{"id":"https://openalex.org/W4385192485","doi":"https://doi.org/10.23919/vlsitechnologyandcir57934.2023.10185430","title":"Molybdenum Nitride as a Scalable and Thermally Stable pWFM for CFET","display_name":"Molybdenum Nitride as a Scalable and Thermally Stable pWFM for CFET","publication_year":2023,"publication_date":"2023-06-11","ids":{"openalex":"https://openalex.org/W4385192485","doi":"https://doi.org/10.23919/vlsitechnologyandcir57934.2023.10185430"},"language":"en","primary_location":{"id":"doi:10.23919/vlsitechnologyandcir57934.2023.10185430","is_oa":false,"landing_page_url":"https://doi.org/10.23919/vlsitechnologyandcir57934.2023.10185430","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5005695208","display_name":"Hiroaki Arimura","orcid":"https://orcid.org/0000-0002-3138-708X"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":true,"raw_author_name":"H. Arimura","raw_affiliation_strings":["imec, Leuven,Belgium","imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034287544","display_name":"S. Brus","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"S. Brus","raw_affiliation_strings":["imec, Leuven,Belgium","imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068577719","display_name":"J. Franco","orcid":"https://orcid.org/0000-0002-7382-8605"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"J. Franco","raw_affiliation_strings":["imec, Leuven,Belgium","imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065941151","display_name":"Yusuke Oniki","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"Y. Oniki","raw_affiliation_strings":["imec, Leuven,Belgium","imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019061501","display_name":"A. Vandooren","orcid":"https://orcid.org/0000-0002-2412-0176"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"A. Vandooren","raw_affiliation_strings":["imec, Leuven,Belgium","imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043844856","display_name":"Thierry Conard","orcid":"https://orcid.org/0000-0002-4298-5851"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"T. Conard","raw_affiliation_strings":["imec, Leuven,Belgium","imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007704072","display_name":"B. T. Chan","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"B.-T. Chan","raw_affiliation_strings":["imec, Leuven,Belgium","imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100820212","display_name":"Balakrishnan Kannan","orcid":null},"institutions":[{"id":"https://openalex.org/I927159995","display_name":"ASM International","ror":"https://ror.org/0244fmj21","country_code":"US","type":"other","lineage":["https://openalex.org/I927159995"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"B. Kannan","raw_affiliation_strings":["ASM America,Phoenix,USA","ASM America, Phoenix, USA"],"affiliations":[{"raw_affiliation_string":"ASM America,Phoenix,USA","institution_ids":["https://openalex.org/I927159995"]},{"raw_affiliation_string":"ASM America, Phoenix, USA","institution_ids":["https://openalex.org/I927159995"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064811755","display_name":"M. Samiee","orcid":null},"institutions":[{"id":"https://openalex.org/I927159995","display_name":"ASM International","ror":"https://ror.org/0244fmj21","country_code":"US","type":"other","lineage":["https://openalex.org/I927159995"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"M. Samiee","raw_affiliation_strings":["ASM America,Phoenix,USA","ASM America, Phoenix, USA"],"affiliations":[{"raw_affiliation_string":"ASM America,Phoenix,USA","institution_ids":["https://openalex.org/I927159995"]},{"raw_affiliation_string":"ASM America, Phoenix, USA","institution_ids":["https://openalex.org/I927159995"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100318134","display_name":"Wei Li","orcid":"https://orcid.org/0000-0002-2227-9431"},"institutions":[{"id":"https://openalex.org/I927159995","display_name":"ASM International","ror":"https://ror.org/0244fmj21","country_code":"US","type":"other","lineage":["https://openalex.org/I927159995"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"W. Li","raw_affiliation_strings":["ASM America,Phoenix,USA","ASM America, Phoenix, USA"],"affiliations":[{"raw_affiliation_string":"ASM America,Phoenix,USA","institution_ids":["https://openalex.org/I927159995"]},{"raw_affiliation_string":"ASM America, Phoenix, USA","institution_ids":["https://openalex.org/I927159995"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5040860378","display_name":"Petro Deminskyi","orcid":"https://orcid.org/0000-0002-7656-2902"},"institutions":[{"id":"https://openalex.org/I4210152249","display_name":"ASM International (Finland)","ror":"https://ror.org/05wsk5f87","country_code":"FI","type":"company","lineage":["https://openalex.org/I4210092504","https://openalex.org/I4210152249"]}],"countries":["FI"],"is_corresponding":false,"raw_author_name":"P. Deminskyi","raw_affiliation_strings":["ASM