{"id":"https://openalex.org/W2622390068","doi":"https://doi.org/10.1587/elex.14.20170484","title":"Monolithic integrated MEMS phased array antenna scanning in two dimensions","display_name":"Monolithic integrated MEMS phased array antenna scanning in two dimensions","publication_year":2017,"publication_date":"2017-01-01","ids":{"openalex":"https://openalex.org/W2622390068","doi":"https://doi.org/10.1587/elex.14.20170484","mag":"2622390068"},"language":"en","primary_location":{"id":"doi:10.1587/elex.14.20170484","is_oa":true,"landing_page_url":"https://doi.org/10.1587/elex.14.20170484","pdf_url":"https://www.jstage.jst.go.jp/article/elex/14/12/14_14.20170484/_pdf","source":{"id":"https://openalex.org/S207433681","display_name":"IEICE Electronics Express","issn_l":"1349-2543","issn":["1349-2543","1349-9467"],"is_oa":true,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4320800604","host_organization_name":"Institute of Electronics, Information and Communication Engineers","host_organization_lineage":["https://openalex.org/P4320800604"],"host_organization_lineage_names":["Institute of Electronics, Information and Communication Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEICE Electronics Express","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"diamond","oa_url":"https://www.jstage.jst.go.jp/article/elex/14/12/14_14.20170484/_pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100905113","display_name":"Qi Han","orcid":"https://orcid.org/0000-0002-5909-0421"},"institutions":[{"id":"https://openalex.org/I125839683","display_name":"Beijing Institute of Technology","ror":"https://ror.org/01skt4w74","country_code":"CN","type":"education","lineage":["https://openalex.org/I125839683","https://openalex.org/I890469752"]}],"countries":["CN"],"is_corresponding":true,"raw_author_name":"Han Qi","raw_affiliation_strings":["School of Mechatronical Engineering, Beijing Institute of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Mechatronical Engineering, Beijing Institute of Technology","institution_ids":["https://openalex.org/I125839683"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5014893126","display_name":"Lixin Xu","orcid":"https://orcid.org/0000-0001-8215-6663"},"institutions":[{"id":"https://openalex.org/I125839683","display_name":"Beijing Institute of Technology","ror":"https://ror.org/01skt4w74","country_code":"CN","type":"education","lineage":["https://openalex.org/I125839683","https://openalex.org/I890469752"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xu Lixin","raw_affiliation_strings":["School of Mechatronical Engineering, Beijing Institute of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Mechatronical Engineering, Beijing Institute of Technology","institution_ids":["https://openalex.org/I125839683"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5078483183","display_name":"Cong Lin","orcid":"https://orcid.org/0000-0001-5386-7343"},"institutions":[{"id":"https://openalex.org/I125839683","display_name":"Beijing Institute of Technology","ror":"https://ror.org/01skt4w74","country_code":"CN","type":"education","lineage":["https://openalex.org/I125839683","https://openalex.org/I890469752"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Cong Lin","raw_affiliation_strings":["School of Mechatronical Engineering, Beijing Institute of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"School of Mechatronical Engineering, Beijing Institute of Technology","institution_ids":["https://openalex.org/I125839683"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023898602","display_name":"Bo Fu","orcid":"https://orcid.org/0000-0002-9491-756X"},"institutions":[{"id":"https://openalex.org/I2801481043","display_name":"Jiangsu Ocean University","ror":"https://ror.org/031zps173","country_code":"CN","type":"education","lineage":["https://openalex.org/I2801481043"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Fu Bo","raw_affiliation_strings":["MEMS Research Center, Huaihai Industrial Group Co., Ltd"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS Research Center, Huaihai Industrial Group Co., Ltd","institution_ids":["https://openalex.org/I2801481043"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5079506513","display_name":"Dong Liu","orcid":"https://orcid.org/0000-0002-3133-8309"},"institutions":[{"id":"https://openalex.org/I2801481043","display_name":"Jiangsu Ocean University","ror":"https://ror.org/031zps173","country_code":"CN","type":"education","lineage":["https://openalex.org/I2801481043"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Liu