{"id":"https://openalex.org/W3138826588","doi":"https://doi.org/10.1587/transele.2020sup0001","title":"Planarized Nb 4-Layer Fabrication Process for Superconducting Integrated Circuits and Its Fabricated Device Evaluation","display_name":"Planarized Nb 4-Layer Fabrication Process for Superconducting Integrated Circuits and Its Fabricated Device Evaluation","publication_year":2021,"publication_date":"2021-03-16","ids":{"openalex":"https://openalex.org/W3138826588","doi":"https://doi.org/10.1587/transele.2020sup0001","mag":"3138826588"},"language":"en","primary_location":{"id":"doi:10.1587/transele.2020sup0001","is_oa":false,"landing_page_url":"https://doi.org/10.1587/transele.2020sup0001","pdf_url":null,"source":{"id":"https://openalex.org/S2489501747","display_name":"IEICE Transactions on Electronics","issn_l":"0916-8524","issn":["0916-8524","1745-1353"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4320800604","host_organization_name":"Institute of Electronics, Information and Communication Engineers","host_organization_lineage":["https://openalex.org/P4320800604"],"host_organization_lineage_names":["Institute of Electronics, Information and Communication Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEICE Transactions on Electronics","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":false,"oa_status":"closed","oa_url":null,"any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5018879082","display_name":"S. Nagasawa","orcid":"https://orcid.org/0000-0002-1118-5202"},"institutions":[],"countries":[],"is_corresponding":true,"raw_author_name":"Shuichi NAGASAWA","raw_affiliation_strings":["AIST"],"affiliations":[{"raw_affiliation_string":"AIST","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5019744439","display_name":"Masamitsu Tanaka","orcid":"https://orcid.org/0000-0001-8577-3819"},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Masamitsu TANAKA","raw_affiliation_strings":["Nagoya University"],"affiliations":[{"raw_affiliation_string":"Nagoya University","institution_ids":["https://openalex.org/I60134161"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5068806208","display_name":"Naoki Takeuchi","orcid":"https://orcid.org/0000-0003-0396-5222"},"institutions":[{"id":"https://openalex.org/I180203408","display_name":"Yokohama National University","ror":"https://ror.org/03zyp6p76","country_code":"JP","type":"education","lineage":["https://openalex.org/I180203408"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Naoki TAKEUCHI","raw_affiliation_strings":["Yokohama National University"],"affiliations":[{"raw_affiliation_string":"Yokohama National University","institution_ids":["https://openalex.org/I180203408"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5006309940","display_name":"Yuki Yamanashi","orcid":"https://orcid.org/0000-0003-4840-7611"},"institutions":[{"id":"https://openalex.org/I180203408","display_name":"Yokohama National University","ror":"https://ror.org/03zyp6p76","country_code":"JP","type":"education","lineage":["https://openalex.org/I180203408"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yuki YAMANASHI","raw_affiliation_strings":["Yokohama National University"],"affiliations":[{"raw_affiliation_string":"Yokohama National University","institution_ids":["https://openalex.org/I180203408"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5034286761","display_name":"Shigeyuki Miyajima","orcid":"https://orcid.org/0000-0002-5153-5537"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Shigeyuki MIYAJIMA","raw_affiliation_strings":["NICT"],"affiliations":[{"raw_affiliation_string":"NICT","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5082583922","display_name":"Fumihiro China","orcid":"https://orcid.org/0000-0003-2144-8229"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Fumihiro CHINA","raw_affiliation_strings":["NICT"],"affiliations":[{"raw_affiliation_string":"NICT","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072289842","display_name":"Taiki Yamae","orcid":"https://orcid.org/0000-0002-8775-9583"},"institutions":[{"id":"https://openalex.org/I180203408","display_name":"Yokohama National University","ror":"https://ror.org/03zyp6p76","country_code":"JP","type":"education","lineage":["https://openalex.org/I180203408"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Taiki