{"id":"https://openalex.org/W2886522585","doi":"https://doi.org/10.23919/mixdes.2018.8436827","title":"MEMS Gyroscope FEM Modeling and Simulation","display_name":"MEMS Gyroscope FEM Modeling and Simulation","publication_year":2018,"publication_date":"2018-06-01","ids":{"openalex":"https://openalex.org/W2886522585","doi":"https://doi.org/10.23919/mixdes.2018.8436827","mag":"2886522585"},"language":"en","primary_location":{"id":"doi:10.23919/mixdes.2018.8436827","is_oa":false,"landing_page_url":"https://doi.org/10.23919/mixdes.2018.8436827","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 25th International Conference \"Mixed Design of Integrated Circuits and System\" (MIXDES)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5045292478","display_name":"Jacek Nazdrowicz","orcid":"https://orcid.org/0000-0001-8523-8170"},"institutions":[{"id":"https://openalex.org/I188884621","display_name":"Lodz University of Technology","ror":"https://ror.org/00s8fpf52","country_code":"PL","type":"education","lineage":["https://openalex.org/I188884621"]}],"countries":["PL"],"is_corresponding":true,"raw_author_name":"Jacek Nazdrowicz","raw_affiliation_strings":["Department of Microelectronics and Computer Science, Lodz University of Technology, Lodz, Poland"],"affiliations":[{"raw_affiliation_string":"Department of Microelectronics and Computer Science, Lodz University of Technology, Lodz, Poland","institution_ids":["https://openalex.org/I188884621"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078406102","display_name":"Micha\u0142 Szermer","orcid":"https://orcid.org/0000-0002-9294-701X"},"institutions":[{"id":"https://openalex.org/I188884621","display_name":"Lodz University of Technology","ror":"https://ror.org/00s8fpf52","country_code":"PL","type":"education","lineage":["https://openalex.org/I188884621"]}],"countries":["PL"],"is_corresponding":false,"raw_author_name":"Michal Szermer","raw_affiliation_strings":["Department of Microelectronics and Computer Science, Lodz University of Technology, Lodz, Poland"],"affiliations":[{"raw_affiliation_string":"Department of Microelectronics and Computer Science, Lodz University of Technology, Lodz, Poland","institution_ids":["https://openalex.org/I188884621"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039759681","display_name":"Adam Stawinski","orcid":null},"institutions":[{"id":"https://openalex.org/I188884621","display_name":"Lodz University of Technology","ror":"https://ror.org/00s8fpf52","country_code":"PL","type":"education","lineage":["https://openalex.org/I188884621"]}],"countries":["PL"],"is_corresponding":false,"raw_author_name":"Adam Stawinski","raw_affiliation_strings":["Department of Microelectronics and Computer Science, Lodz University of Technology, Lodz, Poland"],"affiliations":[{"raw_affiliation_string":"Department of Microelectronics and Computer Science, Lodz University of Technology, Lodz, Poland","institution_ids":["https://openalex.org/I188884621"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5085564117","display_name":"Andrzej Napieralski","orcid":"https://orcid.org/0000-0002-3844-3435"},"institutions":[{"id":"https://openalex.org/I188884621","display_name":"Lodz University of Technology","ror":"https://ror.org/00s8fpf52","country_code":"PL","type":"education","lineage":["https://openalex.org/I188884621"]}],"countries":["PL"],"is_corresponding":false,"raw_author_name":"Andrzej Napieralski","raw_affiliation_strings":["Department of Microelectronics and Computer Science, Lodz University of Technology, Lodz, Poland"],"affiliations":[{"raw_affiliation_string":"Department of Microelectronics and Computer Science, Lodz University of Technology, Lodz, Poland","institution_ids":["https://openalex.org/I188884621"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":4,"corresponding_author_ids":["https://openalex.org/A5045292478"],"corresponding_institution_ids":["https://openalex.org/I188884621"],"apc_list":null,"apc_paid":null,"fwci":0.1288,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.47677224,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":94},"biblio":{"volume":null,"issue":null,"first_page":"280","last_page":"284"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11160","display_name":"Acoustic Wave Resonator Technologies","score":0.9987999796867371,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/multiphysics","display_name":"Multiphysics","score":0.9481639862060547},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.8369871377944946},{"id":"https://openalex.org/keywords/gyroscope","display_name":"Gyroscope","score":0.8240365982055664},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.7598265409469604},{"id":"https://openalex.org/keywords/comb-drive","display_name":"Comb drive","score":0.7591996192932129},{"id":"https://openalex.org/keywords/vibrating-structure-gyroscope","display_name":"Vibrating structure gyroscope","score":0.7569276094436646},{"id":"https://openalex.org/keywords/actuator","display_name":"Actuator","score":0.6401900053024292},{"id":"https://openalex.org/keywords/deformation","display_name":"Deformation (meteorology)","score":0.6305287480354309},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.48981329798698425},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.4863587021827698},{"id":"https://openalex.org/keywords/software","display_name":"Software","score":0.4644956886768341},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.3667002320289612},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.23430433869361877},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.23430019617080688},{"id":"https://openalex.org/keywords/aerospace-engineering","display_name":"Aerospace engineering","score":0.17370805144309998},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.09939906001091003},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.09459775686264038},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.056205570697784424}],"concepts":[{"id":"https://openalex.org/C46435376","wikidata":"https://www.wikidata.org/wiki/Q1829750","display_name":"Multiphysics","level":3,"score":0.9481639862060547},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.8369871377944946},{"id":"https://openalex.org/C158488048","wikidata":"https://www.wikidata.org/wiki/Q483400","display_name":"Gyroscope","level":2,"score":0.8240365982055664},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.7598265409469604},{"id":"https://openalex.org/C155840801","wikidata":"https://www.wikidata.org/wiki/Q5150581","display_name":"Comb drive","level":4,"score":0.7591996192932129},{"id":"https://openalex.org/C72768775","wikidata":"https://www.wikidata.org/wiki/Q844456","display_name":"Vibrating structure gyroscope","level":3,"score":0.7569276094436646},{"id":"https://openalex.org/C172707124","wikidata":"https://www.wikidata.org/wiki/Q423488","display_name":"Actuator","level":2,"score":0.6401900053024292},{"id":"https://openalex.org/C204366326","wikidata":"https://www.wikidata.org/wiki/Q3027650","display_name":"Deformation (meteorology)","level":2,"score":0.6305287480354309},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.48981329798698425},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.4863587021827698},{"id":"https://openalex.org/C2777904410","wikidata":"https://www.wikidata.org/wiki/Q7397","display_name":"Software","level":2,"score":0.4644956886768341},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3667002320289612},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.23430433869361877},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.23430019617080688},{"id":"https://openalex.org/C146978453","wikidata":"https://www.wikidata.org/wiki/Q3798668","display_name":"Aerospace engineering","level":1,"score":0.17370805144309998},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.09939906001091003},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.09459775686264038},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.056205570697784424},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C159985019","wikidata":"https://www.wikidata.org/wiki/Q181790","display_name":"Composite material","level":1,"score":0.0},{"id":"https://openalex.org/C199360897","wikidata":"https://www.wikidata.org/wiki/Q9143","display_name":"Programming language","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.23919/mixdes.2018.8436827","is_oa":false,"landing_page_url":"https://doi.org/10.23919/mixdes.2018.8436827","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2018 25th International Conference \"Mixed Design of Integrated Circuits and System\" (MIXDES)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":8,"referenced_works":["https://openalex.org/W567312","https://openalex.org/W1529037352","https://openalex.org/W1595396794","https://openalex.org/W2005367730","https://openalex.org/W2021455359","https://openalex.org/W2149128480","https://openalex.org/W2911000121","https://openalex.org/W4254323856"],"related_works":["https://openalex.org/W4320019880","https://openalex.org/W2018733833","https://openalex.org/W2138812454","https://openalex.org/W2185308786","https://openalex.org/W2039007435","https://openalex.org/W2363375256","https://openalex.org/W4312831286","https://openalex.org/W1650140711","https://openalex.org/W2387531099","https://openalex.org/W2371137103"],"abstract_inverted_index":{"This":[0],"paper":[1,88],"the":[2,17],"analysis":[3,15,57,66,95],"of":[4,8,16,38,73,81],"a":[5],"3D":[6,18],"model":[7],"MEMS":[9],"Gyroscope":[10],"is":[11,59],"presented.":[12],"The":[13],"FEM":[14],"structure":[19,75],"has":[20,67],"been":[21],"performed":[22,90],"in":[23,44,49,62,96],"very":[24],"popular":[25],"COMSOL":[26],"Multiphysics":[27],"software.":[28],"Authors":[29],"took":[30],"particular":[31,36],"attention":[32],"on":[33,79],"mechanical":[34],"behaviour":[35],"parts":[37],"this":[39,63,65,87],"device":[40],"especially":[41],"combs":[42],"(used":[43],"electrostatical":[45],"actuators":[46],"and":[47,51,84,93],"sensors)":[48],"drive":[50,107],"sense":[52,97],"directions.":[53],"For":[54],"further":[55],"electrostatic":[56,82],"(which":[58],"not":[60],"covered":[61],"article)":[64],"enormous":[68],"meaning":[69],"because":[70],"any":[71],"deformation":[72,94],"comb":[74],"during":[76],"operation":[77],"influences":[78],"quality":[80],"actuating":[83],"sensing.":[85],"In":[86],"author":[89],"stress":[91],"results":[92],"direction,":[98],"however":[99],"similar":[100],"conclusions":[101],"one":[102],"can":[103],"be":[104],"drawn":[105],"for":[106],"direction.":[108]},"counts_by_year":[{"year":2020,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}