{"id":"https://openalex.org/W1989651585","doi":"https://doi.org/10.3390/s130809624","title":"An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging","display_name":"An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging","publication_year":2013,"publication_date":"2013-07-26","ids":{"openalex":"https://openalex.org/W1989651585","doi":"https://doi.org/10.3390/s130809624","mag":"1989651585","pmid":"https://pubmed.ncbi.nlm.nih.gov/23896705"},"language":"en","primary_location":{"id":"doi:10.3390/s130809624","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s130809624","pdf_url":"https://www.mdpi.com/1424-8220/13/8/9624/pdf?version=1403330979","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/13/8/9624/pdf?version=1403330979","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5112217237","display_name":"Yi Yang","orcid":null},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yi Yang","raw_affiliation_strings":["Institute of Microelectronics, Tsinghua University, Beijing 100084, China","Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China","Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5009113901","display_name":"He Tian","orcid":"https://orcid.org/0000-0001-7328-2182"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"He Tian","raw_affiliation_strings":["Institute of Microelectronics, Tsinghua University, Beijing 100084, China","Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China","Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100367915","display_name":"Yufeng Wang","orcid":"https://orcid.org/0000-0002-5819-0578"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yu-Feng Wang","raw_affiliation_strings":["Institute of Microelectronics, Tsinghua University, Beijing 100084, China","Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China","Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101591280","display_name":"Yi Shu","orcid":"https://orcid.org/0000-0003-4811-3621"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yi Shu","raw_affiliation_strings":["Institute of Microelectronics, Tsinghua University, Beijing 100084, China","Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China","Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089915257","display_name":"Changjian Zhou","orcid":"https://orcid.org/0000-0002-7156-348X"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Chang-Jian Zhou","raw_affiliation_strings":["Institute of Microelectronics, Tsinghua University, Beijing 100084, China","Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China","Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078168981","display_name":"Hui Sun","orcid":"https://orcid.org/0000-0003-2845-1092"},"institutions":[{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]},{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hui Sun","raw_affiliation_strings":["Institute of Microelectronics, Tsinghua University, Beijing 100084, China","Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China","Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5091701244","display_name":"Cang-Hai Zhang","orcid":null},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Cang-Hai Zhang","raw_affiliation_strings":["Institute of Microelectronics, Tsinghua University, Beijing 100084, China","Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China","Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082789325","display_name":"Hao Chen","orcid":"https://orcid.org/0000-0001-9069-3290"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hao Chen","raw_affiliation_strings":["Institute of Microelectronics, Tsinghua University, Beijing 100084, China","Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China","Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5024756322","display_name":"Tian\u2010Ling Ren","orcid":"https://orcid.org/0000-0002-7330-0544"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]},{"id":"https://openalex.org/I4210119392","display_name":"Institute of Microelectronics","ror":"https://ror.org/02s6gs133","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210119392"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Tian-Ling Ren","raw_affiliation_strings":["Institute of Microelectronics, Tsinghua University, Beijing 100084, China","Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China","Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Microelectronics, Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089","https://openalex.org/I4210119392"]},{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology (TNList),  Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"Tsinghua National Laboratory for Information Science and Technology (TNList), Tsinghua University, Beijing 100084, China","institution_ids":["https://openalex.org/I99065089"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":9,"corresponding_author_ids":["https://openalex.org/A5024756322"],"corresponding_institution_ids":["https://openalex.org/I4210119392","https://openalex.org/I99065089"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":1.901,"has_fulltext":true,"cited_by_count":60,"citation_normalized_percentile":{"value":0.84587779,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":"13","issue":"8","first_page":"9624","last_page":"9634"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10727","display_name":"Ultrasound Imaging and Elastography","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2741","display_name":"Radiology, Nuclear Medicine and Imaging"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}},"topics":[{"id":"https://openalex.org/T10727","display_name":"Ultrasound Imaging and