{"id":"https://openalex.org/W2972911930","doi":"https://doi.org/10.23919/acc.2019.8815299","title":"Design and Control of a Multi-Actuated Nanopositioning Stage with Stacked Structure","display_name":"Design and Control of a Multi-Actuated Nanopositioning Stage with Stacked Structure","publication_year":2019,"publication_date":"2019-07-01","ids":{"openalex":"https://openalex.org/W2972911930","doi":"https://doi.org/10.23919/acc.2019.8815299","mag":"2972911930"},"language":"en","primary_location":{"id":"doi:10.23919/acc.2019.8815299","is_oa":false,"landing_page_url":"https://doi.org/10.23919/acc.2019.8815299","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 American Control Conference (ACC)","raw_type":"proceedings-article"},"type":"conference-paper","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5023785952","display_name":"Chen Yang","orcid":"https://orcid.org/0000-0002-0760-8284"},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Chen Yang","raw_affiliation_strings":["Engineering of Massachusetts Institute of Technology, Cambridge, MA, 02139, USA","Department of Mechanical, Engineering of Massachusetts Institute of Technology, Cambridge, MA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Engineering of Massachusetts Institute of Technology, Cambridge, MA, 02139, USA","institution_ids":["https://openalex.org/I63966007"]},{"raw_affiliation_string":"Department of Mechanical, Engineering of Massachusetts Institute of Technology, Cambridge, MA, USA","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5049403879","display_name":"Fangzhou Xia","orcid":"https://orcid.org/0000-0002-6314-3717"},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Fangzhou Xia","raw_affiliation_strings":["Engineering of Massachusetts Institute of Technology, Cambridge, MA, 02139, USA","Department of Mechanical, Engineering of Massachusetts Institute of Technology, Cambridge, MA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Engineering of Massachusetts Institute of Technology, Cambridge, MA, 02139, USA","institution_ids":["https://openalex.org/I63966007"]},{"raw_affiliation_string":"Department of Mechanical, Engineering of Massachusetts Institute of Technology, Cambridge, MA, USA","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100739526","display_name":"Yi Wang","orcid":"https://orcid.org/0000-0001-9681-2334"},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Yi Wang","raw_affiliation_strings":["Massachusetts Institute of Technology, Synfuels China Technology Co. Ltd., Cambridge, MA, 02139, USA","Massachusetts Institute of Technology, Synfuels China Technology Co. Ltd., Cambridge, MA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Massachusetts Institute of Technology, Synfuels China Technology Co. Ltd., Cambridge, MA, 02139, USA","institution_ids":["https://openalex.org/I63966007"]},{"raw_affiliation_string":"Massachusetts Institute of Technology, Synfuels China Technology Co. Ltd., Cambridge, MA, USA","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5069760027","display_name":"Truncale Stephen","orcid":null},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Stephen Truncale","raw_affiliation_strings":["Synfuels Americas, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA","Synfuels Americas, Massachusetts Institute of Technology, Cambridge, MA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Synfuels Americas, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA","institution_ids":["https://openalex.org/I63966007"]},{"raw_affiliation_string":"Synfuels Americas, Massachusetts Institute of Technology, Cambridge, MA, USA","institution_ids":["https://openalex.org/I63966007"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5086271665","display_name":"Kamal Youcef\u2010Toumi","orcid":"https://orcid.org/0000-0001-6755-1534"},"institutions":[{"id":"https://openalex.org/I63966007","display_name":"Massachusetts Institute of Technology","ror":"https://ror.org/042nb2s44","country_code":"US","type":"education","lineage":["https://openalex.org/I63966007"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Kamal Youcef-Toumi","raw_affiliation_strings":["Institute of Technology, Cambridge, MA, 02139, USA","Faculty of Department of Mechanical Engineering of Massachusetts, Institute of Technology, Cambridge, MA, USA"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Institute of Technology, Cambridge, MA, 02139, USA","institution_ids":["https://openalex.org/I63966007"]},{"raw_affiliation_string":"Faculty of Department of Mechanical Engineering of Massachusetts, Institute of Technology, Cambridge, MA, USA","institution_ids":["https://openalex.org/I63966007"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I63966007"],"apc_list":null,"apc_paid":null,"fwci":0.8775,"has_fulltext":false,"cited_by_count":4,"citation_normalized_percentile":{"value":0.67184198,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"2019","issue":null,"first_page":"3782","last_page":"3788"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T11525","display_name":"Piezoelectric Actuators and Control","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2207","display_name":"Control and Systems Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11301","display_name":"Advanced Surface Polishing Techniques","score":0.9950000047683716,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.6920260190963745},{"id":"https://openalex.org/keywords/stiffness","display_name":"Stiffness","score":0.6766797304153442},{"id":"https://openalex.org/keywords/nonlinear-system","display_name":"Nonlinear system","score":0.5638327598571777},{"id":"https://openalex.org/keywords/resonance","display_name":"Resonance (particle physics)","score":0.529106080532074},{"id":"https://openalex.org/keywords/control-theory","display_name":"Control theory (sociology)","score":0.5237798094749451},{"id":"https://openalex.org/keywords/finite-element-method","display_name":"Finite