{"id":"https://openalex.org/W2081956374","doi":"https://doi.org/10.3390/s101109668","title":"An Analytical Model of Joule Heating in Piezoresistive Microcantilevers","display_name":"An Analytical Model of Joule Heating in Piezoresistive Microcantilevers","publication_year":2010,"publication_date":"2010-11-01","ids":{"openalex":"https://openalex.org/W2081956374","doi":"https://doi.org/10.3390/s101109668","mag":"2081956374","pmid":"https://pubmed.ncbi.nlm.nih.gov/22163433"},"language":"en","primary_location":{"id":"doi:10.3390/s101109668","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s101109668","pdf_url":"https://www.mdpi.com/1424-8220/10/11/9668/pdf?version=1403313201","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/10/11/9668/pdf?version=1403313201","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5002871345","display_name":"Mohd. Zahid Ansari","orcid":"https://orcid.org/0000-0001-8222-6174"},"institutions":[{"id":"https://openalex.org/I191879574","display_name":"Inha University","ror":"https://ror.org/01easw929","country_code":"KR","type":"education","lineage":["https://openalex.org/I191879574"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Mohd Zahid Ansari","raw_affiliation_strings":["Department of Mechanical Engineering, Inha University, 253 Yonghyun-dong, Nam-Ku, Incheon, 402-751, Korea"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Inha University, 253 Yonghyun-dong, Nam-Ku, Incheon, 402-751, Korea","institution_ids":["https://openalex.org/I191879574"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5058921581","display_name":"Chongdu Cho","orcid":"https://orcid.org/0000-0002-7980-6159"},"institutions":[{"id":"https://openalex.org/I191879574","display_name":"Inha University","ror":"https://ror.org/01easw929","country_code":"KR","type":"education","lineage":["https://openalex.org/I191879574"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Chongdu Cho","raw_affiliation_strings":["Department of Mechanical Engineering, Inha University, 253 Yonghyun-dong, Nam-Ku, Incheon, 402-751, Korea"],"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Inha University, 253 Yonghyun-dong, Nam-Ku, Incheon, 402-751, Korea","institution_ids":["https://openalex.org/I191879574"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5058921581"],"corresponding_institution_ids":["https://openalex.org/I191879574"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":0.865,"has_fulltext":true,"cited_by_count":29,"citation_normalized_percentile":{"value":0.75265435,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":98},"biblio":{"volume":"10","issue":"11","first_page":"9668","last_page":"9686"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":1.0,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/joule-heating","display_name":"Joule heating","score":0.8619801998138428},{"id":"https://openalex.org/keywords/multiphysics","display_name":"Multiphysics","score":0.860142171382904},{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.8410020470619202},{"id":"https://openalex.org/keywords/cantilever","display_name":"Cantilever","score":0.767182469367981},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7002898454666138},{"id":"https://openalex.org/keywords/heating-element","display_name":"Heating element","score":0.6952236890792847},{"id":"https://openalex.org/keywords/joule-effect","display_name":"Joule effect","score":0.6615750789642334},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.6109132766723633},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5539113283157349},{"id":"https://openalex.org/keywords/deflection","display_name":"Deflection (physics)","score":0.5385189652442932},{"id":"https://openalex.org/keywords/thermal","display_name":"Thermal","score":0.5197531580924988},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.5083155035972595},{"id":"https://openalex.org/keywords/substrate","display_name":"Substrate (aquarium)","score":0.4497334063053131},{"id":"https://openalex.org/keywords/joule\u2013thomson-effect","display_name":"Joule\u2013Thomson effect","score":0.4482637643814087},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.43771272897720337},{"id":"https://openalex.org/keywords/joule","display_name":"Joule (programming language)","score":0.4215629994869232},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.30525684356689453},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.26294976472854614},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.16920819878578186},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.1426156759262085},{"id":"https://openalex.org/keywords/thermodynamics","display_name":"Thermodynamics","score":0.1307218372821808},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.12465551495552063},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.12099963426589966}],"concepts":[{"id":"https://openalex.org/C117926987","wikidata":"https://www.wikidata.org/wiki/Q210009","display_name":"Joule