{"id":"https://openalex.org/W1980107748","doi":"https://doi.org/10.3390/s131012760","title":"Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 \u03bcm CMOS Process","display_name":"Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 \u03bcm CMOS Process","publication_year":2013,"publication_date":"2013-09-25","ids":{"openalex":"https://openalex.org/W1980107748","doi":"https://doi.org/10.3390/s131012760","mag":"1980107748","pmid":"https://pubmed.ncbi.nlm.nih.gov/24072022"},"language":"en","primary_location":{"id":"doi:10.3390/s131012760","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s131012760","pdf_url":"https://www.mdpi.com/1424-8220/13/10/12760/pdf?version=1403335093","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/13/10/12760/pdf?version=1403335093","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5040535582","display_name":"Wei-Zhen Liao","orcid":null},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Wei-Zhen Liao","raw_affiliation_strings":["Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan","Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan","institution_ids":["https://openalex.org/I162838928"]},{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402, Taiwan","institution_ids":["https://openalex.org/I162838928"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005155364","display_name":"Ching\u2010Liang Dai","orcid":"https://orcid.org/0000-0001-9114-7363"},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Ching-Liang Dai","raw_affiliation_strings":["Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan","institution_ids":["https://openalex.org/I162838928"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5031981185","display_name":"Mingzhi Yang","orcid":"https://orcid.org/0000-0003-4191-0636"},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Ming-Zhi Yang","raw_affiliation_strings":["Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan","institution_ids":["https://openalex.org/I162838928"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5040535582"],"corresponding_institution_ids":["https://openalex.org/I162838928"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.9599,"has_fulltext":false,"cited_by_count":15,"citation_normalized_percentile":{"value":0.77699578,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"13","issue":"10","first_page":"12760","last_page":"12770"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11667","display_name":"Advanced Chemical Sensor Technologies","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7511671781539917},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.6980277895927429},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.6244181394577026},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.5936131477355957},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5518820285797119},{"id":"https://openalex.org/keywords/oxide","display_name":"Oxide","score":0.5020124912261963},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.41189494729042053},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3063322603702545},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.11091208457946777},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.06981408596038818}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7511671781539917},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6980277895927429},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.6244181394577026},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.5936131477355957},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5518820285797119},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.5020124912261963},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.41189494729042053},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3063322603702545},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.11091208457946777},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.06981408596038818},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[{"descriptor_ui":"D000431","descriptor_name":"Ethanol","qualifier_ui":"Q000032","qualifier_name":"analysis","is_major_topic":false},{"descriptor_ui":"D000431","descriptor_name":"Ethanol","qualifier_ui":"Q000032","qualifier_name":"analysis","is_major_topic":false},{"descriptor_ui":"D000431","descriptor_name":"Ethanol","qualifier_ui":"Q000032","qualifier_name":"analysis","is_major_topic":false},{"descriptor_ui":"D000431","descriptor_name":"Ethanol","qualifier_ui":"Q000032","qualifier_name":"analysis","is_major_topic":false},{"descriptor_ui":"D000431","descriptor_name":"Ethanol","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D000431","descriptor_name":"Ethanol","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D000431","descriptor_name":"Ethanol","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D000431","descriptor_name":"Ethanol","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D003217","descriptor_name":"Conductometry","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D003217","descriptor_name":"Conductometry","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D003217","descriptor_name":"Conductometry","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D003217","descriptor_name":"Conductometry","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D004566","descriptor_name":"Electrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D004566","descriptor_name":"Electrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D004566","descriptor_name":"Electrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D004566","descriptor_name":"Electrodes","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006358","descriptor_name":"Hot