Elastography","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2741","display_name":"Radiology, Nuclear Medicine and Imaging"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}},{"id":"https://openalex.org/T10662","display_name":"Ultrasonics and Acoustic Wave Propagation","score":0.9993000030517578,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T14156","display_name":"Engineering Applied Research","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2205","display_name":"Civil and Structural Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7649258971214294},{"id":"https://openalex.org/keywords/pmut","display_name":"PMUT","score":0.7304684519767761},{"id":"https://openalex.org/keywords/piezoelectricity","display_name":"Piezoelectricity","score":0.7099891304969788},{"id":"https://openalex.org/keywords/silicon-on-insulator","display_name":"Silicon on insulator","score":0.6217889785766602},{"id":"https://openalex.org/keywords/ultrasonic-sensor","display_name":"Ultrasonic sensor","score":0.5819883346557617},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5147631168365479},{"id":"https://openalex.org/keywords/transducer","display_name":"Transducer","score":0.48790785670280457},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.443220317363739},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.43329498171806335},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3760756254196167},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.3682803511619568},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1359257996082306},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.07774484157562256}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7649258971214294},{"id":"https://openalex.org/C57693265","wikidata":"https://www.wikidata.org/wiki/Q17105295","display_name":"PMUT","level":3,"score":0.7304684519767761},{"id":"https://openalex.org/C100082104","wikidata":"https://www.wikidata.org/wiki/Q183759","display_name":"Piezoelectricity","level":2,"score":0.7099891304969788},{"id":"https://openalex.org/C53143962","wikidata":"https://www.wikidata.org/wiki/Q1478788","display_name":"Silicon on insulator","level":3,"score":0.6217889785766602},{"id":"https://openalex.org/C81288441","wikidata":"https://www.wikidata.org/wiki/Q20736125","display_name":"Ultrasonic sensor","level":2,"score":0.5819883346557617},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5147631168365479},{"id":"https://openalex.org/C56318395","wikidata":"https://www.wikidata.org/wiki/Q215928","display_name":"Transducer","level":2,"score":0.48790785670280457},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.443220317363739},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.43329498171806335},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3760756254196167},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.3682803511619568},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1359257996082306},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.07774484157562256},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D007089","descriptor_name":"Image Enhancement","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D007089","descriptor_name":"Image Enhancement","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D007089","descriptor_name":"Image Enhancement","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D008904","descriptor_name":"Miniaturization","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008904","descriptor_name":"Miniaturization","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D008904","descriptor_name":"Miniaturization","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012680","descriptor_name":"Sensitivity and Specificity","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012680","descriptor_name":"Sensitivity and Specificity","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D012680","descriptor_name":"Sensitivity and Specificity","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D014159","descriptor_name":"Transducers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D014159","descriptor_name":"Transducers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D014159","descriptor_name":"Transducers","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D014463","descriptor_name":"Ultrasonography","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D014463","descriptor_name":"Ultrasonography","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D014463","descriptor_name":"Ultrasonography","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D015203","descriptor_name":"Reproducibility of Results","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D015203","descriptor_name":"Reproducibility of Results","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D015203","descriptor_name":"Reproducibility of Results","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D019544","descriptor_name":"Equipment Failure Analysis","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D019544","descriptor_name":"Equipment Failure Analysis","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D019544","descriptor_name":"Equipment Failure Analysis","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D021621","descriptor_name":"Imaging, Three-Dimensional","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D021621","descriptor_name":"Imaging, Three-Dimensional","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D021621","descriptor_name":"Imaging, Three-Dimensional","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D059629","descriptor_name":"Signal-To-Noise Ratio","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D059629","descriptor_name":"Signal-To-Noise