{"id":"https://openalex.org/W2591029394","doi":"https://doi.org/10.1587/elex.14.20161257","title":"Experimental analysis of out-of-plane Lorentz force actuated magnetic field sensor","display_name":"Experimental analysis of out-of-plane Lorentz force actuated magnetic field sensor","publication_year":2017,"publication_date":"2017-01-01","ids":{"openalex":"https://openalex.org/W2591029394","doi":"https://doi.org/10.1587/elex.14.20161257","mag":"2591029394"},"language":"en","primary_location":{"id":"doi:10.1587/elex.14.20161257","is_oa":true,"landing_page_url":"https://doi.org/10.1587/elex.14.20161257","pdf_url":"https://www.jstage.jst.go.jp/article/elex/14/5/14_14.20161257/_pdf","source":{"id":"https://openalex.org/S207433681","display_name":"IEICE Electronics Express","issn_l":"1349-2543","issn":["1349-2543","1349-9467"],"is_oa":true,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4320800604","host_organization_name":"Institute of Electronics, Information and Communication Engineers","host_organization_lineage":["https://openalex.org/P4320800604"],"host_organization_lineage_names":["Institute of Electronics, Information and Communication Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEICE Electronics Express","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"diamond","oa_url":"https://www.jstage.jst.go.jp/article/elex/14/5/14_14.20161257/_pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5017661660","display_name":"Muhammad Umer Mian","orcid":"https://orcid.org/0000-0002-5057-8105"},"institutions":[{"id":"https://openalex.org/I203899302","display_name":"Universiti Teknologi Petronas","ror":"https://ror.org/048g2sh07","country_code":"MY","type":"education","lineage":["https://openalex.org/I203899302"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Muhammad U. Mian","raw_affiliation_strings":["Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS","institution_ids":["https://openalex.org/I203899302"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031357175","display_name":"John Ojur Dennis","orcid":"https://orcid.org/0000-0002-4489-649X"},"institutions":[{"id":"https://openalex.org/I203899302","display_name":"Universiti Teknologi Petronas","ror":"https://ror.org/048g2sh07","country_code":"MY","type":"education","lineage":["https://openalex.org/I203899302"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"John O. Dennis","raw_affiliation_strings":["Department of Fundamental and Applied Sciences, Universiti Teknologi PETRONAS"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Fundamental and Applied Sciences, Universiti Teknologi PETRONAS","institution_ids":["https://openalex.org/I203899302"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065863396","display_name":"Mohd Haris Md Khir","orcid":"https://orcid.org/0000-0002-6083-6462"},"institutions":[{"id":"https://openalex.org/I203899302","display_name":"Universiti Teknologi Petronas","ror":"https://ror.org/048g2sh07","country_code":"MY","type":"education","lineage":["https://openalex.org/I203899302"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Mohd H. M. Khir","raw_affiliation_strings":["Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS","institution_ids":["https://openalex.org/I203899302"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023322903","display_name":"Mawahib Gafare Ahmed","orcid":"https://orcid.org/0000-0002-5651-9747"},"institutions":[{"id":"https://openalex.org/I203899302","display_name":"Universiti Teknologi Petronas","ror":"https://ror.org/048g2sh07","country_code":"MY","type":"education","lineage":["https://openalex.org/I203899302"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Mawahib G. A. Ahmed","raw_affiliation_strings":["Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS","institution_ids":["https://openalex.org/I203899302"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051448566","display_name":"Almur A. S. Rabih","orcid":"https://orcid.org/0000-0002-1395-2241"},"institutions":[{"id":"https://openalex.org/I203899302","display_name":"Universiti Teknologi Petronas","ror":"https://ror.org/048g2sh07","country_code":"MY","type":"education","lineage":["https://openalex.org/I203899302"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Almur A. S. Rabih","raw_affiliation_strings":["Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS","institution_ids":["https://openalex.org/I203899302"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5034034713","display_name":"Tong Boon Tang","orcid":"https://orcid.org/0000-0002-5721-6828"},"institutions":[{"id":"https://openalex.org/I203899302","display_name":"Universiti Teknologi Petronas","ror":"https://ror.org/048g2sh07","country_code":"MY","type":"education","lineage":["https://openalex.org/I203899302"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Tong Boon Tang","raw_affiliation_strings":["Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS","institution_ids":["https://openalex.org/I203899302"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I203899302"],"apc_list":null,"apc_paid":null,"fwci":0.2816,"has_fulltext":true,"cited_by_count":2,"citation_normalized_percentile":{"value":0.56150033,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":96},"biblio":{"volume":"14","issue":"5","first_page":"20161257","last_page":"20161257"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T12692","display_name":"Magnetic