{"id":"https://openalex.org/W2029143014","doi":"https://doi.org/10.3390/s130912140","title":"An Experimental Study on Fabricating an Inverted Mesa-Type Quartz Crystal Resonator Using a Cheap Wet Etching Process","display_name":"An Experimental Study on Fabricating an Inverted Mesa-Type Quartz Crystal Resonator Using a Cheap Wet Etching Process","publication_year":2013,"publication_date":"2013-09-10","ids":{"openalex":"https://openalex.org/W2029143014","doi":"https://doi.org/10.3390/s130912140","mag":"2029143014","pmid":"https://pubmed.ncbi.nlm.nih.gov/24025559"},"language":"en","primary_location":{"id":"doi:10.3390/s130912140","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s130912140","pdf_url":"https://www.mdpi.com/1424-8220/13/9/12140/pdf?version=1403334304","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/13/9/12140/pdf?version=1403334304","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5109345879","display_name":"Jinxing Liang","orcid":"https://orcid.org/0000-0002-3992-5938"},"institutions":[{"id":"https://openalex.org/I4210100356","display_name":"Ministry of Education","ror":"https://ror.org/018f7hf93","country_code":"CL","type":"government","lineage":["https://openalex.org/I4210100356"]},{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CL","CN"],"is_corresponding":true,"raw_author_name":"Jinxing Liang","raw_affiliation_strings":["Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology,  Ministry of Education, School of Instrument Science and Engineering, Southeast University,  Nanjing 210096, China","Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China,"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology,  Ministry of Education, School of Instrument Science and Engineering, Southeast University,  Nanjing 210096, China","institution_ids":["https://openalex.org/I4210100356"]},{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China,","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101412234","display_name":"Jia Huang","orcid":"https://orcid.org/0009-0003-0150-9511"},"institutions":[{"id":"https://openalex.org/I4210100356","display_name":"Ministry of Education","ror":"https://ror.org/018f7hf93","country_code":"CL","type":"government","lineage":["https://openalex.org/I4210100356"]},{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CL","CN"],"is_corresponding":false,"raw_author_name":"Jia Huang","raw_affiliation_strings":["Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology,  Ministry of Education, School of Instrument Science and Engineering, Southeast University,  Nanjing 210096, China","Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology,  Ministry of Education, School of Instrument Science and Engineering, Southeast University,  Nanjing 210096, China","institution_ids":["https://openalex.org/I4210100356"]},{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100371729","display_name":"Tian Zhang","orcid":"https://orcid.org/0000-0002-1284-1232"},"institutions":[{"id":"https://openalex.org/I4210100356","display_name":"Ministry of Education","ror":"https://ror.org/018f7hf93","country_code":"CL","type":"government","lineage":["https://openalex.org/I4210100356"]},{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CL","CN"],"is_corresponding":false,"raw_author_name":"Tian Zhang","raw_affiliation_strings":["Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology,  Ministry of Education, School of Instrument Science and Engineering, Southeast University,  Nanjing 210096, China","Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology,  Ministry of Education, School of Instrument Science and Engineering, Southeast University,  Nanjing 210096, China","institution_ids":["https://openalex.org/I4210100356"]},{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101883377","display_name":"Jing Zhang","orcid":"https://orcid.org/0000-0002-4408-9698"},"institutions":[{"id":"https://openalex.org/I4210100356","display_name":"Ministry of Education","ror":"https://ror.org/018f7hf93","country_code":"CL","type":"government","lineage":["https://openalex.org/I4210100356"]},{"id":"https://openalex.org/I76569877","display_name":"Southeast University","ror":"https://ror.org/04ct4d772","country_code":"CN","type":"education","lineage":["https://openalex.org/I76569877"]}],"countries":["CL","CN"],"is_corresponding":false,"raw_author_name":"Jing Zhang","raw_affiliation_strings":["Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology,  Ministry of Education, School of Instrument Science and Engineering, Southeast University,  Nanjing 210096, China","Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology,  Ministry of Education, School of Instrument Science and Engineering, Southeast University,  Nanjing 210096, China","institution_ids":["https://openalex.org/I4210100356"]},{"raw_affiliation_string":"Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China","institution_ids":["https://openalex.org/I76569877"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100400565","display_name":"Xuefeng Li","orcid":"https://orcid.org/0000-0003-2992-4680"},"institutions":[{"id":"https://openalex.org/I116953780","display_name":"Tongji University","ror":"https://ror.org/03rc6as71","country_code":"CN","type":"education","lineage":["https://openalex.org/I116953780"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xuefeng Li","raw_affiliation_strings":["School of Electronics and Information Engineering, Tongji University, Shanghai 201804, China","TONGJI UNIVERSITY"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronics and Information Engineering, Tongji University, Shanghai 201804, China","institution_ids":["https://openalex.org/I116953780"]},{"raw_affiliation_string":"TONGJI UNIVERSITY","institution_ids":["https://openalex.org/I116953780"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5102123643","display_name":"Toshitsugu Ueda","orcid":null},"institutions":[{"id":"https://openalex.org/I150744194","display_name":"Waseda University","ror":"https://ror.org/00ntfnx83","country_code":"JP","type":"education","lineage":["https://openalex.org/I150744194"]},{"id":"https://openalex.org/I17056963","display_name":"The University of Kitakyushu","ror":"https://ror.org/03mfefw72","country_code":"JP","type":"education","lineage":["https://openalex.org/I17056963"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Toshitsugu