{"id":"https://openalex.org/W2063225677","doi":"https://doi.org/10.3390/s100504950","title":"Level Set Approach to Anisotropic Wet Etching of Silicon","display_name":"Level Set Approach to Anisotropic Wet Etching of Silicon","publication_year":2010,"publication_date":"2010-05-17","ids":{"openalex":"https://openalex.org/W2063225677","doi":"https://doi.org/10.3390/s100504950","mag":"2063225677","pmid":"https://pubmed.ncbi.nlm.nih.gov/22399916"},"language":"en","primary_location":{"id":"doi:10.3390/s100504950","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s100504950","pdf_url":"https://www.mdpi.com/1424-8220/10/5/4950/pdf?version=1403312496","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/10/5/4950/pdf?version=1403312496","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5011272633","display_name":"Branislav Radjenovi\u0107","orcid":"https://orcid.org/0000-0002-8756-1008"},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Branislav Radjenovi\u0107","raw_affiliation_strings":["Institute of Physics, Pregrevica 118, 11080 Beograd, Serbia"],"affiliations":[{"raw_affiliation_string":"Institute of Physics, Pregrevica 118, 11080 Beograd, Serbia","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034764967","display_name":"Marija Radmilovi\u0107-Radjenovi\u0107","orcid":"https://orcid.org/0000-0001-8931-859X"},"institutions":[{"id":"https://openalex.org/I4068193","display_name":"University of Belgrade","ror":"https://ror.org/02qsmb048","country_code":"RS","type":"education","lineage":["https://openalex.org/I4068193"]}],"countries":["RS"],"is_corresponding":false,"raw_author_name":"Marija Radmilovi\u0107-Radjenovi\u0107","raw_affiliation_strings":["Institute of Physics, Pregrevica 118, 11080 Beograd, Serbia","University of Belgrade"],"affiliations":[{"raw_affiliation_string":"Institute of Physics, Pregrevica 118, 11080 Beograd, Serbia","institution_ids":[]},{"raw_affiliation_string":"University of Belgrade","institution_ids":["https://openalex.org/I4068193"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5046558232","display_name":"Miodrag Mitri\u0107","orcid":"https://orcid.org/0000-0002-1709-9890"},"institutions":[{"id":"https://openalex.org/I4210135359","display_name":"Institute of Economic Sciences","ror":"https://ror.org/03gh3xj41","country_code":"RS","type":"nonprofit","lineage":["https://openalex.org/I4210135359"]},{"id":"https://openalex.org/I4387152209","display_name":"Vin\u010da Institute of Nuclear Sciences","ror":"https://ror.org/04wecwh56","country_code":null,"type":"facility","lineage":["https://openalex.org/I4068193","https://openalex.org/I4387152209"]}],"countries":["RS"],"is_corresponding":false,"raw_author_name":"Miodrag Mitri\u0107","raw_affiliation_strings":["Vin\u010da Institute of Nuclear Sciences, P.O. Box 522, 11001 Beograd, Serbia"],"affiliations":[{"raw_affiliation_string":"Vin\u010da Institute of Nuclear Sciences, P.O. Box 522, 11001 Beograd, Serbia","institution_ids":["https://openalex.org/I4210135359","https://openalex.org/I4387152209"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5011272633"],"corresponding_institution_ids":[],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":7.4077,"has_fulltext":true,"cited_by_count":40,"citation_normalized_percentile":{"value":0.96207038,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"10","issue":"5","first_page":"4950","last_page":"4967"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10996","display_name":"Computational Geometry and Mesh Generation","score":0.989799976348877,"subfield":{"id":"https://openalex.org/subfields/1704","display_name":"Computer Graphics and Computer-Aided Design"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10996","display_name":"Computational Geometry and Mesh Generation","score":0.989799976348877,"subfield":{"id":"https://openalex.org/subfields/1704","display_name":"Computer Graphics and Computer-Aided Design"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10339","display_name":"Advanced Numerical Methods in Computational Mathematics","score":0.9865000247955322,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11181","display_name":"Advanced Data Storage Technologies","score":0.9768999814987183,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.7729039192199707},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.6391302943229675},{"id":"https://openalex.org/keywords/anisotropy","display_name":"Anisotropy","score":0.5289442539215088},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.47489944100379944},{"id":"https://openalex.org/keywords/interpolation","display_name":"Interpolation (computer graphics)","score":0.46191003918647766},{"id":"https://openalex.org/keywords/set","display_name":"Set (abstract data type)","score":0.4583110511302948},{"id":"https://openalex.org/keywords/isotropic-etching","display_name":"Isotropic etching","score":0.437671422958374},{"id":"https://openalex.org/keywords/reactive-ion-etching","display_name":"Reactive-ion etching","score":0.43181464076042175},{"id":"https://openalex.org/keywords/regular-polygon","display_name":"Regular polygon","score":0.4231165051460266},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.4210098385810852},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.41720888018608093},{"id":"https://openalex.org/keywords/algorithm","display_name":"Algorithm","score":0.4058701992034912},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3174688220024109},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.2994527816772461},{"id":"https://openalex.org/keywords/geometry","display_name":"Geometry","score":0.2867579460144043},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.27608153223991394},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.2497689425945282},{"id":"https://openalex.org/keywords/image","display_name":"Image (mathematics)","score":0.2472594976425171},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.17086261510849},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.1298988163471222}],"concepts":[{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.7729039192199707},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6391302943229675},{"id":"https://openalex.org/C85725439","wikidata":"https://www.wikidata.org/wiki/Q466686","display_name":"Anisotropy","level":2,"score":0.5289442539215088},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.47489944100379944},{"id":"https://openalex.org/C137800194","wikidata":"https://www.wikidata.org/wiki/Q11713455","display_name":"Interpolation (computer graphics)","level":3,"score":0.46191003918647766},{"id":"https://openalex.org/C177264268","wikidata":"https://www.wikidata.org/wiki/Q1514741","display_name":"Set (abstract data type)","level":2,"score":0.4583110511302948},{"id":"https://openalex.org/C33220542","wikidata":"https://www.wikidata.org/wiki/Q6086567","display_name":"Isotropic etching","level":4,"score":0.437671422958374},{"id":"https://openalex.org/C130472188","wikidata":"https://www.wikidata.org/wiki/Q1640159","display_name":"Reactive-ion etching","level":4,"score":0.43181464076042175},{"id":"https://openalex.org/C112680207","wikidata":"https://www.wikidata.org/wiki/Q714886","display_name":"Regular polygon","level":2,"score":0.4231165051460266},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.4210098385810852},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.41720888018608093},{"id":"https://openalex.org/C11413529","wikidata":"https://www.wikidata.org/wiki/Q8366","display_name":"Algorithm","level":1,"score":0.4058701992034912},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3174688220024109},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.2994527816772461},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.2867579460144043},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.27608153223991394},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.2497689425945282},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.2472594976425171},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17086261510849},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.1298988163471222},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0}],"mesh":[],"locations_count":6,"locations":[{"id":"doi:10.3390/s100504950","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s100504950","pdf_url":"https://www.mdpi.com/1424-8220/10/5/4950/pdf?version=1403312496","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:22399916","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/22399916","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:11ee190e7d784d1c98efa85d7e9d7a7c","is_oa":true,"landing_page_url":"https://doaj.org/article/11ee190e7d784d1c98efa85d7e9d7a7c","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 10, Iss 5, Pp 4950-4967 (2010)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:2305659","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3292156","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/1424-8220/10/5/4950/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s100504950","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 10; Issue 5; Pages: 4950-4967","raw_type":"Text"},{"id":"pmh:oai:vinar.vin.bg.ac.rs:123456789/4009","is_oa":true,"landing_page_url":"https://vinar.vin.bg.ac.rs/handle/123456789/4009","pdf_url":null,"source":{"id":"https://openalex.org/S4306402108","display_name":"VinaR (Institute of Nuclear Sciences \"Vin\u010da\")","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210101313","host_organization_name":"University Hospital Center Dr Dragi\u0161a Mi\u0161ovi\u0107","host_organization_lineage":["https://openalex.org/I4210101313"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors","raw_type":"publishedVersion"}],"best_oa_location":{"id":"doi:10.3390/s100504950","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s100504950","pdf_url":"https://www.mdpi.com/1424-8220/10/5/4950/pdf?version=1403312496","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.46000000834465027,"id":"https://metadata.un.org/sdg/9","display_name":"Industry, innovation and infrastructure"}],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2063225677.pdf","grobid_xml":"https://content.openalex.org/works/W2063225677.grobid-xml"},"referenced_works_count":27,"referenced_works":["https://openalex.org/W32649172","https://openalex.org/W136326607","https://openalex.org/W1238092070","https://openalex.org/W1606028884","https://openalex.org/W1977081223","https://openalex.org/W1980402085","https://openalex.org/W1989365707","https://openalex.org/W1991113069","https://openalex.org/W2008709032","https://openalex.org/W2022079192","https://openalex.org/W2023854161","https://openalex.org/W2042915059","https://openalex.org/W2056030209","https://openalex.org/W2089588506","https://openalex.org/W2090512191","https://openalex.org/W2091986413","https://openalex.org/W2092568788","https://openalex.org/W2093834886","https://openalex.org/W2127292566","https://openalex.org/W2142054519","https://openalex.org/W2171336223","https://openalex.org/W2172282498","https://openalex.org/W2331108513","https://openalex.org/W2597351744","https://openalex.org/W2798792863","https://openalex.org/W3021722416","https://openalex.org/W4205230957"],"related_works":["https://openalex.org/W2093286625","https://openalex.org/W2070736010","https://openalex.org/W2359313340","https://openalex.org/W3001471993","https://openalex.org/W1912896571","https://openalex.org/W2389091192","https://openalex.org/W3138583210","https://openalex.org/W2362770635","https://openalex.org/W2009420109","https://openalex.org/W4388376001"],"abstract_inverted_index":{"In":[0],"this":[1],"paper":[2],"a":[3,166],"methodology":[4],"for":[5,55,95,103,158],"the":[6,14,25,48,56,82,96,121,170,178,181],"three":[7],"dimensional":[8],"(3D)":[9],"modeling":[10],"and":[11,62,132,163],"simulation":[12,119],"of":[13,21,47,81,98,123,137,180],"profile":[15],"evolution":[16],"during":[17],"anisotropic":[18,117],"wet":[19,159,182],"etching":[20,57,118,160,183],"silicon":[22,35,42],"based":[23],"on":[24],"level":[26,71,148],"set":[27,72,149],"method":[28,85,150,173],"is":[29,36,165],"presented.":[30],"Etching":[31],"rate":[32],"anisotropy":[33],"in":[34,66,89,120,177],"modeled":[37],"taking":[38],"into":[39],"account":[40],"full":[41],"symmetry":[43],"properties,":[44],"by":[45],"means":[46],"interpolation":[49],"technique":[50],"using":[51,76],"experimentally":[52],"obtained":[53,144],"values":[54],"rates":[58],"along":[59],"thirteen":[60],"principal":[61],"high":[63],"index":[64],"directions":[65],"KOH":[67],"solutions.":[68],"The":[69,143],"resulting":[70],"equations":[73],"are":[74,140],"solved":[75],"an":[77,155],"open":[78],"source":[79],"implementation":[80],"sparse":[83],"field":[84],"(ITK":[86],"library,":[87],"developed":[88],"medical":[90],"image":[91],"processing":[92],"community),":[93],"extended":[94],"case":[97],"non-convex":[99],"Hamiltonians.":[100],"Simulation":[101],"results":[102,145],"some":[104,112],"interesting":[105],"initial":[106],"3D":[107],"shapes,":[108],"as":[109,111,154],"well":[110],"more":[113],"practical":[114],"examples":[115],"illustrating":[116],"presence":[122],"masks":[124],"(simple":[125],"square":[126],"aperture":[127],"mask,":[128],"convex":[129,133],"corner":[130,134],"undercutting":[131],"compensation,":[135],"formation":[136],"suspended":[138],"structures)":[139],"shown":[141],"also.":[142],"show":[146],"that":[147,164],"can":[151],"be":[152],"used":[153],"effective":[156],"tool":[157],"process":[161],"modeling,":[162],"viable":[167],"alternative":[168],"to":[169],"Cellular":[171],"Automata":[172],"which":[174],"now":[175],"prevails":[176],"simulations":[179],"process.":[184]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":2},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":4},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2017,"cited_by_count":5},{"year":2016,"cited_by_count":2},{"year":2015,"cited_by_count":3},{"year":2014,"cited_by_count":6},{"year":2013,"cited_by_count":2},{"year":2012,"cited_by_count":1}],"updated_date":"2026-03-20T23:20:44.827607","created_date":"2025-10-10T00:00:00"}