{"id":"https://openalex.org/W4404039177","doi":"https://doi.org/10.3390/jsan13060075","title":"Multi-Domain Data Integration for Plasma Diagnostics in Semiconductor Manufacturing Using Tri-CycleGAN","display_name":"Multi-Domain Data Integration for Plasma Diagnostics in Semiconductor Manufacturing Using Tri-CycleGAN","publication_year":2024,"publication_date":"2024-11-04","ids":{"openalex":"https://openalex.org/W4404039177","doi":"https://doi.org/10.3390/jsan13060075"},"language":"en","primary_location":{"id":"doi:10.3390/jsan13060075","is_oa":true,"landing_page_url":"https://doi.org/10.3390/jsan13060075","pdf_url":null,"source":{"id":"https://openalex.org/S2736633529","display_name":"Journal of Sensor and Actuator Networks","issn_l":"2224-2708","issn":["2224-2708"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Sensor and Actuator Networks","raw_type":"journal-article"},"type":"article","indexed_in":["crossref","doaj"],"open_access":{"is_oa":true,"oa_status":"gold","oa_url":"https://doi.org/10.3390/jsan13060075","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5077055206","display_name":"Minji Kang","orcid":"https://orcid.org/0000-0001-6244-4625"},"institutions":[{"id":"https://openalex.org/I196345858","display_name":"Chungnam National University","ror":"https://ror.org/0227as991","country_code":"KR","type":"education","lineage":["https://openalex.org/I196345858"]},{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Minji Kang","raw_affiliation_strings":["Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea","Semiconductor Manufacturing Research Center, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea","institution_ids":["https://openalex.org/I196345858"]},{"raw_affiliation_string":"Semiconductor Manufacturing Research Center, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea","institution_ids":["https://openalex.org/I4210111434"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046761006","display_name":"Sung Kyu Jang","orcid":"https://orcid.org/0000-0003-0610-0662"},"institutions":[{"id":"https://openalex.org/I4210131650","display_name":"Korea Electronics Technology Institute","ror":"https://ror.org/039k6f508","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I4210089395","https://openalex.org/I4210131650"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Sung Kyu Jang","raw_affiliation_strings":["Electronic Convergence Material and Device Research Center, Korea Electronics Technology Institute (KETI), Seongnam 13509, Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0003-0610-0662","affiliations":[{"raw_affiliation_string":"Electronic Convergence Material and Device Research Center, Korea Electronics Technology Institute (KETI), Seongnam 13509, Republic of Korea","institution_ids":["https://openalex.org/I4210131650"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004323813","display_name":"J.H. Kim","orcid":null},"institutions":[{"id":"https://openalex.org/I4210131650","display_name":"Korea Electronics Technology Institute","ror":"https://ror.org/039k6f508","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I4210089395","https://openalex.org/I4210131650"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Jihun Kim","raw_affiliation_strings":["Electronic Convergence Material and Device Research Center, Korea Electronics Technology Institute (KETI), Seongnam 13509, Republic of Korea"],"raw_orcid":"https://orcid.org/0009-0007-8945-914X","affiliations":[{"raw_affiliation_string":"Electronic Convergence Material and Device Research Center, Korea Electronics Technology Institute (KETI), Seongnam 13509, Republic of Korea","institution_ids":["https://openalex.org/I4210131650"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100649753","display_name":"Seong-Ho Kim","orcid":"https://orcid.org/0000-0002-5787-7650"},"institutions":[{"id":"https://openalex.org/I196345858","display_name":"Chungnam National University","ror":"https://ror.org/0227as991","country_code":"KR","type":"education","lineage":["https://openalex.org/I196345858"]},{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Seongho Kim","raw_affiliation_strings":["Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea","Semiconductor Manufacturing Research Center, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea","institution_ids":["https://openalex.org/I196345858"]},{"raw_affiliation_string":"Semiconductor Manufacturing Research Center, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea","institution_ids":["https://openalex.org/I4210111434"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5016131218","display_name":"Changmin Kim","orcid":"https://orcid.org/0000-0001-5515-4611"},"institutions":[{"id":"https://openalex.org/I2250650973","display_name":"Samsung (South Korea)","ror":"https://ror.org/04w3jy968","country_code":"KR","type":"company","lineage":["https://openalex.org/I2250650973"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Changmin Kim","raw_affiliation_strings":["Memory Etch Technology Team, Samsung Electronics, Pyeongtaek 17786, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Memory Etch Technology Team, Samsung Electronics, Pyeongtaek 17786, Republic of