{"id":"https://openalex.org/W7163592520","doi":"https://doi.org/10.23919/date69613.2026.11539705","title":"LithoMamba: High-fidelity lithography simulation with State Space Models","display_name":"LithoMamba: High-fidelity lithography simulation with State Space Models","publication_year":2026,"publication_date":"2026-04-20","ids":{"openalex":"https://openalex.org/W7163592520","doi":"https://doi.org/10.23919/date69613.2026.11539705"},"language":null,"primary_location":{"id":"doi:10.23919/date69613.2026.11539705","is_oa":false,"landing_page_url":"https://doi.org/10.23919/date69613.2026.11539705","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2026 Design, Automation & Test in Europe Conference (DATE)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5137896052","display_name":"Xinyu He","orcid":null},"institutions":[{"id":"https://openalex.org/I66867065","display_name":"East China Normal University","ror":"https://ror.org/02n96ep67","country_code":"CN","type":"education","lineage":["https://openalex.org/I66867065"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xinyu He","raw_affiliation_strings":["East China Normal University,Shanghai Key Laboratory of Multidimensional Information Processing,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"East China Normal University,Shanghai Key Laboratory of Multidimensional Information Processing,China","institution_ids":["https://openalex.org/I66867065"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5067879917","display_name":"Daohui Wang","orcid":"https://orcid.org/0009-0000-8169-294X"},"institutions":[{"id":"https://openalex.org/I66867065","display_name":"East China Normal University","ror":"https://ror.org/02n96ep67","country_code":"CN","type":"education","lineage":["https://openalex.org/I66867065"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Daohui Wang","raw_affiliation_strings":["East China Normal University,Shanghai Key Laboratory of Multidimensional Information Processing,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"East China Normal University,Shanghai Key Laboratory of Multidimensional Information Processing,China","institution_ids":["https://openalex.org/I66867065"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5075220317","display_name":"Shujing Lyu","orcid":"https://orcid.org/0000-0003-2623-1379"},"institutions":[{"id":"https://openalex.org/I66867065","display_name":"East China Normal University","ror":"https://ror.org/02n96ep67","country_code":"CN","type":"education","lineage":["https://openalex.org/I66867065"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Shujing Lyu","raw_affiliation_strings":["East China Normal University,Shanghai Key Laboratory of Multidimensional Information Processing,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"East China Normal University,Shanghai Key Laboratory of Multidimensional Information Processing,China","institution_ids":["https://openalex.org/I66867065"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5137898868","display_name":"Pourya Shamsolmoali","orcid":null},"institutions":[{"id":"https://openalex.org/I66867065","display_name":"East China Normal University","ror":"https://ror.org/02n96ep67","country_code":"CN","type":"education","lineage":["https://openalex.org/I66867065"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Pourya Shamsolmoali","raw_affiliation_strings":["East China Normal University,Shanghai Key Laboratory of Multidimensional Information Processing,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"East China Normal University,Shanghai Key Laboratory of Multidimensional Information Processing,China","institution_ids":["https://openalex.org/I66867065"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5055933562","display_name":"Jiwei Shen","orcid":"https://orcid.org/0000-0002-1987-4926"},"institutions":[{"id":"https://openalex.org/I66867065","display_name":"East China Normal University","ror":"https://ror.org/02n96ep67","country_code":"CN","type":"education","lineage":["https://openalex.org/I66867065"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Jiwei Shen","raw_affiliation_strings":["East China Normal University,Shanghai Key Laboratory of Multidimensional Information Processing,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"East China Normal University,Shanghai Key Laboratory of Multidimensional Information Processing,China","institution_ids":["https://openalex.org/I66867065"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5137854565","display_name":"Yue Lu","orcid":null},"institutions":[{"id":"https://openalex.org/I66867065","display_name":"East China Normal University","ror":"https://ror.org/02n96ep67","country_code":"CN","type":"education","lineage":["https://openalex.org/I66867065"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Yue Lu","raw_affiliation_strings":["East China Normal University,Shanghai Key Laboratory of Multidimensional Information Processing,China"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"East China Normal University,Shanghai Key Laboratory of Multidimensional Information Processing,China","institution_ids":["https://openalex.org/I66867065"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I66867065"],"apc_list":null,"apc_paid":null,"fwci":0.0,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":{"value":0.75831869,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"1","last_page":"6"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.8064000010490417,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11338","display_name":"Advancements in Photolithography