{"id":"https://openalex.org/W2056474353","doi":"https://doi.org/10.3390/s131217006","title":"A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure","display_name":"A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure","publication_year":2013,"publication_date":"2013-12-10","ids":{"openalex":"https://openalex.org/W2056474353","doi":"https://doi.org/10.3390/s131217006","mag":"2056474353"},"language":"en","primary_location":{"id":"doi:10.3390/s131217006","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s131217006","pdf_url":"https://www.mdpi.com/1424-8220/13/12/17006/pdf?version=1403340499","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/13/12/17006/pdf?version=1403340499","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5017201768","display_name":"Sen Ren","orcid":null},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Sen Ren","raw_affiliation_strings":["Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education,  Northwestern Polytechnical University, Xi'an 710072, China","Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems,  Northwestern Polytechnical University, Xi'an 710072, China","Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China","Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi'an 710072, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education,  Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems,  Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5071859531","display_name":"Weizheng Yuan","orcid":"https://orcid.org/0000-0001-9490-7188"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Weizheng Yuan","raw_affiliation_strings":["Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education,  Northwestern Polytechnical University, Xi'an 710072, China","Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems,  Northwestern Polytechnical University, Xi'an 710072, China","Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi'an 710072, China","Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education,  Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems,  Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102991162","display_name":"Dayong Qiao","orcid":"https://orcid.org/0000-0003-3392-8844"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dayong Qiao","raw_affiliation_strings":["Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education,  Northwestern Polytechnical University, Xi'an 710072, China","Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems,  Northwestern Polytechnical University, Xi'an 710072, China","Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi'an 710072, China","Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education,  Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems,  Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068224407","display_name":"Jinjun Deng","orcid":"https://orcid.org/0000-0003-3247-1985"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jinjun Deng","raw_affiliation_strings":["Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education,  Northwestern Polytechnical University, Xi'an 710072, China","Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems,  Northwestern Polytechnical University, Xi'an 710072, China","Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China","Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi'an 710072, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education,  Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems,  Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100782363","display_name":"Xiaodong Sun","orcid":"https://orcid.org/0000-0002-9451-3311"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaodong Sun","raw_affiliation_strings":["Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education,  Northwestern Polytechnical University, Xi'an 710072, China","Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems,  Northwestern Polytechnical University, Xi'an 710072, China","Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China","Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi'an 710072, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education,  Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems,  Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi'an 710072, China","institution_ids":["https://openalex.org/I17145004"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5071859531"],"corresponding_institution_ids":["https://openalex.org/I17145004"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":2.64,"has_fulltext":true,"cited_by_count":37,"citation_normalized_percentile":{"value":0.90655645,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":91,"max":99},"biblio":{"volume":"13","issue":"12","first_page":"17006","last_page":"17024"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.8335224986076355},{"id":"https://openalex.org/keywords/pressure-sensor","display_name":"Pressure sensor","score":0.6449718475341797},{"id":"https://openalex.org/keywords/atmospheric-pressure","display_name":"Atmospheric pressure","score":0.6428133249282837},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.6354040503501892},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6190834045410156},{"id":"https://openalex.org/keywords/tuning-fork","display_name":"Tuning fork","score":0.6092095375061035},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.5608817338943481},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5554825663566589},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.5141525864601135},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.5127795338630676},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.5058900713920593},{"id":"https://openalex.org/keywords/q-factor","display_name":"Q factor","score":0.464402437210083},{"id":"https://openalex.org/keywords/signal","display_name":"SIGNAL (programming language)","score":0.4502123296260834},{"id":"https://openalex.org/keywords/pressure-measurement","display_name":"Pressure measurement","score":0.43638816475868225},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3419470191001892},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3406509757041931},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.26452475786209106},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2101653814315796},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.1505953073501587},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.11694598197937012},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.07505151629447937},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.07323738932609558}],"concepts":[{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.8335224986076355},{"id":"https://openalex.org/C41325743","wikidata":"https://www.wikidata.org/wiki/Q1261040","display_name":"Pressure sensor","level":2,"score":0.6449718475341797},{"id":"https://openalex.org/C200239111","wikidata":"https://www.wikidata.org/wiki/Q81809","display_name":"Atmospheric pressure","level":2,"score":0.6428133249282837},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.6354040503501892},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6190834045410156},{"id":"https://openalex.org/C107677527","wikidata":"https://www.wikidata.org/wiki/Q201898","display_name":"Tuning