Korea","institution_ids":["https://openalex.org/I2250650973"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5074901895","display_name":"Hyo\u2010Chang Lee","orcid":"https://orcid.org/0000-0003-2754-1512"},"institutions":[{"id":"https://openalex.org/I24456540","display_name":"Korea Aerospace University","ror":"https://ror.org/05jmm0651","country_code":"KR","type":"education","lineage":["https://openalex.org/I24456540"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Hyo-Chang Lee","raw_affiliation_strings":["School of Electronics and Computer Engineering, Korea Aerospace University (KAU), Goyang 10540, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Electronics and Computer Engineering, Korea Aerospace University (KAU), Goyang 10540, Republic of Korea","institution_ids":["https://openalex.org/I24456540"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5103531082","display_name":"Woo-Seok Kang","orcid":null},"institutions":[{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]},{"id":"https://openalex.org/I88761825","display_name":"Korea University of Science and Technology","ror":"https://ror.org/000qzf213","country_code":"KR","type":"education","lineage":["https://openalex.org/I88761825"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Wooseok Kang","raw_affiliation_strings":["Mechanical Engineering, KIMM Campus, University of Science & Technology (UST), Daejeon 34113, Republic of Korea","Semiconductor Manufacturing Research Center, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Mechanical Engineering, KIMM Campus, University of Science & Technology (UST), Daejeon 34113, Republic of Korea","institution_ids":["https://openalex.org/I88761825"]},{"raw_affiliation_string":"Semiconductor Manufacturing Research Center, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea","institution_ids":["https://openalex.org/I4210111434"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5046575574","display_name":"Min Sup Choi","orcid":"https://orcid.org/0000-0002-8448-4043"},"institutions":[{"id":"https://openalex.org/I196345858","display_name":"Chungnam National University","ror":"https://ror.org/0227as991","country_code":"KR","type":"education","lineage":["https://openalex.org/I196345858"]}],"countries":["KR"],"is_corresponding":false,"raw_author_name":"Min Sup Choi","raw_affiliation_strings":["Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Materials Science and Engineering, Chungnam National University (CNU), Daejeon 34134, Republic of Korea","institution_ids":["https://openalex.org/I196345858"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102721397","display_name":"Hyeongkeun Kim","orcid":null},"institutions":[{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]},{"id":"https://openalex.org/I4210131650","display_name":"Korea Electronics Technology Institute","ror":"https://ror.org/039k6f508","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I4210089395","https://openalex.org/I4210131650"]},{"id":"https://openalex.org/I88761825","display_name":"Korea University of Science and Technology","ror":"https://ror.org/000qzf213","country_code":"KR","type":"education","lineage":["https://openalex.org/I88761825"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Hyeongkeun Kim","raw_affiliation_strings":["Electronic Convergence Material and Device Research Center, Korea Electronics Technology Institute (KETI), Seongnam 13509, Republic of Korea","Nano-Mechatronics, KIMM Campus, University of Science & Technology (UST), Daejeon 34113, Republic of Korea","Semiconductor Manufacturing Research Center, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Electronic Convergence Material and Device Research Center, Korea Electronics Technology Institute (KETI), Seongnam 13509, Republic of Korea","institution_ids":["https://openalex.org/I4210131650"]},{"raw_affiliation_string":"Nano-Mechatronics, KIMM Campus, University of Science & Technology (UST), Daejeon 34113, Republic of Korea","institution_ids":["https://openalex.org/I88761825"]},{"raw_affiliation_string":"Semiconductor Manufacturing Research Center, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea","institution_ids":["https://openalex.org/I4210111434"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5025326808","display_name":"Hyeong\u2010U Kim","orcid":"https://orcid.org/0000-0002-0018-9603"},"institutions":[{"id":"https://openalex.org/I4210111434","display_name":"Korea Institute of Machinery & Materials","ror":"https://ror.org/01qcq9d74","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I2801339556","https://openalex.org/I4210111434","https://openalex.org/I4210144908","https://openalex.org/I4387152098","https://openalex.org/I4387152098"]},{"id":"https://openalex.org/I4210131650","display_name":"Korea Electronics Technology Institute","ror":"https://ror.org/039k6f508","country_code":"KR","type":"facility","lineage":["https://openalex.org/I2801339556","https://openalex.org/I4210089395","https://openalex.org/I4210131650"]},{"id":"https://openalex.org/I88761825","display_name":"Korea University of Science and Technology","ror":"https://ror.org/000qzf213","country_code":"KR","type":"education","lineage":["https://openalex.org/I88761825"]}],"countries":["KR"],"is_corresponding":true,"raw_author_name":"Hyeong-U