{"id":"https://openalex.org/W2109008229","doi":"https://doi.org/10.3390/mi5040943","title":"Characterization of Laser Beam Shaping Optics Based on Their Ablation Geometry of Thin Films","display_name":"Characterization of Laser Beam Shaping Optics Based on Their Ablation Geometry of Thin Films","publication_year":2014,"publication_date":"2014-10-27","ids":{"openalex":"https://openalex.org/W2109008229","doi":"https://doi.org/10.3390/mi5040943","mag":"2109008229"},"language":"en","primary_location":{"id":"doi:10.3390/mi5040943","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi5040943","pdf_url":"https://www.mdpi.com/2072-666X/5/4/943/pdf?version=1414413461","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/2072-666X/5/4/943/pdf?version=1414413461","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5001077783","display_name":"Stefan Rung","orcid":"https://orcid.org/0000-0003-4029-9185"},"institutions":[{"id":"https://openalex.org/I4210158205","display_name":"Aschaffenburg University of Applied Sciences","ror":"https://ror.org/04sms9203","country_code":"DE","type":"education","lineage":["https://openalex.org/I4210158205"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Stefan Rung","raw_affiliation_strings":["University of Applied Science Aschaffenburg, Wuerzburger Strasse 45, D-63743 Aschaffenburg, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Applied Science Aschaffenburg, Wuerzburger Strasse 45, D-63743 Aschaffenburg, Germany","institution_ids":["https://openalex.org/I4210158205"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081873841","display_name":"Johannes V. Barth","orcid":"https://orcid.org/0000-0002-6270-2150"},"institutions":[{"id":"https://openalex.org/I4210158205","display_name":"Aschaffenburg University of Applied Sciences","ror":"https://ror.org/04sms9203","country_code":"DE","type":"education","lineage":["https://openalex.org/I4210158205"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Johannes Barth","raw_affiliation_strings":["University of Applied Science Aschaffenburg, Wuerzburger Strasse 45, D-63743 Aschaffenburg, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Applied Science Aschaffenburg, Wuerzburger Strasse 45, D-63743 Aschaffenburg, Germany","institution_ids":["https://openalex.org/I4210158205"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5090007254","display_name":"Ralf Hellmann","orcid":"https://orcid.org/0000-0001-5592-3388"},"institutions":[{"id":"https://openalex.org/I4210158205","display_name":"Aschaffenburg University of Applied Sciences","ror":"https://ror.org/04sms9203","country_code":"DE","type":"education","lineage":["https://openalex.org/I4210158205"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Ralf Hellmann","raw_affiliation_strings":["University of Applied Science Aschaffenburg, Wuerzburger Strasse 45, D-63743 Aschaffenburg, Germany"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"University of Applied Science Aschaffenburg, Wuerzburger Strasse 45, D-63743 Aschaffenburg, Germany","institution_ids":["https://openalex.org/I4210158205"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5001077783"],"corresponding_institution_ids":["https://openalex.org/I4210158205"],"apc_list":{"value":2000,"currency":"CHF","value_usd":2165},"apc_paid":{"value":2000,"currency":"CHF","value_usd":2165},"fwci":2.8981,"has_fulltext":true,"cited_by_count":43,"citation_normalized_percentile":{"value":0.90146635,"is_in_top_1_percent":false,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":94,"max":99},"biblio":{"volume":"5","issue":"4","first_page":"943","last_page":"953"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10732","display_name":"Laser Material Processing Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13049","display_name":"Surface Roughness and Optical Measurements","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2206","display_name":"Computational Mechanics"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13869","display_name":"Ocular and Laser Science Research","score":0.9976000189781189,"subfield":{"id":"https://openalex.org/subfields/2731","display_name":"Ophthalmology"},"field":{"id":"https://openalex.org/fields/27","display_name":"Medicine"},"domain":{"id":"https://openalex.org/domains/4","display_name":"Health Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.8344719409942627},{"id":"https://openalex.org/keywords/laser-beam-quality","display_name":"Laser