{"id":"https://openalex.org/W2143780370","doi":"https://doi.org/10.3390/s140916423","title":"A Micro Oxygen Sensor Based on a Nano Sol-Gel TiO2 Thin Film","display_name":"A Micro Oxygen Sensor Based on a Nano Sol-Gel TiO2 Thin Film","publication_year":2014,"publication_date":"2014-09-03","ids":{"openalex":"https://openalex.org/W2143780370","doi":"https://doi.org/10.3390/s140916423","mag":"2143780370","pmid":"https://pubmed.ncbi.nlm.nih.gov/25192312"},"language":"en","primary_location":{"id":"doi:10.3390/s140916423","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s140916423","pdf_url":"https://www.mdpi.com/1424-8220/14/9/16423/pdf?version=1409735157","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/14/9/16423/pdf?version=1409735157","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100767423","display_name":"Hairong Wang","orcid":"https://orcid.org/0000-0002-9558-981X"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hairong Wang","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University , Xi'an 710049, Shaanxi, China","State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, Shaanxi, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University , Xi'an 710049, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100333485","display_name":"Lei Chen","orcid":"https://orcid.org/0000-0002-6066-0831"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lei Chen","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University , Xi'an 710049, Shaanxi, China","State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, Shaanxi, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University , Xi'an 710049, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100377438","display_name":"Jiaxin Wang","orcid":"https://orcid.org/0000-0002-7038-923X"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiaxin Wang","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University , Xi'an 710049, Shaanxi, China","State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, Shaanxi, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University , Xi'an 710049, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5090046595","display_name":"Quantao Sun","orcid":null},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Quantao Sun","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University , Xi'an 710049, Shaanxi, China","State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, Shaanxi, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University , Xi'an 710049, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101584205","display_name":"Yulong Zhao","orcid":"https://orcid.org/0000-0002-1546-9931"},"institutions":[{"id":"https://openalex.org/I87445476","display_name":"Xi'an Jiaotong University","ror":"https://ror.org/017zhmm22","country_code":"CN","type":"education","lineage":["https://openalex.org/I87445476"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yulong Zhao","raw_affiliation_strings":["State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University , Xi'an 710049, Shaanxi, China","State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, Shaanxi, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University , Xi'an 710049, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]},{"raw_affiliation_string":"State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an, 710049, Shaanxi, China","institution_ids":["https://openalex.org/I87445476"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I87445476"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2673},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2673},"fwci":2.9613,"has_fulltext":true,"cited_by_count":44,"citation_normalized_percentile":{"value":0.91811171,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"14","issue":"9","first_page":"16423","last_page":"16433"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11667","display_name":"Advanced Chemical Sensor Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9984999895095825,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nano","display_name":"Nano-","score":0.7326153516769409},{"id":"https://openalex.org/keywords/oxygen-sensor","display_name":"Oxygen sensor","score":0.6881314516067505},{"id":"https://openalex.org/keywords/thin-film","display_name":"Thin film","score":0.6668833494186401},{"id":"https://openalex.org/keywords/sol-gel","display_name":"Sol-gel","score":0.5865515470504761},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5860018730163574},{"id":"https://openalex.org/keywords/oxygen","display_name":"Oxygen","score":0.49193641543388367},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.4837810695171356},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.35029593110084534},{"id":"https://openalex.org/keywords/chemical-engineering","display_name":"Chemical