{"id":"https://openalex.org/W2165091860","doi":"https://doi.org/10.3390/s140304177","title":"Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip","display_name":"Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip","publication_year":2014,"publication_date":"2014-03-03","ids":{"openalex":"https://openalex.org/W2165091860","doi":"https://doi.org/10.3390/s140304177","mag":"2165091860"},"language":"en","primary_location":{"id":"doi:10.3390/s140304177","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s140304177","pdf_url":"https://www.mdpi.com/1424-8220/14/3/4177/pdf?version=1403348776","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/14/3/4177/pdf?version=1403348776","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5091005724","display_name":"Yu-Chih Hu","orcid":null},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yu-Chih Hu","raw_affiliation_strings":["Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan","institution_ids":["https://openalex.org/I162838928"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005155364","display_name":"Ching\u2010Liang Dai","orcid":"https://orcid.org/0000-0001-9114-7363"},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Ching-Liang Dai","raw_affiliation_strings":["Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan","institution_ids":["https://openalex.org/I162838928"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101088381","display_name":"Cheng-Chih Hsu","orcid":null},"institutions":[{"id":"https://openalex.org/I99908691","display_name":"Yuan Ze University","ror":"https://ror.org/01fv1ds98","country_code":"TW","type":"education","lineage":["https://openalex.org/I99908691"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Cheng-Chih Hsu","raw_affiliation_strings":["Department of Electro-Optical Engineering, Yuan Ze University, Taoyuan 320, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electro-Optical Engineering, Yuan Ze University, Taoyuan 320, Taiwan","institution_ids":["https://openalex.org/I99908691"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5005155364"],"corresponding_institution_ids":["https://openalex.org/I162838928"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":1.7031,"has_fulltext":true,"cited_by_count":44,"citation_normalized_percentile":{"value":0.86823192,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":99},"biblio":{"volume":"14","issue":"3","first_page":"4177","last_page":"4188"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11667","display_name":"Advanced Chemical Sensor Technologies","score":0.9940999746322632,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7895350456237793},{"id":"https://openalex.org/keywords/humidity","display_name":"Humidity","score":0.7760214805603027},{"id":"https://openalex.org/keywords/titanium-dioxide","display_name":"Titanium dioxide","score":0.711794912815094},{"id":"https://openalex.org/keywords/relative-humidity","display_name":"Relative humidity","score":0.6931138038635254},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5496066212654114},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.543369710445404},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.4967373013496399},{"id":"https://openalex.org/keywords/titanium","display_name":"Titanium","score":0.4443443715572357},{"id":"https://openalex.org/keywords/silicon-dioxide","display_name":"Silicon dioxide","score":0.4297245144844055},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.4241725206375122},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.39102140069007874},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.21751296520233154},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.16648605465888977},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.10871750116348267},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.07711207866668701}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7895350456237793},{"id":"https://openalex.org/C151420433","wikidata":"https://www.wikidata.org/wiki/Q180600","display_name":"Humidity","level":2,"score":0.7760214805603027},{"id":"https://openalex.org/C2777593239","wikidata":"https://www.wikidata.org/wiki/Q193521","display_name":"Titanium dioxide","level":2,"score":0.711794912815094},{"id":"https://openalex.org/C158960510","wikidata":"https://www.wikidata.org/wiki/Q180600","display_name":"Relative humidity","level":2,"score":0.6931138038635254},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5496066212654114},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.543369710445404},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.4967373013496399},{"id":"https://openalex.org/C506065880","wikidata":"https://www.wikidata.org/wiki/Q716","display_name":"Titanium","level":2,"score":0.4443443715572357},{"id":"https://openalex.org/C2779089622","wikidata":"https://www.wikidata.org/wiki/Q116269","display_name":"Silicon