{"id":"https://openalex.org/W2030890954","doi":"https://doi.org/10.3390/s141224244","title":"A High-Q Resonant Pressure Microsensor with Through-Glass Electrical Interconnections Based on Wafer-Level MEMS Vacuum Packaging","display_name":"A High-Q Resonant Pressure Microsensor with Through-Glass Electrical Interconnections Based on Wafer-Level MEMS Vacuum Packaging","publication_year":2014,"publication_date":"2014-12-16","ids":{"openalex":"https://openalex.org/W2030890954","doi":"https://doi.org/10.3390/s141224244","mag":"2030890954","pmid":"https://pubmed.ncbi.nlm.nih.gov/25521385"},"language":"en","primary_location":{"id":"doi:10.3390/s141224244","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s141224244","pdf_url":"https://www.mdpi.com/1424-8220/14/12/24244/pdf?version=1418726054","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/14/12/24244/pdf?version=1418726054","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5102351851","display_name":"Zhenyu Luo","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhenyu Luo","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","University of Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458"]},{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049215297","display_name":"Deyong Chen","orcid":"https://orcid.org/0000-0001-5856-3592"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Deyong Chen","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109218676","display_name":"Junbo Wang","orcid":"https://orcid.org/0000-0002-6032-1274"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Junbo Wang","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100599393","display_name":"Yinan Li","orcid":"https://orcid.org/0000-0001-5590-1189"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]},{"id":"https://openalex.org/I4210165038","display_name":"University of Chinese Academy of Sciences","ror":"https://ror.org/05qbk4x57","country_code":"CN","type":"education","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210165038"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yinan Li","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","University of Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458"]},{"raw_affiliation_string":"University of Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I4210165038"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100326500","display_name":"Jian Chen","orcid":"https://orcid.org/0000-0003-4612-3279"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210107198","display_name":"State Key Laboratory of Transducer Technology","ror":"https://ror.org/01qg56n75","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366","https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458","https://openalex.org/I4210147322"]},{"id":"https://openalex.org/I4210110458","display_name":"Institute of Electronics","ror":"https://ror.org/01z143507","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210110458"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jian Chen","raw_affiliation_strings":["State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China"],"raw_orcid":"https://orcid.org/0000-0003-4612-3279","affiliations":[{"raw_affiliation_string":"State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China","institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5049215297","https://openalex.org/A5109218676"],"corresponding_institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210107198","https://openalex.org/I4210110458"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2673},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2673},"fwci":2.7824,"has_fulltext":true,"cited_by_count":57,"citation_normalized_percentile":{"value":0.90981625,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":94,"max":99},"biblio":{"volume":"14","issue":"12","first_page":"24244","last_page":"24257"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.8695002794265747},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7671587467193604},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7396885752677917},{"id":"https://openalex.org/keywords/getter","display_name":"Getter","score":0.7246025800704956},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.6752917766571045},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.5950718522071838},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5932632088661194},{"id":"https://openalex.org/keywords/wafer-level-packaging","display_name":"Wafer-level packaging","score":0.5556855201721191},{"id":"https://openalex.org/keywords/wafer-bonding","display_name":"Wafer bonding","score":0.47937873005867004},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.4150840640068054},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.39239412546157837},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.09050476551055908}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.8695002794265747},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7671587467193604},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7396885752677917},{"id":"https://openalex.org/C125099081","wikidata":"https://www.wikidata.org/wiki/Q935396","display_name":"Getter","level":2,"score":0.7246025800704956},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6752917766571045},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.5950718522071838},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5932632088661194},{"id":"https://openalex.org/C2780288131","wikidata":"https://www.wikidata.org/wiki/Q4017648","display_name":"Wafer-level packaging","level":3,"score":0.5556855201721191},{"id":"https://openalex.org/C2779133538","wikidata":"https://www.wikidata.org/wiki/Q677010","display_name":"Wafer bonding","level":3,"score":0.47937873005867004},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.4150840640068054},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.39239412546157837},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.09050476551055908},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":6,"locations":[{"id":"doi:10.3390/s141224244","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s141224244","pdf_url":"https://www.mdpi.com/1424-8220/14/12/24244/pdf?version=1418726054","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:25521385","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/25521385","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:europepmc.org:3271690","is_oa":true,"landing_page_url":"http://europepmc.org/articles/PMC4299109","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:4299109","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/4299109","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:doaj.org/article:f92fa88f71d149929034d22256b3b043","is_oa":true,"landing_page_url":"https://doaj.org/article/f92fa88f71d149929034d22256b3b043","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 