element method","score":0.4956897497177124},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.36139804124832153},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.35585448145866394},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.34246566891670227},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3287743926048279},{"id":"https://openalex.org/keywords/structural-engineering","display_name":"Structural engineering","score":0.31647199392318726},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.28961437940597534},{"id":"https://openalex.org/keywords/control","display_name":"Control (management)","score":0.14948251843452454}],"concepts":[{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.6920260190963745},{"id":"https://openalex.org/C2779372316","wikidata":"https://www.wikidata.org/wiki/Q569057","display_name":"Stiffness","level":2,"score":0.6766797304153442},{"id":"https://openalex.org/C158622935","wikidata":"https://www.wikidata.org/wiki/Q660848","display_name":"Nonlinear system","level":2,"score":0.5638327598571777},{"id":"https://openalex.org/C139210041","wikidata":"https://www.wikidata.org/wiki/Q2145840","display_name":"Resonance (particle physics)","level":2,"score":0.529106080532074},{"id":"https://openalex.org/C47446073","wikidata":"https://www.wikidata.org/wiki/Q5165890","display_name":"Control theory (sociology)","level":3,"score":0.5237798094749451},{"id":"https://openalex.org/C135628077","wikidata":"https://www.wikidata.org/wiki/Q220184","display_name":"Finite element method","level":2,"score":0.4956897497177124},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.36139804124832153},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.35585448145866394},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.34246566891670227},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3287743926048279},{"id":"https://openalex.org/C66938386","wikidata":"https://www.wikidata.org/wiki/Q633538","display_name":"Structural engineering","level":1,"score":0.31647199392318726},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.28961437940597534},{"id":"https://openalex.org/C2775924081","wikidata":"https://www.wikidata.org/wiki/Q55608371","display_name":"Control (management)","level":2,"score":0.14948251843452454},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C109214941","wikidata":"https://www.wikidata.org/wiki/Q18334","display_name":"Particle physics","level":1,"score":0.0}],"mesh":[],"locations_count":2,"locations":[{"id":"doi:10.23919/acc.2019.8815299","is_oa":false,"landing_page_url":"https://doi.org/10.23919/acc.2019.8815299","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 American Control Conference (ACC)","raw_type":"proceedings-article"},{"id":"mag:3042277934","is_oa":false,"landing_page_url":"https://jglobal.jst.go.jp/en/detail?JGLOBAL_ID=201902238977963560","pdf_url":null,"source":{"id":"https://openalex.org/S4306512817","display_name":"IEEE Conference Proceedings","issn_l":null,"issn":null,"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"conference"},"license":null,"license_id":null,"version":null,"is_accepted":false,"is_published":null,"raw_source_name":"IEEE Conference Proceedings","raw_type":null}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":19,"referenced_works":["https://openalex.org/W1855904358","https://openalex.org/W1978061179","https://openalex.org/W1984883693","https://openalex.org/W1987015208","https://openalex.org/W2027318914","https://openalex.org/W2037802181","https://openalex.org/W2041018206","https://openalex.org/W2054927915","https://openalex.org/W2056526779","https://openalex.org/W2058209887","https://openalex.org/W2086343416","https://openalex.org/W2088171588","https://openalex.org/W2102023741","https://openalex.org/W2141694011","https://openalex.org/W2143399365","https://openalex.org/W2481620428","https://openalex.org/W2679743164","https://openalex.org/W2736021429","https://openalex.org/W2887987283"],"related_works":["https://openalex.org/W585100505","https://openalex.org/W2055836843","https://openalex.org/W1993699589","https://openalex.org/W2755775996","https://openalex.org/W2088429012","https://openalex.org/W1978561773","https://openalex.org/W4386004832","https://openalex.org/W2325836299","https://openalex.org/W2508382938","https://openalex.org/W2773728674"],"abstract_inverted_index":{"A":[0,87],"novel":[1],"multi-actuated":[2],"nanopositioning":[3,107],"stage":[4],"with":[5,81],"stacked":[6],"structure":[7],"has":[8],"been":[9],"developed.":[10],"The":[11,97],"aim":[12],"is":[13,77,90],"to":[14,27,62,92,109],"achieve":[15],"both":[16],"high":[17],"bandwidth":[18],"and":[19,44,56,100,105],"large":[20],"motion":[21,83],"range.":[22],"Symmetric":[23],"flexures":[24],"are":[25,60],"designed":[26],"obtain":[28],"equal":[29],"stiffness":[30,43],"along":[31],"any":[32],"direction":[33],"in":[34],"the":[35,41,64,72,94],"lateral":[36,42],"plane.":[37],"With":[38],"this":[39],"design,":[40],"corresponding":[45],"bending":[46],"mode":[47],"resonance":[48,66,74],"frequency":[49],"can":[50],"be":[51],"optimized.":[52],"Both":[53],"analytical":[54],"model":[55],"finite":[57],"element":[58],"analysis":[59],"employed":[61],"predict":[63],"dominant":[65,73],"frequency.":[67],"Experimental":[68],"results":[69],"indicate":[70],"that":[71],"of":[75,85],"nanopositioner":[76],"at":[78],"28.2":[79],"kHz,":[80],"a":[82],"range":[84],"16.5J.1m.":[86],"disturbance-observer-based":[88],"controller":[89],"implemented":[91],"suppress":[93],"hysteretic":[95],"nonlinearity.":[96],"new":[98],"design":[99],"control":[101],"system":[102],"enable":[103],"high-bandwidth":[104],"high-precision":[106],"up":[108],"2":[110],"kHz.":[111]},"counts_by_year":[{"year":2024,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1}],"updated_date":"2026-07-29T14:22:42.915294","created_date":"2025-10-10T00:00:00"}