Kim","raw_affiliation_strings":["Electronic Convergence Material and Device Research Center, Korea Electronics Technology Institute (KETI), Seongnam 13509, Republic of Korea","Nano-Mechatronics, KIMM Campus, University of Science & Technology (UST), Daejeon 34113, Republic of Korea","Semiconductor Manufacturing Research Center, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea"],"raw_orcid":"https://orcid.org/0000-0002-0018-9603","affiliations":[{"raw_affiliation_string":"Electronic Convergence Material and Device Research Center, Korea Electronics Technology Institute (KETI), Seongnam 13509, Republic of Korea","institution_ids":["https://openalex.org/I4210131650"]},{"raw_affiliation_string":"Nano-Mechatronics, KIMM Campus, University of Science & Technology (UST), Daejeon 34113, Republic of Korea","institution_ids":["https://openalex.org/I88761825"]},{"raw_affiliation_string":"Semiconductor Manufacturing Research Center, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea","institution_ids":["https://openalex.org/I4210111434"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":10,"corresponding_author_ids":["https://openalex.org/A5025326808","https://openalex.org/A5102721397"],"corresponding_institution_ids":["https://openalex.org/I4210111434","https://openalex.org/I4210131650","https://openalex.org/I88761825"],"apc_list":{"value":1600,"currency":"CHF","value_usd":1732},"apc_paid":{"value":1600,"currency":"CHF","value_usd":1732},"fwci":0.5024,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.60046873,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":96},"biblio":{"volume":"13","issue":"6","first_page":"75","last_page":"75"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11854","display_name":"Laser-induced spectroscopy and plasma","score":0.9962000250816345,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11854","display_name":"Laser-induced spectroscopy and plasma","score":0.9962000250816345,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10781","display_name":"Plasma Diagnostics and Applications","score":0.9954000115394592,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9829999804496765,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.7692627906799316},{"id":"https://openalex.org/keywords/domain","display_name":"Domain (mathematical analysis)","score":0.6833783984184265},{"id":"https://openalex.org/keywords/plasma","display_name":"Plasma","score":0.6305592060089111},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.5550569891929626},{"id":"https://openalex.org/keywords/semiconductor","display_name":"Semiconductor","score":0.46828362345695496},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.16742554306983948},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.16718041896820068},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.0871264636516571},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.06037616729736328}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.7692627906799316},{"id":"https://openalex.org/C36503486","wikidata":"https://www.wikidata.org/wiki/Q11235244","display_name":"Domain (mathematical analysis)","level":2,"score":0.6833783984184265},{"id":"https://openalex.org/C82706917","wikidata":"https://www.wikidata.org/wiki/Q10251","display_name":"Plasma","level":2,"score":0.6305592060089111},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.5550569891929626},{"id":"https://openalex.org/C108225325","wikidata":"https://www.wikidata.org/wiki/Q11456","display_name":"Semiconductor","level":2,"score":0.46828362345695496},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.16742554306983948},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.16718041896820068},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0871264636516571},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.06037616729736328},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.0},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.3390/jsan13060075","is_oa":true,"landing_page_url":"https://doi.org/10.3390/jsan13060075","pdf_url":null,"source":{"id":"https://openalex.org/S2736633529","display_name":"Journal of Sensor and Actuator Networks","issn_l":"2224-2708","issn":["2224-2708"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Sensor and Actuator Networks","raw_type":"journal-article"},{"id":"pmh:oai:doaj.org/article:5a6da56cd858405ab2d3f9c27a5ee8db","is_oa":false,"landing_page_url":"https://doaj.org/article/5a6da56cd858405ab2d3f9c27a5ee8db","pdf_url":null,"source":{"id":"https://openalex.org/S4306401280","display_name":"DOAJ (DOAJ: Directory of Open Access Journals)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Journal of Sensor and Actuator Networks, Vol 13, Iss 6, p 75 (2024)","raw_type":"article"}],"best_oa_location":{"id":"doi:10.3390/jsan13060075","is_oa":true,"landing_page_url":"https://doi.org/10.3390/jsan13060075","pdf_url":null,"source":{"id":"https://openalex.org/S2736633529","display_name":"Journal of Sensor and Actuator Networks","issn_l":"2224-2708","issn":["2224-2708"],"is_oa":true,"is_in_doaj":true,"is_core":true,"host_organization":"https://openalex.org/P4310310987","host_organization_name":"Multidisciplinary