{"id":"https://openalex.org/W2020360707","doi":"https://doi.org/10.3390/s100301753","title":"Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip","display_name":"Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip","publication_year":2010,"publication_date":"2010-03-03","ids":{"openalex":"https://openalex.org/W2020360707","doi":"https://doi.org/10.3390/s100301753","mag":"2020360707","pmid":"https://pubmed.ncbi.nlm.nih.gov/22294897"},"language":"en","primary_location":{"id":"doi:10.3390/s100301753","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s100301753","pdf_url":"https://www.mdpi.com/1424-8220/10/3/1753/pdf?version=1403312193","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/1424-8220/10/3/1753/pdf?version=1403312193","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5005155364","display_name":"Ching\u2010Liang Dai","orcid":"https://orcid.org/0000-0001-9114-7363"},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":true,"raw_author_name":"Ching-Liang Dai","raw_affiliation_strings":["Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan","Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402, Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan","institution_ids":["https://openalex.org/I162838928"]},{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402, Taiwan","institution_ids":["https://openalex.org/I162838928"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101986378","display_name":"Yen-Chi Chen","orcid":"https://orcid.org/0009-0008-2323-9360"},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Yen-Chi Chen","raw_affiliation_strings":["Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan","institution_ids":["https://openalex.org/I162838928"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052420595","display_name":"Chyan\u2010Chyi Wu","orcid":null},"institutions":[{"id":"https://openalex.org/I107470533","display_name":"Tamkang University","ror":"https://ror.org/04tft4718","country_code":"TW","type":"education","lineage":["https://openalex.org/I107470533"]},{"id":"https://openalex.org/I142066694","display_name":"ITRI International","ror":"https://ror.org/04wwsbd59","country_code":"US","type":"facility","lineage":["https://openalex.org/I142066694"]}],"countries":["TW","US"],"is_corresponding":false,"raw_author_name":"Chyan-Chyi Wu","raw_affiliation_strings":["Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui, 251 Taiwan","Industrial Technology Research Inst"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui, 251 Taiwan","institution_ids":["https://openalex.org/I107470533"]},{"raw_affiliation_string":"Industrial Technology Research Inst","institution_ids":["https://openalex.org/I142066694"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109989282","display_name":"Chin-Fu Kuo","orcid":null},"institutions":[{"id":"https://openalex.org/I162838928","display_name":"National Chung Hsing University","ror":"https://ror.org/05vn3ca78","country_code":"TW","type":"education","lineage":["https://openalex.org/I162838928"]},{"id":"https://openalex.org/I4210148468","display_name":"Industrial Technology Research Institute","ror":"https://ror.org/05szzwt63","country_code":"TW","type":"nonprofit","lineage":["https://openalex.org/I4210148468"]},{"id":"https://openalex.org/I99613584","display_name":"National Taipei University","ror":"https://ror.org/03e29r284","country_code":"TW","type":"education","lineage":["https://openalex.org/I99613584"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Chin-Fu Kuo","raw_affiliation_strings":["Microsystems Technology Center, Industrial Technology Research Institute, Tainan, 709 Taiwan","National Chung Hsing University"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Microsystems Technology Center, Industrial Technology Research Institute, Tainan, 709 Taiwan","institution_ids":["https://openalex.org/I4210148468"]},{"raw_affiliation_string":"National Chung Hsing University","institution_ids":["https://openalex.org/I99613584","https://openalex.org/I162838928"]}]}],"institutions":[],"countries_distinct_count":2,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5005155364"],"corresponding_institution_ids":["https://openalex.org/I162838928"],"apc_list":{"value":2400,"currency":"CHF","value_usd":2598},"apc_paid":{"value":2400,"currency":"CHF","value_usd":2598},"fwci":1.471,"has_fulltext":true,"cited_by_count":38,"citation_normalized_percentile":{"value":0.83394793,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":99},"biblio":{"volume":"10","issue":"3","first_page":"1753","last_page":"1764"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10461","display_name":"Gas Sensing Nanomaterials and Sensors","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11667","display_name":"Advanced Chemical Sensor Technologies","score":0.9980999827384949,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11472","display_name":"Analytical Chemistry and Sensors","score":0.9973000288009644,"subfield":{"id":"https://openalex.org/subfields/1502","display_name":"Bioengineering"},"field":{"id":"https://openalex.org/fields/15","display_name":"Chemical Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanosheet","display_name":"Nanosheet","score":0.8196450471878052},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.8015027046203613},{"id":"https://openalex.org/keywords/carbon-nanotube","display_name":"Carbon