{"id":"https://openalex.org/W1997786933","doi":"https://doi.org/10.3390/mi5030622","title":"Integrated Magnetic MEMS Relays: Status of the Technology","display_name":"Integrated Magnetic MEMS Relays: Status of the Technology","publication_year":2014,"publication_date":"2014-08-29","ids":{"openalex":"https://openalex.org/W1997786933","doi":"https://doi.org/10.3390/mi5030622","mag":"1997786933"},"language":"en","primary_location":{"id":"doi:10.3390/mi5030622","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi5030622","pdf_url":"https://www.mdpi.com/2072-666X/5/3/622/pdf?version=1409557470","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/2072-666X/5/3/622/pdf?version=1409557470","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5066548006","display_name":"Giuseppe Schiavone","orcid":"https://orcid.org/0000-0001-7121-9825"},"institutions":[{"id":"https://openalex.org/I32062511","display_name":"Heriot-Watt University","ror":"https://ror.org/04mghma93","country_code":"GB","type":"education","lineage":["https://openalex.org/I32062511"]},{"id":"https://openalex.org/I4210087927","display_name":"National Microelectronics Institute","ror":"https://ror.org/003ck6433","country_code":"GB","type":"nonprofit","lineage":["https://openalex.org/I4210087927"]},{"id":"https://openalex.org/I98677209","display_name":"University of Edinburgh","ror":"https://ror.org/01nrxwf90","country_code":"GB","type":"education","lineage":["https://openalex.org/I98677209"]}],"countries":["GB"],"is_corresponding":true,"raw_author_name":"Giuseppe Schiavone","raw_affiliation_strings":["Research Institute of Signals, Sensors and Systems, School of Engineering & Physical Sciences, Heriot-Watt University, Edinburgh EH14 4AS, UK","Scottish Microelectronics Centre, Institute for Integrated Micro and Nano Systems, School of Engineering, The University of Edinburgh, King's Buildings, Edinburgh EH9 3JF, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Research Institute of Signals, Sensors and Systems, School of Engineering & Physical Sciences, Heriot-Watt University, Edinburgh EH14 4AS, UK","institution_ids":["https://openalex.org/I32062511"]},{"raw_affiliation_string":"Scottish Microelectronics Centre, Institute for Integrated Micro and Nano Systems, School of Engineering, The University of Edinburgh, King's Buildings, Edinburgh EH9 3JF, UK","institution_ids":["https://openalex.org/I4210087927","https://openalex.org/I98677209"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5087136593","display_name":"Marc P. Y. Desmulliez","orcid":"https://orcid.org/0000-0002-2441-1598"},"institutions":[{"id":"https://openalex.org/I32062511","display_name":"Heriot-Watt University","ror":"https://ror.org/04mghma93","country_code":"GB","type":"education","lineage":["https://openalex.org/I32062511"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Marc Desmulliez","raw_affiliation_strings":["Research Institute of Signals, Sensors and Systems, School of Engineering & Physical Sciences, Heriot-Watt University, Edinburgh EH14 4AS, UK"],"raw_orcid":"https://orcid.org/0000-0002-2441-1598","affiliations":[{"raw_affiliation_string":"Research Institute of Signals, Sensors and Systems, School of Engineering & Physical Sciences, Heriot-Watt University, Edinburgh EH14 4AS, UK","institution_ids":["https://openalex.org/I32062511"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5056608443","display_name":"A.J. Walton","orcid":"https://orcid.org/0000-0002-8110-2230"},"institutions":[{"id":"https://openalex.org/I4210087927","display_name":"National Microelectronics Institute","ror":"https://ror.org/003ck6433","country_code":"GB","type":"nonprofit","lineage":["https://openalex.org/I4210087927"]},{"id":"https://openalex.org/I98677209","display_name":"University of Edinburgh","ror":"https://ror.org/01nrxwf90","country_code":"GB","type":"education","lineage":["https://openalex.org/I98677209"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Anthony Walton","raw_affiliation_strings":["Scottish Microelectronics Centre, Institute for Integrated Micro and Nano Systems, School of Engineering, The University of Edinburgh, King's Buildings, Edinburgh EH9 3JF, UK"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Scottish Microelectronics Centre, Institute for Integrated Micro and Nano Systems, School of Engineering, The University of Edinburgh, King's Buildings, Edinburgh EH9 