YAMAE","raw_affiliation_strings":["Yokohama National University"],"affiliations":[{"raw_affiliation_string":"Yokohama National University","institution_ids":["https://openalex.org/I180203408"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5072359194","display_name":"Koki Yamazaki","orcid":null},"institutions":[{"id":"https://openalex.org/I20529979","display_name":"University of Electro-Communications","ror":"https://ror.org/02x73b849","country_code":"JP","type":"education","lineage":["https://openalex.org/I20529979"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Koki YAMAZAKI","raw_affiliation_strings":["The University of Electro-Communications"],"affiliations":[{"raw_affiliation_string":"The University of Electro-Communications","institution_ids":["https://openalex.org/I20529979"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5035917188","display_name":"Yuta Somei","orcid":"https://orcid.org/0000-0001-8124-5197"},"institutions":[{"id":"https://openalex.org/I20529979","display_name":"University of Electro-Communications","ror":"https://ror.org/02x73b849","country_code":"JP","type":"education","lineage":["https://openalex.org/I20529979"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yuta SOMEI","raw_affiliation_strings":["The University of Electro-Communications"],"affiliations":[{"raw_affiliation_string":"The University of Electro-Communications","institution_ids":["https://openalex.org/I20529979"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5039600620","display_name":"Naonori Sega","orcid":null},"institutions":[{"id":"https://openalex.org/I20529979","display_name":"University of Electro-Communications","ror":"https://ror.org/02x73b849","country_code":"JP","type":"education","lineage":["https://openalex.org/I20529979"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Naonori SEGA","raw_affiliation_strings":["The University of Electro-Communications"],"affiliations":[{"raw_affiliation_string":"The University of Electro-Communications","institution_ids":["https://openalex.org/I20529979"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5007441610","display_name":"Yoshinao Mizugaki","orcid":"https://orcid.org/0000-0002-0962-6259"},"institutions":[{"id":"https://openalex.org/I20529979","display_name":"University of Electro-Communications","ror":"https://ror.org/02x73b849","country_code":"JP","type":"education","lineage":["https://openalex.org/I20529979"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Yoshinao MIZUGAKI","raw_affiliation_strings":["The University of Electro-Communications"],"affiliations":[{"raw_affiliation_string":"The University of Electro-Communications","institution_ids":["https://openalex.org/I20529979"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5081719311","display_name":"Hiroaki Myoren","orcid":"https://orcid.org/0000-0002-3632-3712"},"institutions":[{"id":"https://openalex.org/I72253084","display_name":"Saitama University","ror":"https://ror.org/02evnh647","country_code":"JP","type":"education","lineage":["https://openalex.org/I72253084"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Hiroaki MYOREN","raw_affiliation_strings":["Saitama University"],"affiliations":[{"raw_affiliation_string":"Saitama University","institution_ids":["https://openalex.org/I72253084"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5022978655","display_name":"Hirotaka Terai","orcid":"https://orcid.org/0000-0002-5575-2221"},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Hirotaka TERAI","raw_affiliation_strings":["NICT"],"affiliations":[{"raw_affiliation_string":"NICT","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5105471313","display_name":"Mutsuo Hidaka","orcid":null},"institutions":[],"countries":[],"is_corresponding":false,"raw_author_name":"Mutsuo HIDAKA","raw_affiliation_strings":["AIST"],"affiliations":[{"raw_affiliation_string":"AIST","institution_ids":[]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5089936222","display_name":"Nobuyuki Yoshikawa","orcid":"https://orcid.org/0000-0001-6191-6715"},"institutions":[{"id":"https://openalex.org/I180203408","display_name":"Yokohama National