nanotube","score":0.5431874990463257},{"id":"https://openalex.org/keywords/oxide","display_name":"Oxide","score":0.496498167514801},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.457349956035614},{"id":"https://openalex.org/keywords/cobalt","display_name":"Cobalt","score":0.45268714427948},{"id":"https://openalex.org/keywords/carbon-monoxide","display_name":"Carbon monoxide","score":0.4313991367816925},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.42575421929359436},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.08818134665489197},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.07632440328598022}],"concepts":[{"id":"https://openalex.org/C51967427","wikidata":"https://www.wikidata.org/wiki/Q17148232","display_name":"Nanosheet","level":2,"score":0.8196450471878052},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8015027046203613},{"id":"https://openalex.org/C513720949","wikidata":"https://www.wikidata.org/wiki/Q1778729","display_name":"Carbon nanotube","level":2,"score":0.5431874990463257},{"id":"https://openalex.org/C2779851234","wikidata":"https://www.wikidata.org/wiki/Q50690","display_name":"Oxide","level":2,"score":0.496498167514801},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.457349956035614},{"id":"https://openalex.org/C515602321","wikidata":"https://www.wikidata.org/wiki/Q740","display_name":"Cobalt","level":2,"score":0.45268714427948},{"id":"https://openalex.org/C512735826","wikidata":"https://www.wikidata.org/wiki/Q2025","display_name":"Carbon monoxide","level":3,"score":0.4313991367816925},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.42575421929359436},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.08818134665489197},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.07632440328598022},{"id":"https://openalex.org/C161790260","wikidata":"https://www.wikidata.org/wiki/Q82264","display_name":"Catalysis","level":2,"score":0.0},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0}],"mesh":[{"descriptor_ui":"D002248","descriptor_name":"Carbon Monoxide","qualifier_ui":"Q000032","qualifier_name":"analysis","is_major_topic":false},{"descriptor_ui":"D002248","descriptor_name":"Carbon Monoxide","qualifier_ui":"Q000032","qualifier_name":"analysis","is_major_topic":false},{"descriptor_ui":"D002248","descriptor_name":"Carbon Monoxide","qualifier_ui":"Q000032","qualifier_name":"analysis","is_major_topic":false},{"descriptor_ui":"D003035","descriptor_name":"Cobalt","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D003035","descriptor_name":"Cobalt","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D003035","descriptor_name":"Cobalt","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D004867","descriptor_name":"Equipment Design","qualifier_ui":null,"qualifier_name":null,"is_major_topic":false},{"descriptor_ui":"D010087","descriptor_name":"Oxides","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D010087","descriptor_name":"Oxides","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D010087","descriptor_name":"Oxides","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D012666","descriptor_name":"Semiconductors","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D012666","descriptor_name":"Semiconductors","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D012666","descriptor_name":"Semiconductors","qualifier_ui":"Q000295","qualifier_name":"instrumentation","is_major_topic":false},{"descriptor_ui":"D037742","descriptor_name":"Nanotubes, Carbon","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D037742","descriptor_name":"Nanotubes, Carbon","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D037742","descriptor_name":"Nanotubes, Carbon","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D046208","descriptor_name":"Microchip Analytical Procedures","qualifier_ui":"Q000379","qualifier_name":"methods","is_major_topic":false},{"descriptor_ui":"D046208","descriptor_name":"Microchip Analytical Procedures","qualifier_ui":"Q000379","qualifier_name":"methods","is_major_topic":false},{"descriptor_ui":"D046208","descriptor_name":"Microchip Analytical Procedures","qualifier_ui":"Q000379","qualifier_name":"methods","is_major_topic":false},{"descriptor_ui":"D049329","descriptor_name":"Nanostructures","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D049329","descriptor_name":"Nanostructures","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D049329","descriptor_name":"Nanostructures","qualifier_ui":"Q000737","qualifier_name":"chemistry","is_major_topic":false},{"descriptor_ui":"D056656","descriptor_name":"Lab-On-A-Chip Devices","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D056656","descriptor_name":"Lab-On-A-Chip Devices","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true},{"descriptor_ui":"D056656","descriptor_name":"Lab-On-A-Chip