{"id":"https://openalex.org/W2137562005","doi":"https://doi.org/10.3390/s101110095","title":"Polypyrrole Porous Micro Humidity Sensor Integrated with a Ring Oscillator Circuit on Chip","display_name":"Polypyrrole Porous Micro Humidity Sensor Integrated with a Ring Oscillator Circuit on Chip","publication_year":2010,"publication_date":"2010-11-10","ids":{"openalex":"https://openalex.org/W2137562005","doi":"https://doi.org/10.3390/s101110095","mag":"2137562005","pmid":"https://pubmed.ncbi.nlm.nih.gov/22163459"},"language":"en","primary_location":{"id":"doi:10.3390/s101110095","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s101110095","pdf_url":"https://www.mdpi.com/1424-8220/10/11/10095/pdf?version=1403313249","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/10/11/10095/pdf?version=1403313249","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5031981185","display_name":"Mingzhi Yang","orcid":"https://orcid.org/0000-0003-4191-0636"},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Ming-Zhi Yang","raw_affiliation_strings":["Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402, Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402, Taiwan","institution_ids":["https://openalex.org/I162838928"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5005155364","display_name":"Ching\u2010Liang Dai","orcid":"https://orcid.org/0000-0001-9114-7363"},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Ching-Liang Dai","raw_affiliation_strings":["Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402, Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402, Taiwan","institution_ids":["https://openalex.org/I162838928"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5073599155","display_name":"De-Hao Lu","orcid":null},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"De-Hao Lu","raw_affiliation_strings":["Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402, Taiwan"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402, Taiwan","institution_ids":["https://openalex.org/I162838928"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5005155364"],"corresponding_institution_ids":["https://openalex.org/I162838928"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":3.11,"has_fulltext":true,"cited_by_count":43,"citation_normalized_percentile":{"value":0.90723684,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"10","issue":"11","first_page":"10095","last_page":"10104"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9969000220298767,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/polypyrrole","display_name":"Polypyrrole","score":0.8322994709014893},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7821838855743408},{"id":"https://openalex.org/keywords/ring-oscillator","display_name":"Ring oscillator","score":0.6534122228622437},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.5852919220924377},{"id":"https://openalex.org/keywords/capacitor","display_name":"Capacitor","score":0.5833243727684021},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5744038820266724},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.5626219511032104},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.5462034940719604},{"id":"https://openalex.org/keywords/capacitance-probe","display_name":"Capacitance probe","score":0.48526713252067566},{"id":"https://openalex.org/keywords/humidity","display_name":"Humidity","score":0.48031869530677795},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.3396355211734772},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.3310732841491699},{"id":"https://openalex.org/keywords/polymerization","display_name":"Polymerization","score":0.201835036277771},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.12076795101165771},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.09347420930862427},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.07937145233154297},{"id":"https://openalex.org/keywords/polymer","display_name":"Polymer","score":0.06685400009155273},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.066683828830719}],"concepts":[{"id":"https://openalex.org/C2777232022","wikidata":"https://www.wikidata.org/wiki/Q146230","display_name":"Polypyrrole","level":4,"score":0.8322994709014893},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7821838855743408},{"id":"https://openalex.org/C104111718","wikidata":"https://www.wikidata.org/wiki/Q2153973","display_name":"Ring oscillator","level":3,"score":0.6534122228622437},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.5852919220924377},{"id":"https://openalex.org/C52192207","wikidata":"https://www.wikidata.org/wiki/Q5322","display_name":"Capacitor","level":3,"score":0.5833243727684021},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5744038820266724},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.5626219511032104},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.5462034940719604},{"id":"https://openalex.org/C203455917","wikidata":"https://www.wikidata.org/wiki/Q5034478","display_name":"Capacitance probe","level":4,"score":0.48526713252067566},{"id":"https://openalex.org/C151420433","wikidata":"https://www.wikidata.org/wiki/Q180600","display_name":"Humidity","level":2,"score":0.48031869530677795},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.3396355211734772},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.3310732841491699},{"id":"https://openalex.org/C44228677","wikidata":"https://www.wikidata.org/wiki/Q181898","display_name":"Polymerization","level":3,"score":0.201835036277771},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.12076795101165771},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.09347420930862427},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.07937145233154297},{"id":"https://openalex.org/C521977710","wikidata":"https://www.wikidata.org/wiki/Q81163","display_name":"Polymer","level":2,"score":0.06685400009155273},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.066683828830719},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.0},{"id":"https://openalex.org/C147789679","wikidata":"https://www.wikidata.org/wiki/Q11372","display_name":"Physical