{"id":"https://openalex.org/W4390026006","doi":"https://doi.org/10.23919/sice59929.2023.10354144","title":"Modeling and Simulation Method for a Belt-Driven SiliconWafer Transfer Robot Considering Static Friction","display_name":"Modeling and Simulation Method for a Belt-Driven SiliconWafer Transfer Robot Considering Static Friction","publication_year":2023,"publication_date":"2023-09-06","ids":{"openalex":"https://openalex.org/W4390026006","doi":"https://doi.org/10.23919/sice59929.2023.10354144"},"language":"en","primary_location":{"id":"doi:10.23919/sice59929.2023.10354144","is_oa":false,"landing_page_url":"http://dx.doi.org/10.23919/sice59929.2023.10354144","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 62nd Annual Conference of the Society of Instrument and Control Engineers (SICE)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5024890797","display_name":"Yoshiro Fukui","orcid":"https://orcid.org/0000-0002-2704-798X"},"institutions":[{"id":"https://openalex.org/I207014233","display_name":"Kyushu Institute of Technology","ror":"https://ror.org/02278tr80","country_code":"JP","type":"education","lineage":["https://openalex.org/I207014233"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Yoshiro Fukui","raw_affiliation_strings":["Kyushu institute of technology,Department of Intelligent and Control Systems,Fukuoka,Japan"],"affiliations":[{"raw_affiliation_string":"Kyushu institute of technology,Department of Intelligent and Control Systems,Fukuoka,Japan","institution_ids":["https://openalex.org/I207014233"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5027742876","display_name":"Yusuke Murayama","orcid":"https://orcid.org/0009-0007-6559-9105"},"institutions":[{"id":"https://openalex.org/I207014233","display_name":"Kyushu Institute of Technology","ror":"https://ror.org/02278tr80","country_code":"JP","type":"education","lineage":["https://openalex.org/I207014233"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yusuke Murayama","raw_affiliation_strings":["Kyushu institute of technology,Department of Intelligent and Control Systems,Fukuoka,Japan"],"affiliations":[{"raw_affiliation_string":"Kyushu institute of technology,Department of Intelligent and Control Systems,Fukuoka,Japan","institution_ids":["https://openalex.org/I207014233"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":["https://openalex.org/A5024890797"],"corresponding_institution_ids":["https://openalex.org/I207014233"],"apc_list":null,"apc_paid":null,"fwci":0.3756,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.61694226,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":95},"biblio":{"volume":null,"issue":null,"first_page":"730","last_page":"735"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11394","display_name":"Dynamics and Control of Mechanical Systems","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11394","display_name":"Dynamics and Control of Mechanical Systems","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11749","display_name":"Iterative Learning Control Systems","score":0.996999979019165,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12206","display_name":"Vibration and Dynamic Analysis","score":0.9937999844551086,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/robot","display_name":"Robot","score":0.6613865494728088},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.5710315704345703},{"id":"https://openalex.org/keywords/simulation","display_name":"Simulation","score":0.40186887979507446},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.3693559765815735},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.3400840163230896},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2488747239112854},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.14481547474861145}],"concepts":[{"id":"https://openalex.org/C90509273","wikidata":"https://www.wikidata.org/wiki/Q11012","display_name":"Robot","level":2,"score":0.6613865494728088},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5710315704345703},{"id":"https://openalex.org/C44154836","wikidata":"https://www.wikidata.org/wiki/Q45045","display_name":"Simulation","level":1,"score":0.40186887979507446},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.3693559765815735},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.3400840163230896},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2488747239112854},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.14481547474861145}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.23919/sice59929.2023.10354144","is_oa":false,"landing_page_url":"http://dx.doi.org/10.23919/sice59929.2023.10354144","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2023 62nd Annual Conference of the Society of Instrument and Control Engineers (SICE)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W2014450203","https://openalex.org/W2047656848","https://openalex.org/W2127629326","https://openalex.org/W2145915743","https://openalex.org/W2314539012","https://openalex.org/W2318142499"],"related_works":["https://openalex.org/W2748952813","https://openalex.org/W2390279801","https://openalex.org/W2358668433","https://openalex.org/W2376932109","https://openalex.org/W2001405890","https://openalex.org/W2382290278","https://openalex.org/W2350741829","https://openalex.org/W2130043461","https://openalex.org/W2530322880","https://openalex.org/W1596801655"],"abstract_inverted_index":{"In":[0],"this":[1],"study,":[2],"we":[3,66],"consider":[4],"a":[5,32,55],"modeling":[6,33],"problem":[7],"associated":[8],"with":[9],"belt-driven":[10,37],"robots":[11],"that":[12,39,68,79],"transfer":[13,27],"silicon":[14],"wafers":[15],"in":[16,82],"the":[17,36,43,46,49,59,69,74],"automated":[18],"manufacturing":[19],"of":[20,45],"semiconductors":[21],"to":[22],"achieve":[23],"high-speed":[24],"and":[25,48,53],"high-precision":[26],"control.":[28],"We":[29],"propose":[30],"1)":[31],"method":[34,57],"for":[35,58],"robot":[38],"takes":[40],"into":[41],"account":[42],"dynamics":[44],"belt":[47],"static":[50,60],"friction":[51,61],"force,":[52],"2)":[54],"calculation":[56],"force.":[62],"Using":[63],"simulation":[64],"experiments":[65],"confirmed":[67],"proposed":[70],"model":[71],"can":[72],"reproduce":[73],"actual":[75,83],"trajectory":[76],"deviation":[77],"phenomenon":[78],"is":[80],"observed":[81],"robots.":[84]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1}],"updated_date":"2025-12-25T23:11:45.687758","created_date":"2025-10-10T00:00:00"}