{"id":"https://openalex.org/W2049942606","doi":"https://doi.org/10.3390/s120708465","title":"Development of An Automatic Approaching System for Electrochemical Nanofabrication Using Visual and Force-Displacement Sensing","display_name":"Development of An Automatic Approaching System for Electrochemical Nanofabrication Using Visual and Force-Displacement Sensing","publication_year":2012,"publication_date":"2012-06-25","ids":{"openalex":"https://openalex.org/W2049942606","doi":"https://doi.org/10.3390/s120708465","mag":"2049942606","pmid":"https://pubmed.ncbi.nlm.nih.gov/23012500"},"language":"en","primary_location":{"id":"doi:10.3390/s120708465","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s120708465","pdf_url":"https://www.mdpi.com/1424-8220/12/7/8465/pdf?version=1403317757","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/12/7/8465/pdf?version=1403317757","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5070743667","display_name":"Leijie Lai","orcid":"https://orcid.org/0000-0002-8767-4715"},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Lei-Jie Lai","raw_affiliation_strings":["State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5042729380","display_name":"Shiyu Zhou","orcid":"https://orcid.org/0000-0002-8345-773X"},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shi-Yu Zhou","raw_affiliation_strings":["State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5070063268","display_name":"Guoying Gu","orcid":"https://orcid.org/0000-0002-7778-4523"},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Guo-Ying Gu","raw_affiliation_strings":["State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China","institution_ids":["https://openalex.org/I183067930"]}]},{"author_position":"last","author":{"id":null,"display_name":"Li-Min Zhu","orcid":null},"institutions":[{"id":"https://openalex.org/I183067930","display_name":"Shanghai Jiao Tong University","ror":"https://ror.org/0220qvk04","country_code":"CN","type":"education","lineage":["https://openalex.org/I183067930"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Li-Min Zhu","raw_affiliation_strings":["State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China","institution_ids":["https://openalex.org/I183067930"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I183067930"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.6406,"has_fulltext":true,"cited_by_count":4,"citation_normalized_percentile":{"value":0.69657572,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":"12","issue":"7","first_page":"8465","last_page":"8476"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.6776313185691833},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.6333221197128296},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.6235499382019043},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5227006673812866},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5123072862625122},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.4782480299472809},{"id":"https://openalex.org/keywords/contact-force","display_name":"Contact force","score":0.4474214017391205},{"id":"https://openalex.org/keywords/nanolithography","display_name":"Nanolithography","score":0.44528526067733765},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3239840865135193},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.13001564145088196},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.11787194013595581}],"concepts":[{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.6776313185691833},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.6333221197128296},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.6235499382019043},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5227006673812866},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5123072862625122},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4782480299472809},{"id":"https://openalex.org/C81302111","wikidata":"https://www.wikidata.org/wiki/Q2916417","display_name":"Contact force","level":2,"score":0.4474214017391205},{"id":"https://openalex.org/C162117346","wikidata":"https://www.wikidata.org/wiki/Q1106386","display_name":"Nanolithography","level":4,"score":0.44528526067733765},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3239840865135193},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.13001564145088196},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.11787194013595581},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.3390/s120708465","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s120708465","pdf_url":"https://www.mdpi.com/1424-8220/12/7/8465/pdf?version=1403317757","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:23012500","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/23012500","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:f914078a5ced414c84b4b16b0755914c","is_oa":true,"landing_page_url":"https://doaj.org/article/f914078a5ced414c84b4b16b0755914c","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 