{"id":"https://openalex.org/W2087167781","doi":"https://doi.org/10.3390/mi3020255","title":"Mechanical Vibrations of Thermally Actuated Silicon Membranes","display_name":"Mechanical Vibrations of Thermally Actuated Silicon Membranes","publication_year":2012,"publication_date":"2012-03-28","ids":{"openalex":"https://openalex.org/W2087167781","doi":"https://doi.org/10.3390/mi3020255","mag":"2087167781"},"language":"en","primary_location":{"id":"doi:10.3390/mi3020255","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi3020255","pdf_url":"https://www.mdpi.com/2072-666X/3/2/255/pdf?version=1332916160","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://www.mdpi.com/2072-666X/3/2/255/pdf?version=1332916160","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5021528643","display_name":"Ivan Puchades","orcid":"https://orcid.org/0000-0002-2242-5937"},"institutions":[{"id":"https://openalex.org/I155173764","display_name":"Rochester Institute of Technology","ror":"https://ror.org/00v4yb702","country_code":"US","type":"education","lineage":["https://openalex.org/I155173764"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Ivan Puchades","raw_affiliation_strings":["Electrical and Microelectronic Engineering Department, Rochester Institute of Technology, 82 Lomb Memorial Dr., Rochester, NY 14623, USA"],"raw_orcid":"https://orcid.org/0000-0002-2242-5937","affiliations":[{"raw_affiliation_string":"Electrical and Microelectronic Engineering Department, Rochester Institute of Technology, 82 Lomb Memorial Dr., Rochester, NY 14623, USA","institution_ids":["https://openalex.org/I155173764"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016331125","display_name":"Mustafa Koz","orcid":"https://orcid.org/0000-0002-2278-565X"},"institutions":[{"id":"https://openalex.org/I155173764","display_name":"Rochester Institute of Technology","ror":"https://ror.org/00v4yb702","country_code":"US","type":"education","lineage":["https://openalex.org/I155173764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Mustafa Koz","raw_affiliation_strings":["Microsystems Engineering Department, Rochester Institute of Technology, 82 Lomb Memorial Dr., Rochester, NY 14623, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Microsystems Engineering Department, Rochester Institute of Technology, 82 Lomb Memorial Dr., Rochester, NY 14623, USA","institution_ids":["https://openalex.org/I155173764"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5109941208","display_name":"Lynn Fuller","orcid":null},"institutions":[{"id":"https://openalex.org/I155173764","display_name":"Rochester Institute of Technology","ror":"https://ror.org/00v4yb702","country_code":"US","type":"education","lineage":["https://openalex.org/I155173764"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Lynn Fuller","raw_affiliation_strings":["Electrical and Microelectronic Engineering Department, Rochester Institute of Technology, 82 Lomb Memorial Dr., Rochester, NY 14623, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electrical and Microelectronic Engineering Department, Rochester Institute of Technology, 82 Lomb Memorial Dr., Rochester, NY 14623, USA","institution_ids":["https://openalex.org/I155173764"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5021528643"],"corresponding_institution_ids":["https://openalex.org/I155173764"],"apc_list":{"value":2000,"currency":"CHF","value_usd":2165},"apc_paid":{"value":2000,"currency":"CHF","value_usd":2165},"fwci":0.2498,"has_fulltext":true,"cited_by_count":8,"citation_normalized_percentile":{"value":0.61941435,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":96},"biblio":{"volume":"3","issue":"2","first_page":"255","last_page":"269"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.7765039205551147},{"id":"https://openalex.org/keywords/vibration","display_name":"Vibration","score":0.7476165294647217},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7165530323982239},{"id":"https://openalex.org/keywords/silicon","display_name":"Silicon","score":0.6718907356262207},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.6545385718345642},{"id":"https://openalex.org/keywords/natural-frequency","display_name":"Natural frequency","score":0.6530318260192871},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.6386504173278809},{"id":"https://openalex.org/keywords/profilometer","display_name":"Profilometer","score":0.597710132598877},{"id":"https://openalex.org/keywords/membrane","display_name":"Membrane","score":0.5122000575065613},{"id":"https://openalex.org/keywords/viscosity","display_name":"Viscosity","score":0.46400657296180725},{"id":"https://openalex.org/keywords/normal-mode","display_name":"Normal mode","score":0.4386635422706604},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.399985134601593},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.38711321353912354},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.2716093063354492},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.2536129057407379},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.13649344444274902},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.09596076607704163},{"id":"https://openalex.org/keywords/chemistry","display_name":"Chemistry","score":0.07446902990341187}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.7765039205551147},{"id":"https://openalex.org/C198394728","wikidata":"https://www.wikidata.org/wiki/Q3695508","display_name":"Vibration","level":2,"score":0.7476165294647217},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7165530323982239},{"id":"https://openalex.org/C544956773","wikidata":"https://www.wikidata.org/wiki/Q670","display_name":"Silicon","level":2,"score":0.6718907356262207},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.6545385718345642},{"id":"https://openalex.org/C78736273","wikidata":"https://www.wikidata.org/wiki/Q946764","display_name":"Natural