University","ror":"https://ror.org/03zyp6p76","country_code":"JP","type":"education","lineage":["https://openalex.org/I180203408"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Nobuyuki YOSHIKAWA","raw_affiliation_strings":["Yokohama National University"],"affiliations":[{"raw_affiliation_string":"Yokohama National University","institution_ids":["https://openalex.org/I180203408"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5018410709","display_name":"Akira Fujimaki","orcid":"https://orcid.org/0000-0003-0315-9714"},"institutions":[{"id":"https://openalex.org/I60134161","display_name":"Nagoya University","ror":"https://ror.org/04chrp450","country_code":"JP","type":"education","lineage":["https://openalex.org/I60134161"]}],"countries":["JP"],"is_corresponding":false,"raw_author_name":"Akira FUJIMAKI","raw_affiliation_strings":["Nagoya University"],"affiliations":[{"raw_affiliation_string":"Nagoya University","institution_ids":["https://openalex.org/I60134161"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":16,"corresponding_author_ids":["https://openalex.org/A5018879082"],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":0.7742,"has_fulltext":false,"cited_by_count":6,"citation_normalized_percentile":{"value":0.69587122,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":89,"max":96},"biblio":{"volume":"E104.C","issue":"9","first_page":"435","last_page":"445"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10037","display_name":"Physics of Superconductivity and Magnetism","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10037","display_name":"Physics of Superconductivity and Magnetism","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3104","display_name":"Condensed Matter Physics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10361","display_name":"Silicon Carbide Semiconductor Technologies","score":0.9988999962806702,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11808","display_name":"Superconducting Materials and Applications","score":0.9986000061035156,"subfield":{"id":"https://openalex.org/subfields/2204","display_name":"Biomedical Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/chemical-mechanical-planarization","display_name":"Chemical-mechanical planarization","score":0.8916375041007996},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6499831676483154},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.639888346195221},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.6305147409439087},{"id":"https://openalex.org/keywords/josephson-effect","display_name":"Josephson effect","score":0.6280142664909363},{"id":"https://openalex.org/keywords/electronic-circuit","display_name":"Electronic circuit","score":0.5590328574180603},{"id":"https://openalex.org/keywords/etching","display_name":"Etching (microfabrication)","score":0.5135131478309631},{"id":"https://openalex.org/keywords/rapid-single-flux-quantum","display_name":"Rapid single flux quantum","score":0.5056548118591309},{"id":"https://openalex.org/keywords/interconnection","display_name":"Interconnection","score":0.4808550477027893},{"id":"https://openalex.org/keywords/layer","display_name":"Layer (electronics)","score":0.4738980829715729},{"id":"https://openalex.org/keywords/logic-gate","display_name":"Logic gate","score":0.44114959239959717},{"id":"https://openalex.org/keywords/integrated-circuit","display_name":"Integrated circuit","score":0.4220002293586731},{"id":"https://openalex.org/keywords/semiconductor-device-fabrication","display_name":"Semiconductor device fabrication","score":0.41006606817245483},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.3707836866378784},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.34753602743148804},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.3140261173248291},{"id":"https://openalex.org/keywords/superconductivity","display_name":"Superconductivity","score":0.2741767466068268},{"id":"https://openalex.org/keywords/nanotechnology","display_name":"Nanotechnology","score":0.23172324895858765},{"id":"https://openalex.org/keywords/wafer","display_name":"Wafer","score":0.16684022545814514},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.15367764234542847},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1373351514339447},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.07695981860160828}],"concepts":[{"id":"https://openalex.org/C180088628","wikidata":"https://www.wikidata.org/wiki/Q1069404","display_name":"Chemical-mechanical