{"id":"https://openalex.org/W1621474960","doi":"https://doi.org/10.3390/s150717232","title":"On-Chip Sensing of Thermoelectric Thin Film\u2019s Merit","display_name":"On-Chip Sensing of Thermoelectric Thin Film\u2019s Merit","publication_year":2015,"publication_date":"2015-07-16","ids":{"openalex":"https://openalex.org/W1621474960","doi":"https://doi.org/10.3390/s150717232","mag":"1621474960","pmid":"https://pubmed.ncbi.nlm.nih.gov/26193272"},"language":"en","primary_location":{"id":"doi:10.3390/s150717232","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s150717232","pdf_url":"https://www.mdpi.com/1424-8220/15/7/17232/pdf?version=1437037819","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/15/7/17232/pdf?version=1437037819","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5079749559","display_name":"Zhigang Xiao","orcid":"https://orcid.org/0000-0002-1595-0565"},"institutions":[{"id":"https://openalex.org/I176692203","display_name":"Alabama Agricultural and Mechanical University","ror":"https://ror.org/05hz8m414","country_code":"US","type":"education","lineage":["https://openalex.org/I176692203"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Zhigang Xiao","raw_affiliation_strings":["Department of Electrical Engineering, Alabama A&M University, Normal, AL 35762, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical Engineering, Alabama A&M University, Normal, AL 35762, USA","institution_ids":["https://openalex.org/I176692203"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5057543611","display_name":"Xiaoshan Zhu","orcid":"https://orcid.org/0000-0001-5924-856X"},"institutions":[{"id":"https://openalex.org/I134113660","display_name":"University of Nevada, Reno","ror":"https://ror.org/01keh0577","country_code":"US","type":"education","lineage":["https://openalex.org/I134113660"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Xiaoshan Zhu","raw_affiliation_strings":["Department of Electrical and Biomedical Engineering, University of Nevada, Reno, NV 89557, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Biomedical Engineering, University of Nevada, Reno, NV 89557, USA","institution_ids":["https://openalex.org/I134113660"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5079749559"],"corresponding_institution_ids":["https://openalex.org/I176692203"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.2808,"has_fulltext":true,"cited_by_count":14,"citation_normalized_percentile":{"value":0.53585033,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"15","issue":"7","first_page":"17232","last_page":"17240"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10440","display_name":"Advanced Thermoelectric Materials and Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10440","display_name":"Advanced Thermoelectric Materials and Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12442","display_name":"Thermal Radiation and Cooling Technologies","score":0.9983999729156494,"subfield":{"id":"https://openalex.org/subfields/2205","display_name":"Civil and Structural Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11277","display_name":"Thermal properties of materials","score":0.9951000213623047,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/thermoelectric-effect","display_name":"Thermoelectric effect","score":0.7800647020339966},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7732583284378052},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.6548994779586792},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5996687412261963},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5979371666908264},{"id":"https://openalex.org/keywords/microfabrication","display_name":"Microfabrication","score":0.5859454274177551},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.5845507383346558},{"id":"https://openalex.org/keywords/thermoelectric-materials","display_name":"Thermoelectric materials","score":0.5611791014671326},{"id":"https://openalex.org/keywords/thermoelectric-generator","display_name":"Thermoelectric generator","score":0.5215592384338379},{"id":"https://openalex.org/keywords/figure-of-merit","display_name":"Figure of merit","score":0.5203104019165039},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.4832323491573334},{"id":"https://openalex.org/keywords/seebeck-coefficient","display_name":"Seebeck