{"id":"https://openalex.org/W6964093439","doi":"https://doi.org/10.21227/fp2b-8b33","title":"Data table used for figures of merit plotting","display_name":"Data table used for figures of merit plotting","publication_year":2019,"publication_date":"2019-09-16","ids":{"openalex":"https://openalex.org/W6964093439","doi":"https://doi.org/10.21227/fp2b-8b33"},"language":"en","primary_location":{"id":"doi:10.21227/fp2b-8b33","is_oa":true,"landing_page_url":"https://doi.org/10.21227/fp2b-8b33","pdf_url":null,"source":{"id":"https://openalex.org/S7407051695","display_name":"IEEE DataPort","issn_l":null,"issn":[],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"dataset"},"type":"dataset","indexed_in":["datacite"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://doi.org/10.21227/fp2b-8b33","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Errando-Herranz, Carlos","orcid":"https://orcid.org/0000-0001-7249-7392"},"institutions":[{"id":"https://openalex.org/I4210119527","display_name":"Qi2","ror":"https://ror.org/021wvan87","country_code":"US","type":"company","lineage":["https://openalex.org/I4210119527"]}],"countries":["US"],"is_corresponding":true,"raw_author_name":"Errando-Herranz, Carlos","raw_affiliation_strings":["KTH, Q"],"raw_orcid":"https://orcid.org/0000-0001-7249-7392","affiliations":[{"raw_affiliation_string":"KTH, Q","institution_ids":["https://openalex.org/I4210119527"]}]},{"author_position":"middle","author":{"id":null,"display_name":"Takabayashi, Alain Yuji","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Takabayashi, Alain Yuji","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"Edinger, Pierre","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Edinger, Pierre","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"Sattari, Hamed","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Sattari, Hamed","raw_affiliation_strings":[],"raw_orcid":null,"affiliations":[]},{"author_position":"middle","author":{"id":null,"display_name":"B. Gylfason, Kristinn","orcid":"https://orcid.org/0000-0001-9008-8402"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"B. Gylfason, Kristinn","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0001-9008-8402","affiliations":[]},{"author_position":"last","author":{"id":null,"display_name":"Quack, Niels","orcid":"https://orcid.org/0000-0001-5189-0929"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Quack, Niels","raw_affiliation_strings":[],"raw_orcid":"https://orcid.org/0000-0001-5189-0929","affiliations":[]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":6,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I4210119527"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":true,"primary_topic":null,"topics":[],"keywords":[{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7206000089645386},{"id":"https://openalex.org/keywords/dimension","display_name":"Dimension (graph theory)","score":0.5857999920845032},{"id":"https://openalex.org/keywords/figure-of-merit","display_name":"Figure of merit","score":0.5397999882698059},{"id":"https://openalex.org/keywords/field","display_name":"Field (mathematics)","score":0.5307999849319458},{"id":"https://openalex.org/keywords/table","display_name":"Table (database)","score":0.4871000051498413},{"id":"https://openalex.org/keywords/integrated-circuit","display_name":"Integrated circuit","score":0.3937999904155731},{"id":"https://openalex.org/keywords/range","display_name":"Range (aeronautics)","score":0.3903000056743622}],"concepts":[{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7206000089645386},{"id":"https://openalex.org/C33676613","wikidata":"https://www.wikidata.org/wiki/Q13415176","display_name":"Dimension (graph theory)","level":2,"score":0.5857999920845032},{"id":"https://openalex.org/C130277099","wikidata":"https://www.wikidata.org/wiki/Q3676605","display_name":"Figure of merit","level":2,"score":0.5397999882698059},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.5343999862670898},{"id":"https://openalex.org/C9652623","wikidata":"https://www.wikidata.org/wiki/Q190109","display_name":"Field (mathematics)","level":2,"score":0.5307999849319458},{"id":"https://openalex.org/C45235069","wikidata":"https://www.wikidata.org/wiki/Q278425","display_name":"Table (database)","level":2,"score":0.4871000051498413},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.4205000102519989},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.3937999904155731},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.3919999897480011},{"id":"https://openalex.org/C204323151","wikidata":"https://www.wikidata.org/wiki/Q905424","display_name":"Range (aeronautics)","level":2,"score":0.3903000056743622},{"id":"https://openalex.org/C171635847","wikidata":"https://www.wikidata.org/wiki/Q406983","display_name":"Micrometer","level":2,"score":0.35830000042915344},{"id":"https://openalex.org/C2778755073","wikidata":"https://www.wikidata.org/wiki/Q10858537","display_name":"Scale (ratio)","level":2,"score":0.3424000144004822},{"id":"https://openalex.org/C118530786","wikidata":"https://www.wikidata.org/wiki/Q1134732","display_name":"Instrumentation (computer programming)","level":2,"score":0.3167000114917755},{"id":"https://openalex.org/C199639397","wikidata":"https://www.wikidata.org/wiki/Q1788588","display_name":"Engineering drawing","level":1,"score":0.31369999051094055},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2799000144004822},{"id":"https://openalex.org/C201995342","wikidata":"https://www.wikidata.org/wiki/Q682496","display_name":"Systems engineering","level":1,"score":0.27250000834465027},{"id":"https://openalex.org/C20788544","wikidata":"https://www.wikidata.org/wiki/Q467054","display_name":"Photonics","level":2,"score":0.271699994802475},{"id":"https://openalex.org/C77066764","wikidata":"https://www.wikidata.org/wiki/Q178674","display_name":"Nanometre","level":2,"score":0.2694999873638153},{"id":"https://openalex.org/C78519656","wikidata":"https://www.wikidata.org/wiki/Q101333","display_name":"Mechanical engineering","level":1,"score":0.2687000036239624},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.2678999900817871},{"id":"https://openalex.org/C207789793","wikidata":"https://www.wikidata.org/wiki/Q3028070","display_name":"Critical dimension","level":2,"score":0.25519999861717224}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.21227/fp2b-8b33","is_oa":true,"landing_page_url":"https://doi.org/10.21227/fp2b-8b33","pdf_url":null,"source":{"id":"https://openalex.org/S7407051695","display_name":"IEEE DataPort","issn_l":null,"issn":[],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":null,"is_accepted":false,"is_published":null,"raw_source_name":null,"raw_type":"dataset"}],"best_oa_location":{"id":"doi:10.21227/fp2b-8b33","is_oa":true,"landing_page_url":"https://doi.org/10.21227/fp2b-8b33","pdf_url":null,"source":{"id":"https://openalex.org/S7407051695","display_name":"IEEE DataPort","issn_l":null,"issn":[],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"dataset"},"sustainable_development_goals":[{"display_name":"Industry, innovation and infrastructure","score":0.5081542134284973,"id":"https://metadata.un.org/sdg/9"}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":[],"abstract_inverted_index":{"The":[0,48],"field":[1,14],"of":[2,50,53,100],"microelectromechanical":[3],"Systems":[4],"(MEMS)":[5],"for":[6,45,69],"photonic":[7],"integrated":[8,46],"circuits":[9],"(PICs)":[10],"is":[11,59],"reviewed.":[12],"This":[13,33],"leverages":[15],"mechanics":[16],"at":[17],"the":[18,36,41,51],"nanometer":[19],"to":[20,23,67,82,90],"micrometer":[21],"scale":[22],"improve":[24],"existing":[25,73],"components":[26,56],"and":[27,40,62,89],"introduce":[28],"novel":[29],"functionalities":[30],"in":[31,57,72,86],"PICs.":[32],"review":[34],"covers":[35],"MEMS":[37,54,77],"actuation":[38],"principles":[39],"mechanical":[42],"tuning":[43],"mechanisms":[44],"photonics.":[47],"state":[49],"art":[52],"tunable":[55],"PICs":[58],"quantitatively":[60],"reviewed":[61],"critically":[63],"assessed":[64],"with":[65,96],"respect":[66],"suitability":[68],"large-scale":[70],"integration":[71],"PIC":[74,87],"technology":[75],"platforms.":[76],"provide":[78],"a":[79,92,97],"powerful":[80],"approach":[81],"overcome":[83],"current":[84],"limitations":[85],"technologies":[88],"enable":[91],"new":[93],"design":[94],"dimension":[95],"wide":[98],"range":[99],"applications.":[101]},"counts_by_year":[],"updated_date":"2025-11-06T06:51:31.235846","created_date":"2025-10-10T00:00:00"}