Ueda","raw_affiliation_strings":["Graduate School of Information, Production and System, Waseda University,  Kitakyushu 808-0135, Japan","Graduate School of Information, Production and System, Waseda University, Kitakyushu 808-0135, Japan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Graduate School of Information, Production and System, Waseda University,  Kitakyushu 808-0135, Japan","institution_ids":["https://openalex.org/I150744194","https://openalex.org/I17056963"]},{"raw_affiliation_string":"Graduate School of Information, Production and System, Waseda University, Kitakyushu 808-0135, Japan","institution_ids":["https://openalex.org/I150744194"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5109345879"],"corresponding_institution_ids":["https://openalex.org/I4210100356","https://openalex.org/I76569877"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.4102,"has_fulltext":true,"cited_by_count":15,"citation_normalized_percentile":{"value":0.64938018,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"13","issue":"9","first_page":"12140","last_page":"12148"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9904999732971191,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11255","display_name":"Microfluidic and Bio-sensing Technologies","score":0.9902999997138977,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/quartz-crystal-microbalance","display_name":"Quartz crystal microbalance","score":0.8935707211494446},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7600952982902527},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.6615591049194336},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.6564221382141113},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.6314941644668579},{"id":"https://openalex.org/keywords/quartz","display_name":"Quartz","score":0.5945308208465576},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5767708420753479},{"id":"https://openalex.org/keywords/isotropic-etching","display_name":"Isotropic etching","score":0.5732454657554626},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.502190351486206},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.48466211557388306},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.4756607413291931},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.2556203007698059},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.22349122166633606},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.1393047571182251},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.13751059770584106},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.13231942057609558},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.09946256875991821}],"concepts":[{"id":"https://openalex.org/C9996572","wikidata":"https://www.wikidata.org/wiki/Q629569","display_name":"Quartz crystal microbalance","level":3,"score":0.8935707211494446},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7600952982902527},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.6615591049194336},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.6564221382141113},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.6314941644668579},{"id":"https://openalex.org/C2779870107","wikidata":"https://www.wikidata.org/wiki/Q43010","display_name":"Quartz","level":2,"score":0.5945308208465576},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5767708420753479},{"id":"https://openalex.org/C33220542","wikidata":"https://www.wikidata.org/wiki/Q6086567","display_name":"Isotropic etching","level":4,"score":0.5732454657554626},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.502190351486206},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.48466211557388306},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.4756607413291931},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2556203007698059},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.22349122166633606},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.1393047571182251},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.13751059770584106},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.13231942057609558},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.09946256875991821},{"id":"https://openalex.org/C150394285","wikidata":"https://www.wikidata.org/wiki/Q180254","display_name":"Adsorption","level":2,"score":0.0},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C178790620","wikidata":"https://www.wikidata.org/wiki/Q11351","display_name":"Organic chemistry","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[{"descriptor_ui":"D002623","descriptor_name":"Chemistry Techniques, Analytical","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D002623","descriptor_name":"Chemistry Techniques, Analytical","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D002623","descriptor_name":"Chemistry Techniques, Analytical","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008904","descriptor_name":"Miniaturization","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008904","descriptor_name":"Miniaturization","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008904","descriptor_name":"Miniaturization","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012680","descriptor_name":"Sensitivity and Specificity","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012680","descriptor_name":"Sensitivity and Specificity","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012680","descriptor_name":"Sensitivity and Specificity","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D014159","descriptor_name":"Transducers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D014159","descriptor_name":"Transducers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D014159","descriptor_name":"Transducers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D014867","descriptor_name":"Water","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D014867","descriptor_name":"Water","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D014867","descriptor_name":"Water","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D015203","descriptor_name":"Reproducibility of Results","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D015203","descriptor_name":"Reproducibility