{"id":"https://openalex.org/W4401247467","doi":"https://doi.org/10.23919/mixdes62605.2024.10614012","title":"Single Dopant Lithography for the Fabrication of Atomic-scale Devices and Quantum Systems","display_name":"Single Dopant Lithography for the Fabrication of Atomic-scale Devices and Quantum Systems","publication_year":2024,"publication_date":"2024-06-27","ids":{"openalex":"https://openalex.org/W4401247467","doi":"https://doi.org/10.23919/mixdes62605.2024.10614012"},"language":"en","primary_location":{"id":"doi:10.23919/mixdes62605.2024.10614012","is_oa":false,"landing_page_url":"https://doi.org/10.23919/mixdes62605.2024.10614012","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 31st International Conference on Mixed Design of Integrated Circuits and System (MIXDES)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5057705318","display_name":"Ivo W. Rangelow","orcid":"https://orcid.org/0000-0002-1487-1486"},"institutions":[{"id":"https://openalex.org/I119449181","display_name":"Technische Universit\u00e4t Ilmenau","ror":"https://ror.org/01weqhp73","country_code":"DE","type":"education","lineage":["https://openalex.org/I119449181"]}],"countries":["DE"],"is_corresponding":true,"raw_author_name":"Ivo W. Rangelow","raw_affiliation_strings":["Technische Universit&#x00E4;t Ilmenau,NanoScale Systems,Ilmenau,Germany,98693"],"affiliations":[{"raw_affiliation_string":"Technische Universit&#x00E4;t Ilmenau,NanoScale Systems,Ilmenau,Germany,98693","institution_ids":["https://openalex.org/I119449181"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034042048","display_name":"T. Schenkel","orcid":"https://orcid.org/0000-0003-4046-9252"},"institutions":[{"id":"https://openalex.org/I148283060","display_name":"Lawrence Berkeley National Laboratory","ror":"https://ror.org/02jbv0t02","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I148283060","https://openalex.org/I39565521"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Thomas Schenkel","raw_affiliation_strings":["Lawrence Berkeley National Laboratory,Accelerator Technology and Applied Physics Division,Berkeley,CA,USA,94720"],"affiliations":[{"raw_affiliation_string":"Lawrence Berkeley National Laboratory,Accelerator Technology and Applied Physics Division,Berkeley,CA,USA,94720","institution_ids":["https://openalex.org/I148283060"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5079509870","display_name":"Arun Persaud","orcid":"https://orcid.org/0000-0003-3186-8358"},"institutions":[{"id":"https://openalex.org/I148283060","display_name":"Lawrence Berkeley National Laboratory","ror":"https://ror.org/02jbv0t02","country_code":"US","type":"facility","lineage":["https://openalex.org/I1330989302","https://openalex.org/I148283060","https://openalex.org/I39565521"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Arun Persaud","raw_affiliation_strings":["Lawrence Berkeley National Laboratory,Accelerator Technology and Applied Physics Division,Berkeley,CA,USA,94720"],"affiliations":[{"raw_affiliation_string":"Lawrence Berkeley National Laboratory,Accelerator Technology and Applied Physics Division,Berkeley,CA,USA,94720","institution_ids":["https://openalex.org/I148283060"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5018621054","display_name":"Z. A. K. Durrani","orcid":"https://orcid.org/0000-0003-3022-2758"},"institutions":[{"id":"https://openalex.org/I47508984","display_name":"Imperial College London","ror":"https://ror.org/041kmwe10","country_code":"GB","type":"education","lineage":["https://openalex.org/I47508984"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Zahid Durrani","raw_affiliation_strings":["Imperial College London, S. Kensington,Department of Electrical and Electronic Engineering,London,UK,SW7 2AZ"],"affiliations":[{"raw_affiliation_string":"Imperial College London, S. Kensington,Department of Electrical and Electronic Engineering,London,UK,SW7 2AZ","institution_ids":["https://openalex.org/I47508984"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5102916541","display_name":"Mervyn Jones","orcid":"https://orcid.org/0000-0002-6839-3053"},"institutions":[{"id":"https://openalex.org/I47508984","display_name":"Imperial College