coefficient","score":0.48196718096733093},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.22228604555130005},{"id":"https://openalex.org/keywords/thermal-conductivity","display_name":"Thermal conductivity","score":0.20925027132034302},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.1275137960910797}],"concepts":[{"id":"https://openalex.org/C63024428","wikidata":"https://www.wikidata.org/wiki/Q552456","display_name":"Thermoelectric effect","level":2,"score":0.7800647020339966},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7732583284378052},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6548994779586792},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5996687412261963},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5979371666908264},{"id":"https://openalex.org/C527607","wikidata":"https://www.wikidata.org/wiki/Q175538","display_name":"Microfabrication","level":4,"score":0.5859454274177551},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.5845507383346558},{"id":"https://openalex.org/C207365445","wikidata":"https://www.wikidata.org/wiki/Q15020929","display_name":"Thermoelectric materials","level":3,"score":0.5611791014671326},{"id":"https://openalex.org/C117127486","wikidata":"https://www.wikidata.org/wiki/Q11569191","display_name":"Thermoelectric generator","level":3,"score":0.5215592384338379},{"id":"https://openalex.org/C130277099","wikidata":"https://www.wikidata.org/wiki/Q3676605","display_name":"Figure of merit","level":2,"score":0.5203104019165039},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.4832323491573334},{"id":"https://openalex.org/C112625512","wikidata":"https://www.wikidata.org/wiki/Q1091448","display_name":"Seebeck coefficient","level":3,"score":0.48196718096733093},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.22228604555130005},{"id":"https://openalex.org/C97346530","wikidata":"https://www.wikidata.org/wiki/Q487005","display_name":"Thermal conductivity","level":2,"score":0.20925027132034302},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.1275137960910797},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s150717232","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s150717232","pdf_url":"https://www.mdpi.com/1424-8220/15/7/17232/pdf?version=1437037819","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:26193272","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/26193272","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:c9ba64df301447d7be7a992f2e7dc422","is_oa":true,"landing_page_url":"https://doaj.org/article/c9ba64df301447d7be7a992f2e7dc422","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 15, Iss 7, Pp 17232-17240 (2015)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:3519705","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/4541931","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/15/7/17232/","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/s150717232","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s150717232","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s150717232","pdf_url":"https://www.mdpi.com/1424-8220/15/7/17232/pdf?version=1437037819","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.8899999856948853,"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7"}],"awards":[{"id":"https://openalex.org/G1079538096","display_name":null,"funder_award_id":"DE-SC00112704","funder_id":"https://openalex.org/F4320306084","funder_display_name":"U.S. Department of Energy"},{"id":"https://openalex.org/G1236134970","display_name":null,"funder_award_id":"ECCS-1229312","funder_id":"https://openalex.org/F4320306076","funder_display_name":"National Science Foundation"},{"id":"https://openalex.org/G340987949","display_name":null,"funder_award_id":"DE-SC00112704","funder_id":"https://openalex.org/F4320306076","funder_display_name":"National Science Foundation"},{"id":"https://openalex.org/G4200402220","display_name":null,"funder_award_id":"No. DE-SC00112704","funder_id":"https://openalex.org/F4320338289","funder_display_name":"Brookhaven National Laboratory"},{"id":"https://openalex.org/G4456717411","display_name":null,"funder_award_id":"DE-SC00112704","funder_id":"https://openalex.org/F4320337480","funder_display_name":"Basic Energy Sciences"},{"id":"https://openalex.org/G5431240400","display_name":"MRI: Acquisition of an Advanced E-Beam Evaporation Thin