Microchemistry Oy,Helsinki,Finland","ASM Microchemistry Oy, Helsinki, Finland"],"affiliations":[{"raw_affiliation_string":"ASM Microchemistry Oy,Helsinki,Finland","institution_ids":["https://openalex.org/I4210152249"]},{"raw_affiliation_string":"ASM Microchemistry Oy, Helsinki, Finland","institution_ids":["https://openalex.org/I4210152249"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5024070960","display_name":"Eric Shero","orcid":null},"institutions":[{"id":"https://openalex.org/I927159995","display_name":"ASM International","ror":"https://ror.org/0244fmj21","country_code":"US","type":"other","lineage":["https://openalex.org/I927159995"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"E. Shero","raw_affiliation_strings":["ASM America,Phoenix,USA","ASM America, Phoenix, USA"],"affiliations":[{"raw_affiliation_string":"ASM America,Phoenix,USA","institution_ids":["https://openalex.org/I927159995"]},{"raw_affiliation_string":"ASM America, Phoenix, USA","institution_ids":["https://openalex.org/I927159995"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5064968736","display_name":"Jonathan R. Bakke","orcid":null},"institutions":[{"id":"https://openalex.org/I927159995","display_name":"ASM International","ror":"https://ror.org/0244fmj21","country_code":"US","type":"other","lineage":["https://openalex.org/I927159995"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"J. Bakke","raw_affiliation_strings":["ASM America,Phoenix,USA","ASM America, Phoenix, USA"],"affiliations":[{"raw_affiliation_string":"ASM America,Phoenix,USA","institution_ids":["https://openalex.org/I927159995"]},{"raw_affiliation_string":"ASM America, Phoenix, USA","institution_ids":["https://openalex.org/I927159995"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5109346277","display_name":"N. Jourdan","orcid":null},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"N. Jourdan","raw_affiliation_strings":["imec, Leuven,Belgium","imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5076416778","display_name":"Giuseppe Alessio Verni","orcid":"https://orcid.org/0000-0002-5512-5930"},"institutions":[{"id":"https://openalex.org/I4210152249","display_name":"ASM International (Finland)","ror":"https://ror.org/05wsk5f87","country_code":"FI","type":"company","lineage":["https://openalex.org/I4210092504","https://openalex.org/I4210152249"]}],"countries":["FI"],"is_corresponding":false,"raw_author_name":"G. Alessio Verni","raw_affiliation_strings":["ASM Microchemistry Oy,Helsinki,Finland","ASM Microchemistry Oy, Helsinki, Finland"],"affiliations":[{"raw_affiliation_string":"ASM Microchemistry Oy,Helsinki,Finland","institution_ids":["https://openalex.org/I4210152249"]},{"raw_affiliation_string":"ASM Microchemistry Oy, Helsinki, Finland","institution_ids":["https://openalex.org/I4210152249"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5004894157","display_name":"Jan Willem Maes","orcid":null},"institutions":[{"id":"https://openalex.org/I4210132699","display_name":"ASM International (Belgium)","ror":"https://ror.org/03ajjdx52","country_code":"BE","type":"company","lineage":["https://openalex.org/I4210092504","https://openalex.org/I4210132699"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"J. W. Maes","raw_affiliation_strings":["ASM Belgium,Leuven,Belgium","ASM Belgium, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"ASM Belgium,Leuven,Belgium","institution_ids":["https://openalex.org/I4210132699"]},{"raw_affiliation_string":"ASM Belgium, Leuven, Belgium","institution_ids":["https://openalex.org/I4210132699"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5020725003","display_name":"Michael Givens","orcid":null},"institutions":[{"id":"https://openalex.org/I4210132699","display_name":"ASM International (Belgium)","ror":"https://ror.org/03ajjdx52","country_code":"BE","type":"company","lineage":["https://openalex.org/I4210092504","https://openalex.org/I4210132699"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"M. Givens","raw_affiliation_strings":["ASM Belgium,Leuven,Belgium","ASM Belgium, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"ASM Belgium,Leuven,Belgium","institution_ids":["https://openalex.org/I4210132699"]},{"raw_affiliation_string":"ASM Belgium, Leuven, Belgium","institution_ids":["https://openalex.org/I4210132699"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5108622788","display_name":"Lars\u2010\u00c5ke Ragnarsson","orcid":"https://orcid.org/0000-0003-1057-8140"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"L.