engineering","score":0.3286575675010681},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.21413901448249817},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.2062850296497345},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1944393515586853},{"id":"https://openalex.org/keywords/organic-chemistry","display_name":"Organic chemistry","score":0.06838846206665039}],"concepts":[{"id":"https://openalex.org/C2780357685","wikidata":"https://www.wikidata.org/wiki/Q154357","display_name":"Nano-","level":2,"score":0.7326153516769409},{"id":"https://openalex.org/C17734536","wikidata":"https://www.wikidata.org/wiki/Q286588","display_name":"Oxygen sensor","level":3,"score":0.6881314516067505},{"id":"https://openalex.org/C19067145","wikidata":"https://www.wikidata.org/wiki/Q1137203","display_name":"Thin film","level":2,"score":0.6668833494186401},{"id":"https://openalex.org/C38398224","wikidata":"https://www.wikidata.org/wiki/Q48350","display_name":"Sol-gel","level":2,"score":0.5865515470504761},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5860018730163574},{"id":"https://openalex.org/C540031477","wikidata":"https://www.wikidata.org/wiki/Q629","display_name":"Oxygen","level":2,"score":0.49193641543388367},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4837810695171356},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.35029593110084534},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.3286575675010681},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.21413901448249817},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.2062850296497345},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1944393515586853},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.06838846206665039}],"mesh":[{"descriptor_ui":"D003217","descriptor_name":"Conductometry","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D003217","descriptor_name":"Conductometry","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D003217","descriptor_name":"Conductometry","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008567","descriptor_name":"Membranes, Artificial","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D008567","descriptor_name":"Membranes, Artificial","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D008567","descriptor_name":"Membranes, Artificial","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D010092","descriptor_name":"Oximetry","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D010092","descriptor_name":"Oximetry","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D010092","descriptor_name":"Oximetry","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D010100","descriptor_name":"Oxygen","qualifier_ui":"Q000032","qualifier_name":"analysis","is_major_topic":false},{"descriptor_ui":"D010100","descriptor_name":"Oxygen","qualifier_ui":"Q000032","qualifier_name":"analysis","is_major_topic":false},{"descriptor_ui":"D010100","descriptor_name":"Oxygen","qualifier_ui":"Q000032","qualifier_name":"analysis","is_major_topic":false},{"descriptor_ui":"D010100","descriptor_name":"Oxygen","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D010100","descriptor_name":"Oxygen","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D010100","descriptor_name":"Oxygen","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D014025","descriptor_name":"Titanium","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D014025","descriptor_name":"Titanium","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D014025","descriptor_name":"Titanium","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D019544","descriptor_name":"Equipment Failure Analysis","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D019544","descriptor_name":"Equipment Failure Analysis","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D019544","descriptor_name":"Equipment Failure Analysis","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D036103","descriptor_name":"Nanotechnology","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D036103","descriptor_name":"Nanotechnology","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D036103","descriptor_name":"Nanotechnology","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D053768","descriptor_name":"Metal Nanoparticles","qualifier_ui":"Q000648","qualifier_name":"ultrastructure","is_major_topic":false},{"descriptor_ui":"D053768","descriptor_name":"Metal Nanoparticles","qualifier_ui":"Q000648","qualifier_name":"ultrastructure","is_major_topic":false},{"descriptor_ui":"D053768","descriptor_name":"Metal Nanoparticles","qualifier_ui":"Q000648","qualifier_name":"ultrastructure","is_major_topic":false},{"descriptor_ui":"D053768","descriptor_name":"Metal Nanoparticles","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D053768","descriptor_name":"Metal Nanoparticles","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D053768","descriptor_name":"Metal