{"id":"https://openalex.org/W4385192438","doi":"https://doi.org/10.23919/vlsitechnologyandcir57934.2023.10185284","title":"First Stacked Nanosheet FeFET Featuring Memory Window of 1.8V at Record Low Write Voltage of 2V and Endurance &gt;1E11 Cycles","display_name":"First Stacked Nanosheet FeFET Featuring Memory Window of 1.8V at Record Low Write Voltage of 2V and Endurance &gt;1E11 Cycles","publication_year":2023,"publication_date":"2023-06-11","ids":{"openalex":"https://openalex.org/W4385192438","doi":"https://doi.org/10.23919/vlsitechnologyandcir57934.2023.10185284"},"language":"en","primary_location":{"id":"doi:10.23919/vlsitechnologyandcir57934.2023.10185284","is_oa":false,"landing_page_url":"https://doi.org/10.23919/vlsitechnologyandcir57934.2023.10185284","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5049569903","display_name":"Yu-Rui Chen","orcid":"https://orcid.org/0000-0002-1564-7750"},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Yu-Rui Chen","raw_affiliation_strings":["Graduate Institute of Electronics Engineering,Taipei,Taiwan","Graduate Institute of Electronics Engineering, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"Graduate Institute of Electronics Engineering,Taipei,Taiwan","institution_ids":[]},{"raw_affiliation_string":"Graduate Institute of Electronics Engineering, Taipei, Taiwan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100658555","display_name":"Yi\u2010Chun Liu","orcid":"https://orcid.org/0000-0002-3404-236X"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Yi-Chun Liu","raw_affiliation_strings":["Graduate Institute of Electronics Engineering,Taipei,Taiwan","Graduate Institute of Electronics Engineering, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"Graduate Institute of Electronics Engineering,Taipei,Taiwan","institution_ids":[]},{"raw_affiliation_string":"Graduate Institute of Electronics Engineering, Taipei, Taiwan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035270779","display_name":"Zefu Zhao","orcid":"https://orcid.org/0000-0003-0796-1659"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Zefu Zhao","raw_affiliation_strings":["Graduate Institute of Electronics Engineering,Taipei,Taiwan","Graduate Institute of Electronics Engineering, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"Graduate Institute of Electronics Engineering,Taipei,Taiwan","institution_ids":[]},{"raw_affiliation_string":"Graduate Institute of Electronics Engineering, Taipei, Taiwan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5043292560","display_name":"Wan-Hsuan Hsieh","orcid":"https://orcid.org/0000-0001-6924-6648"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Wan-Hsuan Hsieh","raw_affiliation_strings":["Graduate Institute of Electronics Engineering,Taipei,Taiwan","Graduate Institute of Electronics Engineering, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"Graduate Institute of Electronics Engineering,Taipei,Taiwan","institution_ids":[]},{"raw_affiliation_string":"Graduate Institute of Electronics Engineering, Taipei, Taiwan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5053287052","display_name":"J. H. Lee","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Jia-Yang Lee","raw_affiliation_strings":["Graduate School of Advanced Technology,Taipei,Taiwan","Graduate School of Advanced Technology, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"Graduate School of Advanced Technology,Taipei,Taiwan","institution_ids":[]},{"raw_affiliation_string":"Graduate School of Advanced Technology, Taipei, Taiwan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037346513","display_name":"Chien-Te Tu","orcid":"https://orcid.org/0000-0003-2832-1853"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Chien-Te Tu","raw_affiliation_strings":["Graduate Institute of Electronics Engineering,Taipei,Taiwan","Graduate Institute of Electronics Engineering, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"Graduate Institute of Electronics Engineering,Taipei,Taiwan","institution_ids":[]},{"raw_affiliation_string":"Graduate Institute of Electronics Engineering, Taipei, Taiwan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5057943079","display_name":"Bo\u2010Wei Huang","orcid":"https://orcid.org/0000-0002-1405-8639"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Bo-Wei Huang","raw_affiliation_strings":["Graduate Institute of Electronics Engineering,Taipei,Taiwan","Graduate Institute of Electronics Engineering, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"Graduate Institute of Electronics Engineering,Taipei,Taiwan","institution_ids":[]},{"raw_affiliation_string":"Graduate Institute of Electronics Engineering, Taipei, Taiwan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085380486","display_name":"Jer-Fu Wang","orcid":"https://orcid.org/0009-0005-4156-531X"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Jer-Fu