-\u00c5. Ragnarsson","raw_affiliation_strings":["imec, Leuven,Belgium","imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110590613","display_name":"J\u00e9r\u00f4me Mitard","orcid":"https://orcid.org/0000-0002-7422-079X"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"J. Mitard","raw_affiliation_strings":["imec, Leuven,Belgium","imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039544876","display_name":"E. Dentoni Litta","orcid":"https://orcid.org/0000-0003-0333-376X"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"E. Dentoni Litta","raw_affiliation_strings":["imec, Leuven,Belgium","imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5065113949","display_name":"Naoto Horiguchi","orcid":"https://orcid.org/0000-0001-5490-0416"},"institutions":[{"id":"https://openalex.org/I4210114974","display_name":"IMEC","ror":"https://ror.org/02kcbn207","country_code":"BE","type":"nonprofit","lineage":["https://openalex.org/I4210114974"]}],"countries":["BE"],"is_corresponding":false,"raw_author_name":"N. Horiguchi","raw_affiliation_strings":["imec, Leuven,Belgium","imec, Leuven, Belgium"],"affiliations":[{"raw_affiliation_string":"imec, Leuven,Belgium","institution_ids":["https://openalex.org/I4210114974"]},{"raw_affiliation_string":"imec, Leuven, Belgium","institution_ids":["https://openalex.org/I4210114974"]}]}],"institutions":[],"countries_distinct_count":3,"institutions_distinct_count":21,"corresponding_author_ids":["https://openalex.org/A5005695208"],"corresponding_institution_ids":["https://openalex.org/I4210114974"],"apc_list":null,"apc_paid":null,"fwci":0.6694,"has_fulltext":false,"cited_by_count":5,"citation_normalized_percentile":{"value":0.68409239,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"2"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10558","display_name":"Advancements in Semiconductor Devices and Circuit Design","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10377","display_name":"Metal and Thin Film Mechanics","score":0.9995999932289124,"subfield":{"id":"https://openalex.org/subfields/2211","display_name":"Mechanics of Materials"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/pmos-logic","display_name":"PMOS logic","score":0.8791142702102661},{"id":"https://openalex.org/keywords/tin","display_name":"Tin","score":0.8623958230018616},{"id":"https://openalex.org/keywords/nanosheet","display_name":"Nanosheet","score":0.8270906209945679},{"id":"https://openalex.org/keywords/scalability","display_name":"Scalability","score":0.6914344429969788},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6611396074295044},{"id":"https://openalex.org/keywords/nitride","display_name":"Nitride","score":0.5103177428245544},{"id":"https://openalex.org/keywords/reliability","display_name":"Reliability (semiconductor)","score":0.5093353986740112},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.4853304922580719},{"id":"https://openalex.org/keywords/planar","display_name":"Planar","score":0.47084447741508484},{"id":"https://openalex.org/keywords/stack","display_name":"Stack (abstract data type)","score":0.44728511571884155},{"id":"https://openalex.org/keywords/titanium-nitride","display_name":"Titanium nitride","score":0.43169814348220825},{"id":"https://openalex.org/keywords/molybdenum-disulfide","display_name":"Molybdenum disulfide","score":0.42457345128059387},{"id":"https://openalex.org/keywords/thermal-stability","display_name":"Thermal stability","score":0.42089617252349854},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.32597172260284424},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2991691827774048},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.24852299690246582},{"id":"https://openalex.org/keywords/chemical-engineering","display_name":"Chemical engineering","score":0.24609076976776123},{"id":"https://openalex.org/keywords/transistor","display_name":"Transistor","score":0.19882342219352722},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.17583167552947998},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.163790762424469},{"id":"https://openalex.org/keywords/composite-material","display_name":"Composite material","score":0.12400856614112854},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.10755547881126404},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.08777639269828796},{"id":"https://openalex.org/keywords/metallurgy","display_name":"Metallurgy","score":0.07306715846061707}],"concepts":[{"id":"https://openalex.org/C27050352","wikidata":"https://www.wikidata.org/wiki/Q173605","display_name":"PMOS logic","level":4,"score":0.8791142702102661},{"id":"https://openalex.org/C525849907","wikidata":"https://www.wikidata.org/wiki/Q1096","display_name":"Tin","level":2,"score":0.8623958230018616},{"id":"https://openalex.org/C51967427","wikidata":"https://www.wikidata.org/wiki/Q17148232","display_name":"Nanosheet","level":2,"score":0.8270906209945679},{"id":"https://openalex.org/C48044578","wikidata":"https://www.wikidata.org/wiki/Q727490","display_name":"Scalability","level":2,"score":0.6914344429969788},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6611396074295044},{"id":"https://openalex.org/C194760766","wikidata":"https://www.wikidata.org/wiki/Q410851","display_name":"Nitride","level":3,"score":0.5103177428245544},{"id":"https://openalex.org/C43214815","wikidata":"https://www.wikidata.org/wiki/Q7310987","display_name":"Reliability (semiconductor)","level":3,"score":0.5093353986740112},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.4853304922580719},{"id":"https://openalex.org/C134786449","wikidata":"https://www.wikidata.org/wiki/Q3391255","display_name":"Planar","level":2,"score":0.47084447741508484},{"id":"https://openalex.org/C9395851","wikidata":"https://www.wikidata.org/wiki/Q177929","display_name":"Stack (abstract data type)","level":2,"score":0.44728511571884155},{"id":"https://openalex.org/C2778489163","wikidata":"https://www.wikidata.org/wiki/Q415638","display_name":"Titanium nitride","level":4,"score":0.43169814348220825},{"id":"https://openalex.org/C2780423959","wikidata":"https://www.wikidata.org/wiki/Q424257","display_name":"Molybdenum disulfide","level":2,"score":0.42457345128059387},{"id":"https://openalex.org/C59061564","wikidata":"https://www.wikidata.org/wiki/Q7783071","display_name":"Thermal stability","level":2,"score":0.42089617252349854},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.32597172260284424},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2991691827774048},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.24852299690246582},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.24609076976776123},{"id":"https://openalex.org/C172385210","wikidata":"https://www.wikidata.org/wiki/Q5339","display_name":"Transistor","level":3,"score":0.19882342219352722},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17583167552947998},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.163790762424469},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.12400856614112854},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.10755547881126404},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.08777639269828796},{"id":"https://openalex.org/C191897082","wikidata":"https://www.wikidata.org/wiki/Q11467","display_name":"Metallurgy","level":1,"score":0.07306715846061707},{"id":"https://openalex.org/C163258240","wikidata":"https://www.wikidata.org/wiki/Q25342","display_name":"Power (physics)","level":2,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C77088390","wikidata":"https://www.wikidata.org/wiki/Q8513","display_name":"Database","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0},{"id":"https://openalex.org/C121684516","wikidata":"https://www.wikidata.org/wiki/Q7600677","display_name":"Computer graphics (images)","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.23919/vlsitechnologyandcir57934.2023.10185430","is_oa":false,"landing_page_url":"https://doi.org/10.23919/vlsitechnologyandcir57934.2023.10185430","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":3,"referenced_works":["https://openalex.org/W2144935111","https://openalex.org/W2148788141","https://openalex.org/W2808037169"],"related_works":["https://openalex.org/W3119082211","https://openalex.org/W3091852196","https://openalex.org/W2084951691","https://openalex.org/W4388294765","https://openalex.org/W3206721946","https://openalex.org/W2338175038","https://openalex.org/W2957838220","https://openalex.org/W2388140853","https://openalex.org/W3212329783","https://openalex.org/W3087973822"],"abstract_inverted_index":{"ALD":[0,23],"MoN":[1,24,45,79],"is":[2,47],"proposed":[3],"as":[4,27,51],"a":[5,28,34],"scalable":[6,30],"and":[7,18,96],"thermally":[8,49],"stable":[9,50],"p-type":[10],"WFM":[11],"for":[12,61,85],"CFET.":[13,62],"The":[14,41],"early":[15],"film":[16],"closure":[17],"high":[19,42],"WF":[20],"of":[21,44],"the":[22,54,83,86],"make":[25],"it":[26,59],"promising":[29],"pWFM":[31],"applicable":[32],"to":[33,53,74,82],"wide-tunable":[35],"multi-":[36],"$\\mathrm{V}_{\\mathrm{t}}$":[37],"nanosheet":[38],"gate":[39],"stack.":[40],"EWF":[43],"pMOS":[46],"also":[48],"compared":[52,81],"reference":[55],"TiN,":[56],"which":[57],"makes":[58],"suitable":[60],"On":[63],"planar":[64],"RMG":[65],"pFETs,":[66],"V":[67],"<inf":[68],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[69],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">t</inf>":[70],"reduction":[71],"by":[72],"up":[73],"220mV":[75],"was":[76],"achieved":[77],"with":[78],"barrier":[80],"TiN":[84],"same":[87],"physical":[88],"thickness,":[89],"without":[90],"affecting":[91],"long":[92],"channel":[93],"hole":[94],"mobility":[95],"NBTI":[97],"reliability.":[98]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2025,"cited_by_count":2},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}