{"id":"https://openalex.org/W4402261812","doi":"https://doi.org/10.23919/acc60939.2024.10644777","title":"An Efficiency Scanning Strategy Based on Online Smoothing Variable-Speed for AFM with a Rotating Stage","display_name":"An Efficiency Scanning Strategy Based on Online Smoothing Variable-Speed for AFM with a Rotating Stage","publication_year":2024,"publication_date":"2024-07-10","ids":{"openalex":"https://openalex.org/W4402261812","doi":"https://doi.org/10.23919/acc60939.2024.10644777"},"language":"en","primary_location":{"id":"doi:10.23919/acc60939.2024.10644777","is_oa":false,"landing_page_url":"http://dx.doi.org/10.23919/acc60939.2024.10644777","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 American Control Conference (ACC)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5036381684","display_name":"Huang-Chih Chen","orcid":"https://orcid.org/0000-0002-0838-1069"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Huang-Chih Chen","raw_affiliation_strings":["National Taiwan University,Electrical Engineering Department,Taipei,Taiwan,106"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Taiwan University,Electrical Engineering Department,Taipei,Taiwan,106","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5113368581","display_name":"Sheng-Wei Peng","orcid":null},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Sheng-Wei Peng","raw_affiliation_strings":["National Taiwan University,Electrical Engineering Department,Taipei,Taiwan,106"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Taiwan University,Electrical Engineering Department,Taipei,Taiwan,106","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5114221456","display_name":"Ting-An Chou","orcid":null},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Ting-An Chou","raw_affiliation_strings":["National Taiwan University,Electrical Engineering Department,Taipei,Taiwan,106"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Taiwan University,Electrical Engineering Department,Taipei,Taiwan,106","institution_ids":["https://openalex.org/I16733864"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5101925654","display_name":"Li\u2010Chen Fu","orcid":"https://orcid.org/0000-0002-6947-7646"},"institutions":[{"id":"https://openalex.org/I16733864","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95","country_code":"TW","type":"education","lineage":["https://openalex.org/I16733864"]}],"countries":["TW"],"is_corresponding":false,"raw_author_name":"Li-Chen Fu","raw_affiliation_strings":["National Taiwan University,Electrical Engineering Department,Taipei,Taiwan,106"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"National Taiwan University,Electrical Engineering Department,Taipei,Taiwan,106","institution_ids":["https://openalex.org/I16733864"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I16733864"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":"4308","last_page":"4313"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10188","display_name":"Advanced machining processes and optimization","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/2210","display_name":"Mechanical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/smoothing","display_name":"Smoothing","score":0.6921412944793701},{"id":"https://openalex.org/keywords/stage","display_name":"Stage (stratigraphy)","score":0.5751280784606934},{"id":"https://openalex.org/keywords/atomic-force-microscopy","display_name":"Atomic force microscopy","score":0.5661084651947021},{"id":"https://openalex.org/keywords/variable","display_name":"Variable (mathematics)","score":0.5652288794517517},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.470276415348053},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3681489825248718},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.3234245777130127},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.240993469953537},{"id":"https://openalex.org/keywords/computer-vision","display_name":"Computer vision","score":0.2102627456188202},{"id":"https://openalex.org/keywords/artificial-intelligence","display_name":"Artificial intelligence","score":0.2006443738937378},{"id":"https://openalex.org/keywords/mathematics","display_name":"Mathematics","score":0.15764781832695007},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.13051000237464905}],"concepts":[{"id":"https://openalex.org/C3770464","wikidata":"https://www.wikidata.org/wiki/Q775963","display_name":"Smoothing","level":2,"score":0.6921412944793701},{"id":"https://openalex.org/C146357865","wikidata":"https://www.wikidata.org/wiki/Q1123245","display_name":"Stage (stratigraphy)","level":2,"score":0.5751280784606934},{"id":"https://openalex.org/C102951782","wikidata":"https://www.wikidata.org/wiki/Q49295","display_name":"Atomic force