Nanoparticles","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false}],"locations_count":5,"locations":[{"id":"doi:10.3390/s140916423","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s140916423","pdf_url":"https://www.mdpi.com/1424-8220/14/9/16423/pdf?version=1409735157","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:25192312","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/25192312","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:528c833bfc2e46a7a3ef2f290bd04a98","is_oa":true,"landing_page_url":"https://doaj.org/article/528c833bfc2e46a7a3ef2f290bd04a98","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 14, Iss 9, Pp 16423-16433 (2014)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/14/9/16423/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s140916423","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 14; Issue 9; Pages: 16423-16433","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:4208180","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/4208180","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s140916423","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s140916423","pdf_url":"https://www.mdpi.com/1424-8220/14/9/16423/pdf?version=1409735157","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.5799999833106995,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[{"id":"https://openalex.org/G6378690266","display_name":null,"funder_award_id":"51175416","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2143780370.pdf","grobid_xml":"https://content.openalex.org/works/W2143780370.grobid-xml"},"referenced_works_count":22,"referenced_works":["https://openalex.org/W1966764257","https://openalex.org/W1976369583","https://openalex.org/W1981009111","https://openalex.org/W1981228913","https://openalex.org/W1987744916","https://openalex.org/W1993830981","https://openalex.org/W1997821193","https://openalex.org/W2027536917","https://openalex.org/W2028738701","https://openalex.org/W2038875696","https://openalex.org/W2039499611","https://openalex.org/W2041194416","https://openalex.org/W2044223273","https://openalex.org/W2044754137","https://openalex.org/W2049403812","https://openalex.org/W2053286983","https://openalex.org/W2053707950","https://openalex.org/W2056258017","https://openalex.org/W2085000718","https://openalex.org/W2090328985","https://openalex.org/W2122627362","https://openalex.org/W2155781551"],"related_works":["https://openalex.org/W2380807943","https://openalex.org/W2046259896","https://openalex.org/W2012890259","https://openalex.org/W2607132846","https://openalex.org/W2535053442","https://openalex.org/W37553110","https://openalex.org/W2375678032","https://openalex.org/W2374241363","https://openalex.org/W1998688048","https://openalex.org/W2049820601"],"abstract_inverted_index":{"An":[0],"oxygen":[1],"gas":[2],"microsensor":[3],"based":[4],"on":[5,18,104],"nanostructured":[6,23],"sol-gel":[7,34],"TiO2":[8,44],"thin":[9,25],"films":[10,26],"with":[11,47,96,119,150],"a":[12,19,108,117],"buried":[13],"Pd":[14],"layer":[15,101],"was":[16,56,70,102,114],"developed":[17],"silicon":[20],"substrate.":[21],"The":[22,111],"titania":[24],"for":[27,83,169],"O2":[28,122],"sensors":[29],"were":[30],"prepared":[31],"by":[32,58,107,128],"the":[33,67,73,84,105,121,140,165],"process":[35,75],"and":[36,62,66,145,155,178],"became":[37],"anatase":[38],"after":[39,136],"heat":[40],"treatment.":[41],"A":[42,87],"sandwich":[43],"square":[45],"board":[46,106],"an":[48],"area":[49],"of":[50,80,89],"350":[51,54],"\u03bcm":[52,55],"\u00d7":[53,153],"defined":[57],"both":[59],"wet":[60,68],"etching":[61,64],"dry":[63],"processes":[65],"one":[69],"applied":[71],"in":[72,116,171],"final":[74,85],"due":[76],"to":[77,126,160],"its":[78,130,146,161],"advantages":[79],"easy":[81],"control":[82],"structure.":[86],"pair":[88],"150":[90],"nm":[91,98],"Pt":[92],"micro":[93],"interdigitated":[94],"electrodes":[95],"50":[97],"Ti":[99],"buffer":[100],"fabricated":[103],"lift-off":[109],"process.":[110],"sensor":[112,166],"chip":[113],"tested":[115],"furnace":[118],"changing":[120],"concentration":[123],"from":[124],"1.0%":[125],"20%":[127],"monitoring":[129],"electrical":[131],"resistance.":[132],"Results":[133],"showed":[134],"that":[135],"several":[137],"testing":[138],"cycles":[139],"sensor's":[141],"output":[142],"becomes":[143],"stable,":[144],"sensitivity":[147],"is":[148,157],"0.054":[149],"deviation":[151],"2.65":[152],"10(-4)":[154],"hysteresis":[156],"8.5%.":[158],"Due":[159],"simple":[162],"fabrication":[163],"process,":[164],"has":[167],"potential":[168],"application":[170],"environmental":[172],"monitoring,":[173],"where":[174],"lower":[175],"power":[176],"consumption":[177],"small":[179],"size":[180],"are":[181],"required.":[182]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":3},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":5},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":4},{"year":2018,"cited_by_count":4},{"year":2017,"cited_by_count":5},{"year":2016,"cited_by_count":6},{"year":2015,"cited_by_count":6}],"updated_date":"2026-07-30T17:31:21.811387","created_date":"2025-10-10T00:00:00"}