{"id":"https://openalex.org/W4385216895","doi":"https://doi.org/10.23919/vlsitechnologyandcir57934.2023.10185421","title":"Thickness-Engineered Extremely-thin Channel High Performance ITO TFTs with Raised S/D Architecture: Record-Low R<sub>SD</sub>, Highest Moblity (Sub-4 nm T<sub>CH</sub> Regime), and High V<sub>TH</sub> Tunability","display_name":"Thickness-Engineered Extremely-thin Channel High Performance ITO TFTs with Raised S/D Architecture: Record-Low R<sub>SD</sub>, Highest Moblity (Sub-4 nm T<sub>CH</sub> Regime), and High V<sub>TH</sub> Tunability","publication_year":2023,"publication_date":"2023-06-11","ids":{"openalex":"https://openalex.org/W4385216895","doi":"https://doi.org/10.23919/vlsitechnologyandcir57934.2023.10185421"},"language":"en","primary_location":{"id":"doi:10.23919/vlsitechnologyandcir57934.2023.10185421","is_oa":false,"landing_page_url":"https://doi.org/10.23919/vlsitechnologyandcir57934.2023.10185421","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5063188500","display_name":"Yuye Kang","orcid":"https://orcid.org/0000-0002-9242-565X"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Yuye Kang","raw_affiliation_strings":["National University of Singapore,Singapore","National University of Singapore, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National University of Singapore,Singapore","institution_ids":["https://openalex.org/I165932596"]},{"raw_affiliation_string":"National University of Singapore, Singapore","institution_ids":["https://openalex.org/I165932596"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5025729156","display_name":"Kaizhen Han","orcid":"https://orcid.org/0000-0002-2376-0921"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Kaizhen Han","raw_affiliation_strings":["National University of Singapore,Singapore","National University of Singapore, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National University of Singapore,Singapore","institution_ids":["https://openalex.org/I165932596"]},{"raw_affiliation_string":"National University of Singapore, Singapore","institution_ids":["https://openalex.org/I165932596"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100454828","display_name":"Yue Chen","orcid":"https://orcid.org/0000-0003-0041-6113"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Yue Chen","raw_affiliation_strings":["National University of Singapore,Singapore","National University of Singapore, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National University of Singapore,Singapore","institution_ids":["https://openalex.org/I165932596"]},{"raw_affiliation_string":"National University of Singapore, Singapore","institution_ids":["https://openalex.org/I165932596"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5014399843","display_name":"Xiao Gong","orcid":"https://orcid.org/0000-0002-9243-1937"},"institutions":[{"id":"https://openalex.org/I165932596","display_name":"National University of Singapore","ror":"https://ror.org/01tgyzw49","country_code":"SG","type":"education","lineage":["https://openalex.org/I165932596"]}],"countries":["SG"],"is_corresponding":false,"raw_author_name":"Xiao Gong","raw_affiliation_strings":["National University of Singapore,Singapore","National University of Singapore, Singapore"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National University of Singapore,Singapore","institution_ids":["https://openalex.org/I165932596"]},{"raw_affiliation_string":"National University of Singapore, Singapore","institution_ids":["https://openalex.org/I165932596"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I165932596"],"apc_list":null,"apc_paid":null,"fwci":17.8485,"has_fulltext":false,"cited_by_count":33,"citation_normalized_percentile":{"value":0.99747542,"is_in_top_1_percent":true,"is_in_top_10_percent":true},"cited_by_percentile_year":{"min":94,"max":100},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"2"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10623","display_name":"Thin-Film Transistor Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9718000292778015,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10624","display_name":"Silicon