of Results","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D015203","descriptor_name":"Reproducibility of Results","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D015374","descriptor_name":"Biosensing Techniques","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D015374","descriptor_name":"Biosensing Techniques","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D015374","descriptor_name":"Biosensing Techniques","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D019544","descriptor_name":"Equipment Failure Analysis","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D019544","descriptor_name":"Equipment Failure Analysis","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D019544","descriptor_name":"Equipment Failure Analysis","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false}],"locations_count":5,"locations":[{"id":"doi:10.3390/s130912140","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s130912140","pdf_url":"https://www.mdpi.com/1424-8220/13/9/12140/pdf?version=1403334304","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:24025559","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/24025559","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:48eea3cb92d6471ab9604879dcefb605","is_oa":true,"landing_page_url":"https://doaj.org/article/48eea3cb92d6471ab9604879dcefb605","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 13, Iss 9, Pp 12140-12148 (2013)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:2810976","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3821337","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/13/9/12140/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s130912140","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 13; Issue 9; Pages: 12140-12148","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s130912140","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s130912140","pdf_url":"https://www.mdpi.com/1424-8220/13/9/12140/pdf?version=1403334304","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Clean water and sanitation","id":"https://metadata.un.org/sdg/6","score":0.6000000238418579}],"awards":[{"id":"https://openalex.org/G4531342520","display_name":null,"funder_award_id":"BK2011607","funder_id":"https://openalex.org/F4320322769","funder_display_name":"Natural Science Foundation of Jiangsu Province"},{"id":"https://openalex.org/G6332225127","display_name":null,"funder_award_id":"20110092120052","funder_id":"https://openalex.org/F4320321106","funder_display_name":"Ministry of Education of the People's Republic of China"}],"funders":[{"id":"https://openalex.org/F4320321106","display_name":"Ministry of Education of the People's Republic of China","ror":"https://ror.org/01mv9t934"},{"id":"https://openalex.org/F4320321605","display_name":"Government of Jiangsu Province","ror":"https://ror.org/004svx814"},{"id":"https://openalex.org/F4320322769","display_name":"Natural Science Foundation of Jiangsu Province","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320335787","display_name":"Fundamental Research Funds for the Central Universities","ror":null}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2029143014.pdf","grobid_xml":"https://content.openalex.org/works/W2029143014.grobid-xml"},"referenced_works_count":18,"referenced_works":["https://openalex.org/W1975997726","https://openalex.org/W1983459880","https://openalex.org/W1992109659","https://openalex.org/W2003478517","https://openalex.org/W2004005109","https://openalex.org/W2011186854","https://openalex.org/W2026580083","https://openalex.org/W2042951886","https://openalex.org/W2049542537","https://openalex.org/W2059085974","https://openalex.org/W2060517690","https://openalex.org/W2072174984","https://openalex.org/W2097025993","https://openalex.org/W2122826344","https://openalex.org/W2149144093","https://openalex.org/W2599199563","https://openalex.org/W2914966218","https://openalex.org/W2993478925"],"related_works":["https://openalex.org/W1990831804","https://openalex.org/W2074502480","https://openalex.org/W2148274155","https://openalex.org/W2788903434","https://openalex.org/W1972608542","https://openalex.org/W2091008601","https://openalex.org/W2990644426","https://openalex.org/W581292172","https://openalex.org/W1482397683","https://openalex.org/W2150931894"],"abstract_inverted_index":{"In":[0],"this":[1],"study,":[2],"a":[3,18,55,125],"miniaturized":[4],"high":[5,32,69,130],"fundamental":[6],"frequency":[7,33],"quartz":[8,53],"crystal":[9],"microbalance":[10],"(QCM)":[11],"is":[12,25,59,111,157],"fabricated":[13,91,121,166],"for":[14,172],"sensor":[15,176],"applications":[16,177],"using":[17],"wet":[19],"etching":[20],"technique.":[21],"The":[22],"vibration":[23,57,100],"area":[24,58],"reduced":[26],"in":[27,124,178],"the":[28,31,42,45,63,117,120,155],"fabrication":[29],"of":[30,44,62,102,119,154],"QCM":[34,122,167],"with":[35,68,98],"an":[36],"inverted":[37],"mesa":[38],"structure.":[39,66],"To":[40],"reduce":[41],"complexity":[43],"side":[46,153],"wall":[47],"profile":[48],"that":[49,165],"results":[50,163],"from":[51],"anisotropic":[52],"etching,":[54],"rectangular":[56],"used":[60,171],"instead":[61],"conventional":[64],"circular":[65],"QCMs":[67],"Q":[70,127],"values":[71,128],"exceeding":[72],"25,000":[73,86],"at":[74,78,82,87,133,137,141,146],"47":[75,134],"MHz,":[76,80,135,139],"27,000":[77],"60":[79],"24,000":[81],"73":[83],"MHz":[84,89,143,148],"and":[85,113,144,174],"84":[88,147],"are":[90,149],"on":[92],"4":[93,95],"\u00d7":[94,104],"mm2":[96],"chips":[97,168],"small":[99],"areas":[101],"1.2":[103],"1.4":[105],"mm2.":[106],"A":[107],"PMMA-based":[108],"flow":[109],"cell":[110],"designed":[112],"manufactured":[114],"to":[115,159],"characterize":[116],"behavior":[118],"chip":[123,156],"liquid.":[126],"as":[129,131],"1,006":[132],"904":[136],"62":[138],"867":[140],"71":[142],"747":[145],"obtained":[150],"when":[151],"one":[152],"exposed":[158],"pure":[160],"water.":[161],"These":[162],"show":[164],"can":[169],"be":[170],"bio-":[173],"chemical":[175],"liquids.":[179]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":3},{"year":2022,"cited_by_count":2},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":1},{"year":2014,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}