chemistry","level":1,"score":0.0}],"mesh":[{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D006813","descriptor_name":"Humidity","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D006813","descriptor_name":"Humidity","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D006813","descriptor_name":"Humidity","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D011108","descriptor_name":"Polymers","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D011108","descriptor_name":"Polymers","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D011108","descriptor_name":"Polymers","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D011758","descriptor_name":"Pyrroles","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D011758","descriptor_name":"Pyrroles","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D011758","descriptor_name":"Pyrroles","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000379","qualifier_name":"methods","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000379","qualifier_name":"methods","is_major_topic":false},{"descriptor_ui":"D055617","descriptor_name":"Micro-Electrical-Mechanical Systems","qualifier_ui":"Q000379","qualifier_name":"methods","is_major_topic":false}],"locations_count":5,"locations":[{"id":"doi:10.3390/s101110095","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s101110095","pdf_url":"https://www.mdpi.com/1424-8220/10/11/10095/pdf?version=1403313249","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:22163459","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/22163459","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:3191966efb044202af55e62e541b04bd","is_oa":true,"landing_page_url":"https://doaj.org/article/3191966efb044202af55e62e541b04bd","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 10, Iss 11, Pp 10095-10104 (2010)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:2240184","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3231002","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/10/11/10095/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s101110095","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 10; Issue 11; Pages: 10095-10104","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s101110095","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s101110095","pdf_url":"https://www.mdpi.com/1424-8220/10/11/10095/pdf?version=1403313249","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Affordable and clean energy","score":0.5400000214576721,"id":"https://metadata.un.org/sdg/7"}],"awards":[{"id":"https://openalex.org/G8737284672","display_name":null,"funder_award_id":"NSC 99","funder_id":"https://openalex.org/F4320321040","funder_display_name":"National Science Council"}],"funders":[{"id":"https://openalex.org/F4320321040","display_name":"National Science Council","ror":"https://ror.org/02kv4zf79"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2137562005.pdf","grobid_xml":"https://content.openalex.org/works/W2137562005.grobid-xml"},"referenced_works_count":13,"referenced_works":["https://openalex.org/W1970125584","https://openalex.org/W1983517597","https://openalex.org/W2001573288","https://openalex.org/W2013034428","https://openalex.org/W2077164641","https://openalex.org/W2078448046","https://openalex.org/W2109788251","https://openalex.org/W2118565267","https://openalex.org/W2160677031","https://openalex.org/W2168424540","https://openalex.org/W2315586869","https://openalex.org/W2410969525","https://openalex.org/W3143002681"],"related_works":["https://openalex.org/W2134746914","https://openalex.org/W2312410299","https://openalex.org/W4386858602","https://openalex.org/W2570285680","https://openalex.org/W2088465119","https://openalex.org/W3199783526","https://openalex.org/W2021968997","https://openalex.org/W2555879836","https://openalex.org/W2038758712","https://openalex.org/W3205255437"],"abstract_inverted_index":{"This":[0],"study":[1],"presents":[2],"the":[3,23,33,65,68,74,82,87,101,113,118,123,134,146,150,153,161,164],"design":[4],"and":[5,49,86,116],"fabrication":[6],"of":[7,32,45,67,73,149,163],"a":[8,15,46,50,90,96,108,129],"capacitive":[9],"micro":[10],"humidity":[11,34,42,165],"sensor":[12,35,43,75,94,127,151,166],"integrated":[13],"with":[14],"five-stage":[16],"ring":[17,142],"oscillator":[18,143],"circuit":[19,144],"on":[20,122],"chip":[21,36],"using":[22],"complimentary":[24],"metal":[25],"oxide":[26],"semiconductor":[27],"(CMOS)":[28],"process.":[29],"The":[30,41,53,70,93,104,126,141],"area":[31],"is":[37,56,76,79,120,167],"about":[38,168],"1":[39],"mm(2).":[40],"consists":[44],"sensing":[47,51,54,71,102,124,135],"capacitor":[48,55],"film.":[52,103],"constructed":[57],"from":[58],"spiral":[59],"interdigital":[60],"electrodes":[61],"that":[62,160],"can":[63],"enhance":[64],"sensitivity":[66,162],"sensor.":[69],"film":[72,88,136],"polypyrrole,":[77],"which":[78],"prepared":[80],"by":[81],"chemical":[83],"polymerization":[84],"method,":[85],"has":[89],"porous":[91],"structure.":[92],"needs":[95],"post-CMOS":[97,105],"process":[98,106],"to":[99,111],"coat":[100],"uses":[107],"wet":[109],"etching":[110],"etch":[112],"sacrificial":[114],"layers,":[115],"then":[117],"polypyrrole":[119],"coated":[121],"capacitor.":[125],"generates":[128],"change":[130],"in":[131],"capacitance":[132,147],"when":[133],"absorbs":[137],"or":[138],"desorbs":[139],"vapor.":[140],"converts":[145],"variation":[148],"into":[152],"oscillation":[154],"frequency":[155],"output.":[156],"Experimental":[157],"results":[158],"show":[159],"99":[169],"kHz/%RH":[170],"at":[171],"25":[172],"\u00b0C.":[173]},"counts_by_year":[{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":3},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":4},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":5},{"year":2014,"cited_by_count":9},{"year":2013,"cited_by_count":5},{"year":2012,"cited_by_count":1}],"updated_date":"2026-04-10T15:06:20.359241","created_date":"2025-10-10T00:00:00"}