planarization","level":3,"score":0.8916375041007996},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6499831676483154},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.639888346195221},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.6305147409439087},{"id":"https://openalex.org/C12038964","wikidata":"https://www.wikidata.org/wiki/Q764228","display_name":"Josephson effect","level":3,"score":0.6280142664909363},{"id":"https://openalex.org/C134146338","wikidata":"https://www.wikidata.org/wiki/Q1815901","display_name":"Electronic circuit","level":2,"score":0.5590328574180603},{"id":"https://openalex.org/C100460472","wikidata":"https://www.wikidata.org/wiki/Q2368605","display_name":"Etching (microfabrication)","level":3,"score":0.5135131478309631},{"id":"https://openalex.org/C150206757","wikidata":"https://www.wikidata.org/wiki/Q7294230","display_name":"Rapid single flux quantum","level":4,"score":0.5056548118591309},{"id":"https://openalex.org/C123745756","wikidata":"https://www.wikidata.org/wiki/Q1665949","display_name":"Interconnection","level":2,"score":0.4808550477027893},{"id":"https://openalex.org/C2779227376","wikidata":"https://www.wikidata.org/wiki/Q6505497","display_name":"Layer (electronics)","level":2,"score":0.4738980829715729},{"id":"https://openalex.org/C131017901","wikidata":"https://www.wikidata.org/wiki/Q170451","display_name":"Logic gate","level":2,"score":0.44114959239959717},{"id":"https://openalex.org/C530198007","wikidata":"https://www.wikidata.org/wiki/Q80831","display_name":"Integrated circuit","level":2,"score":0.4220002293586731},{"id":"https://openalex.org/C66018809","wikidata":"https://www.wikidata.org/wiki/Q1570432","display_name":"Semiconductor device fabrication","level":3,"score":0.41006606817245483},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.3707836866378784},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.34753602743148804},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.3140261173248291},{"id":"https://openalex.org/C54101563","wikidata":"https://www.wikidata.org/wiki/Q124131","display_name":"Superconductivity","level":2,"score":0.2741767466068268},{"id":"https://openalex.org/C171250308","wikidata":"https://www.wikidata.org/wiki/Q11468","display_name":"Nanotechnology","level":1,"score":0.23172324895858765},{"id":"https://openalex.org/C160671074","wikidata":"https://www.wikidata.org/wiki/Q267131","display_name":"Wafer","level":2,"score":0.16684022545814514},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.15367764234542847},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1373351514339447},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.07695981860160828},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1587/transele.2020sup0001","is_oa":false,"landing_page_url":"https://doi.org/10.1587/transele.2020sup0001","pdf_url":null,"source":{"id":"https://openalex.org/S2489501747","display_name":"IEICE Transactions on Electronics","issn_l":"0916-8524","issn":["0916-8524","1745-1353"],"is_oa":false,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4320800604","host_organization_name":"Institute of Electronics, Information and Communication Engineers","host_organization_lineage":["https://openalex.org/P4320800604"],"host_organization_lineage_names":["Institute of Electronics, Information and Communication Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEICE Transactions on