Dong","raw_affiliation_strings":["MEMS Research Center, Huaihai Industrial Group Co., Ltd"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS Research Center, Huaihai Industrial Group Co., Ltd","institution_ids":["https://openalex.org/I2801481043"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":5,"corresponding_author_ids":["https://openalex.org/A5100905113"],"corresponding_institution_ids":["https://openalex.org/I125839683"],"apc_list":null,"apc_paid":null,"fwci":0.1461,"has_fulltext":false,"cited_by_count":1,"citation_normalized_percentile":{"value":0.49993684,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":94},"biblio":{"volume":"14","issue":"12","first_page":"20170484","last_page":"20170484"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10262","display_name":"Microwave Engineering and Waveguides","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10262","display_name":"Microwave Engineering and Waveguides","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10069","display_name":"Antenna Design and Analysis","score":0.998199999332428,"subfield":{"id":"https://openalex.org/subfields/2202","display_name":"Aerospace Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/phased-array","display_name":"Phased array","score":0.751268744468689},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.6736518144607544},{"id":"https://openalex.org/keywords/microstrip-antenna","display_name":"Microstrip antenna","score":0.6400478482246399},{"id":"https://openalex.org/keywords/phased-array-optics","display_name":"Phased-array optics","score":0.6386616230010986},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.6246048212051392},{"id":"https://openalex.org/keywords/antenna","display_name":"Antenna (radio)","score":0.584776759147644},{"id":"https://openalex.org/keywords/beam-steering","display_name":"Beam steering","score":0.5684199929237366},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.5568573474884033},{"id":"https://openalex.org/keywords/microstrip","display_name":"Microstrip","score":0.5072523951530457},{"id":"https://openalex.org/keywords/antenna-array","display_name":"Antenna array","score":0.45721694827079773},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.44908469915390015},{"id":"https://openalex.org/keywords/bulk-micromachining","display_name":"Bulk micromachining","score":0.4327234625816345},{"id":"https://openalex.org/keywords/aperture","display_name":"Aperture (computer memory)","score":0.4297838807106018},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.41349613666534424},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.2962954044342041},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.2546713352203369},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.24160122871398926},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.1917801797389984},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.10833007097244263}],"concepts":[{"id":"https://openalex.org/C55494473","wikidata":"https://www.wikidata.org/wiki/Q727898","display_name":"Phased array","level":3,"score":0.751268744468689},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.6736518144607544},{"id":"https://openalex.org/C170349913","wikidata":"https://www.wikidata.org/wiki/Q13402882","display_name":"Microstrip antenna","level":3,"score":0.6400478482246399},{"id":"https://openalex.org/C193860024","wikidata":"https://www.wikidata.org/wiki/Q7180973","display_name":"Phased-array optics","level":4,"score":0.6386616230010986},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.6246048212051392},{"id":"https://openalex.org/C21822782","wikidata":"https://www.wikidata.org/wiki/Q131214","display_name":"Antenna (radio)","level":2,"score":0.584776759147644},{"id":"https://openalex.org/C143148639","wikidata":"https://www.wikidata.org/wiki/Q4876192","display_name":"Beam steering","level":3,"score":0.5684199929237366},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.5568573474884033},{"id":"https://openalex.org/C123657345","wikidata":"https://www.wikidata.org/wiki/Q639055","display_name":"Microstrip","level":2,"score":0.5072523951530457},{"id":"https://openalex.org/C62191587","wikidata":"https://www.wikidata.org/wiki/Q4771249","display_name":"Antenna array","level":3,"score":0.45721694827079773},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.44908469915390015},{"id":"https://openalex.org/C41075158","wikidata":"https://www.wikidata.org/wiki/Q4996485","display_name":"Bulk