{"id":"https://openalex.org/W2460710185","doi":"https://doi.org/10.3390/mi7070118","title":"Plasmonic Structures, Materials and Lenses for Optical Lithography beyond the Diffraction Limit: A Review","display_name":"Plasmonic Structures, Materials and Lenses for Optical Lithography beyond the Diffraction Limit: A Review","publication_year":2016,"publication_date":"2016-07-13","ids":{"openalex":"https://openalex.org/W2460710185","doi":"https://doi.org/10.3390/mi7070118","mag":"2460710185","pmid":"https://pubmed.ncbi.nlm.nih.gov/30404291"},"language":"en","primary_location":{"id":"doi:10.3390/mi7070118","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi7070118","pdf_url":"https://www.mdpi.com/2072-666X/7/7/118/pdf?version=1468409522","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"type":"review","indexed_in":["crossref","doaj","pubmed"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/2072-666X/7/7/118/pdf?version=1468409522","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5077736544","display_name":"Changtao Wang","orcid":"https://orcid.org/0000-0002-1784-1741"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210128284","display_name":"Institute of Optics and Electronics, Chinese Academy of Sciences","ror":"https://ror.org/02bn68w95","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210128284"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Changtao Wang","raw_affiliation_strings":["State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China","institution_ids":["https://openalex.org/I4210128284","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5045273512","display_name":"Wei Zhang","orcid":"https://orcid.org/0000-0002-3218-9392"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210128284","display_name":"Institute of Optics and Electronics, Chinese Academy of Sciences","ror":"https://ror.org/02bn68w95","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210128284"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Wei Zhang","raw_affiliation_strings":["State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China","institution_ids":["https://openalex.org/I4210128284","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084498173","display_name":"Zeyu Zhao","orcid":"https://orcid.org/0000-0002-3748-2555"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210128284","display_name":"Institute of Optics and Electronics, Chinese Academy of Sciences","ror":"https://ror.org/02bn68w95","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210128284"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zeyu Zhao","raw_affiliation_strings":["State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China","institution_ids":["https://openalex.org/I4210128284","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5084966451","display_name":"Yanqin Wang","orcid":"https://orcid.org/0000-0002-5636-0617"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210128284","display_name":"Institute of Optics and Electronics, Chinese Academy of Sciences","ror":"https://ror.org/02bn68w95","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210128284"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yanqin Wang","raw_affiliation_strings":["State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China","institution_ids":["https://openalex.org/I4210128284","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103778527","display_name":"Ping Gao","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210128284","display_name":"Institute of Optics and Electronics, Chinese Academy of Sciences","ror":"https://ror.org/02bn68w95","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210128284"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Ping Gao","raw_affiliation_strings":["State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China","institution_ids":["https://openalex.org/I4210128284","https://openalex.org/I19820366"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101138451","display_name":"Yunfei Luo","orcid":null},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210128284","display_name":"Institute of Optics and Electronics, Chinese Academy of Sciences","ror":"https://ror.org/02bn68w95","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210128284"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yunfei Luo","raw_affiliation_strings":["State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China","institution_ids":["https://openalex.org/I4210128284","https://openalex.org/I19820366"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111579735","display_name":"Xiangang Luo","orcid":"https://orcid.org/0000-0002-1401-1670"},"institutions":[{"id":"https://openalex.org/I19820366","display_name":"Chinese Academy of Sciences","ror":"https://ror.org/034t30j35","country_code":"CN","type":"government","lineage":["https://openalex.org/I19820366"]},{"id":"https://openalex.org/I4210128284","display_name":"Institute of Optics and Electronics, Chinese Academy of