{"id":"https://openalex.org/W2972344464","doi":"https://doi.org/10.23919/acc.2019.8815024","title":"Characterization of a Tilted-beam Piezoresistive MEMS Sensor with Current-drive Readout Circuit","display_name":"Characterization of a Tilted-beam Piezoresistive MEMS Sensor with Current-drive Readout Circuit","publication_year":2019,"publication_date":"2019-07-01","ids":{"openalex":"https://openalex.org/W2972344464","doi":"https://doi.org/10.23919/acc.2019.8815024","mag":"2972344464"},"language":"en","primary_location":{"id":"doi:10.23919/acc.2019.8815024","is_oa":false,"landing_page_url":"https://doi.org/10.23919/acc.2019.8815024","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 American Control Conference (ACC)","raw_type":"proceedings-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5043525731","display_name":"Nastaran Nikooienejad","orcid":"https://orcid.org/0000-0002-1365-4439"},"institutions":[{"id":"https://openalex.org/I162577319","display_name":"The University of Texas at Dallas","ror":"https://ror.org/049emcs32","country_code":"US","type":"education","lineage":["https://openalex.org/I162577319"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Nastaran Nikooienejad","raw_affiliation_strings":["Erik Jonsson School of Engineering and Computer Science, University of Texas at Dallas, Richardson, TX, USA"],"affiliations":[{"raw_affiliation_string":"Erik Jonsson School of Engineering and Computer Science, University of Texas at Dallas, Richardson, TX, USA","institution_ids":["https://openalex.org/I162577319"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5041882764","display_name":"Mohammad Maroufi","orcid":"https://orcid.org/0000-0001-7127-5026"},"institutions":[{"id":"https://openalex.org/I162577319","display_name":"The University of Texas at Dallas","ror":"https://ror.org/049emcs32","country_code":"US","type":"education","lineage":["https://openalex.org/I162577319"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"Mohammad Maroufi","raw_affiliation_strings":["Erik Jonsson School of Engineering and Computer Science, University of Texas at Dallas, Richardson, TX, USA"],"affiliations":[{"raw_affiliation_string":"Erik Jonsson School of Engineering and Computer Science, University of Texas at Dallas, Richardson, TX, USA","institution_ids":["https://openalex.org/I162577319"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5061619957","display_name":"S. O. Reza Moheimani","orcid":"https://orcid.org/0000-0002-1225-4126"},"institutions":[{"id":"https://openalex.org/I162577319","display_name":"The University of Texas at Dallas","ror":"https://ror.org/049emcs32","country_code":"US","type":"education","lineage":["https://openalex.org/I162577319"]}],"countries":["US"],"is_corresponding":false,"raw_author_name":"S. O. Reza Moheimani","raw_affiliation_strings":["Erik Jonsson School of Engineering and Computer Science, University of Texas at Dallas, Richardson, TX, USA"],"affiliations":[{"raw_affiliation_string":"Erik Jonsson School of Engineering and Computer Science, University of Texas at Dallas, Richardson, TX, USA","institution_ids":["https://openalex.org/I162577319"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":3,"corresponding_author_ids":["https://openalex.org/A5043525731"],"corresponding_institution_ids":["https://openalex.org/I162577319"],"apc_list":null,"apc_paid":null,"fwci":0.2385,"has_fulltext":false,"cited_by_count":3,"citation_normalized_percentile":{"value":0.55180745,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":99},"biblio":{"volume":null,"issue":null,"first_page":"2483","last_page":"2488"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10923","display_name":"Force Microscopy Techniques and Applications","score":0.9991000294685364,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/wheatstone-bridge","display_name":"Wheatstone bridge","score":0.9704083204269409},{"id":"https://openalex.org/keywords/piezoresistive-effect","display_name":"Piezoresistive effect","score":0.7920366525650024},{"id":"https://openalex.org/keywords/linearity","display_name":"Linearity","score":0.6159330606460571},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5731971263885498},{"id":"https://openalex.org/keywords/electronic-circuit","display_name":"Electronic circuit","score":0.5376708507537842},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.4880880117416382},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.4686198830604553},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.46448618173599243},{"id":"https://openalex.org/keywords/constant-current","display_name":"Constant current","score":0.44799134135246277},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3901696801185608},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.36876749992370605},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.32275402545928955},{"id":"https://openalex.org/keywords/current","display_name":"Current (fluid)","score":0.28873202204704285},{"id":"https://openalex.org/keywords/resistor","display_name":"Resistor","score":0.2814522981643677},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2418728768825531},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.15744516253471375}],"concepts":[{"id":"https://openalex.org/C104713690","wikidata":"https://www.wikidata.org/wiki/Q245133","display_name":"Wheatstone bridge","level":4,"score":0.9704083204269409},{"id":"https://openalex.org/C198490522","wikidata":"https://www.wikidata.org/wiki/Q1932915","display_name":"Piezoresistive effect","level":2,"score":0.7920366525650024},{"id":"https://openalex.org/C77170095","wikidata":"https://www.wikidata.org/wiki/Q1753188","display_name":"Linearity","level":2,"score":0.6159330606460571},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5731971263885498},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.5376708507537842},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.4880880117416382},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.4686198830604553},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.46448618173599243},{"id":"https://openalex.org/C53392680","wikidata":"https://www.wikidata.org/wiki/Q5163647","display_name":"Constant current","level":3,"score":0.44799134135246277},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3901696801185608},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.36876749992370605},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.32275402545928955},{"id":"https://openalex.org/C148043351","wikidata":"https://www.wikidata.org/wiki/Q4456944","display_name":"Current (fluid)","level":2,"score":0.28873202204704285},{"id":"https://openalex.org/C137488568","wikidata":"https://www.wikidata.org/wiki/Q5321","display_name":"Resistor","level":3,"score":0.2814522981643677},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2418728768825531},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.15744516253471375},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.23919/acc.2019.8815024","is_oa":false,"landing_page_url":"https://doi.org/10.23919/acc.2019.8815024","pdf_url":null,"source":null,"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"2019 American Control Conference (ACC)","raw_type":"proceedings-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":15,"referenced_works":["https://openalex.org/W1628443368","https://openalex.org/W1972147225","https://openalex.org/W2018445953","https://openalex.org/W2023618805","https://openalex.org/W2050260496","https://openalex.org/W2091012868","https://openalex.org/W2092877668","https://openalex.org/W2095243602","https://openalex.org/W2110846134","https://openalex.org/W2120255193","https://openalex.org/W2170422465","https://openalex.org/W2268088919","https://openalex.org/W2572040289","https://openalex.org/W2601920760","https://openalex.org/W2886723917"],"related_works":["https://openalex.org/W2323653612","https://openalex.org/W3119258731","https://openalex.org/W2378386980","https://openalex.org/W1998975346","https://openalex.org/W2110357888","https://openalex.org/W2122551138","https://openalex.org/W2081793799","https://openalex.org/W2007149924","https://openalex.org/W2080085392","https://openalex.org/W2076424200"],"abstract_inverted_index":{"The":[0,18,54,137],"sensing":[1,104],"properties":[2],"of":[3,23,40,56,90,124,131],"a":[4,11,21,47,70,77,150,166],"microelectromechanical":[5],"system":[6],"(MEMS)-based":[7],"displacement":[8,34],"sensor":[9,19,43,58,126,143],"with":[10,44,59,65,144,163],"constant-current":[12],"(CC)":[13],"readout":[14,48,147],"circuit":[15,49,62,92,148,161],"are":[16,31,63,83,93,112,171],"explored.":[17],"comprises":[20],"pair":[22],"tilted":[24],"clamped-guided":[25],"silicon":[26],"beams":[27],"whose":[28],"bulk":[29],"piezoresistivity":[30],"employed":[32],"for":[33],"sensing.":[35],"To":[36,75],"investigate":[37],"the":[38,42,57,60,66,86,97,103,107,125,141,145,155],"effect":[39],"driving":[41],"constant":[45],"current,":[46],"is":[50,100,127],"designed":[51],"and":[52,135],"implemented.":[53],"characteristics":[55],"CC":[61,91,146],"compared":[64,153],"results":[67,138],"obtained":[68],"from":[69],"previously":[71],"implemented":[72],"Wheatstone":[73,156],"half-bridge.":[74],"ensure":[76],"fair":[78],"comparison,":[79],"two":[80],"test":[81],"scenarios":[82],"considered.":[84],"In":[85,106],"first":[87],"approach,":[88],"parameters":[89,111],"tuned":[94],"such":[95],"that":[96,115,140],"same":[98],"power":[99],"delivered":[101],"to":[102,154],"beams.":[105],"second":[108],"case,":[109],"these":[110],"chosen":[113],"so":[114],"both":[116],"circuits":[117],"achieve":[118],"equal":[119],"gains.":[120],"A":[121],"thorough":[122],"characterization":[123],"preformed":[128],"in":[129],"terms":[130],"linearity,":[132],"resolution,":[133],"bandwidth":[134],"noise.":[136],"reveal":[139],"piezoresistive":[142],"provides":[149],"superior":[151],"linearity":[152],"bridge.":[157],"However,":[158],"using":[159],"this":[160],"comes":[162],"challenges":[164],"including":[165],"poor":[167],"noise":[168],"performance":[169],"which":[170],"also":[172],"discussed":[173],"here.":[174]},"counts_by_year":[{"year":2026,"cited_by_count":1},{"year":2020,"cited_by_count":1},{"year":2019,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}