{"id":"https://openalex.org/W2124380687","doi":"https://doi.org/10.3390/s100504898","title":"High Sensitivity Carbon Nanotubes Flow-Rate Sensors and Their Performance Improvement by Coating","display_name":"High Sensitivity Carbon Nanotubes Flow-Rate Sensors and Their Performance Improvement by Coating","publication_year":2010,"publication_date":"2010-05-13","ids":{"openalex":"https://openalex.org/W2124380687","doi":"https://doi.org/10.3390/s100504898","mag":"2124380687","pmid":"https://pubmed.ncbi.nlm.nih.gov/22399913"},"language":"en","primary_location":{"id":"doi:10.3390/s100504898","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s100504898","pdf_url":"https://www.mdpi.com/1424-8220/10/5/4898/pdf?version=1403312481","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/10/5/4898/pdf?version=1403312481","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5073081890","display_name":"Xing Yang","orcid":"https://orcid.org/0000-0002-1249-3602"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Xing Yang","raw_affiliation_strings":["MEMS Lab, Department of Precision Instruments & Mechanology, Tsinghua University, 100084, Beijing, China","State Key Lab of Precision Measurement Technology and Instrumentation, Tsinghua University, 100084, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS Lab, Department of Precision Instruments & Mechanology, Tsinghua University, 100084, Beijing, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"State Key Lab of Precision Measurement Technology and Instrumentation, Tsinghua University, 100084, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103774554","display_name":"Zhaoying Zhou","orcid":null},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhaoying Zhou","raw_affiliation_strings":["MEMS Lab, Department of Precision Instruments & Mechanology, Tsinghua University, 100084, Beijing, China","State Key Lab of Precision Measurement Technology and Instrumentation, Tsinghua University, 100084, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS Lab, Department of Precision Instruments & Mechanology, Tsinghua University, 100084, Beijing, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"State Key Lab of Precision Measurement Technology and Instrumentation, Tsinghua University, 100084, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016362308","display_name":"Dingqu Wang","orcid":"https://orcid.org/0000-0002-5708-8854"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Dingqu Wang","raw_affiliation_strings":["MEMS Lab, Department of Precision Instruments & Mechanology, Tsinghua University, 100084, Beijing, China","State Key Lab of Precision Measurement Technology and Instrumentation, Tsinghua University, 100084, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS Lab, Department of Precision Instruments & Mechanology, Tsinghua University, 100084, Beijing, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"State Key Lab of Precision Measurement Technology and Instrumentation, Tsinghua University, 100084, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5060825429","display_name":"Xiaoli Liu","orcid":"https://orcid.org/0000-0002-6204-4485"},"institutions":[{"id":"https://openalex.org/I99065089","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549","country_code":"CN","type":"education","lineage":["https://openalex.org/I99065089"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaoli Liu","raw_affiliation_strings":["MEMS Lab, Department of Precision Instruments & Mechanology, Tsinghua University, 100084, Beijing, China","State Key Lab of Precision Measurement Technology and Instrumentation, Tsinghua University, 100084, Beijing, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS Lab, Department of Precision Instruments & Mechanology, Tsinghua University, 100084, Beijing, China","institution_ids":["https://openalex.org/I99065089"]},{"raw_affiliation_string":"State Key Lab of Precision Measurement Technology and Instrumentation, Tsinghua University, 100084, Beijing, China","institution_ids":["https://openalex.org/I99065089"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":["https://openalex.org/A5073081890"],"corresponding_institution_ids":["https://openalex.org/I99065089"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2673},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2673},"fwci":0.5399,"has_fulltext":true,"cited_by_count":10,"citation_normalized_percentile":{"value":0.67588933,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":97},"biblio":{"volume":"10","issue":"5","first_page":"4898","last_page":"4906"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9958000183105469,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9958000183105469,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10074","display_name":"Carbon Nanotubes in Composites","score":0.9952999949455261,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9926999807357788,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/repeatability","display_name":"Repeatability","score":0.814338207244873},{"id":"https://openalex.org/keywords/carbon-nanotube","display_name":"Carbon nanotube","score":0.8087072968482971},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7763880491256714},{"id":"https://openalex.org/keywords/volumetric-flow-rate","display_name":"Volumetric flow rate","score":0.7560750246047974},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.6864812970161438},{"id":"https://openalex.org/keywords/coating","display_name":"Coating","score":0.6486182808876038},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.4820478856563568},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.4718601405620575},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.4470696449279785},{"id":"https://openalex.org/keywords/flow","display_name":"Flow (mathematics)","score":0.4339953064918518},{"id":"https://openalex.org/keywords/volume","display_name":"Volume (thermodynamics)","score":0.41374385356903076},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3409491777420044},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.18449446558952332},{"id":"https://openalex.org/keywords/mechanics","display_name":"Mechanics","score":0.0925264060497284},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.08433926105499268},{"id":"https://openalex.org/keywords/chromatography","display_name":"Chromatography","score":0.07329651713371277},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.0709013044834137}],"concepts":[{"id":"https://openalex.org/C154020017","wikidata":"https://www.wikidata.org/wiki/Q520171","display_name":"Repeatability","level":2,"score":0.814338207244873},{"id":"https://openalex.org/C513720949","wikidata":"https://www.wikidata.org/wiki/Q1778729","display_name":"Carbon nanotube","level":2,"score":0.8087072968482971},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7763880491256714},{"id":"https://openalex.org/C172120300","wikidata":"https://www.wikidata.org/wiki/Q1134348","display_name":"Volumetric flow rate","level":2,"score":0.7560750246047974},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6864812970161438},{"id":"https://openalex.org/C2781448156","wikidata":"https://www.wikidata.org/wiki/Q1570182","display_name":"Coating","level":2,"score":0.6486182808876038},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.4820478856563568},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.4718601405620575},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.4470696449279785},{"id":"https://openalex.org/C38349280","wikidata":"https://www.wikidata.org/wiki/Q1434290","display_name":"Flow (mathematics)","level":2,"score":0.4339953064918518},{"id":"https://openalex.org/C20556612","wikidata":"https://www.wikidata.org/wiki/Q4469374","display_name":"Volume (thermodynamics)","level":2,"score":0.41374385356903076},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3409491777420044},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.18449446558952332},{"id":"https://openalex.org/C57879066","wikidata":"https://www.wikidata.org/wiki/Q41217","display_name":"Mechanics","level":1,"score":0.0925264060497284},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.08433926105499268},{"id":"https://openalex.org/C43617362","wikidata":"https://www.wikidata.org/wiki/Q170050","display_name":"Chromatography","level":1,"score":0.07329651713371277},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.0709013044834137},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.3390/s100504898","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s100504898","pdf_url":"https://www.mdpi.com/1424-8220/10/5/4898/pdf?version=1403312481","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:22399913","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/22399913","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:64be9c3dde4c4c619a9aafbfe71f0375","is_oa":true,"landing_page_url":"https://doaj.org/article/64be9c3dde4c4c619a9aafbfe71f0375","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 10, Iss 5, Pp 4898-4906 (2010)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:2305656","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3292153","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s100504898","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s100504898","pdf_url":"https://www.mdpi.com/1424-8220/10/5/4898/pdf?version=1403312481","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G8271745834","display_name":null,"funder_award_id":"10832005","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320322392","display_name":"Tsinghua University","ror":"https://ror.org/03cve4549"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2124380687.pdf","grobid_xml":"https://content.openalex.org/works/W2124380687.grobid-xml"},"referenced_works_count":23,"referenced_works":["https://openalex.org/W1508082243","https://openalex.org/W1579269841","https://openalex.org/W1965751628","https://openalex.org/W1966919959","https://openalex.org/W1969332508","https://openalex.org/W1974891483","https://openalex.org/W2005043597","https://openalex.org/W2008771485","https://openalex.org/W2017535567","https://openalex.org/W2018570325","https://openalex.org/W2050397452","https://openalex.org/W2055528797","https://openalex.org/W2074755101","https://openalex.org/W2081989905","https://openalex.org/W2092100813","https://openalex.org/W2116849263","https://openalex.org/W2140212259","https://openalex.org/W2141049906","https://openalex.org/W2146161411","https://openalex.org/W2162138319","https://openalex.org/W2790727345","https://openalex.org/W3099624231","https://openalex.org/W4388392512"],"related_works":["https://openalex.org/W2481168506","https://openalex.org/W4288084846","https://openalex.org/W2893816048","https://openalex.org/W3168747143","https://openalex.org/W2237675924","https://openalex.org/W2315867670","https://openalex.org/W1968795594","https://openalex.org/W4256621282","https://openalex.org/W2755432716","https://openalex.org/W1605170656"],"abstract_inverted_index":{"A":[0],"new":[1],"type":[2],"of":[3,13,31,40,114],"hot-wire":[4],"flow-rate":[5,34,65,87,106],"sensor":[6,35,66,88,107],"(HWFS)":[7],"with":[8],"a":[9,14,38,74],"sensing":[10],"element":[11],"made":[12],"macro-sized":[15],"carbon":[16],"nanotube":[17],"(CNT)":[18],"strand":[19],"is":[20,46,80],"presented":[21],"in":[22],"this":[23],"study.":[24],"An":[25],"effective":[26],"way":[27],"to":[28,53,97],"improve":[29],"repeatability":[30,91],"the":[32,43,54,63,84,100],"CNT":[33,44,64,86,105],"by":[36],"coating":[37],"layer":[39],"Al(2)O(3)":[41,61],"on":[42],"surface":[45],"proposed.":[47],"Experimental":[48],"results":[49],"show":[50],"that":[51,83],"due":[52,96],"large":[55],"surface-to-volume":[56],"ratio":[57],"and":[58,70],"thin":[59],"coated":[60],"layer,":[62],"has":[67,89],"higher":[68],"sensitivity":[69],"faster":[71],"response":[72],"than":[73,92],"conventional":[75],"platinum":[76],"(Pt)":[77],"HWFS.":[78],"It":[79],"also":[81],"demonstrated":[82],"covered":[85],"better":[90],"its":[93],"bare":[94],"counterpart":[95],"insulation":[98],"from":[99],"surrounding":[101],"environment.":[102],"The":[103],"proposed":[104],"shows":[108],"application":[109],"potential":[110],"for":[111],"high-sensitivity":[112],"measurement":[113],"flow":[115],"rate.":[116]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":3},{"year":2014,"cited_by_count":1},{"year":2012,"cited_by_count":1}],"updated_date":"2026-07-22T07:51:19.307946","created_date":"2025-10-10T00:00:00"}