Ratio","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D059629","descriptor_name":"Signal-To-Noise Ratio","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false}],"locations_count":5,"locations":[{"id":"doi:10.3390/s130809624","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s130809624","pdf_url":"https://www.mdpi.com/1424-8220/13/8/9624/pdf?version=1403330979","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:23896705","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/23896705","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:d90e1b770ba445d191e9510926b35a1f","is_oa":true,"landing_page_url":"https://doaj.org/article/d90e1b770ba445d191e9510926b35a1f","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 13, Iss 8, Pp 9624-9634 (2013)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:2798540","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3812571","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/13/8/9624/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s130809624","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 13; Issue 8; Pages: 9624-9634","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s130809624","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s130809624","pdf_url":"https://www.mdpi.com/1424-8220/13/8/9624/pdf?version=1403330979","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G285299692","display_name":null,"funder_award_id":"2011ZX02403","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G4110417826","display_name":null,"funder_award_id":"2011ZX02403-002","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G4514606016","display_name":null,"funder_award_id":"51072089","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G5115299794","display_name":null,"funder_award_id":"61020106006","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G7163126717","display_name":null,"funder_award_id":"61025021","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G7395225799","display_name":null,"funder_award_id":"60936002","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W1989651585.pdf","grobid_xml":"https://content.openalex.org/works/W1989651585.grobid-xml"},"referenced_works_count":28,"referenced_works":["https://openalex.org/W1614962183","https://openalex.org/W1771611356","https://openalex.org/W1988200000","https://openalex.org/W2011096988","https://openalex.org/W2015435409","https://openalex.org/W2023355432","https://openalex.org/W2028324325","https://openalex.org/W2038704122","https://openalex.org/W2046019820","https://openalex.org/W2048140414","https://openalex.org/W2049773163","https://openalex.org/W2078318663","https://openalex.org/W2086928488","https://openalex.org/W2098325242","https://openalex.org/W2107573561","https://openalex.org/W2114269960","https://openalex.org/W2123943285","https://openalex.org/W2137410099","https://openalex.org/W2140317622","https://openalex.org/W2158572158","https://openalex.org/W2328631669","https://openalex.org/W2412980266","https://openalex.org/W4256629763","https://openalex.org/W4256718178","https://openalex.org/W4290769810","https://openalex.org/W6675959271","https://openalex.org/W6680549869","https://openalex.org/W6680573625"],"related_works":["https://openalex.org/W2912807936","https://openalex.org/W2366424944","https://openalex.org/W2089829884","https://openalex.org/W3034962873","https://openalex.org/W2383309909","https://openalex.org/W2102304199","https://openalex.org/W2352652589","https://openalex.org/W138921638","https://openalex.org/W2314521183","https://openalex.org/W3156424550"],"abstract_inverted_index":{"A":[0],"~1":[1],"MHz":[2],"piezoelectric":[3,57],"micromachined":[4],"ultrasonic":[5],"transducer":[6],"(pMUT)":[7],"array":[8,25],"with":[9,41,88],"ultra-high":[10],"element":[11,43],"density":[12,44],"and":[13,37,63,93,127],"low":[14],"crosstalk":[15],"is":[16,26,101],"proposed":[17],"for":[18],"the":[19,83,104,112],"first":[20],"time.":[21],"This":[22],"novel":[23,72],"pMUT":[24,77],"based":[27],"on":[28],"a":[29,46],"nano-layer":[30],"spin-coating":[31],"lead":[32],"zirconium":[33],"titanium":[34],"film":[35,58],"technique":[36],"can":[38,79,119],"be":[39,120],"fabricated":[40],"high":[42,91,129],"using":[45],"relatively":[47],"simple":[48],"process.":[49],"Accordingly,":[50],"key":[51],"fabrication":[52],"processes":[53],"such":[54],"as":[55],"thick":[56],"deposition,":[59],"low-stress":[60],"Si-SOI":[61],"bonding":[62],"bulk":[64],"silicon":[65],"removal":[66],"have":[67],"been":[68,109],"successfully":[69],"developed.":[70],"The":[71,98],"fine-pitch":[73],"6":[74,76],"\u00d7":[75],"arrays":[78,118],"all":[80],"work":[81],"at":[82],"desired":[84],"frequency":[85],"(~1":[86],"MHz)":[87],"good":[89],"uniformity,":[90],"performance":[92],"potential":[94],"IC":[95],"integration":[96],"compatibility.":[97],"minimum":[99],"interspace":[100],"~20":[102],"\u03bcm,":[103],"smallest":[105],"that":[106],"has":[107],"ever":[108],"achieved":[110],"to":[111,123],"best":[113],"of":[114],"our":[115],"knowledge.":[116],"These":[117],"potentially":[121],"used":[122],"steer":[124],"ultrasound":[125],"beams":[126],"implement":[128],"quality":[130],"3-D":[131],"medical":[132],"imaging":[133],"applications.":[134]},"counts_by_year":[{"year":2025,"cited_by_count":6},{"year":2024,"cited_by_count":8},{"year":2023,"cited_by_count":8},{"year":2022,"cited_by_count":6},{"year":2021,"cited_by_count":9},{"year":2020,"cited_by_count":8},{"year":2019,"cited_by_count":3},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":4},{"year":2016,"cited_by_count":4},{"year":2015,"cited_by_count":3}],"updated_date":"2026-05-06T08:25:59.206177","created_date":"2025-10-10T00:00:00"}