{"id":"https://openalex.org/W1752442583","doi":"https://doi.org/10.3390/mi6060790","title":"Special Issue: 15 Years of SU8 as MEMS Material","display_name":"Special Issue: 15 Years of SU8 as MEMS Material","publication_year":2015,"publication_date":"2015-06-19","ids":{"openalex":"https://openalex.org/W1752442583","doi":"https://doi.org/10.3390/mi6060790","mag":"1752442583"},"language":"en","primary_location":{"id":"doi:10.3390/mi6060790","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi6060790","pdf_url":"https://www.mdpi.com/2072-666X/6/6/790/pdf?version=1434723281","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/2072-666X/6/6/790/pdf?version=1434723281","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5053679826","display_name":"Arnaud Bertsch","orcid":"https://orcid.org/0000-0002-1044-0478"},"institutions":[{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]}],"countries":["CH"],"is_corresponding":true,"raw_author_name":"Arnaud Bertsch","raw_affiliation_strings":["Microsystems Laboratory (LMIS4), \u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne (EPFL), Station 17, 1015 Lausanne, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Microsystems Laboratory (LMIS4), \u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne (EPFL), Station 17, 1015 Lausanne, Switzerland","institution_ids":["https://openalex.org/I5124864"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5038168256","display_name":"Philippe Renaud","orcid":"https://orcid.org/0000-0001-5199-1252"},"institutions":[{"id":"https://openalex.org/I5124864","display_name":"\u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne","ror":"https://ror.org/02s376052","country_code":"CH","type":"education","lineage":["https://openalex.org/I2799323385","https://openalex.org/I5124864"]}],"countries":["CH"],"is_corresponding":false,"raw_author_name":"Philippe Renaud","raw_affiliation_strings":["Microsystems Laboratory (LMIS4), \u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne (EPFL), Station 17, 1015 Lausanne, Switzerland"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Microsystems Laboratory (LMIS4), \u00c9cole Polytechnique F\u00e9d\u00e9rale de Lausanne (EPFL), Station 17, 1015 Lausanne, Switzerland","institution_ids":["https://openalex.org/I5124864"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5053679826"],"corresponding_institution_ids":["https://openalex.org/I5124864"],"apc_list":{"value":2000,"currency":"CHF","value_usd":2165},"apc_paid":{"value":2000,"currency":"CHF","value_usd":2165},"fwci":1.1393,"has_fulltext":true,"cited_by_count":28,"citation_normalized_percentile":{"value":0.76157659,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":"6","issue":"6","first_page":"790","last_page":"792"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9975000023841858,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11723","display_name":"Optical Coatings and Gratings","score":0.9975000023841858,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10313","display_name":"Surface Modification and Superhydrophobicity","score":0.9961000084877014,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.9951000213623047,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microfabrication","display_name":"Microfabrication","score":0.9277678728103638},{"id":"https://openalex.org/keywords/photoresist","display_name":"Photoresist","score":0.8567057251930237},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7299734354019165},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6074801087379456},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.48401328921318054},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.38896000385284424},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.34097814559936523},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2989458441734314},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.1167660653591156}],"concepts":[{"id":"https://openalex.org/C527607","wikidata":"https://www.wikidata.org/wiki/Q175538","display_name":"Microfabrication","level":4,"score":0.9277678728103638},{"id":"https://openalex.org/C134406635","wikidata":"https://www.wikidata.org/wiki/Q1439684","display_name":"Photoresist","level":3,"score":0.8567057251930237},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7299734354019165},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6074801087379456},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.48401328921318054},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.38896000385284424},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.34097814559936523},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2989458441734314},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.1167660653591156},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.3390/mi6060790","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi6060790","pdf_url":"https://www.mdpi.com/2072-666X/6/6/790/pdf?version=1434723281","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:0139761159354a758aa9b6bfcb1cf7d3","is_oa":true,"landing_page_url":"https://doaj.org/article/0139761159354a758aa9b6bfcb1cf7d3","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Micromachines, Vol 6, Iss 6, Pp 790-792 (2015)","raw_type":"article"},{"id":"pmh:oai:infoscience.epfl.ch:209114","is_oa":true,"landing_page_url":"http://infoscience.epfl.ch/record/209114","pdf_url":null,"source":{"id":"https://openalex.org/S4306400487","display_name":"Infoscience (Ecole Polytechnique F\u00e9d\u00e9rale de Lausanne)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":"Text"},{"id":"pmh:oai:mdpi.com:/2072-666X/6/6/790/","is_oa":true,"landing_page_url":"http://doi.org/10.3390/mi6060790","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Micromachines","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/mi6060790","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi6060790","pdf_url":"https://www.mdpi.com/2072-666X/6/6/790/pdf?version=1434723281","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W1752442583.pdf","grobid_xml":"https://content.openalex.org/works/W1752442583.grobid-xml"},"referenced_works_count":14,"referenced_works":["https://openalex.org/W1915749593","https://openalex.org/W1988090103","https://openalex.org/W2003810647","https://openalex.org/W2007353130","https://openalex.org/W2019932593","https://openalex.org/W2028567428","https://openalex.org/W2035427511","https://openalex.org/W2038492688","https://openalex.org/W2038973215","https://openalex.org/W2060686323","https://openalex.org/W2077546406","https://openalex.org/W2084684012","https://openalex.org/W2092471058","https://openalex.org/W2106667485"],"related_works":["https://openalex.org/W4234716800","https://openalex.org/W1975753780","https://openalex.org/W2085527795","https://openalex.org/W4251446537","https://openalex.org/W2171937395","https://openalex.org/W2055226196","https://openalex.org/W4250420135","https://openalex.org/W4212850813","https://openalex.org/W2913475304","https://openalex.org/W1989840290"],"abstract_inverted_index":{"In":[0],"1997,":[1],"the":[2,16,23,30],"first":[3],"paper":[4],"using":[5],"SU-8":[6],"as":[7],"a":[8],"material":[9],"for":[10,22],"microfabrication":[11],"was":[12],"published":[13],"[1],":[14],"demonstrating":[15],"interest":[17],"of":[18,26,32],"this":[19],"negative":[20],"photoresist":[21],"near-UV":[24],"structuration":[25],"thick":[27],"layers":[28],"and":[29],"manufacturing":[31],"high":[33],"aspect-ratio":[34],"components.[...]":[35]},"counts_by_year":[{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":3},{"year":2022,"cited_by_count":8},{"year":2021,"cited_by_count":4},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":3},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":3}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2025-10-10T00:00:00"}