{"id":"https://openalex.org/W2057674493","doi":"https://doi.org/10.3390/mi4020232","title":"Fabrication of Nanopillar Micropatterns by Hybrid Mask Lithography for Surface-Directed Liquid Flow","display_name":"Fabrication of Nanopillar Micropatterns by Hybrid Mask Lithography for Surface-Directed Liquid Flow","publication_year":2013,"publication_date":"2013-06-05","ids":{"openalex":"https://openalex.org/W2057674493","doi":"https://doi.org/10.3390/mi4020232","mag":"2057674493"},"language":"en","primary_location":{"id":"doi:10.3390/mi4020232","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi4020232","pdf_url":"https://www.mdpi.com/2072-666X/4/2/232/pdf?version=1370422965","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/2072-666X/4/2/232/pdf?version=1370422965","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5065631742","display_name":"Shinya Sakuma","orcid":"https://orcid.org/0000-0002-4145-7264"},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Shinya Sakuma","raw_affiliation_strings":["Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5008087333","display_name":"Masakuni Sugita","orcid":null},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masakuni Sugita","raw_affiliation_strings":["Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5091532948","display_name":"Fumihito Arai","orcid":"https://orcid.org/0000-0002-2508-1615"},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Fumihito Arai","raw_affiliation_strings":["Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Micro-Nano Systems Engineering, Nagoya University, Nagoya 464-8603, Japan","institution_ids":["https://openalex.org/I60134161"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5065631742"],"corresponding_institution_ids":["https://openalex.org/I60134161"],"apc_list":{"value":2000,"currency":"CHF","value_usd":2165},"apc_paid":{"value":2000,"currency":"CHF","value_usd":2165},"fwci":0.2053,"has_fulltext":true,"cited_by_count":6,"citation_normalized_percentile":{"value":0.58203879,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":95},"biblio":{"volume":"4","issue":"2","first_page":"232","last_page":"242"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11255","display_name":"Microfluidic and Bio-sensing Technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11255","display_name":"Microfluidic and Bio-sensing Technologies","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10313","display_name":"Surface Modification and Superhydrophobicity","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2508","display_name":"Surfaces, Coatings and Films"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10412","display_name":"Microfluidic and Capillary Electrophoresis Applications","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanopillar","display_name":"Nanopillar","score":0.8863843679428101},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.8314377069473267},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.7216686606407166},{"id":"https://openalex.org/keywords/photolithography","display_name":"Photolithography","score":0.6844121217727661},{"id":"https://openalex.org/keywords/photoresist","display_name":"Photoresist","score":0.6119605302810669},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.6032253503799438},{"id":"https://openalex.org/keywords/microfluidics","display_name":"Microfluidics","score":0.5274425148963928},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.4980177879333496},{"id":"https://openalex.org/keywords/maskless-lithography","display_name":"Maskless lithography","score":0.4684458076953888},{"id":"https://openalex.org/keywords/resist","display_name":"Resist","score":0.4355015158653259},{"id":"https://openalex.org/keywords/x-ray-lithography","display_name":"X-ray lithography","score":0.41193583607673645},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.29933756589889526},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2754446268081665},{"id":"https://openalex.org/keywords/electron-beam-lithography","display_name":"Electron-beam