heating","level":2,"score":0.8619801998138428},{"id":"https://openalex.org/C46435376","wikidata":"https://www.wikidata.org/wiki/Q1829750","display_name":"Multiphysics","level":3,"score":0.860142171382904},{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.8410020470619202},{"id":"https://openalex.org/C141354745","wikidata":"https://www.wikidata.org/wiki/Q17227","display_name":"Cantilever","level":2,"score":0.767182469367981},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7002898454666138},{"id":"https://openalex.org/C151662897","wikidata":"https://www.wikidata.org/wiki/Q610112","display_name":"Heating element","level":2,"score":0.6952236890792847},{"id":"https://openalex.org/C106889404","wikidata":"https://www.wikidata.org/wiki/Q6294587","display_name":"Joule effect","level":3,"score":0.6615750789642334},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6109132766723633},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5539113283157349},{"id":"https://openalex.org/C2781355719","wikidata":"https://www.wikidata.org/wiki/Q2080698","display_name":"Deflection (physics)","level":2,"score":0.5385189652442932},{"id":"https://openalex.org/C204530211","wikidata":"https://www.wikidata.org/wiki/Q752823","display_name":"Thermal","level":2,"score":0.5197531580924988},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.5083155035972595},{"id":"https://openalex.org/C2777289219","wikidata":"https://www.wikidata.org/wiki/Q7632154","display_name":"Substrate (aquarium)","level":2,"score":0.4497334063053131},{"id":"https://openalex.org/C68656383","wikidata":"https://www.wikidata.org/wiki/Q724510","display_name":"Joule\u2013Thomson effect","level":2,"score":0.4482637643814087},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.43771272897720337},{"id":"https://openalex.org/C2779058145","wikidata":"https://www.wikidata.org/wiki/Q6294583","display_name":"Joule (programming language)","level":3,"score":0.4215629994869232},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.30525684356689453},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.26294976472854614},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.16920819878578186},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.1426156759262085},{"id":"https://openalex.org/C97355855","wikidata":"https://www.wikidata.org/wiki/Q11473","display_name":"Thermodynamics","level":1,"score":0.1307218372821808},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.12465551495552063},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.12099963426589966},{"id":"https://openalex.org/C2742236","wikidata":"https://www.wikidata.org/wiki/Q924713","display_name":"Efficient energy use","level":2,"score":0.0},{"id":"https://openalex.org/C127313418","wikidata":"https://www.wikidata.org/wiki/Q1069","display_name":"Geology","level":0,"score":0.0},{"id":"https://openalex.org/C111368507","wikidata":"https://www.wikidata.org/wiki/Q43518","display_name":"Oceanography","level":1,"score":0.0}],"mesh":[{"descriptor_ui":"D008962","descriptor_name":"Models, Theoretical","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D008962","descriptor_name":"Models, Theoretical","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D008962","descriptor_name":"Models, Theoretical","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D013696","descriptor_name":"Temperature","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D013696","descriptor_name":"Temperature","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D013696","descriptor_name":"Temperature","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D015374","descriptor_name":"Biosensing Techniques","qualifier_ui":"Q000379","qualifier_name":"methods","is_major_topic":false},{"descriptor_ui":"D015374","descriptor_name":"Biosensing Techniques","qualifier_ui":"Q000379","qualifier_name":"methods","is_major_topic":false},{"descriptor_ui":"D015374","descriptor_name":"Biosensing Techniques","qualifier_ui":"Q000379","qualifier_name":"methods","is_major_topic":false}],"locations_count":6,"locations":[{"id":"doi:10.3390/s101109668","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s101109668","pdf_url":"https://www.mdpi.com/1424-8220/10/11/9668/pdf?version=1403313201","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:22163433","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/22163433","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.287.903","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.287.903","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"ftp://ftp.ncbi.nlm.nih.gov/pub/pmc/64/71/Sensors_(Basel)_2010_Nov_1_10(11)_9668-9686.tar.gz","raw_type":"text"},{"id":"pmh:oai:doaj.org/article:dd34d1a51c5c4d9ba8e86035b59ec505","is_oa":true,"landing_page_url":"https://doaj.org/article/dd34d1a51c5c4d9ba8e86035b59ec505","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 