12, Iss 7, Pp 8465-8476 (2012)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:2449859","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3444058","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s120708465","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s120708465","pdf_url":"https://www.mdpi.com/1424-8220/12/7/8465/pdf?version=1403317757","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G5672188750","display_name":"\u5fae/\u7eb3\u5149\u5b66\u9635\u5217\u5143\u4ef6\u7684\u7ea6\u675f\u523b\u8680\u5242\u5c42\u52a0\u5de5\u6280\u672f\u4e0e\u7cfb\u7edf\u7684\u57fa\u7840\u7814\u7a76","funder_award_id":"91023047","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G6499429306","display_name":null,"funder_award_id":"10SG17","funder_id":"https://openalex.org/F4320321881","funder_display_name":"Shanghai Municipal Education Commission"},{"id":"https://openalex.org/G8164780554","display_name":null,"funder_award_id":"11520701500","funder_id":"https://openalex.org/F4320321885","funder_display_name":"Science and Technology Commission of Shanghai Municipality"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320321881","display_name":"Shanghai Municipal Education Commission","ror":"https://ror.org/05tewj457"},{"id":"https://openalex.org/F4320321885","display_name":"Science and Technology Commission of Shanghai Municipality","ror":"https://ror.org/03kt66j61"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2049942606.pdf","grobid_xml":"https://content.openalex.org/works/W2049942606.grobid-xml"},"referenced_works_count":16,"referenced_works":["https://openalex.org/W1990771466","https://openalex.org/W2000918858","https://openalex.org/W2008786713","https://openalex.org/W2010656735","https://openalex.org/W2022093959","https://openalex.org/W2038828705","https://openalex.org/W2043433112","https://openalex.org/W2052787277","https://openalex.org/W2054123002","https://openalex.org/W2064009299","https://openalex.org/W2084515602","https://openalex.org/W2086861484","https://openalex.org/W2088456208","https://openalex.org/W2094798913","https://openalex.org/W2103381196","https://openalex.org/W4256520552"],"related_works":["https://openalex.org/W2074707023","https://openalex.org/W2407751474","https://openalex.org/W3102847316","https://openalex.org/W2018888480","https://openalex.org/W2086956906","https://openalex.org/W2372424043","https://openalex.org/W1531006674","https://openalex.org/W2380836832","https://openalex.org/W2364226584","https://openalex.org/W3128324021"],"abstract_inverted_index":{"In":[0],"this":[1,121],"paper,":[2],"a":[3,59,79],"fast":[4],"automatic":[5],"precision":[6],"approaching":[7,43,153],"system":[8,154],"is":[9,22,47,62,83,99],"developed":[10],"for":[11],"electrochemical":[12],"nanofabrication":[13],"using":[14,72],"visual":[15,66,157],"and":[16,39,113,144,158],"force-displacement":[17,80,103,160],"sensing.":[18],"Before":[19],"the":[20,24,28,33,37,42,45,52,55,65,69,73,87,91,102,108,129,137,141,148,151,156,159],"substrate":[21,29,53,92,142],"fabricated,":[23],"template":[25,38,46,88,138],"should":[26],"approach":[27,71],"accurately":[30,143],"to":[31,85,93],"establish":[32],"initial":[34],"gap":[35,61],"between":[36],"substrate.":[40],"During":[41],"process,":[44],"first":[48],"quickly":[49],"moved":[50],"towards":[51],"by":[54,64,101],"stepping":[56],"motor":[57],"until":[58],"specified":[60],"detected":[63],"feedback.":[67],"Then,":[68],"successive":[70],"switch":[74],"of":[75,120,128,150],"macro-micro":[76],"motion":[77],"with":[78,90,155],"sensing":[81,104,161],"module":[82,105],"triggered":[84],"make":[86],"contact":[89,97],"nanometre":[94],"accuracy.":[95],"The":[96,117,132],"force":[98],"measured":[100],"which":[106,146],"employs":[107],"high-resolution":[109],"capacitive":[110,122],"displacement":[111,123],"sensor":[112,124],"flexure":[114],"compliant":[115],"mechanism.":[116],"high":[118,126],"sensitivity":[119],"ensures":[125],"accuracy":[127],"template-substrate":[130],"contact.":[131],"experimental":[133],"results":[134],"show":[135],"that":[136],"can":[139],"reach":[140],"smoothly,":[145],"verifies":[147],"effectiveness":[149],"proposed":[152],"modules.":[162]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2014,"cited_by_count":2},{"year":2012,"cited_by_count":1}],"updated_date":"2026-06-06T09:05:17.133730","created_date":"2025-10-10T00:00:00"}