{"id":"https://openalex.org/W2058333535","doi":"https://doi.org/10.3390/s100403835","title":"Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit","display_name":"Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit","publication_year":2010,"publication_date":"2010-04-14","ids":{"openalex":"https://openalex.org/W2058333535","doi":"https://doi.org/10.3390/s100403835","mag":"2058333535","pmid":"https://pubmed.ncbi.nlm.nih.gov/22319329"},"language":"en","primary_location":{"id":"doi:10.3390/s100403835","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s100403835","pdf_url":"https://www.mdpi.com/1424-8220/10/4/3835/pdf?version=1403312385","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/10/4/3835/pdf?version=1403312385","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5077311643","display_name":"Honglong Chang","orcid":"https://orcid.org/0000-0003-0400-3658"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Honglong Chang","raw_affiliation_strings":["Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi\u2019an, Shaanxi, China","Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi'an, Shaanxi, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi\u2019an, Shaanxi, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5010955005","display_name":"Qiang Shen","orcid":"https://orcid.org/0000-0002-2241-4218"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qiang Shen","raw_affiliation_strings":["Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi\u2019an, Shaanxi, China","Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi'an, Shaanxi, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi\u2019an, Shaanxi, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100888242","display_name":"Zhiguang Zhou","orcid":null},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhiguang Zhou","raw_affiliation_strings":["Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi\u2019an, Shaanxi, China","Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi'an, Shaanxi, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi\u2019an, Shaanxi, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100864894","display_name":"Jianbing Xie","orcid":null},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jianbing Xie","raw_affiliation_strings":["Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi\u2019an, Shaanxi, China","Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi'an, Shaanxi, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi\u2019an, Shaanxi, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101915279","display_name":"Qinghua Jiang","orcid":"https://orcid.org/0000-0003-2959-0342"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Qinghua Jiang","raw_affiliation_strings":["Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi\u2019an, Shaanxi, China","Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi'an, Shaanxi, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi\u2019an, Shaanxi, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I17145004"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5071859531","display_name":"Weizheng Yuan","orcid":"https://orcid.org/0000-0001-9490-7188"},"institutions":[{"id":"https://openalex.org/I17145004","display_name":"Northwestern Polytechnical University","ror":"https://ror.org/01y0j0j86","country_code":"CN","type":"education","lineage":["https://openalex.org/I17145004"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Weizheng Yuan","raw_affiliation_strings":["Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi\u2019an, Shaanxi, China","Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi'an, Shaanxi, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi\u2019an, Shaanxi, China","institution_ids":["https://openalex.org/I17145004"]},{"raw_affiliation_string":"Micro and Nano Electromechanical System Laboratory, Northwestern Polytechnical University, 127#, Youyi West Road, Xi'an, Shaanxi, China","institution_ids":["https://openalex.org/I17145004"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5077311643"],"corresponding_institution_ids":["https://openalex.org/I17145004"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":1.177,"has_fulltext":true,"cited_by_count":10,"citation_normalized_percentile":{"value":0.81110846,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":"10","issue":"4","first_page":"3835","last_page":"3856"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.9677731394767761},{"id":"https://openalex.org/keywords/accelerometer","display_name":"Accelerometer","score":0.8989273309707642},{"id":"https://openalex.org/keywords/inertial-measurement-unit","display_name":"Inertial measurement unit","score":0.758587121963501},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.7179845571517944},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.5473508834838867},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.538223147392273},{"id":"https://openalex.org/keywords/bulk-micromachining","display_name":"Bulk micromachining","score":0.5364329218864441},{"id":"https://openalex.org/keywords/inertial-reference-unit","display_name":"Inertial reference unit","score":0.48464423418045044},{"id":"https://openalex.org/keywords/scale-factor","display_name":"Scale factor (cosmology)","score":0.44117262959480286},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4400690197944641},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.4250478744506836},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3017999529838562},{"id":"https://openalex.org/keywords/inertial-navigation-system","display_name":"Inertial navigation system","score":0.27582505345344543},{"id":"https://openalex.org/keywords/inertial-frame-of-reference","display_name":"Inertial frame of reference","score":0.21003937721252441},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.1849149465560913},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.06589892506599426}],"concepts":[{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.9677731394767761},{"id":"https://openalex.org/C89805583","wikidata":"https://www.wikidata.org/wiki/Q192940","display_name":"Accelerometer","level":2,"score":0.8989273309707642},{"id":"https://openalex.org/C79061980","wikidata":"https://www.wikidata.org/wiki/Q941680","display_name":"Inertial measurement unit","level":2,"score":0.758587121963501},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.7179845571517944},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.5473508834838867},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.538223147392273},{"id":"https://openalex.org/C41075158","wikidata":"https://www.wikidata.org/wiki/Q4996485","display_name":"Bulk