lithography","score":0.17161306738853455},{"id":"https://openalex.org/keywords/nanostructure","display_name":"Nanostructure","score":0.1500682532787323}],"concepts":[{"id":"https://openalex.org/C25479853","wikidata":"https://www.wikidata.org/wiki/Q12228614","display_name":"Nanopillar","level":3,"score":0.8863843679428101},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.8314377069473267},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.7216686606407166},{"id":"https://openalex.org/C105487726","wikidata":"https://www.wikidata.org/wiki/Q622938","display_name":"Photolithography","level":2,"score":0.6844121217727661},{"id":"https://openalex.org/C134406635","wikidata":"https://www.wikidata.org/wiki/Q1439684","display_name":"Photoresist","level":3,"score":0.6119605302810669},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.6032253503799438},{"id":"https://openalex.org/C8673954","wikidata":"https://www.wikidata.org/wiki/Q138845","display_name":"Microfluidics","level":2,"score":0.5274425148963928},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.4980177879333496},{"id":"https://openalex.org/C137905882","wikidata":"https://www.wikidata.org/wiki/Q6783445","display_name":"Maskless lithography","level":5,"score":0.4684458076953888},{"id":"https://openalex.org/C53524968","wikidata":"https://www.wikidata.org/wiki/Q7315582","display_name":"Resist","level":3,"score":0.4355015158653259},{"id":"https://openalex.org/C41794268","wikidata":"https://www.wikidata.org/wiki/Q1408939","display_name":"X-ray lithography","level":4,"score":0.41193583607673645},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.29933756589889526},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2754446268081665},{"id":"https://openalex.org/C200274948","wikidata":"https://www.wikidata.org/wiki/Q256845","display_name":"Electron-beam lithography","level":4,"score":0.17161306738853455},{"id":"https://openalex.org/C186187911","wikidata":"https://www.wikidata.org/wiki/Q1093894","display_name":"Nanostructure","level":2,"score":0.1500682532787323},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":3,"locations":[{"id":"doi:10.3390/mi4020232","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi4020232","pdf_url":"https://www.mdpi.com/2072-666X/4/2/232/pdf?version=1370422965","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},{"id":"pmh:oai:CiteSeerX.psu:10.1.1.361.4280","is_oa":false,"landing_page_url":"http://citeseerx.ist.psu.edu/viewdoc/summary?doi=10.1.1.361.4280","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"http://www.mdpi.com/2072-666X/4/2/232/pdf/","raw_type":"text"},{"id":"pmh:oai:doaj.org/article:71b539dfbddd4b2699d3488895b27f4d","is_oa":true,"landing_page_url":"https://doaj.org/article/71b539dfbddd4b2699d3488895b27f4d","pdf_url":null,"source":{"id":"https://openalex.org/S112646816","display_name":"SHILAP Revista de lepidopterolog\u00eda","issn_l":"0300-5267","issn":["0300-5267","2340-4078"],"is_oa":true,"is_in_doaj":true,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"journal"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Micromachines, Vol 4, Iss 2, Pp 232-242 (2013)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.3390/mi4020232","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi4020232","pdf_url":"https://www.mdpi.com/2072-666X/4/2/232/pdf?version=1370422965","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G12401395","display_name":null,"funder_award_id":"Technology","funder_id":"https://openalex.org/F4320320912","funder_display_name":"Ministry of Education, Culture, Sports, Science and Technology"},{"id":"https://openalex.org/G2983449479","display_name":null,"funder_award_id":"Scientific Research","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G3236194794","display_name":null,"funder_award_id":"Grant-in-Aid","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G3459562248","display_name":null,"funder_award_id":"Grant","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G3685851388","display_name":null,"funder_award_id":"23106002","funder_id":"https://openalex.org/F4320320912","funder_display_name":"Ministry of Education, Culture, Sports, Science and Technology"},{"id":"https://openalex.org/G383935966","display_name":"\u7d4c\u6e08\u6210\u9577\u904e\u7a0b\u306b\u304a\u3051\u308b\u6240\u5f97\u5206\u914d","funder_award_id":"31060","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G4874944895","display_name":null,"funder_award_id":"-in-Aid","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G6267471473","display_name":null,"funder_award_id":"Grant-in-Aid","funder_id":"https://openalex.org/F4320320912","funder_display_name":"Ministry of Education, Culture, Sports, Science and Technology"},{"id":"https://openalex.org/G6731395164","display_name":"\u5185\u9678\u30a2\u30b8\u30a2\u306e\u793e\u4f1a\u53f2\u7814\u7a76","funder_award_id":"231060","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G7167128334","display_name":null,"funder_award_id":"Grant-in-Aid for Scientific