3JF, UK","institution_ids":["https://openalex.org/I4210087927","https://openalex.org/I98677209"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5066548006"],"corresponding_institution_ids":["https://openalex.org/I32062511","https://openalex.org/I4210087927","https://openalex.org/I98677209"],"apc_list":{"value":2000,"currency":"CHF","value_usd":2165},"apc_paid":{"value":2000,"currency":"CHF","value_usd":2165},"fwci":2.3417,"has_fulltext":true,"cited_by_count":30,"citation_normalized_percentile":{"value":0.89484751,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":98},"biblio":{"volume":"5","issue":"3","first_page":"622","last_page":"653"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9990000128746033,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.9968000054359436,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8013779520988464},{"id":"https://openalex.org/keywords/microelectronics","display_name":"Microelectronics","score":0.6733580231666565},{"id":"https://openalex.org/keywords/power-consumption","display_name":"Power consumption","score":0.5684237480163574},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.5636669397354126},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.5149972438812256},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.4366086721420288},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.37032702565193176},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.35907790064811707},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3410225212574005},{"id":"https://openalex.org/keywords/power","display_name":"Power (physics)","score":0.33677995204925537},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.24452471733093262},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.07650706171989441}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8013779520988464},{"id":"https://openalex.org/C187937830","wikidata":"https://www.wikidata.org/wiki/Q175403","display_name":"Microelectronics","level":2,"score":0.6733580231666565},{"id":"https://openalex.org/C2984118289","wikidata":"https://www.wikidata.org/wiki/Q29954","display_name":"Power consumption","level":3,"score":0.5684237480163574},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.5636669397354126},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.5149972438812256},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.4366086721420288},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.37032702565193176},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.35907790064811707},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3410225212574005},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.33677995204925537},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.24452471733093262},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.07650706171989441},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":4,"locations":[{"id":"doi:10.3390/mi5030622","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi5030622","pdf_url":"https://www.mdpi.com/2072-666X/5/3/622/pdf?version=1409557470","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:1bbd51f5a50e41149d5f675f2e1944f6","is_oa":true,"landing_page_url":"https://doaj.org/article/1bbd51f5a50e41149d5f675f2e1944f6","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Micromachines, Vol 5, Iss 3, Pp 622-653 (2014)","raw_type":"article"},{"id":"pmh:oai:pure.ed.ac.uk:publications/0fe4a2e7-16d0-493d-bde2-9cfee7682ac3","is_oa":true,"landing_page_url":"https://hdl.handle.net/20.500.11820/0fe4a2e7-16d0-493d-bde2-9cfee7682ac3","pdf_url":null,"source":{"id":"https://openalex.org/S4406922455","display_name":"Edinburgh Research Explorer","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"other-oa","license_id":"https://openalex.org/licenses/other-oa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Schiavone, G, Desmulliez, M P Y & Walton, A J 2014, 'Integrated Magnetic MEMS Relays : Status of the Technology', Micromachines, vol. 5, no. 3, pp. 622-653. https://doi.org/10.3390/mi5030622","raw_type":"info:eu-repo/semantics/publishedVersion"},{"id":"pmh:oai:pure.ed.ac.uk:publications/0fe4a2e7-16d0-493d-bde2-9cfee7682ac3","is_oa":false,"landing_page_url":"https://www.research.ed.ac.uk/en/publications/0fe4a2e7-16d0-493d-bde2-9cfee7682ac3","pdf_url":null,"source":{"id":"https://openalex.org/S4406922455","display_name":"Edinburgh Research Explorer","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":""}],"best_oa_location":{"id":"doi:10.3390/mi5030622","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi5030622","pdf_url":"https://www.mdpi.com/2072-666X/5/3/622/pdf?version=1409557470","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"sustainable_development_goals":[{"score":0.8899999856948853,"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy"}],"awards":[{"id":"https://openalex.org/G3030650342","display_name":null,"funder_award_id":"FS/01/02/10","funder_id":"https://openalex.org/F4320320206","funder_display_name":"Innovative electronics Manufacturing Research