{"id":"https://openalex.org/W2149914665","doi":"https://doi.org/10.23919/ecc.2009.7074742","title":"Multivariable control of a metrological Atomic Force Microscope","display_name":"Multivariable control of a metrological Atomic Force Microscope","publication_year":2009,"publication_date":"2009-08-01","ids":{"openalex":"https://openalex.org/W2149914665","doi":"https://doi.org/10.23919/ecc.2009.7074742","mag":"2149914665"},"language":"en","primary_location":{"id":"doi:10.23919/ecc.2009.7074742","is_oa":false,"landing_page_url":"https://doi.org/10.23919/ecc.2009.7074742","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 European Control Conference (ECC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5050053529","display_name":"Michael Ronde","orcid":"https://orcid.org/0000-0002-8651-2044"},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"M.J.C. Ronde","raw_affiliation_strings":["Department of Mechanical Engineering, Eindhoven University of Technology, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Eindhoven University of Technology, The Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5110272227","display_name":"Roel Merry","orcid":null},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"R.J.E. Merry","raw_affiliation_strings":["Department of Mechanical Engineering, Eindhoven University of Technology, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Eindhoven University of Technology, The Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5111512012","display_name":"M.J.G. v.d. Molengraft","orcid":null},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"M.J.G. v.d. Molengraft","raw_affiliation_strings":["Department of Mechanical Engineering, Eindhoven University of Technology, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Eindhoven University of Technology, The Netherlands","institution_ids":["https://openalex.org/I83019370"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039073958","display_name":"K.R. Koops","orcid":null},"institutions":[{"id":"https://openalex.org/I4210164637","display_name":"VSL Dutch Metrology Institute","ror":"https://ror.org/05ap1vt50","country_code":"NL","type":"facility","lineage":["https://openalex.org/I4210164637"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"K.R. Koops","raw_affiliation_strings":["VSL Dutch Metrology Institute, Delft"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"VSL Dutch Metrology Institute, Delft","institution_ids":["https://openalex.org/I4210164637"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5026038138","display_name":"M. Steinbuch","orcid":"https://orcid.org/0000-0002-1469-1696"},"institutions":[{"id":"https://openalex.org/I83019370","display_name":"Eindhoven University of Technology","ror":"https://ror.org/02c2kyt77","country_code":"NL","type":"education","lineage":["https://openalex.org/I83019370"]}],"countries":["NL"],"is_corresponding":false,"raw_author_name":"M. Steinbuch","raw_affiliation_strings":["Department of Mechanical Engineering, Eindhoven University of Technology, The Netherlands"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Mechanical Engineering, Eindhoven University of Technology, The Netherlands","institution_ids":["https://openalex.org/I83019370"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.20330155,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"2265","last_page":"2270"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11890","display_name":"Scientific Measurement and Uncertainty Evaluation","score":0.9980000257492065,"subfield":{"id":"https://openalex.org/subfields/1804","display_name":"Statistics, Probability and Uncertainty"},"field":{"id":"https://openalex.org/fields/18","display_name":"Decision Sciences"},"domain":{"id":"https://openalex.org/domains/2","display_name":"Social Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9948999881744385,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/multivariable-calculus","display_name":"Multivariable calculus","score":0.975820779800415},{"id":"https://openalex.org/keywords/pid-controller","display_name":"PID controller","score":0.7079371809959412},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.6661208271980286},{"id":"https://openalex.org/keywords/metrology","display_name":"Metrology","score":0.6501018404960632},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.6205571889877319},{"id":"https://openalex.org/keywords/coupling","display_name":"Coupling (piping)","score":0.5508338809013367},{"id":"https://openalex.org/keywords/calibration","display_name":"Calibration","score":0.4857771694660187},{"id":"https://openalex.org/keywords/control-engineering","display_name":"Control engineering","score":0.4588812291622162},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.44884902238845825},{"id":"https://openalex.org/keywords/controller","display_name":"Controller (irrigation)","score":0.4431009888648987},{"id":"https://openalex.org/keywords/transfer-function","display_name":"Transfer