Researc","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G7337825077","display_name":null,"funder_award_id":"Grant-in-Aid for Sc","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G7482275571","display_name":null,"funder_award_id":"Ministry of Education, Culture, Sports, Science and Technology","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G7599130655","display_name":null,"funder_award_id":"Grant","funder_id":"https://openalex.org/F4320320912","funder_display_name":"Ministry of Education, Culture, Sports, Science and Technology"},{"id":"https://openalex.org/G7752643416","display_name":null,"funder_award_id":"Japan","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"},{"id":"https://openalex.org/G8044579487","display_name":null,"funder_award_id":"Japan","funder_id":"https://openalex.org/F4320320912","funder_display_name":"Ministry of Education, Culture, Sports, Science and Technology"},{"id":"https://openalex.org/G8759943101","display_name":null,"funder_award_id":"rant-in-Aid for Scientific Research","funder_id":"https://openalex.org/F4320334764","funder_display_name":"Japan Society for the Promotion of Science"}],"funders":[{"id":"https://openalex.org/F4320320912","display_name":"Ministry of Education, Culture, Sports, Science and Technology","ror":"https://ror.org/048rj2z13"},{"id":"https://openalex.org/F4320334764","display_name":"Japan Society for the Promotion of Science","ror":"https://ror.org/00hhkn466"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2057674493.pdf","grobid_xml":"https://content.openalex.org/works/W2057674493.grobid-xml"},"referenced_works_count":30,"referenced_works":["https://openalex.org/W630955716","https://openalex.org/W1487014009","https://openalex.org/W1966529974","https://openalex.org/W1969565648","https://openalex.org/W1988186994","https://openalex.org/W1988979733","https://openalex.org/W1997527925","https://openalex.org/W2009544237","https://openalex.org/W2019387487","https://openalex.org/W2023339260","https://openalex.org/W2036710319","https://openalex.org/W2038294174","https://openalex.org/W2048228650","https://openalex.org/W2052319034","https://openalex.org/W2071862327","https://openalex.org/W2080081908","https://openalex.org/W2086449302","https://openalex.org/W2092129509","https://openalex.org/W2103511109","https://openalex.org/W2103547742","https://openalex.org/W2112430908","https://openalex.org/W2121045059","https://openalex.org/W2128969447","https://openalex.org/W2133149764","https://openalex.org/W2137983525","https://openalex.org/W2157533783","https://openalex.org/W2167488641","https://openalex.org/W2168428990","https://openalex.org/W4254778611","https://openalex.org/W6641987518"],"related_works":["https://openalex.org/W2376266960","https://openalex.org/W1599891132","https://openalex.org/W2150695081","https://openalex.org/W2095314224","https://openalex.org/W2069602738","https://openalex.org/W2071670783","https://openalex.org/W2058483223","https://openalex.org/W3016625011","https://openalex.org/W2082661878","https://openalex.org/W2095157408"],"abstract_inverted_index":{"This":[0],"paper":[1],"presents":[2],"a":[3,21,25,28,59,102],"novel":[4],"method":[5],"for":[6,10],"fabricating":[7],"nanopillar":[8,37,79],"micropatterns":[9],"surface-directed":[11,60,67,103],"liquid":[12,61,68,104],"flows.":[13],"It":[14],"employs":[15],"hybrid":[16],"mask":[17,22,53],"lithography,":[18],"which":[19,70],"uses":[20],"consisting":[23],"of":[24,27,46,65,90],"combination":[26],"photoresist":[29],"and":[30,83],"nanoparticles":[31,47],"in":[32,48],"the":[33,43,49,66,74,84,88,93,107],"photolithography":[34],"process.":[35],"The":[36,63],"density":[38],"is":[39],"controlled":[40],"by":[41,73,100],"varying":[42],"weight":[44],"ratio":[45],"composite":[50],"mask.":[51],"Hybrid":[52],"lithography":[54],"was":[55,71,81,95,97,110],"used":[56],"to":[57,78],"fabricate":[58],"flow.":[62,105],"effect":[64],"flow,":[69],"formed":[72],"air-liquid":[75],"interface":[76],"due":[77],"micropatterns,":[80],"evaluated,":[82],"results":[85],"show":[86],"that":[87],"oscillation":[89],"microparticles,":[91],"when":[92],"micro-tool":[94],"actuated,":[96],"dramatically":[98],"reduced":[99],"using":[101],"Moreover,":[106],"target":[108],"particle":[109],"manipulated":[111],"individually":[112],"without":[113],"non-oscillating":[114],"ambient":[115],"particles.":[116]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2022,"cited_by_count":1},{"year":2018,"cited_by_count":1},{"year":2017,"cited_by_count":1},{"year":2016,"cited_by_count":1}],"updated_date":"2026-04-10T15:06:20.359241","created_date":"2025-10-10T00:00:00"}