dioxide","level":2,"score":0.4297245144844055},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.4241725206375122},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.39102140069007874},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.21751296520233154},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.16648605465888977},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.10871750116348267},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.07711207866668701},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0}],"mesh":[],"locations_count":6,"locations":[{"id":"doi:10.3390/s140304177","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s140304177","pdf_url":"https://www.mdpi.com/1424-8220/14/3/4177/pdf?version=1403348776","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:ce9cec25ea2a46cfafa04a335dff3a32","is_oa":true,"landing_page_url":"https://doaj.org/article/ce9cec25ea2a46cfafa04a335dff3a32","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 14, Iss 3, Pp 4177-4188 (2014)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:2979782","is_oa":true,"landing_page_url":"http://europepmc.org/articles/PMC4003938","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Text"},{"id":"pmh:oai:ir.lib.nchu.edu.tw:11455/86253","is_oa":false,"landing_page_url":"http://hdl.handle.net/11455/86253","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Journal Article"},{"id":"pmh:oai:mdpi.com:/1424-8220/14/3/4177/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s140304177","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 14; Issue 3; Pages: 4177-4188","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:4003938","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/4003938","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s140304177","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s140304177","pdf_url":"https://www.mdpi.com/1424-8220/14/3/4177/pdf?version=1403348776","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.7200000286102295}],"awards":[],"funders":[{"id":"https://openalex.org/F4320321040","display_name":"National Science Council","ror":"https://ror.org/02kv4zf79"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2165091860.pdf","grobid_xml":"https://content.openalex.org/works/W2165091860.grobid-xml"},"referenced_works_count":33,"referenced_works":["https://openalex.org/W1854974761","https://openalex.org/W1979413974","https://openalex.org/W1982495274","https://openalex.org/W1989615198","https://openalex.org/W1989859717","https://openalex.org/W1999307375","https://openalex.org/W2008039216","https://openalex.org/W2008579878","https://openalex.org/W2024771300","https://openalex.org/W2025179016","https://openalex.org/W2031350258","https://openalex.org/W2031739436","https://openalex.org/W2046964911","https://openalex.org/W2057710469","https://openalex.org/W2062474724","https://openalex.org/W2069331981","https://openalex.org/W2071822903","https://openalex.org/W2086507063","https://openalex.org/W2094485065","https://openalex.org/W2095334449","https://openalex.org/W2117364386","https://openalex.org/W2118751963","https://openalex.org/W2131094989","https://openalex.org/W2131560430","https://openalex.org/W2137562005","https://openalex.org/W2147910234","https://openalex.org/W2166721839","https://openalex.org/W2469614066","https://openalex.org/W2499130578","https://openalex.org/W3203011645","https://openalex.org/W4285719527","https://openalex.org/W6720285064","https://openalex.org/W6750403012"],"related_works":["https://openalex.org/W2013511864","https://openalex.org/W2366365583","https://openalex.org/W1586733611","https://openalex.org/W1642018725","https://openalex.org/W2181379992","https://openalex.org/W2357642794","https://openalex.org/W4390758803","https://openalex.org/W2298909941","https://openalex.org/W2380249611","https://openalex.org/W2351931336"],"abstract_inverted_index":{"A":[0],"humidity":[1,30,37,69,123],"microsensor":[2],"integrated":[3,24,122],"with":[4],"a":[5,29,33,42,72,126],"readout":[6,34,100],"circuit":[7,101],"on-a-chip":[8],"fabricated":[9],"using":[10],"the":[11,56,65,76,82,88,92,106,110,113,121],"commercial":[12],"0.18":[13],"\u03bcm":[14],"CMOS":[15],"(complementary":[16],"metal":[17],"oxide":[18],"semiconductor)":[19],"process":[20],"was":[21],"presented.":[22],"The":[23,36,48,59,68,85,99,116],"sensor":[25,31,38,70,89,111,124],"chip":[26],"consists":[27],"of":[28,41,87,109,128],"and":[32,45,79],"circuit.":[35],"is":[39,51,62,102],"composed":[40],"sensitive":[43,49,93],"film":[44,50,94],"interdigitated":[46,66],"electrodes.":[47,67],"titanium":[52,60,83],"dioxide":[53,61],"prepared":[54],"by":[55],"sol-gel":[57],"method.":[58],"coated":[63],"on":[64],"requires":[71],"post-process":[73],"to":[74,80,104],"remove":[75],"sacrificial":[77],"layer":[78],"coat":[81],"dioxide.":[84],"resistance":[86,107],"changes":[90],"as":[91],"absorbs":[95],"or":[96],"desorbs":[97],"vapor.":[98],"employed":[103],"convert":[105],"variation":[108],"into":[112],"output":[114],"voltage.":[115],"experimental":[117],"results":[118],"show":[119],"that":[120],"has":[125],"sensitivity":[127],"4.5":[129],"mV/RH%":[130],"(relative":[131],"humidity)":[132],"at":[133],"room":[134],"temperature.":[135]},"counts_by_year":[{"year":2026,"cited_by_count":2},{"year":2025,"cited_by_count":5},{"year":2024,"cited_by_count":8},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":4},{"year":2019,"cited_by_count":5},{"year":2018,"cited_by_count":4},{"year":2017,"cited_by_count":3},{"year":2015,"cited_by_count":3},{"year":2014,"cited_by_count":2}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2016-06-24T00:00:00"}