Sciences","ror":"https://ror.org/02bn68w95","country_code":"CN","type":"facility","lineage":["https://openalex.org/I19820366","https://openalex.org/I4210128284"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Xiangang Luo","raw_affiliation_strings":["State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"State Key Laboratory of Optical Technologies on Nano-fabrication and Micro-engineering, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China","institution_ids":["https://openalex.org/I4210128284","https://openalex.org/I19820366"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":7,"corresponding_author_ids":["https://openalex.org/A5111579735"],"corresponding_institution_ids":["https://openalex.org/I19820366","https://openalex.org/I4210128284"],"apc_list":{"value":2000,"currency":"CHF","value_usd":2165},"apc_paid":{"value":2000,"currency":"CHF","value_usd":2165},"fwci":2.2745,"has_fulltext":true,"cited_by_count":74,"citation_normalized_percentile":{"value":0.87429822,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":99},"biblio":{"volume":"7","issue":"7","first_page":"118","last_page":"118"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10295","display_name":"Plasmonic and Surface Plasmon Research","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10295","display_name":"Plasmonic and Surface Plasmon Research","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10131","display_name":"Gold and Silver Nanoparticles Synthesis and Applications","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2504","display_name":"Electronic, Optical and Magnetic Materials"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/plasmon","display_name":"Plasmon","score":0.8038265705108643},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.7143696546554565},{"id":"https://openalex.org/keywords/plasmonic-lens","display_name":"Plasmonic lens","score":0.679882287979126},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6211186051368713},{"id":"https://openalex.org/keywords/surface-plasmon-polariton","display_name":"Surface plasmon polariton","score":0.5972259640693665},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.5957773923873901},{"id":"https://openalex.org/keywords/diffraction","display_name":"Diffraction","score":0.5525493621826172},{"id":"https://openalex.org/keywords/interference-lithography","display_name":"Interference lithography","score":0.5441946983337402},{"id":"https://openalex.org/keywords/surface-plasmon","display_name":"Surface plasmon","score":0.5120980739593506},{"id":"https://openalex.org/keywords/superlens","display_name":"Superlens","score":0.48928138613700867},{"id":"https://openalex.org/keywords/extreme-ultraviolet-lithography","display_name":"Extreme ultraviolet lithography","score":0.4730592966079712},{"id":"https://openalex.org/keywords/photolithography","display_name":"Photolithography","score":0.46076133847236633},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4594586193561554},{"id":"https://openalex.org/keywords/nanophotonics","display_name":"Nanophotonics","score":0.440339058637619},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.40614020824432373},{"id":"https://openalex.org/keywords/metamaterial","display_name":"Metamaterial","score":0.24849894642829895},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1804884970188141},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.07288473844528198}],"concepts":[{"id":"https://openalex.org/C110879396","wikidata":"https://www.wikidata.org/wiki/Q58392","display_name":"Plasmon","level":2,"score":0.8038265705108643},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.7143696546554565},{"id":"https://openalex.org/C141131685","wikidata":"https://www.wikidata.org/wiki/Q17105289","display_name":"Plasmonic lens","level":5,"score":0.679882287979126},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6211186051368713},{"id":"https://openalex.org/C150835508","wikidata":"https://www.wikidata.org/wiki/Q15916346","display_name":"Surface plasmon polariton","level":4,"score":0.5972259640693665},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.5957773923873901},{"id":"https://openalex.org/C207114421","wikidata":"https://www.wikidata.org/wiki/Q133900","display_name":"Diffraction","level":2,"score":0.5525493621826172},{"id":"https://openalex.org/C159395582","wikidata":"https://www.wikidata.org/wiki/Q6046394","display_name":"Interference lithography","level":4,"score":0.5441946983337402},{"id":"https://openalex.org/C136676167","wikidata":"https://www.wikidata.org/wiki/Q1151829","display_name":"Surface plasmon","level":3,"score":0.5120980739593506},{"id":"https://openalex.org/C94631461","wikidata":"https://www.wikidata.org/wiki/Q3504693","display_name":"Superlens","level":3,"score":0.48928138613700867},{"id":"https://openalex.org/C162996421","wikidata":"https://www.wikidata.org/wiki/Q371965","display_name":"Extreme ultraviolet