Wang","raw_affiliation_strings":["Graduate Institute of Electronics Engineering,Taipei,Taiwan","Graduate Institute of Electronics Engineering, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"Graduate Institute of Electronics Engineering,Taipei,Taiwan","institution_ids":[]},{"raw_affiliation_string":"Graduate Institute of Electronics Engineering, Taipei, Taiwan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5052368998","display_name":"Shee-Jier Chueh","orcid":"https://orcid.org/0000-0002-7886-2693"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Shee-Jier Chueh","raw_affiliation_strings":["Graduate Institute of Electronics Engineering,Taipei,Taiwan","Graduate Institute of Electronics Engineering, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"Graduate Institute of Electronics Engineering,Taipei,Taiwan","institution_ids":[]},{"raw_affiliation_string":"Graduate Institute of Electronics Engineering, Taipei, Taiwan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5085806213","display_name":"Yifan Xing","orcid":"https://orcid.org/0000-0002-2977-5956"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Yifan Xing","raw_affiliation_strings":["Graduate Institute of Electronics Engineering,Taipei,Taiwan","Graduate Institute of Electronics Engineering, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"Graduate Institute of Electronics Engineering,Taipei,Taiwan","institution_ids":[]},{"raw_affiliation_string":"Graduate Institute of Electronics Engineering, Taipei, Taiwan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100665980","display_name":"GuanHua Chen","orcid":"https://orcid.org/0000-0001-5015-0902"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Guan-Hua Chen","raw_affiliation_strings":["Graduate Institute of Photonics and Optoelectronics, National Taiwan University,Taipei,Taiwan","Graduate Institute of Photonics and Optoelectronics, National Taiwan University, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"Graduate Institute of Photonics and Optoelectronics, National Taiwan University,Taipei,Taiwan","institution_ids":["https://openalex.org/I16733864"]},{"raw_affiliation_string":"Graduate Institute of Photonics and Optoelectronics, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039563976","display_name":"Hung-Chun Chou","orcid":"https://orcid.org/0009-0000-9799-8791"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Hung-Chun Chou","raw_affiliation_strings":["Graduate School of Advanced Technology,Taipei,Taiwan","Graduate School of Advanced Technology, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"Graduate School of Advanced Technology,Taipei,Taiwan","institution_ids":[]},{"raw_affiliation_string":"Graduate School of Advanced Technology, Taipei, Taiwan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110451742","display_name":"Dong Soo Woo","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Dong Soo Woo","raw_affiliation_strings":["Graduate Institute of Electronics Engineering,Taipei,Taiwan","Graduate Institute of Electronics Engineering, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"Graduate Institute of Electronics Engineering,Taipei,Taiwan","institution_ids":[]},{"raw_affiliation_string":"Graduate Institute of Electronics Engineering, Taipei, Taiwan","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049486641","display_name":"M. H. Lee","orcid":"https://orcid.org/0000-0002-2007-2875"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"M. H. Lee","raw_affiliation_strings":["Graduate School of Advanced Technology,Taipei,Taiwan","Graduate School of Advanced Technology, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"Graduate School of Advanced Technology,Taipei,Taiwan","institution_ids":[]},{"raw_affiliation_string":"Graduate School of Advanced Technology, Taipei, Taiwan","institution_ids":[]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5100681944","display_name":"C. W. Liu","orcid":"https://orcid.org/0000-0002-6439-8754"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"C. W. Liu","raw_affiliation_strings":["Graduate Institute of Electronics Engineering,Taipei,Taiwan","Graduate School of Advanced Technology, Taipei, Taiwan","Graduate Institute of Electronics Engineering, Taipei, Taiwan","Graduate Institute of Photonics and Optoelectronics, National Taiwan University, Taipei, Taiwan"],"affiliations":[{"raw_affiliation_string":"Graduate Institute of Electronics Engineering,Taipei,Taiwan","institution_ids":[]},{"raw_affiliation_string":"Graduate School of Advanced Technology, Taipei, Taiwan","institution_ids":[]},{"raw_affiliation_string":"Graduate Institute of Electronics Engineering, Taipei, Taiwan","institution_ids":[]},{"raw_affiliation_string":"Graduate Institute of Photonics and Optoelectronics, National Taiwan