{"id":"https://openalex.org/W2229568462","doi":"https://doi.org/10.3390/s16010084","title":"Design Optimization for the Measurement Accuracy Improvement of a Large Range Nanopositioning Stage","display_name":"Design Optimization for the Measurement Accuracy Improvement of a Large Range Nanopositioning Stage","publication_year":2016,"publication_date":"2016-01-11","ids":{"openalex":"https://openalex.org/W2229568462","doi":"https://doi.org/10.3390/s16010084","mag":"2229568462","pmid":"https://pubmed.ncbi.nlm.nih.gov/26761014"},"language":"en","primary_location":{"id":"doi:10.3390/s16010084","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s16010084","pdf_url":"https://www.mdpi.com/1424-8220/16/1/84/pdf?version=1452521619","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/16/1/84/pdf?version=1452521619","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5015818476","display_name":"Marta Torralba","orcid":"https://orcid.org/0000-0002-3069-2736"},"institutions":[{"id":"https://openalex.org/I4210100615","display_name":"Centro Universitario de la Defensa en San Javier","ror":"https://ror.org/00nqz4988","country_code":"ES","type":"education","lineage":["https://openalex.org/I4210100615"]}],"countries":["ES"],"is_corresponding":true,"raw_author_name":"Marta Torralba","raw_affiliation_strings":["Centro Universitario de la Defensa Zaragoza, Academia General Militar, Carretera Huesca s/n, Zaragoza 50090, Spain"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Centro Universitario de la Defensa Zaragoza, Academia General Militar, Carretera Huesca s/n, Zaragoza 50090, Spain","institution_ids":["https://openalex.org/I4210100615"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065489302","display_name":"Jos\u00e9 A. Yag\u00fce\u2010Fabra","orcid":"https://orcid.org/0000-0001-7152-4117"},"institutions":[{"id":"https://openalex.org/I255234318","display_name":"Universidad de Zaragoza","ror":"https://ror.org/012a91z28","country_code":"ES","type":"education","lineage":["https://openalex.org/I255234318"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"Jos\u00e9 Yag\u00fce-Fabra","raw_affiliation_strings":["Instituto de Investigaci\u00f3n en Ingenier\u00eda de Arag\u00f3n, Universidad de Zaragoza, Mar\u00eda de Luna 3, Zaragoza 50018, Spain"],"raw_orcid":"https://orcid.org/0000-0001-7152-4117","affiliations":[{"raw_affiliation_string":"Instituto de Investigaci\u00f3n en Ingenier\u00eda de Arag\u00f3n, Universidad de Zaragoza, Mar\u00eda de Luna 3, Zaragoza 50018, Spain","institution_ids":["https://openalex.org/I255234318"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5050972371","display_name":"Jos\u00e9 Antonio Albajez","orcid":"https://orcid.org/0000-0003-4839-0610"},"institutions":[{"id":"https://openalex.org/I255234318","display_name":"Universidad de Zaragoza","ror":"https://ror.org/012a91z28","country_code":"ES","type":"education","lineage":["https://openalex.org/I255234318"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"Jos\u00e9 Albajez","raw_affiliation_strings":["Instituto de Investigaci\u00f3n en Ingenier\u00eda de Arag\u00f3n, Universidad de Zaragoza, Mar\u00eda de Luna 3, Zaragoza 50018, Spain"],"raw_orcid":"https://orcid.org/0000-0003-4839-0610","affiliations":[{"raw_affiliation_string":"Instituto de Investigaci\u00f3n en Ingenier\u00eda de Arag\u00f3n, Universidad de Zaragoza, Mar\u00eda de Luna 3, Zaragoza 50018, Spain","institution_ids":["https://openalex.org/I255234318"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5054804246","display_name":"Juan Jos\u00e9 Aguilar Mart\u00edn","orcid":"https://orcid.org/0000-0002-8609-1358"},"institutions":[{"id":"https://openalex.org/I255234318","display_name":"Universidad de Zaragoza","ror":"https://ror.org/012a91z28","country_code":"ES","type":"education","lineage":["https://openalex.org/I255234318"]}],"countries":["ES"],"is_corresponding":false,"raw_author_name":"Juan Aguilar","raw_affiliation_strings":["Instituto de Investigaci\u00f3n en Ingenier\u00eda de Arag\u00f3n, Universidad de Zaragoza, Mar\u00eda de Luna 3, Zaragoza 50018, Spain"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Instituto de Investigaci\u00f3n en Ingenier\u00eda de Arag\u00f3n, Universidad de Zaragoza, Mar\u00eda de Luna 3, Zaragoza 50018, Spain","institution_ids":["https://openalex.org/I255234318"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5015818476"],"corresponding_institution_ids":["https://openalex.org/I4210100615"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":2.6731,"has_fulltext":true,"cited_by_count":20,"citation_normalized_percentile":{"value":0.8844553,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"16","issue":"1","first_page":"84","last_page":"84"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11583","display_name":"Advanced Measurement and Metrology