frequency","level":3,"score":0.6530318260192871},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.6386504173278809},{"id":"https://openalex.org/C79261456","wikidata":"https://www.wikidata.org/wiki/Q443756","display_name":"Profilometer","level":3,"score":0.597710132598877},{"id":"https://openalex.org/C41625074","wikidata":"https://www.wikidata.org/wiki/Q176088","display_name":"Membrane","level":2,"score":0.5122000575065613},{"id":"https://openalex.org/C127172972","wikidata":"https://www.wikidata.org/wiki/Q128709","display_name":"Viscosity","level":2,"score":0.46400657296180725},{"id":"https://openalex.org/C32758168","wikidata":"https://www.wikidata.org/wiki/Q900488","display_name":"Normal mode","level":3,"score":0.4386635422706604},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.399985134601593},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.38711321353912354},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.2716093063354492},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.2536129057407379},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.13649344444274902},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.09596076607704163},{"id":"https://openalex.org/C185592680","wikidata":"https://www.wikidata.org/wiki/Q2329","display_name":"Chemistry","level":0,"score":0.07446902990341187},{"id":"https://openalex.org/C55493867","wikidata":"https://www.wikidata.org/wiki/Q7094","display_name":"Biochemistry","level":1,"score":0.0},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C107365816","wikidata":"https://www.wikidata.org/wiki/Q114817","display_name":"Surface roughness","level":2,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.3390/mi3020255","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi3020255","pdf_url":"https://www.mdpi.com/2072-666X/3/2/255/pdf?version=1332916160","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:74fea38ec4fc48c786d4b3729f288622","is_oa":true,"landing_page_url":"https://doaj.org/article/74fea38ec4fc48c786d4b3729f288622","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by-sa","license_id":"https://openalex.org/licenses/cc-by-sa","version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Micromachines, Vol 3, Iss 2, Pp 255-269 (2012)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.3390/mi3020255","is_oa":true,"landing_page_url":"https://doi.org/10.3390/mi3020255","pdf_url":"https://www.mdpi.com/2072-666X/3/2/255/pdf?version=1332916160","source":{"id":"https://openalex.org/S96702057","display_name":"Micromachines","issn_l":"2072-666X","issn":["2072-666X"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Micromachines","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.699999988079071}],"awards":[],"funders":[],"has_content":{"grobid_xml":true,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2087167781.pdf","grobid_xml":"https://content.openalex.org/works/W2087167781.grobid-xml"},"referenced_works_count":17,"referenced_works":["https://openalex.org/W1523582701","https://openalex.org/W1866246404","https://openalex.org/W1933248899","https://openalex.org/W1973214398","https://openalex.org/W2015621384","https://openalex.org/W2015799617","https://openalex.org/W2037960016","https://openalex.org/W2046683496","https://openalex.org/W2074433209","https://openalex.org/W2092091829","https://openalex.org/W2107781971","https://openalex.org/W2115041746","https://openalex.org/W2116051097","https://openalex.org/W2124372468","https://openalex.org/W2130241746","https://openalex.org/W2139175597","https://openalex.org/W2157763436"],"related_works":["https://openalex.org/W2318290115","https://openalex.org/W581462317","https://openalex.org/W2204095332","https://openalex.org/W2360061061","https://openalex.org/W2582763622","https://openalex.org/W2094063693","https://openalex.org/W2349836732","https://openalex.org/W2011477640","https://openalex.org/W587195877","https://openalex.org/W4211079206"],"abstract_inverted_index":{"A":[0],"thermally-actuated":[1],"micro-electro-mechanical":[2],"(MEMS)":[3],"device":[4],"based":[5],"on":[6],"a":[7,15],"vibrating":[8],"silicon":[9],"membrane":[10,65],"has":[11],"been":[12],"proposed":[13],"as":[14,32],"viscosity":[16],"sensor":[17,31],"by":[18],"the":[19,26,30,51,64,68,84,93,96,99,104],"authors.":[20],"In":[21],"this":[22],"paper":[23],"we":[24],"analyze":[25],"vibration":[27,78],"mode":[28,79,86],"of":[29,63],"it":[33],"vibrates":[34],"freely":[35],"at":[36],"its":[37],"natural":[38,77],"frequency.":[39],"Analytical":[40],"examination":[41],"is":[42,71,80,90],"compared":[43],"to":[44,67,82],"finite":[45],"element":[46],"analysis,":[47,98],"electrical":[48,105],"measurements":[49],"and":[50,74,87,103],"results":[52],"obtained":[53],"through":[54],"real-time":[55],"dynamic":[56],"optical":[57],"surface":[58],"profilometry.":[59],"The":[60,76],"vertical":[61],"movement":[62],"due":[66],"applied":[69],"heat":[70],"characterized":[72],"statically":[73],"dynamically.":[75],"determined":[81],"be":[83],"(1,1)":[85],"good":[88],"correlation":[89],"found":[91],"between":[92],"analytical":[94],"predictions,":[95],"simulation":[97],"observed":[100],"mechanical":[101],"displacement":[102],"measurements.":[106]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":2},{"year":2023,"cited_by_count":1},{"year":2020,"cited_by_count":2},{"year":2017,"cited_by_count":1},{"year":2015,"cited_by_count":1}],"updated_date":"2026-05-21T06:26:12.895304","created_date":"2016-06-24T00:00:00"}