Centre"},{"id":"https://openalex.org/G3426597644","display_name":null,"funder_award_id":"EP/H03014X/1","funder_id":"https://openalex.org/F4320334627","funder_display_name":"Engineering and Physical Sciences Research Council"},{"id":"https://openalex.org/G3864409162","display_name":null,"funder_award_id":"DTA/15/2007","funder_id":"https://openalex.org/F4320334627","funder_display_name":"Engineering and Physical Sciences Research Council"},{"id":"https://openalex.org/G4800425939","display_name":"Ultrasound in a Needle: Minimally-invasive High Resolution Imaging for Neurosurgery","funder_award_id":"EP/K020250/1","funder_id":"https://openalex.org/F4320334627","funder_display_name":"Engineering and Physical Sciences Research Council"},{"id":"https://openalex.org/G7779626616","display_name":null,"funder_award_id":"EP/K020250/1","funder_id":"https://openalex.org/F4320334627","funder_display_name":"Engineering and Physical Sciences Research Council"}],"funders":[{"id":"https://openalex.org/F4320320206","display_name":"Innovative electronics Manufacturing Research Centre","ror":"https://ror.org/04vg4w365"},{"id":"https://openalex.org/F4320334627","display_name":"Engineering and Physical Sciences Research Council","ror":"https://ror.org/0439y7842"}],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W1997786933.pdf","grobid_xml":"https://content.openalex.org/works/W1997786933.grobid-xml"},"referenced_works_count":156,"referenced_works":["https://openalex.org/W102057652","https://openalex.org/W193125329","https://openalex.org/W199706877","https://openalex.org/W645502810","https://openalex.org/W956940869","https://openalex.org/W1488343634","https://openalex.org/W1568160296","https://openalex.org/W1791523566","https://openalex.org/W1825897617","https://openalex.org/W1888523366","https://openalex.org/W1919375411","https://openalex.org/W1963691431","https://openalex.org/W1977733550","https://openalex.org/W1978567009","https://openalex.org/W1982911639","https://openalex.org/W1984177402","https://openalex.org/W1985336541","https://openalex.org/W1986176491","https://openalex.org/W1986505968","https://openalex.org/W1989929889","https://openalex.org/W1990652605","https://openalex.org/W1992057257","https://openalex.org/W1995856413","https://openalex.org/W1995900252","https://openalex.org/W1997377175","https://openalex.org/W1998163300","https://openalex.org/W1998343877","https://openalex.org/W1998467257","https://openalex.org/W2003986382","https://openalex.org/W2004127928","https://openalex.org/W2005189854","https://openalex.org/W2005873014","https://openalex.org/W2007784613","https://openalex.org/W2012917475","https://openalex.org/W2016352472","https://openalex.org/W2016475729","https://openalex.org/W2018363058","https://openalex.org/W2018866077","https://openalex.org/W2020377043","https://openalex.org/W2023061992","https://openalex.org/W2024157663","https://openalex.org/W2025584245","https://openalex.org/W2027521932","https://openalex.org/W2027660341","https://openalex.org/W2029668337","https://openalex.org/W2040191795","https://openalex.org/W2044563876","https://openalex.org/W2044828269","https://openalex.org/W2046030042","https://openalex.org/W2047612270","https://openalex.org/W2047659189","https://openalex.org/W2048989815","https://openalex.org/W2049115397","https://openalex.org/W2051826609","https://openalex.org/W2052058076","https://openalex.org/W2054819451","https://openalex.org/W2055284511","https://openalex.org/W2059429151","https://openalex.org/W2061686655","https://openalex.org/W2061901221","https://openalex.org/W2066689248","https://openalex.org/W2076506730","https://openalex.org/W2076622417","https://openalex.org/W2079831792","https://openalex.org/W2080854208","https://openalex.org/W2087939644","https://openalex.org/W2091157984","https://openalex.org/W2091293368","https://openalex.org/W2092678564","https://openalex.org/W2093995103","https://openalex.org/W2094388376","https://openalex.org/W2095839766","https://openalex.org/W2097650800","https://openalex.org/W2098583888","https://openalex.org/W2099525122","https://openalex.org/W2101680297","https://openalex.org/W2102268179","https://openalex.org/W2102669034","https://openalex.org/W2106038354","https://openalex.org/W2107604301","https://openalex.org/W2108324284","https://openalex.org/W2109390871","https://openalex.org/W2109917754","https://openalex.org/W2110413941","https://openalex.org/W2110548898","https://openalex.org/W2114054409","https://openalex.org/W2114276667","https://openalex.org/W2114689113","https://openalex.org/W2115307447","https://openalex.org/W2116482625","https://openalex.org/W2117112020","https://openalex.org/W2117540165","https://openalex.org/W2117867096","https://openalex.org/W2120641576","https://openalex.org/W2122101731","https://openalex.org/W2124004377","https://openalex.