Electronics","raw_type":"journal-article"}],"best_oa_location":null,"sustainable_development_goals":[],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":false},"content_urls":null,"referenced_works_count":55,"referenced_works":["https://openalex.org/W1500616377","https://openalex.org/W1568959341","https://openalex.org/W1580987494","https://openalex.org/W1910760595","https://openalex.org/W1967552827","https://openalex.org/W1968560939","https://openalex.org/W1970510322","https://openalex.org/W1974638538","https://openalex.org/W1987377332","https://openalex.org/W2002206613","https://openalex.org/W2007509087","https://openalex.org/W2016657571","https://openalex.org/W2018957019","https://openalex.org/W2029038613","https://openalex.org/W2034960331","https://openalex.org/W2047695881","https://openalex.org/W2063030408","https://openalex.org/W2070720518","https://openalex.org/W2070992435","https://openalex.org/W2072434547","https://openalex.org/W2076159485","https://openalex.org/W2088947300","https://openalex.org/W2096233839","https://openalex.org/W2113672761","https://openalex.org/W2119587409","https://openalex.org/W2126270606","https://openalex.org/W2129673335","https://openalex.org/W2129959489","https://openalex.org/W2149957728","https://openalex.org/W2156941096","https://openalex.org/W2166482593","https://openalex.org/W2170296121","https://openalex.org/W2171668989","https://openalex.org/W2206019357","https://openalex.org/W2315545418","https://openalex.org/W2566218892","https://openalex.org/W2568503708","https://openalex.org/W2608494095","https://openalex.org/W2739828879","https://openalex.org/W2762986686","https://openalex.org/W2773054699","https://openalex.org/W2810819729","https://openalex.org/W2898083943","https://openalex.org/W2913710402","https://openalex.org/W2921266439","https://openalex.org/W2942281797","https://openalex.org/W2949713192","https://openalex.org/W2964125333","https://openalex.org/W3021326279","https://openalex.org/W3046357248","https://openalex.org/W3088229365","https://openalex.org/W3099173468","https://openalex.org/W3104345573","https://openalex.org/W3123829282","https://openalex.org/W3126604169"],"related_works":["https://openalex.org/W2044901866","https://openalex.org/W1964773178","https://openalex.org/W1996308489","https://openalex.org/W2887007597","https://openalex.org/W2802586186","https://openalex.org/W2017433833","https://openalex.org/W2106504140","https://openalex.org/W2007272667","https://openalex.org/W2074750821","https://openalex.org/W2018045161"],"abstract_inverted_index":{"We":[0,26,81,124,142],"developed":[1,126],"a":[2,157],"Nb":[3,45],"4-layer":[4],"process":[5,29,34,85],"for":[6,90],"fabricating":[7],"superconducting":[8],"integrated":[9],"circuits":[10,138,147],"that":[11,144,164],"involves":[12],"using":[13,154],"caldera":[14],"planarization":[15,89],"to":[16,39,56,74],"increase":[17,177],"the":[18,23,30,44,63,68,78,83,88,91,96,145,165,173,178],"flexibility":[19],"and":[20,46,95,114,119,122,129,136],"reliability":[21],"of":[22,43,70,87,98],"fabrication":[24],"process.":[25],"call":[27],"this":[28],"planarized":[31,174],"high-speed":[32],"standard":[33],"(PHSTP).":[35],"Planarization":[36],"enables":[37],"us":[38],"flexibly":[40],"adjust":[41],"most":[42],"SiO2":[47],"film":[48,54],"thicknesses;":[49],"we":[50],"can":[51],"select":[52],"reduced":[53],"thicknesses":[55],"obtain":[57],"larger":[58],"mutual":[59,170],"coupling":[60,171],"depending":[61],"on":[62],"application.":[64],"It":[65],"also":[66,125],"reduces":[67],"risk":[69],"intra-layer":[71],"shorts":[72],"due":[73],"etching":[75],"residues":[76],"at":[77],"step-edge":[79],"regions.":[80],"describe":[82],"detailed":[84],"flows":[86],"Josephson":[92],"junction":[93,112],"layer":[94,175],"evaluation":[97],"devices":[99],"fabricated":[100,139,153],"with":[101,140,168],"PHSTP.":[102,141],"The":[103,150],"results":[104,162],"indicated":[105],"no":[106],"short":[107],"defects":[108],"or":[109],"degradation":[110],"in":[111],"characteristics":[113],"good":[115],"agreement":[116],"between":[117,182],"designed":[118,146],"measured":[120],"inductances":[121],"resistances.":[123],"single-flux-quantum":[127],"(SFQ)":[128],"adiabatic":[130],"quantum-flux-parametron":[131],"(AQFP)":[132],"logic":[133],"cell":[134],"libraries":[135],"tested":[137],"found":[143],"operated":[148],"correctly.":[149],"SFQ":[151],"shift-registers":[152],"PHSTP":[155],"showed":[156],"high":[158],"yield.":[159],"Numerical":[160],"simulation":[161],"indicate":[163],"AQFP":[166],"gates":[167],"increased":[169],"by":[172],"structure":[176],"maximum":[179],"interconnect":[180],"length":[181],"gates.":[183]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2024,"cited_by_count":1},{"year":2023,"cited_by_count":2},{"year":2022,"cited_by_count":1},{"year":2021,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}