{"id":"https://openalex.org/W6963081197","doi":"https://doi.org/10.21227/7x9f-zt52","title":"Wafer Surface Defect","display_name":"Wafer Surface Defect","publication_year":2024,"publication_date":"2024-10-17","ids":{"openalex":"https://openalex.org/W6963081197","doi":"https://doi.org/10.21227/7x9f-zt52"},"language":"en","primary_location":{"id":"doi:10.21227/7x9f-zt52","is_oa":true,"landing_page_url":"https://doi.org/10.21227/7x9f-zt52","pdf_url":null,"source":{"id":"https://openalex.org/S7407051695","display_name":"IEEE DataPort","issn_l":null,"issn":[],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"dataset"},"type":"dataset","indexed_in":["datacite"],"open_access":{"is_oa":true,"oa_status":"green","oa_url":"https://doi.org/10.21227/7x9f-zt52","any_repository_has_fulltext":true},"authorships":[{"author_position":"first","author":{"id":null,"display_name":"Li, Mengyun","orcid":null},"institutions":[{"id":"https://openalex.org/I55538621","display_name":"China Jiliang University","ror":"https://ror.org/05v1y0t93","country_code":"CN","type":"education","lineage":["https://openalex.org/I55538621"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Li, Mengyun","raw_affiliation_strings":["China Jiliang University"],"affiliations":[{"raw_affiliation_string":"China Jiliang University","institution_ids":["https://openalex.org/I55538621"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I55538621"],"apc_list":null,"apc_paid":null,"fwci":null,"has_fulltext":false,"cited_by_count":0,"citation_normalized_percentile":null,"cited_by_percentile_year":null,"biblio":{"volume":null,"issue":null,"first_page":null,"last_page":null},"is_retracted":false,"is_paratext":false,"is_xpac":true,"primary_topic":null,"topics":[],"keywords":[{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.6585000157356262},{"id":"https://openalex.org/keywords/segmentation","display_name":"Segmentation","score":0.525600016117096},{"id":"https://openalex.org/keywords/image","display_name":"Image (mathematics)","score":0.5098999738693237},{"id":"https://openalex.org/keywords/image-segmentation","display_name":"Image segmentation","score":0.48240000009536743},{"id":"https://openalex.org/keywords/surface","display_name":"Surface (topology)","score":0.4399000108242035},{"id":"https://openalex.org/keywords/resolution","display_name":"Resolution (logic)","score":0.38100001215934753},{"id":"https://openalex.org/keywords/image-processing","display_name":"Image processing","score":0.37290000915527344},{"id":"https://openalex.org/keywords/pattern-recognition","display_name":"Pattern recognition (psychology)","score":0.3528999984264374}],"concepts":[{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.6585000157356262},{"id":"https://openalex.org/C31972630","wikidata":"https://www.wikidata.org/wiki/Q844240","display_name":"Computer vision","level":1,"score":0.642300009727478},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.6319000124931335},{"id":"https://openalex.org/C89600930","wikidata":"https://www.wikidata.org/wiki/Q1423946","display_name":"Segmentation","level":2,"score":0.525600016117096},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.5098999738693237},{"id":"https://openalex.org/C124504099","wikidata":"https://www.wikidata.org/wiki/Q56933","display_name":"Image segmentation","level":3,"score":0.48240000009536743},{"id":"https://openalex.org/C2776799497","wikidata":"https://www.wikidata.org/wiki/Q484298","display_name":"Surface (topology)","level":2,"score":0.4399000108242035},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.43130001425743103},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.4131999909877777},{"id":"https://openalex.org/C138268822","wikidata":"https://www.wikidata.org/wiki/Q1051925","display_name":"Resolution (logic)","level":2,"score":0.38100001215934753},{"id":"https://openalex.org/C9417928","wikidata":"https://www.wikidata.org/wiki/Q1070689","display_name":"Image processing","level":3,"score":0.37290000915527344},{"id":"https://openalex.org/C153180895","wikidata":"https://www.wikidata.org/wiki/Q7148389","display_name":"Pattern recognition (psychology)","level":2,"score":0.3528999984264374},{"id":"https://openalex.org/C2776321320","wikidata":"https://www.wikidata.org/wiki/Q857525","display_name":"Annotation","level":2,"score":0.3361000120639801},{"id":"https://openalex.org/C52622490","wikidata":"https://www.wikidata.org/wiki/Q1026626","display_name":"Feature extraction","level":2,"score":0.3336000144481659},{"id":"https://openalex.org/C3018391215","wikidata":"https://www.wikidata.org/wiki/Q2449377","display_name":"Flat surface","level":2,"score":0.30250000953674316},{"id":"https://openalex.org/C199579030","wikidata":"https://www.wikidata.org/wiki/Q2851778","display_name":"Automatic image annotation","level":4,"score":0.2980000078678131},{"id":"https://openalex.org/C3020199158","wikidata":"https://www.wikidata.org/wiki/Q210521","display_name":"High resolution","level":2,"score":0.29739999771118164},{"id":"https://openalex.org/C4725764","wikidata":"https://www.wikidata.org/wiki/Q844704","display_name":"Extraction (chemistry)","level":2,"score":0.29330000281333923},{"id":"https://openalex.org/C205372480","wikidata":"https://www.wikidata.org/wiki/Q210521","display_name":"Image resolution","level":2,"score":0.2888999879360199},{"id":"https://openalex.org/C36464697","wikidata":"https://www.wikidata.org/wiki/Q451553","display_name":"Visualization","level":2,"score":0.2847000062465668},{"id":"https://openalex.org/C199639397","wikidata":"https://www.wikidata.org/wiki/Q1788588","display_name":"Engineering drawing","level":1,"score":0.2782000005245209},{"id":"https://openalex.org/C195807954","wikidata":"https://www.wikidata.org/wiki/Q1662562","display_name":"Information extraction","level":2,"score":0.27140000462532043},{"id":"https://openalex.org/C55020928","wikidata":"https://www.wikidata.org/wiki/Q3813865","display_name":"Image quality","level":3,"score":0.26109999418258667}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.21227/7x9f-zt52","is_oa":true,"landing_page_url":"https://doi.org/10.21227/7x9f-zt52","pdf_url":null,"source":{"id":"https://openalex.org/S7407051695","display_name":"IEEE DataPort","issn_l":null,"issn":[],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":null,"is_accepted":false,"is_published":null,"raw_source_name":null,"raw_type":"dataset"}],"best_oa_location":{"id":"doi:10.21227/7x9f-zt52","is_oa":true,"landing_page_url":"https://doi.org/10.21227/7x9f-zt52","pdf_url":null,"source":{"id":"https://openalex.org/S7407051695","display_name":"IEEE DataPort","issn_l":null,"issn":[],"is_oa":false,"is_in_doaj":false,"is_core":false,"host_organization":null,"host_organization_name":null,"host_organization_lineage":[],"host_organization_lineage_names":[],"type":"repository"},"license":"cc-by","license_id":"https://openalex.org/licenses/cc-by","version":null,"is_accepted":false,"is_published":false,"raw_source_name":null,"raw_type":"dataset"},"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"pdf":false,"grobid_xml":false},"content_urls":null,"referenced_works_count":0,"referenced_works":[],"related_works":[],"abstract_inverted_index":{"The":[0,15,33,81],"dataset":[1,34],"is":[2],"a":[3,29,100],"self-constructed":[4],"wafer":[5,20],"surface":[6],"defect":[7],"dataset,":[8],"with":[9],"each":[10,26],"image":[11,21,27,98],"captured":[12],"in":[13,91],"real-time.":[14],"extraction":[16],"and":[17,25,52,62,83],"segmentation":[18],"of":[19,38,46,57,66,86,102],"have":[22,71],"been":[23,72],"performed,":[24],"represents":[28],"single":[30],"individual":[31],"die.":[32],"primarily":[35],"includes":[36],"images":[37,59,70],"defect-free":[39],"dies,":[40],"as":[41,43,94],"well":[42],"four":[44],"types":[45,65],"defective":[47],"images:":[48],"particle,":[49],"scratch,":[50],"stain,":[51],"liquid":[53],"residual.":[54],"A":[55],"total":[56],"500":[58],"are":[60,89],"included,":[61],"the":[63,69,75,87],"various":[64],"defects":[67,88],"within":[68],"annotated":[73],"using":[74],"Make":[76],"Sense":[77],"online":[78],"annotation":[79],"tool.":[80],"location":[82],"category":[84],"information":[85],"stored":[90],"YOLO":[92],"format":[93],"txt":[95],"files.":[96],"Each":[97],"has":[99],"resolution":[101],"680\u00d7680":[103],"pixels.":[104]},"counts_by_year":[],"updated_date":"2025-11-06T06:51:31.235846","created_date":"2025-10-10T00:00:00"}