org/W2124208038","https://openalex.org/W2124350913","https://openalex.org/W2124539100","https://openalex.org/W2126326964","https://openalex.org/W2127360055","https://openalex.org/W2128090102","https://openalex.org/W2128097663","https://openalex.org/W2128159194","https://openalex.org/W2128640706","https://openalex.org/W2129447045","https://openalex.org/W2132017935","https://openalex.org/W2133926301","https://openalex.org/W2133979361","https://openalex.org/W2135810614","https://openalex.org/W2136322001","https://openalex.org/W2136393168","https://openalex.org/W2136412777","https://openalex.org/W2139880014","https://openalex.org/W2141571834","https://openalex.org/W2141976269","https://openalex.org/W2143914153","https://openalex.org/W2144925909","https://openalex.org/W2146012062","https://openalex.org/W2148936209","https://openalex.org/W2152424132","https://openalex.org/W2155226993","https://openalex.org/W2155256776","https://openalex.org/W2156934353","https://openalex.org/W2157515886","https://openalex.org/W2157668693","https://openalex.org/W2157849892","https://openalex.org/W2158313697","https://openalex.org/W2159018110","https://openalex.org/W2159576494","https://openalex.org/W2160106757","https://openalex.org/W2161442215","https://openalex.org/W2161768008","https://openalex.org/W2165572732","https://openalex.org/W2168271298","https://openalex.org/W2169302972","https://openalex.org/W2169401349","https://openalex.org/W2171424049","https://openalex.org/W2186294695","https://openalex.org/W2524228888","https://openalex.org/W2545247622","https://openalex.org/W2946723398","https://openalex.org/W3034308842","https://openalex.org/W3124332072","https://openalex.org/W3140707511","https://openalex.org/W4230282064","https://openalex.org/W4251463496","https://openalex.org/W4285719527","https://openalex.org/W6638300448","https://openalex.org/W6649326779","https://openalex.org/W6655452075","https://openalex.org/W6667540802","https://openalex.org/W6675459293","https://openalex.org/W6677245582","https://openalex.org/W6682992032","https://openalex.org/W6685281567"],"related_works":["https://openalex.org/W1981400123","https://openalex.org/W2272290532","https://openalex.org/W3016525403","https://openalex.org/W1520169471","https://openalex.org/W3206835165","https://openalex.org/W2527728814","https://openalex.org/W2951474061","https://openalex.org/W2118008391","https://openalex.org/W2109445684","https://openalex.org/W2081082331"],"abstract_inverted_index":{"The":[0],"development":[1],"and":[2,24,54,83,92,123,137],"application":[3],"of":[4,14,48,101,119],"magnetic":[5,9,102,120],"technologies":[6,93],"employing":[7],"microfabricated":[8],"structures":[10],"for":[11,41],"the":[12,22,28,46,71,84,99,117,144,148],"production":[13],"switching":[15,103],"components":[16],"has":[17],"generated":[18],"enormous":[19],"interest":[20],"in":[21,105,141],"scientific":[23],"industrial":[25],"communities":[26],"over":[27],"last":[29],"decade.":[30],"Magnetic":[31,57],"actuation":[32,58],"offers":[33],"many":[34],"benefits":[35],"when":[36],"compared":[37],"to":[38,70,86,97,143,146],"other":[39,74,151],"schemes":[40],"microelectromechanical":[42],"systems":[43],"(MEMS),":[44],"including":[45],"generation":[47],"forces":[49],"that":[50],"have":[51],"higher":[52],"magnitude":[53],"longer":[55],"range.":[56],"can":[59],"be":[60],"achieved":[61],"using":[62],"different":[63],"excitation":[64],"sources,":[65],"which":[66],"create":[67],"challenges":[68],"related":[69],"integration":[72],"with":[73,132,150],"technologies,":[75],"such":[76],"as":[77],"CMOS":[78],"(Complementary":[79],"Metal":[80],"Oxide":[81],"Semiconductor),":[82],"requirement":[85],"reduce":[87],"power":[88,139],"consumption.":[89,113],"Novel":[90],"designs":[91],"are":[94],"therefore":[95],"sought":[96],"enable":[98],"use":[100],"architectures":[104],"integrated":[106],"MEMS":[107,121],"devices,":[108],"without":[109],"incurring":[110],"excessive":[111],"energy":[112],"This":[114],"article":[115],"reviews":[116],"status":[118],"technology":[122,149],"presents":[124],"devices":[125],"recently":[126],"developed":[127],"by":[128],"various":[129],"research":[130],"groups,":[131],"key":[133],"focuses":[134],"on":[135],"integrability":[136],"effective":[138],"management,":[140],"addition":[142],"ability":[145],"integrate":[147],"microelectronic":[152],"fabrication":[153],"processes.":[154]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1},{"year":2022,"cited_by_count":3},{"year":2021,"cited_by_count":6},{"year":2020,"cited_by_count":3},{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":3},{"year":2016,"cited_by_count":5},{"year":2015,"cited_by_count":2},{"year":2014,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2016-06-24T00:00:00"}