{"id":"https://openalex.org/W4410584042","doi":"https://doi.org/10.23919/date64628.2025.10993108","title":"LLM-SRAF: Sub-Resolution Assist Feature Generation Using Large Language Model","display_name":"LLM-SRAF: Sub-Resolution Assist Feature Generation Using Large Language Model","publication_year":2025,"publication_date":"2025-03-31","ids":{"openalex":"https://openalex.org/W4410584042","doi":"https://doi.org/10.23919/date64628.2025.10993108"},"language":"en","primary_location":{"id":"doi:10.23919/date64628.2025.10993108","is_oa":false,"landing_page_url":"https://doi.org/10.23919/date64628.2025.10993108","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 Design, Automation & Test in Europe Conference (DATE)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100460608","display_name":"Tianyi Li","orcid":"https://orcid.org/0000-0002-6234-6096"},"institutions":[{"id":"https://openalex.org/I30809798","display_name":"ShanghaiTech University","ror":"https://ror.org/030bhh786","country_code":"CN","type":"education","lineage":["https://openalex.org/I30809798"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Tianyi Li","raw_affiliation_strings":["ShanghaiTech University"],"affiliations":[{"raw_affiliation_string":"ShanghaiTech University","institution_ids":["https://openalex.org/I30809798"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108568640","display_name":"Z.M. Tang","orcid":"https://orcid.org/0009-0005-2255-7226"},"institutions":[{"id":"https://openalex.org/I30809798","display_name":"ShanghaiTech University","ror":"https://ror.org/030bhh786","country_code":"CN","type":"education","lineage":["https://openalex.org/I30809798"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhexin Tang","raw_affiliation_strings":["ShanghaiTech University"],"affiliations":[{"raw_affiliation_string":"ShanghaiTech University","institution_ids":["https://openalex.org/I30809798"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5044084188","display_name":"Tao Wu","orcid":"https://orcid.org/0000-0002-8999-9628"},"institutions":[{"id":"https://openalex.org/I30809798","display_name":"ShanghaiTech University","ror":"https://ror.org/030bhh786","country_code":"CN","type":"education","lineage":["https://openalex.org/I30809798"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Tao Wu","raw_affiliation_strings":["ShanghaiTech University"],"affiliations":[{"raw_affiliation_string":"ShanghaiTech University","institution_ids":["https://openalex.org/I30809798"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101153533","display_name":"Bei Yu","orcid":null},"institutions":[{"id":"https://openalex.org/I177725633","display_name":"Chinese University of Hong Kong","ror":"https://ror.org/00t33hh48","country_code":"CN","type":"education","lineage":["https://openalex.org/I177725633"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Bei Yu","raw_affiliation_strings":["Chinese University of Hong Kong"],"affiliations":[{"raw_affiliation_string":"Chinese University of Hong Kong","institution_ids":["https://openalex.org/I177725633"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100564692","display_name":"Jingyi Yu","orcid":"https://orcid.org/0009-0001-7113-3893"},"institutions":[{"id":"https://openalex.org/I30809798","display_name":"ShanghaiTech University","ror":"https://ror.org/030bhh786","country_code":"CN","type":"education","lineage":["https://openalex.org/I30809798"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jingyi Yu","raw_affiliation_strings":["ShanghaiTech University"],"affiliations":[{"raw_affiliation_string":"ShanghaiTech University","institution_ids":["https://openalex.org/I30809798"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101413344","display_name":"Hao Geng","orcid":"https://orcid.org/0000-0002-0943-7714"},"institutions":[{"id":"https://openalex.org/I30809798","display_name":"ShanghaiTech University","ror":"https://ror.org/030bhh786","country_code":"CN","type":"education","lineage":["https://openalex.org/I30809798"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Hao Geng","raw_affiliation_strings":["ShanghaiTech University"],"affiliations":[{"raw_affiliation_string":"ShanghaiTech University","institution_ids":["https://openalex.org/I30809798"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":["https://openalex.org/A5100460608"],"corresponding_institution_ids":["https://openalex.org/I30809798"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.05710066,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"7"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10181","display_name":"Natural Language Processing Techniques","score":0.9799000024795532,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10181","display_name":"Natural