lithography","level":2,"score":0.4730592966079712},{"id":"https://openalex.org/C105487726","wikidata":"https://www.wikidata.org/wiki/Q622938","display_name":"Photolithography","level":2,"score":0.46076133847236633},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4594586193561554},{"id":"https://openalex.org/C27289702","wikidata":"https://www.wikidata.org/wiki/Q2475861","display_name":"Nanophotonics","level":2,"score":0.440339058637619},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.40614020824432373},{"id":"https://openalex.org/C110367647","wikidata":"https://www.wikidata.org/wiki/Q497166","display_name":"Metamaterial","level":2,"score":0.24849894642829895},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1804884970188141},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.07288473844528198},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.3390/mi7070118","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi7070118","pdf_url":"https://www.mdpi.com/2072-666X/7/7/118/pdf?version=1468409522","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},{"id":"pmid:30404291","is_oa":false,"landing_page_url":"https://pubmed.ncbi.nlm.nih.gov/30404291","pdf_url":null,"source":{"id":"https://openalex.org/S4306525036","display_name":"PubMed","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":null},{"id":"pmh:oai:doaj.org/article:e4cafb9c1ad3457bbbd9ef24a2f24bf6","is_oa":true,"landing_page_url":"https://doaj.org/article/e4cafb9c1ad3457bbbd9ef24a2f24bf6","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Micromachines, Vol 7, Iss 7, p 118 (2016)","raw_type":"article"},{"id":"pmh:oai:europepmc.org:5158084","is_oa":true,"landing_page_url":"http://europepmc.org/pmc/articles/PMC6189824","pdf_url":null,"source":{"id":"https://openalex.org/S4306400806","display_name":"Europe PMC (PubMed Central)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1303153112","host_organization_name":"European Bioinformatics Institute","host_organization_lineage":["https://openalex.org/I1303153112"],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Text"},{"id":"pmh:oai:pubmedcentral.nih.gov:6189824","is_oa":true,"landing_page_url":"https://www.ncbi.nlm.nih.gov/pmc/articles/6189824","pdf_url":null,"source":{"id":"https://openalex.org/S2764455111","display_name":"PubMed Central","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1299303238","host_organization_name":"National Institutes of Health","host_organization_lineage":["https://openalex.org/I1299303238"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Micromachines (Basel)","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/mi7070118","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi7070118","pdf_url":"https://www.mdpi.com/2072-666X/7/7/118/pdf?version=1468409522","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.44999998807907104,"display_name":"Industry, innovation and infrastructure","id":"https://metadata.un.org/sdg/9"}],"awards":[{"id":"https://openalex.org/G3622321347","display_name":null,"funder_award_id":"2013CBA01700","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"},{"id":"https://openalex.org/G5385029348","display_name":null,"funder_award_id":"61138002","funder_id":"https://openalex.org/F4320335777","funder_display_name":"National Key Research and Development Program of China"}],"funders":[{"id":"https://openalex.org/F4320335777","display_name":"National Key Research and Development Program of China","ror":null}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2460710185.pdf","grobid_xml":"https://content.openalex.org/works/W2460710185.grobid-xml"},"referenced_works_count":116,"referenced_works":["https://openalex.org/W4296862","https://openalex.org/W248572531","https://openalex.org/W1543771085","https://openalex.org/W1812062654","https://openalex.org/W1937633222","https://openalex.org/W1964103463","https://openalex.org/W1965591598","https://openalex.org/W1970466726","https://openalex.org/W1972678682","https://openalex.org/W1972791776","https://openalex.org/W1973397484","https://openalex.org/W1976030131","https://openalex.org/W1983765474","https://openalex.org/W1984377271","https://openalex.org/W1985244022","https://openalex.org/W1985538838","https://openalex.org/W1987804578","https://openalex.org/W1987891261","https://openalex.org/W1990245077","https://openalex.org/W1990299300","https://openalex.org/W1992074115","https://openalex.org/W1993710461","https://openalex.org/W1999034403","https://openalex.org/W1999479120","https://openalex.org/W1999593104","https://openalex.org/W2000942712","https://openalex.org/W2001245819","https://openalex.org/W2004496195","https://openalex.org/W2004901948","https://openalex.org/W2005076504","https://openalex.org/W2006530737","https://openalex.org/W2008308987","https://openalex.org/W2010741647","https://openalex.org/W2012427867","https://openalex.org/W2013108356","https://openalex.org/W2013260646","https://openalex.org/W2015620100","https://openalex.org/W2016767988","https://openalex.org/W2018586229","https://openalex.org/W2022826415","https://openalex.org/W2024486049","https://openalex.org/W2027652501","https://openalex.org/W2028192735","https://openalex.org/W2028208434","https://openalex.org/W2029453937","https://openalex.org/W2030700679","https://openalex.org/W2035305855","https://openalex.org/W2036324861","https