Field Sensors Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T12692","display_name":"Magnetic Field Sensors Techniques","score":0.9998999834060669,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T13885","display_name":"Geophysics and Sensor Technology","score":0.9972000122070312,"subfield":{"id":"https://openalex.org/subfields/2212","display_name":"Ocean Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9968000054359436,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/lorentz-force","display_name":"Lorentz force","score":0.9110395908355713},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.7384158372879028},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6109089851379395},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.5892379283905029},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.5878275632858276},{"id":"https://openalex.org/keywords/lorentz-transformation","display_name":"Lorentz transformation","score":0.567442774772644},{"id":"https://openalex.org/keywords/magnetic-field","display_name":"Magnetic field","score":0.5155515670776367},{"id":"https://openalex.org/keywords/surface-micromachining","display_name":"Surface micromachining","score":0.4797857403755188},{"id":"https://openalex.org/keywords/excitation","display_name":"Excitation","score":0.4756091237068176},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.45088374614715576},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.44922110438346863},{"id":"https://openalex.org/keywords/plane","display_name":"Plane (geometry)","score":0.4192146062850952},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.4009736180305481},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.35823488235473633},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.3360505700111389},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.19232177734375},{"id":"https://openalex.org/keywords/electrode","display_name":"Electrode","score":0.1772748827934265},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.13810735940933228},{"id":"https://openalex.org/keywords/fabrication","display_name":"Fabrication","score":0.12339317798614502},{"id":"https://openalex.org/keywords/classical-mechanics","display_name":"Classical mechanics","score":0.10007715225219727}],"concepts":[{"id":"https://openalex.org/C140190676","wikidata":"https://www.wikidata.org/wiki/Q172137","display_name":"Lorentz force","level":3,"score":0.9110395908355713},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.7384158372879028},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6109089851379395},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.5892379283905029},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.5878275632858276},{"id":"https://openalex.org/C5667645","wikidata":"https://www.wikidata.org/wiki/Q217255","display_name":"Lorentz transformation","level":2,"score":0.567442774772644},{"id":"https://openalex.org/C115260700","wikidata":"https://www.wikidata.org/wiki/Q11408","display_name":"Magnetic field","level":2,"score":0.5155515670776367},{"id":"https://openalex.org/C145667562","wikidata":"https://www.wikidata.org/wiki/Q7646003","display_name":"Surface micromachining","level":4,"score":0.4797857403755188},{"id":"https://openalex.org/C83581075","wikidata":"https://www.wikidata.org/wiki/Q1361503","display_name":"Excitation","level":2,"score":0.4756091237068176},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.45088374614715576},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.44922110438346863},{"id":"https://openalex.org/C17825722","wikidata":"https://www.wikidata.org/wiki/Q17285","display_name":"Plane (geometry)","level":2,"score":0.4192146062850952},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.4009736180305481},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.35823488235473633},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.3360505700111389},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.19232177734375},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.1772748827934265},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.13810735940933228},{"id":"https://openalex.org/C136525101","wikidata":"https://www.wikidata.org/wiki/Q5428139","display_name":"Fabrication","level":3,"score":0.12339317798614502},{"id":"https://openalex.org/C74650414","wikidata":"https://www.wikidata.org/wiki/Q11397","display_name":"Classical mechanics","level":1,"score":0.10007715225219727},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C204787440","wikidata":"https://www.wikidata.org/wiki/Q188504","display_name":"Alternative