and Solar Cell Technologies","score":0.953499972820282,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5544664263725281},{"id":"https://openalex.org/keywords/channel","display_name":"Channel (broadcasting)","score":0.5370599031448364},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.5327233076095581},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.30279964208602905},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.12989893555641174}],"concepts":[{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5544664263725281},{"id":"https://openalex.org/C127162648","wikidata":"https://www.wikidata.org/wiki/Q16858953","display_name":"Channel (broadcasting)","level":2,"score":0.5370599031448364},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.5327233076095581},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.30279964208602905},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.12989893555641174}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.23919/vlsitechnologyandcir57934.2023.10185421","is_oa":false,"landing_page_url":"https://doi.org/10.23919/vlsitechnologyandcir57934.2023.10185421","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[{"id":"https://openalex.org/F4320321408","display_name":"Ministry of Education","ror":"https://ror.org/01p262204"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":5,"referenced_works":["https://openalex.org/W1999589524","https://openalex.org/W2968389934","https://openalex.org/W3080918441","https://openalex.org/W3215290204","https://openalex.org/W4212902471"],"related_works":["https://openalex.org/W4391375266","https://openalex.org/W2899084033","https://openalex.org/W2748952813","https://openalex.org/W2016187641","https://openalex.org/W2805339068","https://openalex.org/W4246450666","https://openalex.org/W4388998267","https://openalex.org/W2898370298","https://openalex.org/W2137437058","https://openalex.org/W4390401159"],"abstract_inverted_index":{"Utilizing":[0],"the":[1,36,40,74,95],"strong":[2],"thickness-dependent":[3],"property":[4],"of":[5,35,76,116,138,146],"ITO":[6,11,67],"film,":[7],"we":[8],"report":[9],"high-performance":[10],"TFTs":[12],"having":[13],"extremely-thin":[14,37],"channel":[15,26,38,61,118],"(2":[16],"to":[17,30,43,101],"3.5":[18],"nm),":[19],"a":[20,98],"raised":[21],"S/D":[22,46],"(RSD)":[23,49],"structure,":[24],"and":[25,39,50,88,113,144],"length":[27],"(LCH)":[28],"down":[29],"50":[31],"nm.":[32],"The":[33,92,120],"combination":[34],"RSD":[41],"helps":[42],"achieve":[44],"record-low":[45],"series":[47],"resistance":[48],"record-high":[51],"effective":[52],"mobility":[53],"$\\mu_{eff}(72$":[54],"cm$^{2}":[55],"/\\mathrm{V}\\cdot":[56],"\\mathrm{s}$)":[57],"at":[58],"sub-4":[59],"nm":[60,127],"thickness":[62],"(TCH)":[63],"regime":[64],"among":[65],"all":[66],"TFTs.":[68],"We":[69],"perform":[70],"systematic":[71],"investigation":[72],"on":[73],"impacts":[75],"TCH,":[77],"including":[78],"mobility,":[79],"subthreshold":[80],"swing":[81],"(SS),":[82],"threshold":[83],"voltage":[84],"(VTH),":[85],"quantization":[86],"effect,":[87],"temperature":[89],"dependence,":[90],"etc.":[91],"results":[93],"highlight":[94],"TCHengineering":[96],"as":[97,125],"powerful":[99],"knob":[100],"realize":[102],"enhancement":[103],"mode":[104],"operation":[105],"$(\\mathrm{V}_{TH}":[106],"\\gt":[107],"0)$":[108],"while":[109],"maintaining":[110],"high":[111,133],"performance":[112],"excellent":[114],"control":[115],"short":[117],"effects.":[119],"device":[121],"with":[122],"TCHas":[123],"small":[124],"2":[126],"shows":[128],"positive":[129],"VTHof":[130],"0.3":[131],"V,":[132],"peak":[134],"$\\mathrm{G}_{\\mathrm":[135],"{{m}}}(\\mathrm{G}_{{\\mathrm":[136],"{m}},\\max})$":[137],"508":[139],"(at":[140],"VDSof":[141],"1":[142],"V),":[143],"SS":[145],"85":[147],"mV/decade":[148]},"counts_by_year":[{"year":2026,"cited_by_count":6},{"year":2025,"cited_by_count":15},{"year":2024,"cited_by_count":10},{"year":2023,"cited_by_count":2}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}