micromachining","level":5,"score":0.5364329218864441},{"id":"https://openalex.org/C189096121","wikidata":"https://www.wikidata.org/wiki/Q6028512","display_name":"Inertial reference unit","level":4,"score":0.48464423418045044},{"id":"https://openalex.org/C144386022","wikidata":"https://www.wikidata.org/wiki/Q1332997","display_name":"Scale factor (cosmology)","level":5,"score":0.44117262959480286},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4400690197944641},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.4250478744506836},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3017999529838562},{"id":"https://openalex.org/C128651787","wikidata":"https://www.wikidata.org/wiki/Q570607","display_name":"Inertial navigation system","level":3,"score":0.27582505345344543},{"id":"https://openalex.org/C173386949","wikidata":"https://www.wikidata.org/wiki/Q192735","display_name":"Inertial frame of reference","level":2,"score":0.21003937721252441},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.1849149465560913},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.06589892506599426},{"id":"https://openalex.org/C172790937","wikidata":"https://www.wikidata.org/wiki/Q18343","display_name":"Dark energy","level":3,"score":0.0},{"id":"https://openalex.org/C26405456","wikidata":"https://www.wikidata.org/wiki/Q338","display_name":"Cosmology","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C20154449","wikidata":"https://www.wikidata.org/wiki/Q1129469","display_name":"Metric expansion of space","level":4,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/s100403835","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s100403835","pdf_url":"https://www.mdpi.com/1424-8220/10/4/3835/pdf?version=1403312385","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:22319329","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/22319329","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:7eb5d6c8734e4974b1256af8e1f5d57c","is_oa":true,"landing_page_url":"https://doaj.org/article/7eb5d6c8734e4974b1256af8e1f5d57c","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 10, Iss 4, Pp 3835-3856 (2010)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/10/4/3835/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s100403835","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 10; Issue 4; Pages: 3835-3856","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:3274250","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3274250","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/s100403835","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s100403835","pdf_url":"https://www.mdpi.com/1424-8220/10/4/3835/pdf?version=1403312385","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320306076","display_name":"National Science Foundation","ror":"https://ror.org/021nxhr62"},{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2058333535.pdf","grobid_xml":"https://content.openalex.org/works/W2058333535.grobid-xml"},"referenced_works_count":39,"referenced_works":["https://openalex.org/W1558285529","https://openalex.org/W1968871140","https://openalex.org/W1993457774","https://openalex.org/W1995058309","https://openalex.org/W2007947055","https://openalex.org/W2009776833","https://openalex.org/W2013274506","https://openalex.org/W2016180229","https://openalex.org/W2026729832","https://openalex.org/W2051188571","https://openalex.org/W2082468165","https://openalex.org/W2087020924","https://openalex.org/W2097036133","https://openalex.org/W2100757036","https://openalex.org/W2102006204","https://openalex.org/W2114766284","https://openalex.org/W2116648971","https://openalex.org/W2121532716","https://openalex.org/W2133244816","https://openalex.org/W2133644586","https://openalex.org/W2134840571","https://openalex.org/W2137186719","https://openalex.org/W2138918281","https://openalex.org/W2140484782","https://openalex.org/W2143661553","https://openalex.org/W2148521405","https://openalex.org/W2149128480","https://openalex.org/W2150109955","https://openalex.org/W2152237155","https://openalex.org/W2153077824","https://openalex.org/W2153143154","https://openalex.org/W2159272315","https://openalex.org/W2161759256","https://openalex.org/W2164010209","https://openalex.org/W2167334351","https://openalex.org/W2171798746","https://openalex.org/W2265311716","https://openalex.org/W6682455314","https://openalex.org/W6693670083"],"related_works":["https://openalex.org/W3195533899","https://openalex.org/W4284962749","https://openalex.org/W1488373600","https://openalex.org/W2571213417","https://openalex.org/W1973973903","https://openalex.org/W2296264082","https://openalex.org/W2123725840","https://openalex.org/W2904966268","https://openalex.org/W4284965612","https://openalex.org/W2353153179"],"abstract_inverted_index":{"A":[0],"bulk":[1,28],"micromachined":[2],"inertial":[3],"measurement":[4],"unit":[5],"(MIMU)":[6],"is":[7,33],"presented":[8],"in":[9],"this":[10],"paper.":[11],"Three":[12],"single-axis":[13,17],"accelerometers":[14],"and":[15,53,74,81,92,99,110,118,132,142],"three":[16],"gyroscopes":[18,134],"were":[19],"simultaneously":[20],"fabricated":[21],"on":[22,47],"a":[23,27,41],"silicon":[24],"wafer":[25,32],"using":[26],"micromachining":[29],"process;":[30],"the":[31,48,51,60,64,71,89,107,111,123],"smaller":[34],"than":[35],"one":[36],"square":[37],"centimeter.":[38],"In":[39],"particular,":[40],"global":[42],"area":[43,55],"optimization":[44],"method":[45],"based":[46],"relationship":[49],"between":[50],"sensitivity":[52],"layout":[54,61],"was":[56],"proposed":[57],"to":[58],"determine":[59],"configuration":[62],"of":[63,70,88,106,125],"six":[65],"sensors.":[66],"The":[67,85,103],"scale":[68,86],"factors":[69,87],"X/Y-axis":[72,90,108,126,130],"accelerometer":[73,76],"Z-axis":[75,93,112,128,133],"are":[77,95,114,135],"about":[78,96,115],"213.3":[79],"mV/g":[80],"226.9":[82],"mV/g,":[83],"respectively.":[84,102,121,145],"gyroscope":[91,94,109,113],"2.2":[97],"mV/\u00b0/s":[98],"10.8":[100],"mV/\u00b0/s,":[101],"bias":[104],"stability":[105],"2135":[116],"deg/h":[117],"80":[119],"deg/h,":[120],"Finally,":[122],"resolutions":[124],"accelerometers,":[127,129],"gyroscopes,":[131],"0.0012":[136],"g/\u221aHz,":[137,139],"0.0011":[138],"0.314":[140],"\u00b0/s/\u221aHz,":[141,144],"0.008":[143]},"counts_by_year":[{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2017,"cited_by_count":2},{"year":2015,"cited_by_count":1},{"year":2013,"cited_by_count":2}],"updated_date":"2026-05-06T08:25:59.206177","created_date":"2025-10-10T00:00:00"}