10, Iss 11, Pp 9668-9686 (2010)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:2240221","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3231039","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/10/11/9668/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s101109668","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 10; Issue 11; Pages: 9668-9686","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s101109668","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s101109668","pdf_url":"https://www.mdpi.com/1424-8220/10/11/9668/pdf?version=1403313201","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.49000000953674316,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320321370","display_name":"Inha University","ror":"https://ror.org/01easw929"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2081956374.pdf","grobid_xml":"https://content.openalex.org/works/W2081956374.grobid-xml"},"referenced_works_count":38,"referenced_works":["https://openalex.org/W45857683","https://openalex.org/W422221985","https://openalex.org/W586922167","https://openalex.org/W1576503068","https://openalex.org/W1963875682","https://openalex.org/W1967570411","https://openalex.org/W1968274791","https://openalex.org/W1989491796","https://openalex.org/W1995265640","https://openalex.org/W2001683301","https://openalex.org/W2015701179","https://openalex.org/W2016059623","https://openalex.org/W2023936383","https://openalex.org/W2028009076","https://openalex.org/W2042715517","https://openalex.org/W2042981914","https://openalex.org/W2050777388","https://openalex.org/W2053641296","https://openalex.org/W2055163155","https://openalex.org/W2056135287","https://openalex.org/W2058704435","https://openalex.org/W2066202843","https://openalex.org/W2069655806","https://openalex.org/W2078429393","https://openalex.org/W2091289836","https://openalex.org/W2093581518","https://openalex.org/W2099348632","https://openalex.org/W2099582861","https://openalex.org/W2100502452","https://openalex.org/W2100742000","https://openalex.org/W2109362544","https://openalex.org/W2117228527","https://openalex.org/W2120255193","https://openalex.org/W2124824677","https://openalex.org/W2129557974","https://openalex.org/W2162413361","https://openalex.org/W2165107474","https://openalex.org/W2318223972"],"related_works":["https://openalex.org/W2479359125","https://openalex.org/W2766007611","https://openalex.org/W2372368244","https://openalex.org/W2386530389","https://openalex.org/W2362688909","https://openalex.org/W2373989821","https://openalex.org/W2365578918","https://openalex.org/W2765866733","https://openalex.org/W2375815321","https://openalex.org/W2039672249"],"abstract_inverted_index":{"The":[0,68,92],"present":[1],"study":[2,78],"investigates":[3],"Joule":[4,10,34,64,98,106],"heating":[5,11,35,65,99,107],"in":[6,21,36,89],"piezoresistive":[7,38],"microcantilever":[8],"sensors.":[9,23],"and":[12,28,43,86,114,118],"thermal":[13,126],"deflections":[14],"are":[15],"a":[16,120,129],"major":[17],"source":[18],"of":[19,41,81,94,116],"noise":[20],"such":[22],"This":[24],"work":[25],"uses":[26],"analytical":[27],"numerical":[29],"techniques":[30],"to":[31,63,77],"characterise":[32],"the":[33,49,59,79,90,111],"4-layer":[37],"microcantilevers":[39],"made":[40],"silicon":[42,44,52,121,130],"dioxide":[45,131],"substrates":[46],"but":[47],"with":[48],"same":[50],"U-shaped":[51],"piezoresistor.":[53],"A":[54],"theoretical":[55],"model":[56],"for":[57],"predicting":[58],"temperature":[60,85],"generated":[61],"due":[62],"is":[66,100],"developed.":[67],"commercial":[69],"finite":[70],"element":[71],"software":[72],"ANSYS":[73],"Multiphysics":[74],"was":[75],"used":[76],"effect":[80,93],"electrical":[82],"potential":[83,113],"on":[84,97,110],"deflection":[87],"produced":[88],"cantilevers.":[91],"piezoresistor":[95,117],"width":[96,115],"also":[101],"studied.":[102],"Results":[103],"show":[104],"that":[105,119],"strongly":[108],"depends":[109],"applied":[112],"substrate":[122],"cantilever":[123],"has":[124],"better":[125],"characteristics":[127],"than":[128],"cantilever.":[132]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":2},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":3},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":5},{"year":2015,"cited_by_count":1},{"year":2014,"cited_by_count":2},{"year":2013,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-04-04T16:13:02.066488","created_date":"2025-10-10T00:00:00"}