function","score":0.4268406629562378},{"id":"https://openalex.org/keywords/process-control","display_name":"Process control","score":0.415728360414505},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.3713158369064331},{"id":"https://openalex.org/keywords/temperature-control","display_name":"Temperature control","score":0.27117669582366943},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.26604506373405457},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.23976251482963562},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.2240859568119049},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.17487969994544983},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.16350725293159485},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.14738324284553528},{"id":"https://openalex.org/keywords/mechanical-engineering","display_name":"Mechanical engineering","score":0.13483098149299622},{"id":"https://openalex.org/keywords/process","display_name":"Process (computing)","score":0.12812462449073792},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.1102413535118103},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.07378992438316345},{"id":"https://openalex.org/keywords/statistics","display_name":"Statistics","score":0.06941962242126465}],"concepts":[{"id":"https://openalex.org/C117312493","wikidata":"https://www.wikidata.org/wiki/Q2035437","display_name":"Multivariable calculus","level":2,"score":0.975820779800415},{"id":"https://openalex.org/C47116090","wikidata":"https://www.wikidata.org/wiki/Q716829","display_name":"PID controller","level":3,"score":0.7079371809959412},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.6661208271980286},{"id":"https://openalex.org/C195766429","wikidata":"https://www.wikidata.org/wiki/Q394","display_name":"Metrology","level":2,"score":0.6501018404960632},{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.6205571889877319},{"id":"https://openalex.org/C131584629","wikidata":"https://www.wikidata.org/wiki/Q4308705","display_name":"Coupling (piping)","level":2,"score":0.5508338809013367},{"id":"https://openalex.org/C165838908","wikidata":"https://www.wikidata.org/wiki/Q736777","display_name":"Calibration","level":2,"score":0.4857771694660187},{"id":"https://openalex.org/C133731056","wikidata":"https://www.wikidata.org/wiki/Q4917288","display_name":"Control engineering","level":1,"score":0.4588812291622162},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.44884902238845825},{"id":"https://openalex.org/C203479927","wikidata":"https://www.wikidata.org/wiki/Q5165939","display_name":"Controller (irrigation)","level":2,"score":0.4431009888648987},{"id":"https://openalex.org/C81299745","wikidata":"https://www.wikidata.org/wiki/Q334269","display_name":"Transfer function","level":2,"score":0.4268406629562378},{"id":"https://openalex.org/C155386361","wikidata":"https://www.wikidata.org/wiki/Q1649571","display_name":"Process control","level":3,"score":0.415728360414505},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.3713158369064331},{"id":"https://openalex.org/C536315585","wikidata":"https://www.wikidata.org/wiki/Q7698332","display_name":"Temperature control","level":2,"score":0.27117669582366943},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.26604506373405457},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.23976251482963562},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.2240859568119049},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.17487969994544983},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.16350725293159485},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.14738324284553528},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.13483098149299622},{"id":"https://openalex.org/C98045186","wikidata":"https://www.wikidata.org/wiki/Q205663","display_name":"Process (computing)","level":2,"score":0.12812462449073792},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.1102413535118103},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.07378992438316345},{"id":"https://openalex.org/C105795698","wikidata":"https://www.wikidata.org/wiki/Q12483","display_name":"Statistics","level":1,"score":0.06941962242126465},{"id":"https://openalex.org/C6557445","wikidata":"https://www.wikidata.org/wiki/Q173113","display_name":"Agronomy","level":1,"score":0.0},{"id":"https://openalex.org/C111919701","wikidata":"https://www.wikidata.org/wiki/Q9135","display_name":"Operating system","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":5,"locations":[{"id":"doi:10.23919/ecc.2009.7074742","is_oa":false,"landing_page_url":"https://doi.org/10.23919/ecc.2009.7074742","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2009 European Control Conference (ECC)","raw_type":"proceedings-article"},{"id":"pmh:oai:pure.tue.nl:openaire_cris_publications/39a39dd2-db75-469f-88c9-8b0264aad305","is_oa":false,"landing_page_url":"https://research.tue.nl/en/publications/39a39dd2-db75-469f-88c9-8b0264aad305","pdf_url":null,"source":{"id":"https://openalex.org/S4406922641","display_name":"TU/e Research Portal","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"Ronde, M J C, Merry, R J E, van de Molengraft, M J G, Koops, K R & Steinbuch, M 2009, Multivariable control of a metrological Atomic Force Microscope. in Proceedings of 10th European Control Conference (ECC'09), 23-26 August 2009, Budapest, Hungary. pp. 2265-2270.","raw_type":"info:eu-repo/semantics/publishedVersion"},{"id":"pmh:664800","is_oa":false,"landing_page_url":"http://library.tue.nl/csp/dare/LinkToRepository.csp?recordnumber=664800","pdf_url":null,"source":{"id":"https://openalex.org/S4406923046","display_name":"TU/e Research Portal (Eindhoven University of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":""},{"id":"pmh:oai:library.tue.nl:664800","is_oa":false,"landing_page_url":"http://repository.tue.nl/664800","pdf_url":null,"source":{"id":"https://openalex.org/S4406923046","display_name":"TU/e Research Portal (Eindhoven University of Technology)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"","raw_type":""},{"id":"pmh:tue:oai:pure.tue.nl:publications/39a39dd2-db75-469f-88c9-8b0264aad305","is_oa":false,"landing_page_url":"https://research.tue.nl/nl/publications/39a39dd2-db75-469f-88c9-8b0264aad305","pdf_url":null,"source":{"id":"https://openalex.org/S4306401843","display_name":"Data Archiving and Networked Services (DANS)","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":"https://openalex.org/I1322597698","host_organization_name":"Royal Netherlands Academy of Arts and Sciences","host_organization_lineage":["https://openalex.org/I1322597698"],"host_organization_lineage_names":[],"type":"repository"},"license":null,"license_id":null,"version":"submittedVersion","is_accepted":false,"is_published":false,"raw_source_name":"Proceedings of 10th European Control Conference (ECC'09), 23-26 August 2009, Budapest, Hungary, 2265 - 2270","raw_type":"info:eu-repo/semantics/conferencepaper"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":26,"referenced_works":["https://openalex.org/W43009399","https://openalex.org/W1868559974","https://openalex.org/W1888908880","https://openalex.org/W1965324089","https://openalex.org/W1990032845","https://openalex.org/W1991811230","https://openalex.org/W2057895073","https://openalex.org/W2058209887","https://openalex.org/W2074586010","https://openalex.org/W2095600705","https://openalex.org/W2096927411","https://openalex.org/W2099571563","https://openalex.org/W2114515197","https://openalex.org/W2121831660","https://openalex.org/W2126988936","https://openalex.org/W2130212796","https://openalex.org/W2131339636","https://openalex.org/W2131588967","https://openalex.org/W2143862071","https://openalex.org/W2146467343","https://openalex.org/W2166632579","https://openalex.org/W2167933592","https://openalex.org/W2168717647","https://openalex.org/W2171992958","https://openalex.org/W3150248096","https://openalex.org/W3195133498"],"related_works":["https://openalex.org/W2224575301","https://openalex.org/W2626948710","https://openalex.org/W115221160","https://openalex.org/W2079540946","https://openalex.org/W2992866925","https://openalex.org/W2306592611","https://openalex.org/W2081165380","https://openalex.org/W3117957783","https://openalex.org/W1516169664","https://openalex.org/W1534706084"],"abstract_inverted_index":{"Atomic":[0],"Fore":[1],"Microscopes":[2],"(AFMs)":[3],"are":[4],"widely":[5],"used":[6,66],"for":[7,34,67],"nanoscale":[8],"applications.":[9],"Until":[10],"recent":[11],"developments":[12],"these":[13],"instruments":[14],"were":[15],"controlled":[16],"in":[17,38,112],"open":[18],"loop":[19],"or":[20],"by":[21,118],"a":[22,52,63,77,106],"PID":[23],"type":[24],"controller.":[25],"In":[26,47],"the":[27,42,57,68,94,110],"last":[28],"decade":[29],"model-based":[30],"control":[31,54,87],"techniques":[32],"emerged":[33],"controlling":[35],"AFMs,":[36],"but":[37],"almost":[39],"all":[40],"cases":[41],"multivariable":[43,53,86,92,120],"behavior":[44],"was":[45],"ignored.":[46],"this":[48,74],"paper,":[49],"we":[50,82],"present":[51],"strategy":[55],"using":[56,91],"standard":[58],"plant":[59],"framework,":[60],"applied":[61],"to":[62,101],"metrological":[64],"AFM,":[65],"calibration":[69],"of":[70,80,96,109],"transfer":[71],"standards.":[72],"Although":[73],"device":[75],"has":[76,88],"low":[78],"amount":[79,95],"coupling,":[81],"will":[83],"show":[84,105],"that":[85],"advantages.":[89],"By":[90],"control,":[93],"coupling":[97],"is":[98],"reduced":[99],"compared":[100],"decentralized":[102],"control.":[103,121],"Simulations":[104],"significant":[107],"reduction":[108],"errors":[111],"x,":[113],"y":[114],"and":[115],"z":[116],"directions":[117],"applying":[119]},"counts_by_year":[],"updated_date":"2026-06-11T09:08:48.828518","created_date":"2025-10-10T00:00:00"}