Temperature","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006361","descriptor_name":"Heating","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D006361","descriptor_name":"Heating","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D006361","descriptor_name":"Heating","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D008904","descriptor_name":"Miniaturization","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008904","descriptor_name":"Miniaturization","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008904","descriptor_name":"Miniaturization","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008904","descriptor_name":"Miniaturization","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012666","descriptor_name":"Semiconductors","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D012666","descriptor_name":"Semiconductors","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D012666","descriptor_name":"Semiconductors","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D012666","descriptor_name":"Semiconductors","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D014159","descriptor_name":"Transducers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D014159","descriptor_name":"Transducers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D014159","descriptor_name":"Transducers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D014159","descriptor_name":"Transducers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D017097","descriptor_name":"Electric Impedance","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D017097","descriptor_name":"Electric Impedance","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D017097","descriptor_name":"Electric Impedance","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D017097","descriptor_name":"Electric Impedance","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D019544","descriptor_name":"Equipment Failure Analysis","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D019544","descriptor_name":"Equipment Failure Analysis","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D019544","descriptor_name":"Equipment Failure Analysis","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D019544","descriptor_name":"Equipment Failure Analysis","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false}],"locations_count":6,"locations":[{"id":"doi:10.3390/s131012760","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s131012760","pdf_url":"https://www.mdpi.com/1424-8220/13/10/12760/pdf?version=1403335093","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:24072022","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/24072022","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.406.7010","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.406.7010","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://www.mdpi.com/1424-8220/13/10/12760/pdf/","raw_type":"text"},{"id":"pmh:oai:doaj.org/article:6662fc15145e4e7db6189bffe31a96b6","is_oa":true,"landing_page_url":"https://doaj.org/article/6662fc15145e4e7db6189bffe31a96b6","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 13, Iss 10, Pp 12760-12770 (2013)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:2844274","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3859035","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/13/10/12760/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s131012760","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 13; Issue 10; Pages: 12760-12770","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s131012760","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s131012760","pdf_url":"https://www.mdpi.com/1424-8220/13/10/12760/pdf?version=1403335093","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.6700000166893005,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320321040","display_name":"National Science Council","ror":"https://ror.org/02kv4zf79"}],"has_content":{"pdf":true,"grobid_xml":false},"content_urls":{"pdf":"https://content.openalex.org/works/W1980107748.pdf"},"referenced_works_count":25,"referenced_works":["https://openalex.org/W1854974761","https://openalex.org/W1987266183","https://openalex.org/W2004901902","https://openalex.org/W2011282992","https://openalex.org/W2015648930","https://openalex.org/W2025179016","https://openalex.org/W2027602557","https://openalex.org/W2028873622","https://openalex.org/W2036684435","https://openalex.org/W2054539481","https://openalex.org/W2057710469","https://openalex.org/W2075811593","https://openalex.org/W2078788960","https://openalex.org/W2086507063","https://openalex.org/W2095334449","https://openalex.org/W2108956515","https://openalex.org/W2117364386","https://openalex.org/W2118751963","https://openalex.org/W2134571742","https://openalex.org/W2137562005","https://openalex.org/W2146012751","https://openalex.org/W2147910234","https://openalex.org/W2321512086","https://openalex.org/W2499130578","https://openalex.org/W3203011645"],"related_works":["https://openalex.org/W2082914599","https://openalex.org/W2756570351","https://openalex.org/W3014521742","https://openalex.org/W2606427896","https://openalex.org/W2007805353","https://openalex.org/W2132500134","https://openalex.org/W2387433897","https://openalex.org/W2008392873","https://openalex.org/W2058003992","https://openalex.org/W3088198719"],"abstract_inverted_index":{"The":[0,15,31,43,62,83],"study":[1],"investigates":[2],"the":[3,21,51,59,67,80,91,101,105,111,114,127,131,134,140,143],"fabrication":[4],"and":[5,40,54,70,95],"characterization":[6],"of":[7,34,113,130,142],"an":[8],"ethanol":[9,16,109,144],"microsensor":[10],"equipped":[11],"with":[12],"a":[13,35,38,76,86,117],"heater.":[14],"sensor":[17,32,84,115,132,145],"is":[18,46,56,64,72,123,146],"manufactured":[19],"using":[20],"commercial":[22],"0.18":[23],"\u00b5m":[24],"complementary":[25],"metal":[26],"oxide":[27,48,93,99],"semiconductor":[28],"(CMOS)":[29],"process.":[30],"consists":[33],"sensitive":[36,44,81,106],"film,":[37],"heater":[39,63],"interdigitated":[41,60,68,102],"electrodes.":[42,61,103],"film":[45,107],"zinc":[47,98],"prepared":[49],"by":[50],"sol-gel":[52],"method,":[53],"it":[55,71],"coated":[57],"on":[58,100],"located":[65],"under":[66],"electrodes,":[69],"used":[73],"to":[74,79,89,96,125],"supply":[75],"working":[77],"temperature":[78],"film.":[82],"needs":[85],"post-processing":[87],"step":[88],"remove":[90],"sacrificial":[92],"layer,":[94],"coat":[97],"When":[104],"senses":[108],"gas,":[110],"resistance":[112,128],"generates":[116],"change.":[118],"An":[119],"inverting":[120],"amplifier":[121],"circuit":[122],"utilized":[124],"convert":[126],"variation":[129],"into":[133],"output":[135],"voltage.":[136],"Experiments":[137],"show":[138],"that":[139],"sensitivity":[141],"0.35":[147],"mV/ppm.":[148]},"counts_by_year":[{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":3},{"year":2020,"cited_by_count":1},{"year":2018,"cited_by_count":4},{"year":2017,"cited_by_count":2},{"year":2015,"cited_by_count":3},{"year":2014,"cited_by_count":1}],"updated_date":"2026-05-22T06:13:13.366637","created_date":"2025-10-10T00:00:00"}