14, Iss 12, Pp 24244-24257 (2014)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/14/12/24244/","is_oa":true,"landing_page_url":"http://dx.doi.org/10.3390/s141224244","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s141224244","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s141224244","pdf_url":"https://www.mdpi.com/1424-8220/14/12/24244/pdf?version=1418726054","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.7699999809265137}],"awards":[{"id":"https://openalex.org/G4130932894","display_name":null,"funder_award_id":"No. D11110100160000","funder_id":"https://openalex.org/F4320325902","funder_display_name":"Beijing Municipal Science and Technology Commission"},{"id":"https://openalex.org/G5073799558","display_name":null,"funder_award_id":"2014CB744600","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"},{"id":"https://openalex.org/G5205140798","display_name":null,"funder_award_id":"2014CB744600","funder_id":"https://openalex.org/F4320325902","funder_display_name":"Beijing Municipal Science and Technology Commission"},{"id":"https://openalex.org/G7110416980","display_name":null,"funder_award_id":"No.2014CB744600","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"},{"id":"https://openalex.org/G8927034942","display_name":null,"funder_award_id":"D11110100160000","funder_id":"https://openalex.org/F4320325902","funder_display_name":"Beijing Municipal Science and Technology Commission"}],"funders":[{"id":"https://openalex.org/F4320325902","display_name":"Beijing Municipal Science and Technology Commission","ror":null},{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2030890954.pdf","grobid_xml":"https://content.openalex.org/works/W2030890954.grobid-xml"},"referenced_works_count":28,"referenced_works":["https://openalex.org/W1918018431","https://openalex.org/W1970227858","https://openalex.org/W1971388314","https://openalex.org/W1978641534","https://openalex.org/W1982193710","https://openalex.org/W1990224160","https://openalex.org/W1993288966","https://openalex.org/W1994181401","https://openalex.org/W2003766830","https://openalex.org/W2004689712","https://openalex.org/W2008154513","https://openalex.org/W2013199772","https://openalex.org/W2013853238","https://openalex.org/W2035394251","https://openalex.org/W2044056307","https://openalex.org/W2062408946","https://openalex.org/W2067861719","https://openalex.org/W2069753296","https://openalex.org/W2075369346","https://openalex.org/W2082640513","https://openalex.org/W2089073173","https://openalex.org/W2099374012","https://openalex.org/W2110663271","https://openalex.org/W2119801705","https://openalex.org/W2157062341","https://openalex.org/W2162220185","https://openalex.org/W2291508261","https://openalex.org/W3004874162"],"related_works":["https://openalex.org/W2138637063","https://openalex.org/W237886435","https://openalex.org/W2469461079","https://openalex.org/W77800010","https://openalex.org/W1488416978","https://openalex.org/W2099374012","https://openalex.org/W2594639016","https://openalex.org/W1969570385","https://openalex.org/W2041316527","https://openalex.org/W2034049402"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,47,50,72,85,104,116,171,177,184,229],"high-Q":[4],"resonant":[5,68,165],"pressure":[6,43,191],"microsensor":[7,237],"with":[8,30,170,189],"through-glass":[9],"electrical":[10,145,155],"interconnections":[11,146],"based":[12],"on":[13,115],"wafer-level":[14],"MEMS":[15,27],"vacuum":[16,132],"packaging.":[17,133],"An":[18],"approach":[19],"to":[20,59,71,126,196,216],"maintaining":[21],"high-vacuum":[22],"conditions":[23],"by":[24],"integrating":[25],"the":[26,42,101,110,127,139,144,148,153,161,164,190,201,211,219,233,236],"fabrication":[28],"process":[29],"getter":[31,111],"material":[32,112],"preparation":[33],"is":[34,56],"presented":[35],"in":[36,63,138,210],"this":[37,40],"paper.":[38],"In":[39,100,199],"device,":[41],"under":[44],"measurement":[45],"causes":[46],"deflection":[48],"of":[49,163,174,180,186,213,235],"pressure-sensitive":[51],"silicon":[52],"square":[53],"diaphragm,":[54],"which":[55,94,121],"further":[57],"translated":[58],"stress":[60],"build":[61],"up":[62],"\"H\"":[64],"type":[65],"doubly-clamped":[66],"micro":[67],"beams,":[69],"leading":[70],"resonance":[73],"frequency":[74],"shift.":[75],"The":[76],"device":[77,92,102,178],"geometries":[78],"were":[79],"optimized":[80],"using":[81],"FEM":[82],"simulation":[83],"and":[84,152,183,232],"4-inch":[86],"SOI":[87,129,150],"wafer":[88,130,141,151],"was":[89,113,122,167,205,223,238],"used":[90],"for":[91,131],"fabrication,":[93,103],"required":[95],"only":[96],"three":[97],"photolithographic":[98],"steps.":[99],"non-evaporable":[105],"metal":[106],"thin":[107],"film":[108],"as":[109,143,225],"sputtered":[114],"Pyrex":[117],"7740":[118],"glass":[119,140],"wafer,":[120],"then":[123],"anodically":[124],"bonded":[125],"patterned":[128,149],"Through-glass":[134],"via":[135],"holes":[136],"predefined":[137],"functioned":[142],"between":[147],"surrounding":[154],"components.":[156],"Experimental":[157],"results":[158],"recorded":[159],"that":[160],"Q-factor":[162],"beam":[166],"beyond":[168],"22,000,":[169],"differential":[172],"sensitivity":[173],"89.86":[175],"Hz/kPa,":[176],"resolution":[179],"10":[181],"Pa":[182],"nonlinearity":[185],"0.02%":[187],"F.S":[188,227],"varying":[192],"from":[193],"50":[194],"kPa":[195],"100":[197],"kPa.":[198],"addition,":[200],"temperature":[202],"drift":[203],"coefficient":[204],"less":[206],"than":[207,240],"-0.01%":[208],"F.S/\u00b0C":[209],"range":[212],"-40":[214],"\u00b0C":[215],"70":[217],"\u00b0C,":[218],"long-term":[220],"stability":[221],"error":[222],"quantified":[224],"0.01%":[226,241],"over":[228],"5-month":[230],"period":[231],"accuracy":[234],"better":[239],"F.S.":[242]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":5},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":6},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":6},{"year":2020,"cited_by_count":3},{"year":2019,"cited_by_count":10},{"year":2018,"cited_by_count":4},{"year":2017,"cited_by_count":7},{"year":2016,"cited_by_count":4},{"year":2015,"cited_by_count":5}],"updated_date":"2026-08-11T07:18:39.950985","created_date":"2025-10-10T00:00:00"}