Devices","qualifier_ui":null,"qualifier_name":null,"is_major_topic":true}],"locations_count":6,"locations":[{"id":"doi:10.3390/s100301753","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s100301753","pdf_url":"https://www.mdpi.com/1424-8220/10/3/1753/pdf?version=1403312193","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},{"id":"pmid:22294897","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/22294897","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors (Basel, Switzerland)","raw_type":null},{"id":"pmh:oai:doaj.org/article:7998129145994e27a54935a20f760f70","is_oa":true,"landing_page_url":"https://doaj.org/article/7998129145994e27a54935a20f760f70","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors, Vol 10, Iss 3, Pp 1753-1764 (2010)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/1424-8220/10/3/1753/","is_oa":true,"landing_page_url":"https://dx.doi.org/10.3390/s100301753","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors; Volume 10; Issue 3; Pages: 1753-1764","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:3264449","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/3264449","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Sensors (Basel)","raw_type":"Text"},{"id":"pmh:oai:tkuir.lib.tku.edu.tw:987654321/65287","is_oa":false,"landing_page_url":"https://tkuir.lib.tku.edu.tw/dspace/handle/987654321/65287","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":null}],"best_oa_location":{"id":"doi:10.3390/s100301753","is_oa":true,"landing_page_url":"https://doi.org/10.3390/s100301753","pdf_url":"https://www.mdpi.com/1424-8220/10/3/1753/pdf?version=1403312193","source":{"id":"https://openalex.org/S101949793","display_name":"Sensors","issn_l":"1424-8220","issn":["1424-8220"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Sensors","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321040","display_name":"National Science Council","ror":"https://ror.org/02kv4zf79"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2020360707.pdf","grobid_xml":"https://content.openalex.org/works/W2020360707.grobid-xml"},"referenced_works_count":21,"referenced_works":["https://openalex.org/W1496753238","https://openalex.org/W1971578137","https://openalex.org/W1973955096","https://openalex.org/W1983282195","https://openalex.org/W1997259137","https://openalex.org/W1997345761","https://openalex.org/W2004246740","https://openalex.org/W2004901902","https://openalex.org/W2006040099","https://openalex.org/W2007697940","https://openalex.org/W2012187249","https://openalex.org/W2042864215","https://openalex.org/W2045092500","https://openalex.org/W2075658860","https://openalex.org/W2081289238","https://openalex.org/W2082043196","https://openalex.org/W2083026477","https://openalex.org/W2087430770","https://openalex.org/W2134571742","https://openalex.org/W2888782157","https://openalex.org/W3208168328"],"related_works":["https://openalex.org/W3119082211","https://openalex.org/W4396734720","https://openalex.org/W3091852196","https://openalex.org/W4400260568","https://openalex.org/W2084951691","https://openalex.org/W4388294765","https://openalex.org/W3206721946","https://openalex.org/W798086848","https://openalex.org/W2338175038","https://openalex.org/W2600668847"],"abstract_inverted_index":{"The":[0,29,53,69,89,103,118],"study":[1],"presents":[2],"a":[3,11,27,36,50,62,66,74],"micro":[4],"carbon":[5,42],"monoxide":[6],"(CO)":[7],"sensor":[8,34,58,97,107,122,142],"integrated":[9],"with":[10],"readout":[12,90],"circuit-on-a-chip":[13],"manufactured":[14],"by":[15,49],"the":[16,33,56,81,96,100,106,110,115,121,137,140,148],"commercial":[17],"0.35":[18],"\u03bcm":[19],"complementary":[20],"metal":[21],"oxide":[22,39],"semiconductor":[23],"(CMOS)":[24],"process":[25],"and":[26,41,65,113,130,147,150,156],"post-process.":[28],"sensing":[30,67,82,116],"film":[31,45,83],"of":[32,55,61,73,105,120,139],"is":[35,47,59,72,92,143],"composite":[37],"cobalt":[38],"nanosheet":[40],"nanotube":[43],"(CoOOH/CNT)":[44],"that":[46,136],"prepared":[48],"precipitation-oxidation":[51],"method.":[52],"structure":[54],"CO":[57,87,141],"composed":[60],"polysilicon":[63],"resistor":[64],"film.":[68,117],"sensor,":[70],"which":[71],"resistive":[75],"type,":[76],"changes":[77],"its":[78],"resistance":[79,98],"when":[80],"adsorbs":[84],"or":[85],"desorbs":[86],"gas.":[88],"circuit":[91],"used":[93],"to":[94],"convert":[95],"into":[99],"voltage":[101],"output.":[102],"post-processing":[104],"includes":[108],"etching":[109],"sacrificial":[111],"layers":[112],"coating":[114],"advantages":[119],"include":[123],"room":[124],"temperature":[125],"operation,":[126],"short":[127],"response/recovery":[128],"times":[129,152],"easy":[131],"post-processing.":[132],"Experimental":[133],"results":[134],"show":[135],"sensitivity":[138],"about":[144],"0.19":[145],"mV/ppm,":[146],"response":[149],"recovery":[151],"are":[153],"23":[154],"s":[155,158],"34":[157],"for":[159],"200":[160],"ppm":[161],"CO,":[162],"respectively.":[163]},"counts_by_year":[{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":4},{"year":2021,"cited_by_count":4},{"year":2020,"cited_by_count":2},{"year":2019,"cited_by_count":2},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":3},{"year":2016,"cited_by_count":1},{"year":2015,"cited_by_count":6},{"year":2014,"cited_by_count":4},{"year":2013,"cited_by_count":2},{"year":2012,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}