Film Deposition System for Research in Micro and Nanofabrication","funder_award_id":"1229312","funder_id":"https://openalex.org/F4320306076","funder_display_name":"National Science Foundation"},{"id":"https://openalex.org/G6624604760","display_name":null,"funder_award_id":"0814103","funder_id":"https://openalex.org/F4320306076","funder_display_name":"National Science Foundation"},{"id":"https://openalex.org/G839104892","display_name":null,"funder_award_id":"SC00112704","funder_id":"https://openalex.org/F4320306084","funder_display_name":"U.S. Department of Energy"},{"id":"https://openalex.org/G8547854277","display_name":null,"funder_award_id":"EPS-0814103","funder_id":"https://openalex.org/F4320306076","funder_display_name":"National Science Foundation"},{"id":"https://openalex.org/G8691409365","display_name":null,"funder_award_id":"DE-SC00112704","funder_id":"https://openalex.org/F4320338289","funder_display_name":"Brookhaven National Laboratory"}],"funders":[{"id":"https://openalex.org/F4320306076","display_name":"National Science Foundation","ror":"https://ror.org/021nxhr62"},{"id":"https://openalex.org/F4320306084","display_name":"U.S. Department of Energy","ror":"https://ror.org/01bj3aw27"},{"id":"https://openalex.org/F4320337392","display_name":"Division of Electrical, Communications and Cyber Systems","ror":"https://ror.org/01krpsy48"},{"id":"https://openalex.org/F4320337480","display_name":"Basic Energy Sciences","ror":"https://ror.org/05mg91w61"},{"id":"https://openalex.org/F4320338289","display_name":"Brookhaven National Laboratory","ror":"https://ror.org/02ex6cf31"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W1621474960.pdf","grobid_xml":"https://content.openalex.org/works/W1621474960.grobid-xml"},"referenced_works_count":18,"referenced_works":["https://openalex.org/W1502183397","https://openalex.org/W1551152190","https://openalex.org/W1561461762","https://openalex.org/W1661695137","https://openalex.org/W1969605222","https://openalex.org/W1982627664","https://openalex.org/W1990566077","https://openalex.org/W1994715177","https://openalex.org/W2001139162","https://openalex.org/W2038174300","https://openalex.org/W2042056247","https://openalex.org/W2069927004","https://openalex.org/W2082409063","https://openalex.org/W2086612720","https://openalex.org/W2086778233","https://openalex.org/W2087776094","https://openalex.org/W2090877930","https://openalex.org/W2107522232"],"related_works":["https://openalex.org/W1988880617","https://openalex.org/W4205778619","https://openalex.org/W2330360401","https://openalex.org/W2606831736","https://openalex.org/W2027463546","https://openalex.org/W1532356289","https://openalex.org/W2573590587","https://openalex.org/W2128275150","https://openalex.org/W2080573930","https://openalex.org/W2038454371"],"abstract_inverted_index":{"Thermoelectric":[0],"thin":[1,55,79,95],"films":[2],"have":[3],"been":[4],"widely":[5],"explored":[6],"for":[7],"thermal-to-electrical":[8],"energy":[9],"conversion":[10],"or":[11,24,99],"solid-state":[12],"cooling,":[13],"because":[14],"they":[15],"can":[16],"remove":[17],"heat":[18],"from":[19],"integrated":[20,115],"circuit":[21,116],"(IC)":[22],"chips":[23],"micro-electromechanical":[25],"systems":[26],"(MEMS)":[27],"devices":[28,48,64,110],"without":[29],"involving":[30],"any":[31],"moving":[32],"mechanical":[33],"parts.":[34],"In":[35],"this":[36],"paper,":[37],"we":[38],"report":[39],"using":[40,67],"silicon":[41,58,104],"diode-based":[42],"temperature":[43,60,106],"sensors":[44,61,107],"and":[45,62,89,108],"specific":[46],"thermoelectric":[47,54,63,78,109],"to":[49,75],"characterize":[50],"the":[51,77,90,93,114],"merit":[52,91],"of":[53,81,92,103],"films.":[56],"The":[57,86,101],"diode":[59,105],"were":[65,97],"fabricated":[66],"microfabrication":[68],"techniques.":[69],"Specifically,":[70],"e-beam":[71],"evaporation":[72],"was":[73],"used":[74],"grow":[76],"film":[80,96],"Sb2Te3":[82,94],"(100":[83],"nm":[84],"thick).":[85],"Seebeck":[87],"coefficient":[88],"measured":[98],"determined.":[100],"fabrication":[102],"are":[111],"compatible":[112],"with":[113],"fabrication.":[117]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":4},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":1},{"year":2018,"cited_by_count":2}],"updated_date":"2026-05-21T09:19:25.381259","created_date":"2025-10-10T00:00:00"}