Techniques","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9968000054359436,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10188","display_name":"Advanced machining processes and optimization","score":0.9965999722480774,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/metrology","display_name":"Metrology","score":0.8513237237930298},{"id":"https://openalex.org/keywords/flatness","display_name":"Flatness (cosmology)","score":0.8460466861724854},{"id":"https://openalex.org/keywords/range","display_name":"Range (aeronautics)","score":0.5448198318481445},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5193672776222229},{"id":"https://openalex.org/keywords/observational-error","display_name":"Observational error","score":0.4488258957862854},{"id":"https://openalex.org/keywords/propagation-of-uncertainty","display_name":"Propagation of uncertainty","score":0.44337189197540283},{"id":"https://openalex.org/keywords/accuracy-and-precision","display_name":"Accuracy and precision","score":0.4418126940727234},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.3675670921802521},{"id":"https://openalex.org/keywords/simulation","display_name":"Simulation","score":0.3462189733982086},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.25567004084587097},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.23666074872016907},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.17698520421981812},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.11458393931388855},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.11352354288101196},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.07925087213516235}],"concepts":[{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.8513237237930298},{"id":"https://openalex.org/C2778530986","wikidata":"https://www.wikidata.org/wiki/Q5457948","display_name":"Flatness (cosmology)","level":3,"score":0.8460466861724854},{"id":"https://openalex.org/C204323151","wikidata":"https://www.wikidata.org/wiki/Q905424","display_name":"Range (aeronautics)","level":2,"score":0.5448198318481445},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5193672776222229},{"id":"https://openalex.org/C19619285","wikidata":"https://www.wikidata.org/wiki/Q196372","display_name":"Observational error","level":2,"score":0.4488258957862854},{"id":"https://openalex.org/C123614077","wikidata":"https://www.wikidata.org/wiki/Q1364905","display_name":"Propagation of uncertainty","level":2,"score":0.44337189197540283},{"id":"https://openalex.org/C202799725","wikidata":"https://www.wikidata.org/wiki/Q272035","display_name":"Accuracy and precision","level":2,"score":0.4418126940727234},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.3675670921802521},{"id":"https://openalex.org/C44154836","wikidata":"https://www.wikidata.org/wiki/Q45045","display_name":"Simulation","level":1,"score":0.3462189733982086},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.25567004084587097},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.23666074872016907},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.17698520421981812},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.11458393931388855},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.11352354288101196},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.07925087213516235},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C26405456","wikidata":"https://www.wikidata.org/wiki/Q338","display_name":"Cosmology","level":2,"score":0.0}],"mesh":[],"locations_count":6,"locations":[{"id":"doi:10.3390/s16010084","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s16010084","pdf_url":"https://www.mdpi.com/1424-8220/16/1/84/pdf?version=1452521619","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:26761014","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/26761014","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:1d93e87a0b1e4d56a364aaf7a7882729","is_oa":true,"landing_page_url":"https://doaj.org/article/1d93e87a0b1e4d56a364aaf7a7882729","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 16, Iss 1, p 84 (2016)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/16/1/84/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s16010084","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 16; Issue 1; Pages: 84","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:4732117","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/4732117","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:zaguan.unizar.es:36756","is_oa":true,"landing_page_url":"http://zaguan.unizar.es/record/36756","pdf_url":null,"source":{"id":"https://openalex.org/S4306401812","display_name":"Zaguan (University of Zaragoza Repository)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I255234318","host_organization_name":"Universidad de