://openalex.org/W2036583449","https://openalex.org/W2038282958","https://openalex.org/W2038872992","https://openalex.org/W2044139179","https://openalex.org/W2044860847","https://openalex.org/W2047280219","https://openalex.org/W2047468147","https://openalex.org/W2048350649","https://openalex.org/W2048442716","https://openalex.org/W2060783185","https://openalex.org/W2062047511","https://openalex.org/W2062477776","https://openalex.org/W2063866934","https://openalex.org/W2064274413","https://openalex.org/W2064287756","https://openalex.org/W2071093317","https://openalex.org/W2071473194","https://openalex.org/W2073249173","https://openalex.org/W2074163997","https://openalex.org/W2074676655","https://openalex.org/W2078436447","https://openalex.org/W2078463351","https://openalex.org/W2078855889","https://openalex.org/W2082181845","https://openalex.org/W2084010546","https://openalex.org/W2087986955","https://openalex.org/W2089993533","https://openalex.org/W2090318778","https://openalex.org/W2090771956","https://openalex.org/W2091238804","https://openalex.org/W2091658385","https://openalex.org/W2091898550","https://openalex.org/W2093404684","https://openalex.org/W2093746225","https://openalex.org/W2094206443","https://openalex.org/W2094656325","https://openalex.org/W2095251260","https://openalex.org/W2103633039","https://openalex.org/W2110770127","https://openalex.org/W2114951798","https://openalex.org/W2119645153","https://openalex.org/W2122765624","https://openalex.org/W2123343298","https://openalex.org/W2123712230","https://openalex.org/W2127639166","https://openalex.org/W2128951726","https://openalex.org/W2129438244","https://openalex.org/W2129732163","https://openalex.org/W2129821074","https://openalex.org/W2132511353","https://openalex.org/W2133797202","https://openalex.org/W2137938289","https://openalex.org/W2142321590","https://openalex.org/W2152554179","https://openalex.org/W2155415830","https://openalex.org/W2159587145","https://openalex.org/W2161646562","https://openalex.org/W2162186602","https://openalex.org/W2162621384","https://openalex.org/W2167595429","https://openalex.org/W2196078811","https://openalex.org/W2325943286","https://openalex.org/W2337465486","https://openalex.org/W2548434491","https://openalex.org/W2975639389","https://openalex.org/W4230749418","https://openalex.org/W4256681254","https://openalex.org/W6728579657"],"related_works":["https://openalex.org/W4297796318","https://openalex.org/W2074748435","https://openalex.org/W2120554394","https://openalex.org/W2803666353","https://openalex.org/W4327998019","https://openalex.org/W1991906671","https://openalex.org/W2797139618","https://openalex.org/W1985287033","https://openalex.org/W2151209047","https://openalex.org/W2017955569"],"abstract_inverted_index":{"The":[0],"rapid":[1],"development":[2],"of":[3,81,137],"nanotechnologies":[4],"and":[5,22,39,58,85,93,111,146],"sciences":[6],"has":[7],"led":[8],"to":[9],"the":[10,79,102,135,142],"great":[11,40],"demand":[12],"for":[13,68],"novel":[14],"lithography":[15,77,98],"methods":[16],"allowing":[17],"large":[18],"area,":[19],"low":[20],"cost":[21],"high":[23,118],"resolution":[24,99,116],"nano":[25,69],"fabrications.":[26],"Characterized":[27],"by":[28],"unique":[29],"sub-diffraction":[30],"optical":[31],"features":[32],"like":[33],"propagation":[34],"with":[35,107],"an":[36],"ultra-short":[37],"wavelength":[38],"field":[41],"enhancement":[42],"in":[43,78,89,127],"subwavelength":[44],"regions,":[45],"surface":[46,51,60],"plasmon":[47,52,55],"polaritons":[48,56],"(SPPs),":[49],"including":[50],"waves,":[53],"bulk":[54],"(BPPs)":[57],"localized":[59],"plasmons":[61],"(LSPs),":[62],"have":[63,95],"become":[64],"potentially":[65],"promising":[66],"candidates":[67],"lithography.":[70,131],"In":[71],"this":[72],"paper,":[73],"investigations":[74],"into":[75],"plasmonic":[76,97,128],"manner":[80],"point-to-point":[82],"writing,":[83],"interference":[84],"imaging":[86,130],"were":[87],"reviewed":[88],"detail.":[90],"Theoretical":[91],"simulations":[92],"experiments":[94],"demonstrated":[96],"far":[100],"beyond":[101],"conventional":[103],"diffraction":[104],"limit,":[105],"even":[106],"ultraviolet":[108],"light":[109,123],"sources":[110],"single":[112],"exposure":[113],"performances.":[114],"Half-pitch":[115],"as":[117,119,152],"22":[120],"nm":[121],"(~1/17":[122],"wavelength)":[124],"was":[125],"observed":[126],"lens":[129],"Moreover,":[132],"not":[133],"only":[134],"overview":[136],"state-of-the-art":[138],"results,":[139],"but":[140],"also":[141],"physics":[143],"behind":[144],"them":[145],"future":[147],"research":[148],"suggestions":[149],"are":[150],"discussed":[151],"well.":[153]},"counts_by_year":[{"year":2026,"cited_by_count":3},{"year":2025,"cited_by_count":10},{"year":2024,"cited_by_count":11},{"year":2023,"cited_by_count":12},{"year":2022,"cited_by_count":8},{"year":2021,"cited_by_count":7},{"year":2020,"cited_by_count":10},{"year":2019,"cited_by_count":4},{"year":2018,"cited_by_count":7},{"year":2017,"cited_by_count":2}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}