London","ror":"https://ror.org/041kmwe10","country_code":"GB","type":"education","lineage":["https://openalex.org/I47508984"]}],"countries":["GB"],"is_corresponding":false,"raw_author_name":"Mervyn Jones","raw_affiliation_strings":["Imperial College London, S. Kensington,Department of Electrical and Electronic Engineering,London,UK,SW7 2AZ"],"affiliations":[{"raw_affiliation_string":"Imperial College London, S. Kensington,Department of Electrical and Electronic Engineering,London,UK,SW7 2AZ","institution_ids":["https://openalex.org/I47508984"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5037728735","display_name":"Hans-Georg Pietscher","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Hans-Georg Pietscher","raw_affiliation_strings":["nano analytik GmbH,Ilmenau,Germany,98693"],"affiliations":[{"raw_affiliation_string":"nano analytik GmbH,Ilmenau,Germany,98693","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5013420636","display_name":"Fabian Dietrich","orcid":"https://orcid.org/0000-0001-5813-5248"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Fabian Dietrich","raw_affiliation_strings":["nano analytik GmbH,Ilmenau,Germany,98693"],"affiliations":[{"raw_affiliation_string":"nano analytik GmbH,Ilmenau,Germany,98693","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5114202120","display_name":"Aditya S. Tan","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Aditya S. Tan","raw_affiliation_strings":["nano analytik GmbH,Ilmenau,Germany,98693"],"affiliations":[{"raw_affiliation_string":"nano analytik GmbH,Ilmenau,Germany,98693","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5028091022","display_name":"Jaqueline Stauffenberg","orcid":"https://orcid.org/0000-0002-8534-2709"},"institutions":[{"id":"https://openalex.org/I119449181","display_name":"Technische Universit\u00e4t Ilmenau","ror":"https://ror.org/01weqhp73","country_code":"DE","type":"education","lineage":["https://openalex.org/I119449181"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Jaqueline Stauffenberg","raw_affiliation_strings":["Technische Universitat Ilmenau,Faculty of Mechanical Engineering,Ilmenau,Germany,98693"],"affiliations":[{"raw_affiliation_string":"Technische Universitat Ilmenau,Faculty of Mechanical Engineering,Ilmenau,Germany,98693","institution_ids":["https://openalex.org/I119449181"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5030409039","display_name":"Eberhard Manske","orcid":"https://orcid.org/0000-0002-1672-2978"},"institutions":[{"id":"https://openalex.org/I119449181","display_name":"Technische Universit\u00e4t Ilmenau","ror":"https://ror.org/01weqhp73","country_code":"DE","type":"education","lineage":["https://openalex.org/I119449181"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Eberhard Manske","raw_affiliation_strings":["Technische Universitat Ilmenau,Faculty of Mechanical Engineering,Ilmenau,Germany,98693"],"affiliations":[{"raw_affiliation_string":"Technische Universitat Ilmenau,Faculty of Mechanical Engineering,Ilmenau,Germany,98693","institution_ids":["https://openalex.org/I119449181"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5114260406","display_name":"Thomas Froehlich","orcid":null},"institutions":[{"id":"https://openalex.org/I119449181","display_name":"Technische Universit\u00e4t Ilmenau","ror":"https://ror.org/01weqhp73","country_code":"DE","type":"education","lineage":["https://openalex.org/I119449181"]}],"countries":["DE"],"is_corresponding":false,"raw_author_name":"Thomas Froehlich","raw_affiliation_strings":["Technische Universitat Ilmenau,Faculty of Mechanical Engineering,Ilmenau,Germany,98693"],"affiliations":[{"raw_affiliation_string":"Technische Universitat Ilmenau,Faculty of Mechanical Engineering,Ilmenau,Germany,98693","institution_ids":["https://openalex.org/I119449181"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5111819336","display_name":"D.S. Karpuzov","orcid":null},"institutions":[{"id":"https://openalex.org/I154425047","display_name":"University of Alberta","ror":"https://ror.org/0160cpw27","country_code":"CA","type":"education","lineage":["https://openalex.org/I154425047"]}],"countries":["CA"],"is_corresponding":false,"raw_author_name":"Dimitre