openalex.org/W2625379356","https://openalex.org/W2020522377","https://openalex.org/W4281622355","https://openalex.org/W1520139605","https://openalex.org/W2005049565","https://openalex.org/W2063931086","https://openalex.org/W1977680521"],"abstract_inverted_index":{"A":[0],"multi-repeated":[1,169],"photolithography":[2,170],"method":[3,16,171],"for":[4,76],"manufacturing":[5],"an":[6],"incremental":[7],"linear":[8,54,120,197],"scale":[9,55,121,198],"using":[10,60],"projection":[11,122],"lithography":[12,105,123],"is":[13,17,72,172,199],"presented.":[14],"The":[15,68,85],"based":[18],"on":[19,98],"the":[20,27,36,50,61,90,94,99,118,133,147,162,165,168,191,196],"average":[21,62],"homogenization":[22],"effect":[23],"that":[24,131],"periodically":[25],"superposes":[26],"light":[28],"intensity":[29,86],"of":[30,33,52,137,155,167,180,187,195],"different":[31,65],"locations":[32,186],"pitches":[34],"in":[35,89,117,183],"mask":[37,79],"to":[38,150,161,174],"make":[39],"a":[40,45,53,77,81,138,152,177],"consistent":[41],"energy":[42],"distribution":[43],"at":[44],"specific":[46],"wavelength,":[47],"from":[48],"which":[49,111],"accuracy":[51,179,194],"can":[56],"be":[57],"improved":[58],"precisely":[59],"pitch":[63,113,178],"with":[64,80],"step":[66],"distances.":[67],"method's":[69],"theoretical":[70],"error":[71,87,97],"within":[73],"0.01":[74],"\u00b5m":[75],"periodic":[78],"2-\u00b5m":[82],"sine-wave":[83],"error.":[84],"models":[88],"focal":[91,107],"plane":[92,108],"include":[93],"rectangular":[95],"grating":[96],"mask,":[100],"static":[101],"positioning":[102],"error,":[103,110],"and":[104,129,157,190],"lens":[106],"alignment":[109],"affect":[112],"uniformity":[114],"less":[115,200],"than":[116,201],"common":[119],"splicing":[124],"process.":[125],"It":[126],"was":[127],"analyzed":[128],"confirmed":[130,173],"increasing":[132],"repeat":[134],"exposure":[135,148],"number":[136],"single":[139],"stripe":[140],"could":[141,145],"improve":[142],"accuracy,":[143],"as":[144],"adjusting":[146],"spacing":[149],"achieve":[151],"set":[153],"proportion":[154],"black":[156],"white":[158],"stripes.":[159],"According":[160],"experimental":[163],"results,":[164],"effectiveness":[166],"easily":[175],"realize":[176],"43":[181],"nm":[182],"any":[184],"10":[185],"1":[188,202],"m,":[189],"whole":[192],"length":[193],"\u00b5m/m.":[203]},"counts_by_year":[{"year":2019,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1}],"updated_date":"2026-05-22T06:13:13.366637","created_date":"2025-10-10T00:00:00"}