Techniques","score":0.8064000010490417,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11471","display_name":"Block Copolymer Self-Assembly","score":0.039000000804662704,"subfield":{"id":"https://openalex.org/subfields/2505","display_name":"Materials Chemistry"},"field":{"id":"https://openalex.org/fields/25","display_name":"Materials Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12224","display_name":"Nanofabrication and Lithography Techniques","score":0.009399999864399433,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/space","display_name":"Space (punctuation)","score":0.35929998755455017},{"id":"https://openalex.org/keywords/lithography","display_name":"Lithography","score":0.353300005197525},{"id":"https://openalex.org/keywords/state","display_name":"State (computer science)","score":0.3345000147819519},{"id":"https://openalex.org/keywords/state-space","display_name":"State space","score":0.32670000195503235},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.2944999933242798}],"concepts":[{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.43140000104904175},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4309999942779541},{"id":"https://openalex.org/C2778572836","wikidata":"https://www.wikidata.org/wiki/Q380933","display_name":"Space (punctuation)","level":2,"score":0.35929998755455017},{"id":"https://openalex.org/C204223013","wikidata":"https://www.wikidata.org/wiki/Q133036","display_name":"Lithography","level":2,"score":0.353300005197525},{"id":"https://openalex.org/C48103436","wikidata":"https://www.wikidata.org/wiki/Q599031","display_name":"State (computer science)","level":2,"score":0.3345000147819519},{"id":"https://openalex.org/C72434380","wikidata":"https://www.wikidata.org/wiki/Q230930","display_name":"State space","level":2,"score":0.32670000195503235},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.29679998755455017},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.2944999933242798},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.2833000123500824},{"id":"https://openalex.org/C107814960","wikidata":"https://www.wikidata.org/wiki/Q611957","display_name":"Solid-state","level":2,"score":0.2599000036716461},{"id":"https://openalex.org/C90673727","wikidata":"https://www.wikidata.org/wiki/Q901718","display_name":"Product (mathematics)","level":2,"score":0.2549999952316284}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.23919/date69613.2026.11539705","is_oa":false,"landing_page_url":"https://doi.org/10.23919/date69613.2026.11539705","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2026 Design, Automation & Test in Europe Conference (DATE)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"score":0.6984468102455139,"id":"https://metadata.un.org/sdg/11","display_name":"Sustainable cities and communities"}],"awards":[],"funders":[{"id":"https://openalex.org/F4320309612","display_name":"Natural Science Foundation of Shanghai","ror":null},{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320321543","display_name":"China Postdoctoral Science Foundation","ror":"https://ror.org/0426zh255"}],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W1993445447","https://openalex.org/W2066701048","https://openalex.org/W2082891189","https://openalex.org/W2262878824","https://openalex.org/W3200448432","https://openalex.org/W3203959872","https://openalex.org/W3212516020","https://openalex.org/W4380607210","https://openalex.org/W4386764988","https://openalex.org/W4388958963","https://openalex.org/W4390485926","https://openalex.org/W4391899816","https://openalex.org/W4403067091","https://openalex.org/W4403827049"],"related_works":[],"abstract_inverted_index":{"Lithography":[0],"simulation":[1,37,131],"is":[2],"a":[3,67,78],"critical":[4],"technology":[5],"in":[6,35,114,142],"modern":[7],"semiconductor":[8],"manufacturing,":[9],"yet":[10],"existing":[11,111],"deep":[12],"learning":[13],"models":[14],"often":[15],"fail":[16],"to":[17,26,57,70,86,97],"accurately":[18],"model":[19,71,96],"the":[20,27,53,122],"complex,":[21],"long-range":[22,74],"optical":[23,75],"physics":[24,138],"due":[25],"inherent":[28],"locality":[29],"of":[30,124],"convolution.":[31],"This":[32,91],"limitation":[33],"results":[34],"insufficient":[36],"fidelity":[38],"and":[39,73,102,116,132],"poses":[40],"significant":[41],"challenges":[42],"for":[43,60,128,136],"optimization":[44],"tasks.":[45],"To":[46],"overcome":[47],"this":[48],"challenge,":[49],"we":[50],"introduce":[51],"LithoMamba,":[52],"first":[54],"generative":[55,140],"framework":[56],"leverage":[58],"Mamba":[59,68],"high-fidelity":[61],"lithography":[62,130],"simulation.":[63],"Our":[64,105],"architecture":[65],"uses":[66],"Generator":[69],"global":[72],"interactions,":[76],"while":[77],"local,":[79],"MLP-free":[80],"Discriminator":[81],"provides":[82],"precise,":[83],"spatial":[84],"feedback":[85],"ensure":[87],"fine-grained":[88],"pattern":[89],"fidelity.":[90],"global-local":[92],"design":[93],"enables":[94],"our":[95],"achieve":[98],"both":[99,113],"physical":[100],"realism":[101],"exceptional":[103],"detail.":[104],"experiments":[106],"show":[107],"that":[108],"LithoMamba":[109],"outperforms":[110],"methods,":[112],"quantitative":[115],"qualitative":[117],"results.":[118],"These":[119],"findings":[120],"demonstrate":[121],"promise":[123],"State":[125],"Space":[126],"Models":[127],"improving":[129],"suggest":[133],"new":[134],"possibilities":[135],"combining":[137],"with":[139],"AI":[141],"chip":[143],"manufacturing.":[144]},"counts_by_year":[],"updated_date":"2026-06-26T08:34:08.712188","created_date":"2026-06-05T00:00:00"}