University, Taipei, Taiwan","institution_ids":["https://openalex.org/I16733864"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":15,"corresponding_author_ids":["https://openalex.org/A5049569903"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.7425,"has_fulltext":false,"cited_by_count":13,"citation_normalized_percentile":{"value":0.84680785,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"2"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12808","display_name":"Ferroelectric and Negative Capacitance Devices","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9954000115394592,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10502","display_name":"Advanced Memory and Neural Computing","score":0.9901999831199646,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/nanosheet","display_name":"Nanosheet","score":0.8018909692764282},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.5415120720863342},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5156601667404175},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.45504748821258545},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.44288498163223267},{"id":"https://openalex.org/keywords/topology","display_name":"Topology (electrical circuits)","score":0.3606953024864197},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.3590364158153534},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.3421167731285095},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.24892106652259827},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.131437748670578}],"concepts":[{"id":"https://openalex.org/C51967427","wikidata":"https://www.wikidata.org/wiki/Q17148232","display_name":"Nanosheet","level":2,"score":0.8018909692764282},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.5415120720863342},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5156601667404175},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.45504748821258545},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.44288498163223267},{"id":"https://openalex.org/C184720557","wikidata":"https://www.wikidata.org/wiki/Q7825049","display_name":"Topology (electrical circuits)","level":2,"score":0.3606953024864197},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.3590364158153534},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.3421167731285095},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.24892106652259827},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.131437748670578}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.23919/vlsitechnologyandcir57934.2023.10185284","is_oa":false,"landing_page_url":"https://doi.org/10.23919/vlsitechnologyandcir57934.2023.10185284","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":1,"referenced_works":["https://openalex.org/W3182791503"],"related_works":["https://openalex.org/W2748952813","https://openalex.org/W3119082211","https://openalex.org/W3091852196","https://openalex.org/W2084951691","https://openalex.org/W4388294765","https://openalex.org/W3206721946","https://openalex.org/W2338175038","https://openalex.org/W2957838220","https://openalex.org/W798086848","https://openalex.org/W2030474987"],"abstract_inverted_index":{"The":[0,68,91,99],"large":[1],"memory":[2],"window":[3],"of":[4,11,42,60,74],"$1.8\\mathrm{~V}$":[5],"at":[6],"the":[7,32,40,58,113],"low":[8,96],"write":[9],"voltage":[10],"$2\\mathrm{~V}$":[12],"is":[13,94],"achieved":[14],"by":[15],"stacked":[16,100],"two":[17,55],"nanosheet":[18],"(NS)":[19],"gate-allaround":[20],"(GAA)":[21],"Ge":[22],"<inf":[23,27],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[24,28],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">0.98</inf>":[25],"Si":[26],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">0.02</inf>":[29],"FeFETs":[30,108],"with":[31,71,103,112],"channel":[33,51],"phosphorus":[34],"concentration":[35],"larger":[36],"than":[37],"$1\\mathrm{E}18\\mathrm{~cm}^{-3}$,":[38],"enabling":[39],"erase":[41],"GAA":[43],"FeFET.":[44],"Isotropic":[45],"wet":[46],"etching":[47],"was":[48],"used":[49],"in":[50],"release":[52],"process.":[53],"Stacked":[54],"NSs":[56],"have":[57],"advantages":[59],"reducing":[61],"cell":[62],"variation":[63],"and":[64,82,116],"2X":[65],"read":[66],"current.":[67],"stable":[69],"storage":[70],"data":[72],"retention":[73],"$\\gt":[75,85],"1\\mathrm{E}4$":[76],"seconds,":[77],"linearly":[78],"extrapolated":[79],"10":[80],"years,":[81],"high":[83,104],"endurance":[84],"1\\mathrm{E}11$":[86],"cycles":[87],"are":[88],"also":[89],"demonstrated.":[90],"thermal":[92],"budget":[93],"as":[95,97],"$400^{\\circ}\\mathrm{C}$.":[98],"NS":[101],"architecture":[102],"mobility":[105],"channels":[106],"makes":[107],"to":[109],"be":[110],"compatible":[111],"$2\\mathrm{~nm}$":[114],"node":[115],"beyond.":[117]},"counts_by_year":[{"year":2025,"cited_by_count":8},{"year":2024,"cited_by_count":3},{"year":2023,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}