Language Processing Techniques","score":0.9799000024795532,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10028","display_name":"Topic Modeling","score":0.9704999923706055,"subfield":{"id":"https://openalex.org/subfields/1702","display_name":"Artificial Intelligence"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11714","display_name":"Multimodal Machine Learning Applications","score":0.9146999716758728,"subfield":{"id":"https://openalex.org/subfields/1707","display_name":"Computer Vision and Pattern Recognition"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.7318646311759949},{"id":"https://openalex.org/keywords/feature","display_name":"Feature (linguistics)","score":0.5091919302940369},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.348043292760849}],"concepts":[{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.7318646311759949},{"id":"https://openalex.org/C2776401178","wikidata":"https://www.wikidata.org/wiki/Q12050496","display_name":"Feature (linguistics)","level":2,"score":0.5091919302940369},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.348043292760849},{"id":"https://openalex.org/C41895202","wikidata":"https://www.wikidata.org/wiki/Q8162","display_name":"Linguistics","level":1,"score":0.0},{"id":"https://openalex.org/C138885662","wikidata":"https://www.wikidata.org/wiki/Q5891","display_name":"Philosophy","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.23919/date64628.2025.10993108","is_oa":false,"landing_page_url":"https://doi.org/10.23919/date64628.2025.10993108","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2025 Design, Automation & Test in Europe Conference (DATE)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":13,"referenced_works":["https://openalex.org/W1966727831","https://openalex.org/W1989181626","https://openalex.org/W2021209310","https://openalex.org/W2029203814","https://openalex.org/W2329157012","https://openalex.org/W2974976722","https://openalex.org/W3027658987","https://openalex.org/W4312121085","https://openalex.org/W4319993468","https://openalex.org/W4404134168","https://openalex.org/W6739585900","https://openalex.org/W6796581206","https://openalex.org/W6850625674"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W2390279801","https://openalex.org/W4391913857","https://openalex.org/W2358668433","https://openalex.org/W4396701345","https://openalex.org/W2376932109","https://openalex.org/W2001405890","https://openalex.org/W4396696052"],"abstract_inverted_index":{"As":[0],"integrated":[1],"circuit":[2],"(IC)":[3],"feature":[4],"sizes":[5],"continue":[6],"to":[7,96,112,116,160],"shrink,":[8],"using":[9],"sub-resolution":[10],"assist":[11],"features":[12],"(SRAF)":[13],"becomes":[14],"increasingly":[15],"crucial":[16],"for":[17,39,62],"improving":[18],"wafer":[19],"pattern":[20],"resolution":[21],"and":[22,35,46,92,103,120,144],"fidelity.":[23],"However,":[24],"model-based":[25],"SRAF":[26,63,74,82,123],"insertion":[27],"techniques,":[28],"while":[29],"accurate,":[30],"require":[31],"substantial":[32],"computational":[33],"resources":[34],"are":[36,110],"often":[37],"impractical":[38],"industrial":[40],"scenarios.":[41],"This":[42],"demands":[43],"more":[44],"efficient":[45],"industry-compatible":[47],"methods":[48,133],"that":[49,128],"maintain":[50],"high":[51],"performance.":[52],"In":[53],"this":[54],"work,":[55],"we":[56],"introduce":[57],"LLM-SRAF,":[58],"a":[59,67],"novel":[60],"framework":[61],"generation":[64,83],"driven":[65],"by":[66],"large":[68],"language":[69],"model":[70,115],"fine-tuned":[71],"on":[72],"an":[73],"dataset.":[75],"LLM-SRAF":[76,129,154],"accepts":[77],"semantic":[78],"prompt":[79],"inputs,":[80],"including":[81,139],"task":[84],"descriptions,":[85,95],"OPC":[86],"recipe,":[87],"lithography":[88],"conditions,":[89],"mask":[90,137],"rules,":[91],"sequential":[93],"layout":[94],"directly":[97],"generate":[98],"SRAFs.":[99],"Both":[100],"supervised":[101],"fine-tuning":[102],"reinforcement":[104],"learning":[105],"with":[106],"human":[107],"feedback":[108],"(RLHF)":[109],"employed":[111],"enable":[113],"the":[114,151,161],"acquire":[117],"domain-specific":[118],"knowledge":[119],"specialize":[121],"in":[122,134],"generation.":[124],"Experimental":[125],"results":[126],"show":[127],"outperforms":[130],"existing":[131],"state-of-the-art":[132],"metrics":[135],"of":[136,153],"quality,":[138],"edge":[140],"placement":[141],"error":[142],"(EPE)":[143],"process":[145],"variation":[146],"band":[147],"(PVB)":[148],"area.":[149],"Moreover,":[150],"runtime":[152],"is":[155],"also":[156],"3x":[157],"faster":[158],"compared":[159],"Calibre":[162],"commercial":[163],"tool.":[164]},"counts_by_year":[],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}