Karpuzov","raw_affiliation_strings":["University of Alberta,Edmonton,Alberta,Canada,T6G 2R3"],"affiliations":[{"raw_affiliation_string":"University of Alberta,Edmonton,Alberta,Canada,T6G 2R3","institution_ids":["https://openalex.org/I154425047"]}]}],"institutions":[],"countries_distinct_count":4,"institutions_distinct_count":12,"corresponding_author_ids":["https://openalex.org/A5057705318"],"corresponding_institution_ids":["https://openalex.org/I119449181"],"apc_list":null,"apc_paid":null,"fwci":0.4449,"has_fulltext":false,"cited_by_count":2,"citation_normalized_percentile":{"value":0.62207267,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":95,"max":96},"biblio":{"volume":null,"issue":null,"first_page":"23","last_page":"28"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9918000102043152,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10472","display_name":"Semiconductor materials and devices","score":0.9918000102043152,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10299","display_name":"Photonic and Optical Devices","score":0.9897000193595886,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12588","display_name":"Electronic and Structural Properties of Oxides","score":0.9782000184059143,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/dopant","display_name":"Dopant","score":0.7697609066963196},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.72043776512146},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.6618545651435852},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5924736261367798},{"id":"https://openalex.org/keywords/atomic-units","display_name":"Atomic units","score":0.521033763885498},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.502741813659668},{"id":"https://openalex.org/keywords/quantum","display_name":"Quantum","score":0.43134909868240356},{"id":"https://openalex.org/keywords/nanolithography","display_name":"Nanolithography","score":0.4181120991706848},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.39234820008277893},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.21962767839431763},{"id":"https://openalex.org/keywords/doping","display_name":"Doping","score":0.2138213813304901},{"id":"https://openalex.org/keywords/quantum-mechanics","display_name":"Quantum mechanics","score":0.08722320199012756}],"concepts":[{"id":"https://openalex.org/C191952053","wikidata":"https://www.wikidata.org/wiki/Q15119237","display_name":"Dopant","level":3,"score":0.7697609066963196},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.72043776512146},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.6618545651435852},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5924736261367798},{"id":"https://openalex.org/C66823137","wikidata":"https://www.wikidata.org/wiki/Q757568","display_name":"Atomic units","level":2,"score":0.521033763885498},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.502741813659668},{"id":"https://openalex.org/C84114770","wikidata":"https://www.wikidata.org/wiki/Q46344","display_name":"Quantum","level":2,"score":0.43134909868240356},{"id":"https://openalex.org/C162117346","wikidata":"https://www.wikidata.org/wiki/Q1106386","display_name":"Nanolithography","level":4,"score":0.4181120991706848},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.39234820008277893},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.21962767839431763},{"id":"https://openalex.org/C57863236","wikidata":"https://www.wikidata.org/wiki/Q1130571","display_name":"Doping","level":2,"score":0.2138213813304901},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.08722320199012756},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.23919/mixdes62605.2024.10614012","is_oa":false,"landing_page_url":"https://doi.org/10.23919/mixdes62605.2024.10614012","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 31st International Conference on Mixed Design of Integrated Circuits and System (MIXDES)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":41,"referenced_works":["https://openalex.org/W590925644","https://openalex.org/W1977413952","https://openalex.org/W1986359571","https://openalex.org/W1998258166","https://openalex.org/W2000465277","https://openalex.org/W2037634993","https://openalex.org/W2046614871","https://openalex.org/W2061401199","https://openalex.org/W2066184359","https://openalex.org/W2099807554","https://openalex.org/W2114225808","https://openalex.org/W2138754018","https://openalex.org/W2292703207","https://openalex.org/W2334773154","https://openalex.org/W2582426095","https://openalex.org/W2585407399","https://openalex.org/W2614413697","https://openalex.org/W2790424380","https://openalex.org/W2893541202","https://openalex.org/W2897741988","https://openalex.org/W2997733287","https://openalex.org/W3038807327","https://openalex.org/W3164989162","https://openalex.org/W4214751097","https://openalex.org/W4223559377","https://openalex.org/W4251053060","https://openalex.org/W4283221190","https://openalex.org/W4379645645","https://openalex.org/W4384200427","https://openalex.org/W4391581410","https://openalex.org/W4396970664","https://openalex.org/W4399044346","https://openalex.org/W6644444928","https://openalex.org/W6653016929","https://openalex.org/W6672567207","https://openalex.org/W6677088663","https://openalex.org/W6697084770","https://openalex.org/W6780592642","https://openalex.org/W6796841767","https://openalex.org/W6855115105","https://openalex.org/W6861493430"],"related_works":["https://openalex.org/W2074707023","https://openalex.org/W1996561502","https://openalex.org/W2407751474","https://openalex.org/W2140795224","https://openalex.org/W2007767700","https://openalex.org/W4244370485","https://openalex.org/W1909614652","https://openalex.org/W3012007250","https://openalex.org/W2039969115","https://openalex.org/W1971644457"],"abstract_inverted_index":{"We":[0],"describe":[1],"approaches":[2],"for":[3,17,29,61,153],"the":[4,26,34,43,57,66,114,178,183],"fabrication":[5],"of":[6,12,25,56,69,177,185,196],"single":[7,39,73,88,108,186,197],"atom":[8,75,90],"electronic":[9,52,155],"devices":[10,13,59],"and":[11,53,120,174,188,194],"with":[14],"spin-based":[15],"qubits":[16],"quantum":[18,63,91,154],"computing.":[19,64],"Single":[20],"ion":[21],"implantation":[22],"is":[23,81,84,118],"one":[24],"main":[27],"candidates":[28],"fabricating":[30],"atomic-scale":[31],"devices.":[32],"Here,":[33],"ability":[35],"to":[36,45,107,124],"precisely":[37],"locate":[38],"dopant":[40,74,89,109],"atoms":[41,97],"has":[42],"potential":[44,116,132],"enable":[46],"deterministic,":[47],"tunable":[48],"control":[49,184],"over":[50],"key":[51],"magneto-optical":[54],"properties":[55],"basic":[58],"necessary":[60],"solid-state":[62],"Further,":[65],"electrical":[67],"operation":[68,122],"a":[70,87,129,201],"CMOS":[71],"compatible":[72],"device":[76,121],"operating":[77],"at":[78,138,146],"room-temperature":[79],"(RT)":[80],"presented.":[82],"It":[83],"based":[85,159],"on":[86,160],"dot":[92],"(QD)":[93],"transistor":[94],"using":[95],"phosphorous":[96],"isolated":[98],"within":[99],"nanoscale":[100],"SiO<inf":[101],"xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"":[102],"xmlns:xlink=\"http://www.w3.org/1999/xlink\">2</inf>tunnel":[103],"barriers.":[104],"In":[105],"contrast":[106],"transistors":[110],"in":[111,200],"silicon,":[112],"where":[113],"QD":[115],"well":[117,133],"shallow":[119],"limited":[123],"~1":[125],"K":[126,148],"temperatures,":[127],"here,":[128],"deep":[130],"(~1eV)":[131],"allows":[134],"electron":[135],"confinement":[136],"even":[137],"RT":[139],"[1].":[140],"This":[141],"suggests":[142],"higher":[143],"temperature":[144],"operation,":[145],"~10":[147,161],"or":[149],"greater":[150],"if":[151],"needed,":[152],"circuits.":[156],"The":[157],"transistors,":[158],"nm":[162],"size":[163],"scale":[164],"Si/SiO2/Si":[165],"point-contact":[166,179],"tunnel":[167,190],"junctions":[168],"defined":[169],"by":[170],"scanning":[171],"probe":[172],"lithography":[173],"\u2018geometric":[175],"oxidation\u2019":[176],"region,":[180],"have":[181],"enabled":[182],"[1],":[187],"double":[189],"coupled":[191],"QDs":[192],"[2],":[193],"investigations":[195],"particle":[198],"thermodynamics":[199],"Maxwell":[202],"\u2018demon\u2019":[203],"configuration":[204],"[3].":[205]},"counts_by_year":[{"year":2025,"cited_by_count":2}],"updated_date":"2025-12-26T23:08:49.675405","created_date":"2025-10-10T00:00:00"}