{"id":"https://openalex.org/W2970437753","doi":"https://doi.org/10.23919/ps.2019.8817637","title":"Fabrication of Nb<sub>2</sub>O<sub>5</sub> horizontal slot waveguide structures","display_name":"Fabrication of Nb<sub>2</sub>O<sub>5</sub> horizontal slot waveguide structures","publication_year":2019,"publication_date":"2019-07-01","ids":{"openalex":"https://openalex.org/W2970437753","doi":"https://doi.org/10.23919/ps.2019.8817637","mag":"2970437753"},"language":"en","primary_location":{"id":"doi:10.23919/ps.2019.8817637","is_oa":false,"landing_page_url":"https://doi.org/10.23919/ps.2019.8817637","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 24th OptoElectronics and Communications Conference (OECC) and 2019 International Conference on Photonics in Switching and Computing (PSC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5112436981","display_name":"Yoshiki Hayama","orcid":null},"institutions":[{"id":"https://openalex.org/I182069643","display_name":"Kanagawa Institute of Technology","ror":"https://ror.org/007gj5v75","country_code":"JP","type":"education","lineage":["https://openalex.org/I182069643"]}],"countries":["JP"],"is_corresponding":true,"raw_author_name":"Yoshiki Hayama","raw_affiliation_strings":["Department of Electrical and Electronic Engineering, Kanagawa Institute of Technology, Kanagawa, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Electronic Engineering, Kanagawa Institute of Technology, Kanagawa, Japan","institution_ids":["https://openalex.org/I182069643"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5088833236","display_name":"Shinta Uchibori","orcid":null},"institutions":[{"id":"https://openalex.org/I182069643","display_name":"Kanagawa Institute of Technology","ror":"https://ror.org/007gj5v75","country_code":"JP","type":"education","lineage":["https://openalex.org/I182069643"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Shinta Uchibori","raw_affiliation_strings":["Department of Electrical and Electronic Engineering, Kanagawa Institute of Technology, Kanagawa, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Electronic Engineering, Kanagawa Institute of Technology, Kanagawa, Japan","institution_ids":["https://openalex.org/I182069643"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037382508","display_name":"Katsumi Nakatsuhara","orcid":null},"institutions":[{"id":"https://openalex.org/I182069643","display_name":"Kanagawa Institute of Technology","ror":"https://ror.org/007gj5v75","country_code":"JP","type":"education","lineage":["https://openalex.org/I182069643"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Katsumi Nakatsuhara","raw_affiliation_strings":["Department of Electrical and Electronic Engineering, Kanagawa Institute of Technology, Kanagawa, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Electronic Engineering, Kanagawa Institute of Technology, Kanagawa, Japan","institution_ids":["https://openalex.org/I182069643"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102181175","display_name":"Masayuki Takeda","orcid":null},"institutions":[{"id":"https://openalex.org/I182069643","display_name":"Kanagawa Institute of Technology","ror":"https://ror.org/007gj5v75","country_code":"JP","type":"education","lineage":["https://openalex.org/I182069643"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masayuki Takeda","raw_affiliation_strings":["Department of Electrical and Electronic Engineering, Kanagawa Institute of Technology, Kanagawa, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Electronic Engineering, Kanagawa Institute of Technology, Kanagawa, Japan","institution_ids":["https://openalex.org/I182069643"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5108433007","display_name":"Takeshi Nishizawa","orcid":null},"institutions":[{"id":"https://openalex.org/I182069643","display_name":"Kanagawa Institute of Technology","ror":"https://ror.org/007gj5v75","country_code":"JP","type":"education","lineage":["https://openalex.org/I182069643"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Takeshi Nishizawa","raw_affiliation_strings":["Department of Electrical and Electronic Engineering, Kanagawa Institute of Technology, Kanagawa, Japan"],"affiliations":[{"raw_affiliation_string":"Department of Electrical and Electronic Engineering, Kanagawa Institute of Technology, Kanagawa, Japan","institution_ids":["https://openalex.org/I182069643"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5112436981"],"corresponding_institution_ids":["https://openalex.org/I182069643"],"apc_list":null,"apc_paid":null,"fwci":0.2385,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.54967246,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"3"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10666","display_name":"Photonic Crystals and Applications","score":0.9847000241279602,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10205","display_name":"Advanced Fiber Optic Sensors","score":0.9817000031471252,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.8145015239715576},{"id":"https://openalex.org/keywords/waveguide","display_name":"Waveguide","score":0.5796515941619873},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3762992024421692},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3464188575744629},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.33010900020599365},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.32719576358795166},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.15259137749671936}],"concepts":[{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.8145015239715576},{"id":"https://openalex.org/C200687136","wikidata":"https://www.wikidata.org/wiki/Q11233438","display_name":"Waveguide","level":2,"score":0.5796515941619873},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3762992024421692},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3464188575744629},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.33010900020599365},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.32719576358795166},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.15259137749671936},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.23919/ps.2019.8817637","is_oa":false,"landing_page_url":"https://doi.org/10.23919/ps.2019.8817637","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 24th OptoElectronics and Communications Conference (OECC) and 2019 International Conference on Photonics in Switching and Computing (PSC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":6,"referenced_works":["https://openalex.org/W2014076227","https://openalex.org/W2014299001","https://openalex.org/W2069829272","https://openalex.org/W2129540996","https://openalex.org/W2443647554","https://openalex.org/W2955286320"],"related_works":["https://openalex.org/W2899084033","https://openalex.org/W2081689989","https://openalex.org/W2747273510","https://openalex.org/W2745790210","https://openalex.org/W2505733790","https://openalex.org/W3204749931","https://openalex.org/W2054243438","https://openalex.org/W2739323857","https://openalex.org/W1982708586","https://openalex.org/W4318821900"],"abstract_inverted_index":{"We":[0,26],"propose":[1],"a":[2,18,30,35],"fabrication":[3],"process":[4],"for":[5],"Nb":[6],"<sub":[7,11],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[8,12],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</sub>":[9],"O":[10],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">5</sub>":[13],"horizontal":[14,31],"slot":[15,32],"waveguides":[16],"using":[17],"thin":[19],"film":[20],"deposition":[21],"and":[22],"selective":[23],"etching":[24],"technique.":[25],"have":[27],"also":[28],"fabricated":[29],"structure":[33],"as":[34],"preliminary":[36],"experiment.":[37]},"counts_by_year":[{"year":2023,"cited_by_count":1},{"year":2021,"cited_by_count":1},{"year":2020,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}