Zaragoza","host_organization_lineage":["https://openalex.org/I255234318"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"info:eu-repo/semantics/article"}],"best_oa_location":{"id":"doi:10.3390/s16010084","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s16010084","pdf_url":"https://www.mdpi.com/1424-8220/16/1/84/pdf?version=1452521619","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320324111","display_name":"Universidad de Zaragoza","ror":"https://ror.org/012a91z28"},{"id":"https://openalex.org/F4320333028","display_name":"University of North Carolina at Charlotte","ror":"https://ror.org/04dawnj30"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2229568462.pdf","grobid_xml":"https://content.openalex.org/works/W2229568462.grobid-xml"},"referenced_works_count":22,"referenced_works":["https://openalex.org/W605325243","https://openalex.org/W1515484147","https://openalex.org/W1967397188","https://openalex.org/W1979244331","https://openalex.org/W2009375586","https://openalex.org/W2009518030","https://openalex.org/W2018205956","https://openalex.org/W2023618805","https://openalex.org/W2024806432","https://openalex.org/W2028001630","https://openalex.org/W2032918888","https://openalex.org/W2043354912","https://openalex.org/W2046013400","https://openalex.org/W2047123814","https://openalex.org/W2052264557","https://openalex.org/W2070505388","https://openalex.org/W2073381129","https://openalex.org/W2139408969","https://openalex.org/W2152105500","https://openalex.org/W2315214008","https://openalex.org/W4285719527","https://openalex.org/W6742216220"],"related_works":["https://openalex.org/W2354382979","https://openalex.org/W2024563117","https://openalex.org/W1994073155","https://openalex.org/W4322703778","https://openalex.org/W1993615136","https://openalex.org/W2220451197","https://openalex.org/W2043595074","https://openalex.org/W2360832559","https://openalex.org/W2382420926","https://openalex.org/W2410606254"],"abstract_inverted_index":{"Both":[0],"an":[1,6,34,89,209],"accurate":[2,189],"machine":[3],"design":[4,49,97,120],"and":[5,69,72,80,119,124,146,187,191,224,230],"adequate":[7],"metrology":[8,101],"loop":[9,102],"definition":[10],"are":[11,83,122,150],"critical":[12],"factors":[13],"when":[14],"precision":[15],"positioning":[16,212],"represents":[17],"a":[18,43,78,137,201],"key":[19],"issue":[20],"for":[21,214],"the":[22,29,39,87,100,104,111,114,127,157,163,171,175,179,183,188,194,197,215],"final":[23,158],"system":[24,105],"performance.":[25],"This":[26],"article":[27],"discusses":[28],"error":[30,90,144,159,164,181,213],"budget":[31],"methodology":[32],"as":[33],"advantageous":[35],"technique":[36],"to":[37,94,109,154],"improve":[38],"measurement":[40,167],"accuracy":[41],"of":[42,63,103,113,129,174,182,193,204],"2D-long":[44],"range":[45,62],"stage":[46],"during":[47],"its":[48],"phase.":[50],"The":[51,142,166],"nanopositioning":[52],"platform":[53],"NanoPla":[54,217],"is":[55,92,106,134],"here":[56],"presented.":[57],"Its":[58],"specifications,":[59],"e.g.,":[60,77],"XY-travel":[61],"50":[64,67],"mm":[65,68],"\u00d7":[66],"sub-micrometric":[70],"accuracy;":[71],"some":[73],"novel":[74],"designed":[75],"solutions,":[76],"three-layer":[79],"two-stage":[81],"architecture":[82],"described.":[84],"Once":[85],"defined":[86],"prototype,":[88],"analysis":[91,140],"performed":[93],"propose":[95],"improvement":[96],"features.":[98],"Then,":[99],"mathematically":[107],"modelled":[108],"define":[110],"propagation":[112],"different":[115,143],"sources.":[116],"Several":[117],"simplifications":[118],"hypothesis":[121],"justified":[123],"validated,":[125],"including":[126],"assumption":[128],"rigid":[130],"body":[131],"behavior,":[132],"which":[133],"demonstrated":[135],"after":[136],"finite":[138],"element":[139],"verification.":[141],"sources":[145],"their":[147],"estimated":[148],"contributions":[149],"enumerated":[151],"in":[152,208,227],"order":[153],"conclude":[155],"with":[156],"values":[160],"obtained":[161,169],"from":[162],"budget.":[165],"deviations":[168],"demonstrate":[170],"important":[172],"influence":[173],"working":[176],"environmental":[177],"conditions,":[178],"flatness":[180],"plane":[184],"mirror":[185],"reflectors":[186],"manufacture":[190],"assembly":[192],"components":[195],"forming":[196],"metrological":[198],"loop.":[199],"Thus,":[200],"temperature":[202],"control":[203],"\u00b10.1":[205],"\u00b0C":[206],"results":[207],"acceptable":[210],"maximum":[211],"developed":[216],"stage,":[218],"i.e.,":[219],"41":[220],"nm,":[221],"36":[222],"nm":[223,226],"48":[225],"X-,":[228],"Y-":[229],"Z-axis,":[231],"respectively.":[232]},"counts_by_year":[{"year":2024,"cited_by_count":4},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":4},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":3},{"year":2016,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}