microscopy","level":2,"score":0.5661084651947021},{"id":"https://openalex.org/C182365436","wikidata":"https://www.wikidata.org/wiki/Q50701","display_name":"Variable (mathematics)","level":2,"score":0.5652288794517517},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.470276415348053},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3681489825248718},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.3234245777130127},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.240993469953537},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.2102627456188202},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.2006443738937378},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.15764781832695007},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.13051000237464905},{"id":"https://openalex.org/C134306372","wikidata":"https://www.wikidata.org/wiki/Q7754","display_name":"Mathematical analysis","level":1,"score":0.0},{"id":"https://openalex.org/C151730666","wikidata":"https://www.wikidata.org/wiki/Q7205","display_name":"Paleontology","level":1,"score":0.0},{"id":"https://openalex.org/C86803240","wikidata":"https://www.wikidata.org/wiki/Q420","display_name":"Biology","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.23919/acc60939.2024.10644777","is_oa":false,"landing_page_url":"http://dx.doi.org/10.23919/acc60939.2024.10644777","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2024 American Control Conference (ACC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.7300000190734863}],"awards":[{"id":"https://openalex.org/G3607014947","display_name":null,"funder_award_id":"MOST 110-2634-F-002-049,MOST 110-2221-E-002-166-MY3","funder_id":"https://openalex.org/F4320323900","funder_display_name":"National Taiwan University"}],"funders":[{"id":"https://openalex.org/F4320309618","display_name":"Ministry of Science and Technology","ror":"https://ror.org/02b207r52"},{"id":"https://openalex.org/F4320323900","display_name":"National Taiwan University","ror":"https://ror.org/05bqach95"}],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":14,"referenced_works":["https://openalex.org/W2067147925","https://openalex.org/W2088382221","https://openalex.org/W2133826865","https://openalex.org/W2414774309","https://openalex.org/W2530229664","https://openalex.org/W2598353255","https://openalex.org/W2763586588","https://openalex.org/W2905056310","https://openalex.org/W3002733327","https://openalex.org/W3046159930","https://openalex.org/W3094527452","https://openalex.org/W3150248096","https://openalex.org/W4229452547","https://openalex.org/W4285300603"],"related_works":["https://openalex.org/W1978572805","https://openalex.org/W2383807498","https://openalex.org/W1997992934","https://openalex.org/W1987225439","https://openalex.org/W4238188170","https://openalex.org/W2125114371","https://openalex.org/W2019977573","https://openalex.org/W2149980199","https://openalex.org/W3125766170","https://openalex.org/W2040641410"],"abstract_inverted_index":{"Atomic":[0],"force":[1],"microscopy":[2],"(AFM)":[3],"has":[4],"found":[5],"wide":[6],"application":[7],"in":[8,28,35,144],"various":[9],"fields,":[10],"including":[11],"nanotechnology,":[12],"nanomanipulation,":[13],"and":[14],"bioscience.":[15],"Nevertheless,":[16],"traditional":[17],"raster":[18],"or":[19],"non-raster":[20],"trajectories":[21],"do":[22],"not":[23],"allow":[24],"for":[25,61],"speed":[26,65,101],"variations":[27],"specific":[29],"regions":[30,54,96],"but":[31],"are":[32],"predetermined,":[33],"resulting":[34,143],"an":[36,135],"efficiency":[37],"shortfall.":[38],"Addressing":[39],"this":[40,42],"limitation,":[41],"paper":[43],"introduces":[44],"a":[45,98,108,128,139],"novel":[46],"scanning":[47,64,80,115],"strategy":[48],"with":[49,131,138],"online":[50,84],"detection":[51],"of":[52,63,76],"critical":[53,95],"during":[55,66],"the":[56,67,74,79,90,123],"backward":[57],"scan.":[58],"This":[59,112],"allows":[60],"self-adjustment":[62],"forward":[68],"scan,":[69],"as":[70,72],"well":[71],"ensuring":[73],"continuity":[75],"acceleration":[77],"throughout":[78],"process.":[81],"The":[82],"proposed":[83],"smoothing":[85],"variable-speed":[86],"(OSVS)":[87],"method":[88,125],"lets":[89],"AFM":[91,136],"meticulously":[92],"scan":[93,146],"recognized":[94],"at":[97,107],"relatively":[99],"low":[100],"while":[102,117],"swiftly":[103],"traversing":[104],"uninteresting":[105],"areas":[106],"much":[109],"higher":[110,132],"speed.":[111],"approach":[113],"reduces":[114],"time":[116],"maintaining":[118],"imaging":[119],"performance.":[120],"In":[121],"experiments,":[122],"developed":[124],"efficiently":[126],"scans":[127],"grating":[129],"sample":[130,140],"sidewalls":[133],"using":[134],"equipped":[137],"rotating":[141],"stage,":[142],"high-precision":[145],"results.":[147]},"counts_by_year":[],"updated_date":"2026-07-14T23:27:15.235271","created_date":"2025-10-10T00:00:00"}