fork","level":3,"score":0.6092095375061035},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.5608817338943481},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5554825663566589},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.5141525864601135},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.5127795338630676},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.5058900713920593},{"id":"https://openalex.org/C187725362","wikidata":"https://www.wikidata.org/wiki/Q830521","display_name":"Q factor","level":3,"score":0.464402437210083},{"id":"https://openalex.org/C2779843651","wikidata":"https://www.wikidata.org/wiki/Q7390335","display_name":"SIGNAL (programming language)","level":2,"score":0.4502123296260834},{"id":"https://openalex.org/C80264047","wikidata":"https://www.wikidata.org/wiki/Q7424019","display_name":"Pressure measurement","level":2,"score":0.43638816475868225},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3419470191001892},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3406509757041931},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.26452475786209106},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2101653814315796},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.1505953073501587},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.11694598197937012},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.07505151629447937},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.07323738932609558},{"id":"https://openalex.org/C153294291","wikidata":"https://www.wikidata.org/wiki/Q25261","display_name":"Meteorology","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.3390/s131217006","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s131217006","pdf_url":"https://www.mdpi.com/1424-8220/13/12/17006/pdf?version=1403340499","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:549fe6bdc68045ceabd047463e048087","is_oa":true,"landing_page_url":"https://doaj.org/article/549fe6bdc68045ceabd047463e048087","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 13, Iss 12, Pp 17006-17024 (2013)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:2881261","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3892843","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/13/12/17006/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s131217006","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 13; Issue 12; Pages: 17006-17024","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s131217006","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s131217006","pdf_url":"https://www.mdpi.com/1424-8220/13/12/17006/pdf?version=1403340499","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.6899999976158142}],"awards":[],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2056474353.pdf","grobid_xml":"https://content.openalex.org/works/W2056474353.grobid-xml"},"referenced_works_count":42,"referenced_works":["https://openalex.org/W602197117","https://openalex.org/W1824802372","https://openalex.org/W1968766641","https://openalex.org/W1970227858","https://openalex.org/W1982193710","https://openalex.org/W1993288966","https://openalex.org/W1998881781","https://openalex.org/W2007901286","https://openalex.org/W2008154513","https://openalex.org/W2008342270","https://openalex.org/W2008517944","https://openalex.org/W2009591452","https://openalex.org/W2012267630","https://openalex.org/W2013853238","https://openalex.org/W2015891739","https://openalex.org/W2016480551","https://openalex.org/W2025582238","https://openalex.org/W2038104634","https://openalex.org/W2046499943","https://openalex.org/W2048945014","https://openalex.org/W2051730356","https://openalex.org/W2052968366","https://openalex.org/W2053581124","https://openalex.org/W2070490808","https://openalex.org/W2071120679","https://openalex.org/W2076755257","https://openalex.org/W2089073173","https://openalex.org/W2092280836","https://openalex.org/W2116288835","https://openalex.org/W2124539410","https://openalex.org/W2127490754","https://openalex.org/W2131147904","https://openalex.org/W2143909640","https://openalex.org/W2148361306","https://openalex.org/W2157062341","https://openalex.org/W2158392742","https://openalex.org/W2164223529","https://openalex.org/W2164340090","https://openalex.org/W2166830778","https://openalex.org/W2168123783","https://openalex.org/W2174603525","https://openalex.org/W2566666568"],"related_works":["https://openalex.org/W2054124615","https://openalex.org/W1997450548","https://openalex.org/W1988237990","https://openalex.org/W4206804491","https://openalex.org/W1973127455","https://openalex.org/W2984836626","https://openalex.org/W3022118013","https://openalex.org/W2534267407","https://openalex.org/W4242883309","https://openalex.org/W2269051159"],"abstract_inverted_index":{"A":[0,73],"novel":[1],"resonant":[2,40,149,200],"pressure":[3,19,41,57,150,158,167,201],"sensor":[4,32,42,114,151,194,202],"with":[5,43,156],"an":[6],"improved":[7],"micromechanical":[8],"double-ended":[9],"tuning":[10],"fork":[11],"resonator":[12,23,51],"packaged":[13,203],"in":[14,49,60,134],"dry":[15],"air":[16],"at":[17,55,204],"atmospheric":[18,56,205],"is":[20,24,33,53,65,116,131,152],"presented.":[21],"The":[22,112,189],"electrostatically":[25],"driven":[26],"and":[27,30,62,84,94,130,172],"capacitively":[28],"detected,":[29],"the":[31,69,79,88,95,144,148,164,173,192,196],"designed":[34],"to":[35,67,106,185],"realize":[36],"a":[37,50,63,108,120,125,135,157,199],"low":[38],"cost":[39],"medium":[44],"accuracy.":[45],"Various":[46],"damping":[47],"mechanisms":[48],"that":[52,143],"vibrating":[54],"are":[58,101,187],"analyzed":[59],"detail,":[61],"formula":[64],"developed":[66],"predict":[68],"overall":[70],"quality":[71,80,181],"factor.":[72],"trade-off":[74],"has":[75],"been":[76],"reached":[77],"between":[78],"factor,":[81],"stress":[82],"sensitivity":[83,159],"drive":[85],"capability":[86],"of":[87,97,147,160,169,177,191,198],"resonator.":[89],"Furthermore,":[90],"differential":[91],"sense":[92],"elements":[93],"method":[96],"electromechanical":[98],"amplitude":[99],"modulation":[100],"used":[102],"for":[103],"capacitive":[104],"detection":[105],"obtain":[107],"large":[109],"signal-to-noise":[110],"ratio.":[111],"prototype":[113,193],"chip":[115],"successfully":[117],"fabricated":[118],"using":[119],"micromachining":[121],"process":[122],"based":[123],"on":[124],"commercially":[126],"available":[127],"silicon-on-insulator":[128],"wafer":[129],"hermetically":[132],"encapsulated":[133],"custom":[136],"16-pin":[137],"Kovar":[138],"package.":[139],"Preliminary":[140],"measurements":[141],"show":[142],"fundamental":[145],"frequency":[146],"approximately":[153],"34.55":[154],"kHz":[155],"20.77":[161],"Hz/kPa.":[162],"Over":[163],"full":[165],"scale":[166],"range":[168,176],"100\u2013400":[170],"kPa":[171],"whole":[174],"temperature":[175],"\u221220\u201360":[178],"\u00b0C,":[179],"high":[180],"factors":[182],"from":[183],"1,146":[184],"1,772":[186],"obtained.":[188],"characterization":[190],"reveals":[195],"feasibility":[197],"pressure.":[206]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":4},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":5},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":4},{"year":2016,"cited_by_count":5},{"year":2015,"cited_by_count":6}],"updated_date":"2026-05-06T08:25:59.206177","created_date":"2016-06-24T00:00:00"}