medicine","level":2,"score":0.0},{"id":"https://openalex.org/C142724271","wikidata":"https://www.wikidata.org/wiki/Q7208","display_name":"Pathology","level":1,"score":0.0},{"id":"https://openalex.org/C71924100","wikidata":"https://www.wikidata.org/wiki/Q11190","display_name":"Medicine","level":0,"score":0.0},{"id":"https://openalex.org/C2524010","wikidata":"https://www.wikidata.org/wiki/Q8087","display_name":"Geometry","level":1,"score":0.0},{"id":"https://openalex.org/C33923547","wikidata":"https://www.wikidata.org/wiki/Q395","display_name":"Mathematics","level":0,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1587/elex.14.20161257","is_oa":true,"landing_page_url":"https://doi.org/10.1587/elex.14.20161257","pdf_url":"https://www.jstage.jst.go.jp/article/elex/14/5/14_14.20161257/_pdf","source":{"id":"https://openalex.org/S207433681","display_name":"IEICE Electronics Express","issn_l":"1349-2543","issn":["1349-2543","1349-9467"],"is_oa":true,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4320800604","host_organization_name":"Institute of Electronics, Information and Communication Engineers","host_organization_lineage":["https://openalex.org/P4320800604"],"host_organization_lineage_names":["Institute of Electronics, Information and Communication Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEICE Electronics Express","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1587/elex.14.20161257","is_oa":true,"landing_page_url":"https://doi.org/10.1587/elex.14.20161257","pdf_url":"https://www.jstage.jst.go.jp/article/elex/14/5/14_14.20161257/_pdf","source":{"id":"https://openalex.org/S207433681","display_name":"IEICE Electronics Express","issn_l":"1349-2543","issn":["1349-2543","1349-9467"],"is_oa":true,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4320800604","host_organization_name":"Institute of Electronics, Information and Communication Engineers","host_organization_lineage":["https://openalex.org/P4320800604"],"host_organization_lineage_names":["Institute of Electronics, Information and Communication Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEICE Electronics Express","raw_type":"journal-article"},"sustainable_development_goals":[{"display_name":"Affordable and clean energy","id":"https://metadata.un.org/sdg/7","score":0.550000011920929}],"awards":[],"funders":[{"id":"https://openalex.org/F4320321784","display_name":"Kementerian Sains, Teknologi dan Inovasi","ror":"https://ror.org/012s3r374"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2591029394.pdf","grobid_xml":"https://content.openalex.org/works/W2591029394.grobid-xml"},"referenced_works_count":26,"referenced_works":["https://openalex.org/W1276653532","https://openalex.org/W1500532467","https://openalex.org/W1971812257","https://openalex.org/W1974416521","https://openalex.org/W1979779823","https://openalex.org/W2000934322","https://openalex.org/W2016020803","https://openalex.org/W2035009540","https://openalex.org/W2035128527","https://openalex.org/W2041000665","https://openalex.org/W2041663138","https://openalex.org/W2043619384","https://openalex.org/W2053432225","https://openalex.org/W2064856940","https://openalex.org/W2071827237","https://openalex.org/W2073129665","https://openalex.org/W2094258590","https://openalex.org/W2110363894","https://openalex.org/W2115802331","https://openalex.org/W2126794714","https://openalex.org/W2139356817","https://openalex.org/W2175020792","https://openalex.org/W2189408811","https://openalex.org/W2262727781","https://openalex.org/W2362282932","https://openalex.org/W2513265369"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W2114051864","https://openalex.org/W1563566515","https://openalex.org/W1014036322","https://openalex.org/W2463122996","https://openalex.org/W4206531533","https://openalex.org/W2393141780","https://openalex.org/W2893862247"],"abstract_inverted_index":{"In":[0,15,46,66],"this":[1,16,47],"article,":[2],"we":[3],"present":[4],"a":[5,27,129],"simple":[6],"MEMS":[7],"magnetic":[8],"sensor":[9,19,35,61,104,114],"based":[10,38],"on":[11,39],"Lorentz":[12,80],"Force":[13],"principle.":[14],"work,":[17],"the":[18,49,57,60,87,92,103,113,122],"is":[20,36,84,105,118],"designed,":[21],"fabricated":[22,37],"and":[23,63,94],"characterized":[24],"capacitively":[25],"using":[26],"standard":[28],"capacitance":[29,90],"to":[30,55,68,79],"voltage":[31],"MS3110":[32],"circuit.":[33],"The":[34,97,108],"double":[40],"thickness":[41,58],"PolyMUMP":[42],"surface":[43],"micromachining":[44],"process.":[45],"process,":[48],"two":[50],"Poly":[51],"layers":[52],"are":[53],"combined":[54],"increase":[56],"of":[59,75,102,125,132],"beams":[62],"central":[64],"shuttle.":[65],"response":[67],"an":[69,73],"input":[70,123],"excitation":[71],"current":[72,124],"out":[74],"plane":[76],"motion":[77],"due":[78],"force":[81],"occurs":[82],"which":[83],"detected":[85,99],"by":[86,112],"change":[88],"in":[89],"between":[91],"moving":[93],"static":[95],"plate.":[96],"experimentally":[98],"resonant":[100],"frequency":[101],"5.1":[106],"kHz.":[107],"experimental":[109],"sensitivity":[110],"achieved":[111],"at":[115],"atmospheric":[116],"condition":[117],"5.59":[119],"V/T":[120],"for":[121],"30":[126],"mA":[127],"with":[128],"damping":[130],"ratio":[131],"0.010.":[133]},"counts_by_year":[{"year":2018,"cited_by_count":2}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}