beam quality","score":0.832351803779602},{"id":"https://openalex.org/keywords/beam-parameter-product","display_name":"Beam parameter product","score":0.8102492690086365},{"id":"https://openalex.org/keywords/laser","display_name":"Laser","score":0.5894269943237305},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5803104639053345},{"id":"https://openalex.org/keywords/beam-diameter","display_name":"Beam diameter","score":0.5767431259155273},{"id":"https://openalex.org/keywords/beam","display_name":"Beam (structure)","score":0.549192488193512},{"id":"https://openalex.org/keywords/laser-ablation","display_name":"Laser ablation","score":0.5473551750183105},{"id":"https://openalex.org/keywords/m-squared","display_name":"M squared","score":0.5266989469528198},{"id":"https://openalex.org/keywords/beam-divergence","display_name":"Beam divergence","score":0.5063050985336304},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.43991369009017944},{"id":"https://openalex.org/keywords/numerical-aperture","display_name":"Numerical aperture","score":0.4332493245601654},{"id":"https://openalex.org/keywords/ablation","display_name":"Ablation","score":0.42584818601608276},{"id":"https://openalex.org/keywords/laser-beams","display_name":"Laser beams","score":0.21268072724342346},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.209203839302063},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.08279329538345337},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.07853347063064575}],"concepts":[{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.8344719409942627},{"id":"https://openalex.org/C115171683","wikidata":"https://www.wikidata.org/wiki/Q6493038","display_name":"Laser beam quality","level":4,"score":0.832351803779602},{"id":"https://openalex.org/C100796255","wikidata":"https://www.wikidata.org/wiki/Q180407","display_name":"Beam parameter product","level":5,"score":0.8102492690086365},{"id":"https://openalex.org/C520434653","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser","level":2,"score":0.5894269943237305},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5803104639053345},{"id":"https://openalex.org/C119440689","wikidata":"https://www.wikidata.org/wiki/Q4876179","display_name":"Beam diameter","level":4,"score":0.5767431259155273},{"id":"https://openalex.org/C168834538","wikidata":"https://www.wikidata.org/wiki/Q3705329","display_name":"Beam (structure)","level":2,"score":0.549192488193512},{"id":"https://openalex.org/C2779188808","wikidata":"https://www.wikidata.org/wiki/Q1806547","display_name":"Laser ablation","level":3,"score":0.5473551750183105},{"id":"https://openalex.org/C173781883","wikidata":"https://www.wikidata.org/wiki/Q850928","display_name":"M squared","level":5,"score":0.5266989469528198},{"id":"https://openalex.org/C62172962","wikidata":"https://www.wikidata.org/wiki/Q1230543","display_name":"Beam divergence","level":5,"score":0.5063050985336304},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.43991369009017944},{"id":"https://openalex.org/C159108749","wikidata":"https://www.wikidata.org/wiki/Q898896","display_name":"Numerical aperture","level":3,"score":0.4332493245601654},{"id":"https://openalex.org/C2778902805","wikidata":"https://www.wikidata.org/wiki/Q322177","display_name":"Ablation","level":2,"score":0.42584818601608276},{"id":"https://openalex.org/C2984025587","wikidata":"https://www.wikidata.org/wiki/Q38867","display_name":"Laser beams","level":3,"score":0.21268072724342346},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.209203839302063},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.08279329538345337},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.07853347063064575},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C6260449","wikidata":"https://www.wikidata.org/wiki/Q41364","display_name":"Wavelength","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.3390/mi5040943","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi5040943","pdf_url":"https://www.mdpi.com/2072-666X/5/4/943/pdf?version=1414413461","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:9acfbc4539d5415e988e9bfbfe7f47cf","is_oa":true,"landing_page_url":"https://doaj.org/article/9acfbc4539d5415e988e9bfbfe7f47cf","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Micromachines, Vol 5, Iss 4, Pp 943-953 (2014)","raw_type":"article"},{"id":"pmh:oai:mdpi.com:/2072-666X/5/4/943/","is_oa":true,"landing_page_url":"http://doi.org/10.3390/mi5040943","pdf_url":null,"source":{"id":"https://openalex.org/S4306400947","display_name":"MDPI (MDPI AG)","issn_l":null,"issn":null,"is_oa":true,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I4210097602","host_organization_name":"Multidisciplinary Digital Publishing Institute (Switzerland)","host_organization_lineage":["https://openalex.org/I4210097602"],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Micromachines","raw_type":"Text"}],"best_oa_location":{"id":"doi:10.3390/mi5040943","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi5040943","pdf_url":"https://www.mdpi.com/2072-666X/5/4/943/pdf?version=1414413461","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2109008229.pdf","grobid_xml":"https://content.openalex.org/works/W2109008229.grobid-xml"},"referenced_works_count":9,"referenced_works":["https://openalex.org/W1985275046","https://openalex.org/W1999421891","https://openalex.org/W2021732115","https://openalex.org/W2082590833","https://openalex.org/W2114665955","https://openalex.org/W2185906255","https://openalex.org/W2188914486","https://openalex.org/W2296786742","https://openalex.org/W2316978427"],"related_works":["https://openalex.org/W2505517431","https://openalex.org/W2376963088","https://openalex.org/W1986708807","https://openalex.org/W2041059697","https://openalex.org/W2362780884","https://openalex.org/W3148656246","https://openalex.org/W1989019065","https://openalex.org/W1939607537","https://openalex.org/W2366642237","https://openalex.org/W1991364549"],"abstract_inverted_index":{"Thin":[0],"film":[1],"ablation":[2,192,212],"with":[3,22,31,95,127],"pulsed":[4],"nanosecond":[5],"lasers":[6],"can":[7,101,223],"benefit":[8],"from":[9],"the":[10,18,37,40,47,51,57,60,73,82,86,90,157,160,169,181,186,200,216,225],"use":[11],"of":[12,39,50,59,65,72,89,107,136,159,171,189,193,218,228],"beam":[13,20,29,42,48,61,74,109,151,161,174,232],"shaping":[14,62],"optics":[15],"to":[16,80,145],"transform":[17],"Gaussian":[19],"profile":[21,30,43],"a":[23,27,32,96,113,128,147,172,206,229],"circular":[24],"footprint":[25],"into":[26],"Top-Hat":[28,173,230],"rectangular":[33,210],"footprint.":[34],"In":[35,55,164],"general,":[36],"quality":[38,170,207],"transformed":[41],"depends":[44],"strongly":[45],"on":[46,185],"alignment":[49,71,179,220],"entire":[52],"laser":[53,108,119,211,231],"system.":[54],"particular,":[56],"adjustment":[58,158],"element":[63,176],"is":[64,77],"upmost":[66],"importance.":[67],"For":[68],"an":[69],"appropriate":[70],"shaper,":[75],"it":[76],"generally":[78],"necessary":[79],"observe":[81],"intensity":[83,226],"distribution":[84,227],"near":[85],"focal":[87,133],"position":[88],"applied":[91],"focusing":[92],"optics.":[93],"Systems":[94],"low":[97],"numerical":[98],"aperture":[99],"(NA)":[100],"commonly":[102],"be":[103,146],"qualified":[104],"by":[105],"means":[106],"profilers,":[110],"such":[111],"as":[112],"charge-coupled":[114],"device":[115],"(CCD)":[116],"camera.":[117],"However,":[118],"systems":[120,154],"for":[121,149,209],"micromachining":[122],"typically":[123],"employ":[124],"focus":[125],"lenses":[126],"high":[129],"NA,":[130],"which":[131,222],"generate":[132],"spot":[134],"sizes":[135],"only":[137],"several":[138],"microns":[139],"in":[140,180],"diameter.":[141],"This":[142],"turns":[143],"out":[144],"challenge":[148],"common":[150],"profiling":[152,175],"measurement":[153],"and":[155,177,214],"complicates":[156],"shaper":[162],"strongly.":[163],"this":[165],"contribution,":[166],"we":[167,204],"evaluate":[168],"its":[178],"working":[182],"area":[183],"based":[184],"ablated":[187],"geometry":[188],"single":[190],"pulse":[191],"thin":[194],"transparent":[195],"conductive":[196],"oxides.":[197],"To":[198],"determine":[199],"best":[201],"achievable":[202],"adjustment,":[203],"develop":[205],"index":[208],"spots":[213],"investigate":[215],"influences":[217],"different":[219],"parameters,":[221],"affect":[224],"profile.":[233]},"counts_by_year":[{"year":2026,"cited_by_count":3},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":4},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":6},{"year":2021,"cited_by_count":5},{"year":2020,"cited_by_count":4},{"year":2019,"cited_by_count":5},{"year":2018,"cited_by_count":3},{"year":2017,"cited_by_count":2},{"year":2016,"cited_by_count":4},{"year":2015,"cited_by_count":3}],"updated_date":"2026-06-25T08:15:23.626066","created_date":"2025-10-10T00:00:00"}