micromachining","level":5,"score":0.4327234625816345},{"id":"https://openalex.org/C78336883","wikidata":"https://www.wikidata.org/wiki/Q4779385","display_name":"Aperture (computer memory)","level":2,"score":0.4297838807106018},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.41349613666534424},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.2962954044342041},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.2546713352203369},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.24160122871398926},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.1917801797389984},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.10833007097244263},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1587/elex.14.20170484","is_oa":true,"landing_page_url":"https://doi.org/10.1587/elex.14.20170484","pdf_url":"https://www.jstage.jst.go.jp/article/elex/14/12/14_14.20170484/_pdf","source":{"id":"https://openalex.org/S207433681","display_name":"IEICE Electronics Express","issn_l":"1349-2543","issn":["1349-2543","1349-9467"],"is_oa":true,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4320800604","host_organization_name":"Institute of Electronics, Information and Communication Engineers","host_organization_lineage":["https://openalex.org/P4320800604"],"host_organization_lineage_names":["Institute of Electronics, Information and Communication Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEICE Electronics Express","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1587/elex.14.20170484","is_oa":true,"landing_page_url":"https://doi.org/10.1587/elex.14.20170484","pdf_url":"https://www.jstage.jst.go.jp/article/elex/14/12/14_14.20170484/_pdf","source":{"id":"https://openalex.org/S207433681","display_name":"IEICE Electronics Express","issn_l":"1349-2543","issn":["1349-2543","1349-9467"],"is_oa":true,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4320800604","host_organization_name":"Institute of Electronics, Information and Communication Engineers","host_organization_lineage":["https://openalex.org/P4320800604"],"host_organization_lineage_names":["Institute of Electronics, Information and Communication Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEICE Electronics Express","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.800000011920929}],"awards":[],"funders":[],"has_content":{"grobid_xml":false,"pdf":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2622390068.pdf"},"referenced_works_count":13,"referenced_works":["https://openalex.org/W1211162126","https://openalex.org/W1992144175","https://openalex.org/W2011671463","https://openalex.org/W2025175453","https://openalex.org/W2045570582","https://openalex.org/W2047675690","https://openalex.org/W2075565102","https://openalex.org/W2077108139","https://openalex.org/W2089914606","https://openalex.org/W2116674375","https://openalex.org/W2130873965","https://openalex.org/W2162339628","https://openalex.org/W2220587729"],"related_works":["https://openalex.org/W2048938327","https://openalex.org/W4290716467","https://openalex.org/W174322327","https://openalex.org/W2005613467","https://openalex.org/W1974616999","https://openalex.org/W2993230840","https://openalex.org/W4391087564","https://openalex.org/W4317792916","https://openalex.org/W2988246562","https://openalex.org/W2386749714"],"abstract_inverted_index":{"A":[0],"two-dimension":[1],"scanning":[2],"of":[3,77],"phased":[4],"array":[5,25,31,70],"antenna":[6,14],"has":[7],"been":[8],"presented.":[9],"Aperture":[10],"coupled":[11],"microstrip":[12],"patch":[13],"(ACMPA)":[15],"elements":[16],"are":[17,59],"used":[18],"to":[19],"form":[20],"a":[21,73],"2":[22,24],"\u00d7":[23],"operating":[26],"at":[27],"20":[28],"GHz.":[29],"The":[30,47,64],"is":[32,89],"monolithically":[33],"fabricated":[34],"with":[35],"RF":[36],"MEMS":[37],"switches":[38],"by":[39],"using":[40],"surface":[41],"micromachining":[42],"and":[43,83,85],"anodic":[44],"bonding":[45],"process.":[46],"main":[48],"beam":[49,74],"can":[50,71],"steer":[51],"in":[52,80],"two":[53],"dimensions":[54],"when":[55],"the":[56,61,69,86],"phase":[57],"shifters":[58],"on":[60],"different":[62],"state.":[63],"measurement":[65],"results":[66],"show":[67],"that":[68],"complete":[72],"steering":[75],"angle":[76],"approximate":[78],"\u00b130\u00b0":[79],"both":[81],"E-plane":[82],"H-plane,":[84],"highest":[87],"gain":[88],"9.5":[90],"dB.":[91]},"counts_by_year":[{"year":2017,"cited_by_count":1}],"updated_date":"2026-05-22T06:13:13.366637","created_date":"2025-10-10T00:00:00"}