Digital Publishing Institute","host_organization_lineage":["https://openalex.org/P4310310987"],"host_organization_lineage_names":["Multidisciplinary Digital Publishing Institute"],"type":"journal"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Journal of Sensor and Actuator Networks","raw_type":"journal-article"},"sustainable_development_goals":[],"awards":[{"id":"https://openalex.org/G5114552660","display_name":null,"funder_award_id":"2020M3H4A3081879","funder_id":"https://openalex.org/F4320328359","funder_display_name":"Ministry of Science and ICT, South Korea"}],"funders":[{"id":"https://openalex.org/F4320328359","display_name":"Ministry of Science and ICT, South Korea","ror":"https://ror.org/01wpjm123"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":47,"referenced_works":["https://openalex.org/W1665214252","https://openalex.org/W1965061200","https://openalex.org/W1969852806","https://openalex.org/W2007176025","https://openalex.org/W2014453288","https://openalex.org/W2017270223","https://openalex.org/W2019212189","https://openalex.org/W2022090380","https://openalex.org/W2032062662","https://openalex.org/W2062799632","https://openalex.org/W2065955612","https://openalex.org/W2066615746","https://openalex.org/W2074224985","https://openalex.org/W2094427838","https://openalex.org/W2095567118","https://openalex.org/W2127939621","https://openalex.org/W2132924665","https://openalex.org/W2147800946","https://openalex.org/W2150109955","https://openalex.org/W2170327781","https://openalex.org/W2194775991","https://openalex.org/W2478144683","https://openalex.org/W2493880907","https://openalex.org/W2501882354","https://openalex.org/W2553989723","https://openalex.org/W2593768305","https://openalex.org/W2784936144","https://openalex.org/W2901899749","https://openalex.org/W2932343923","https://openalex.org/W2952935478","https://openalex.org/W2962793481","https://openalex.org/W2967663333","https://openalex.org/W3008674449","https://openalex.org/W3034017433","https://openalex.org/W3100219567","https://openalex.org/W3136994557","https://openalex.org/W3173624128","https://openalex.org/W3210528925","https://openalex.org/W4225666552","https://openalex.org/W4317213521","https://openalex.org/W4377030229","https://openalex.org/W4387149357","https://openalex.org/W4392109432","https://openalex.org/W4396637372","https://openalex.org/W4400118516","https://openalex.org/W4402598076","https://openalex.org/W6761336417"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W2390279801","https://openalex.org/W4391913857","https://openalex.org/W2358668433","https://openalex.org/W4396701345","https://openalex.org/W2376932109","https://openalex.org/W2001405890","https://openalex.org/W4396696052"],"abstract_inverted_index":{"The":[0,90,130],"precise":[1],"monitoring":[2],"of":[3,76,86,163],"chemical":[4],"reactions":[5],"in":[6,122,152,168],"plasma-based":[7],"processes":[8],"is":[9],"crucial":[10],"for":[11,62,82,142,160],"advanced":[12],"semiconductor":[13,153],"manufacturing.":[14,154],"This":[15,71,155],"study":[16],"integrates":[17],"three":[18,59],"diagnostic":[19,88,136,166],"techniques\u2014Optical":[20],"Emission":[21],"Spectroscopy":[22],"(OES),":[23],"Quadrupole":[24],"Mass":[25,30],"Spectrometry":[26,31],"(QMS),":[27],"and":[28,45,69,99,149],"Time-of-Flight":[29],"(ToF-MS)\u2014into":[32],"a":[33,54,100,139,158],"reactive":[34],"ion":[35],"etcher":[36],"(RIE)":[37],"system":[38],"to":[39,95,104,133],"analyze":[40],"CF4-based":[41],"plasma.":[42],"To":[43],"synchronize":[44],"integrate":[46],"data":[47,64,77,110,126,137],"from":[48],"these":[49],"different":[50],"domains,":[51,79],"we":[52],"developed":[53],"Tri-CycleGAN":[55,117],"model":[56,91,118],"that":[57,115],"utilizes":[58],"interconnected":[60],"CycleGANs":[61],"bi-directional":[63],"transformation":[65],"between":[66],"OES,":[67],"QMS,":[68],"ToF-MS.":[70],"configuration":[72],"enables":[73],"accurate":[74],"mapping":[75],"across":[78],"effectively":[80],"compensating":[81],"the":[83,116],"blind":[84],"spots":[85],"individual":[87],"techniques.":[89],"incorporates":[92],"self-attention":[93],"mechanisms":[94],"address":[96],"temporal":[97],"misalignments":[98],"direct":[101],"loss":[102],"function":[103],"preserve":[105],"fine-grained":[106],"features,":[107],"further":[108],"enhancing":[109],"accuracy.":[111],"Experimental":[112],"results":[113],"show":[114],"achieves":[119],"high":[120],"consistency":[121],"reconstructing":[123],"plasma":[124,143,170],"measurement":[125],"under":[127],"various":[128],"conditions.":[129],"model\u2019s":[131],"ability":[132],"fuse":[134],"multi-domain":[135],"offers":[138],"robust":[140],"solution":[141],"monitoring,":[144],"potentially":[145],"improving":[146],"precision,":[147],"yield,":[148],"process":[150],"control":[151],"work":[156],"lays":[157],"foundation":[159],"future":[161],"applications":[162],"machine":[164],"learning-based":[165],"integration":[167],"complex":[169],"environments.":[171]},"counts_by_year":[{"year":2025,"cited_by_count":2}],"updated_date":"2026-05-06T08:25:59.206177","created_date":"2025-10-10T00:00:00"}