{"id":"https://openalex.org/W2513265369","doi":"https://doi.org/10.1587/elex.13.20160773","title":"Optical and capacitive characterization of MEMS magnetic resonator","display_name":"Optical and capacitive characterization of MEMS magnetic resonator","publication_year":2016,"publication_date":"2016-01-01","ids":{"openalex":"https://openalex.org/W2513265369","doi":"https://doi.org/10.1587/elex.13.20160773","mag":"2513265369"},"language":"en","primary_location":{"id":"doi:10.1587/elex.13.20160773","is_oa":true,"landing_page_url":"https://doi.org/10.1587/elex.13.20160773","pdf_url":"https://www.jstage.jst.go.jp/article/elex/13/18/13_13.20160773/_pdf","source":{"id":"https://openalex.org/S207433681","display_name":"IEICE Electronics Express","issn_l":"1349-2543","issn":["1349-2543","1349-9467"],"is_oa":true,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4320800604","host_organization_name":"Institute of Electronics, Information and Communication Engineers","host_organization_lineage":["https://openalex.org/P4320800604"],"host_organization_lineage_names":["Institute of Electronics, Information and Communication Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEICE Electronics Express","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"diamond","oa_url":"https://www.jstage.jst.go.jp/article/elex/13/18/13_13.20160773/_pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5017661660","display_name":"Muhammad Umer Mian","orcid":"https://orcid.org/0000-0002-5057-8105"},"institutions":[{"id":"https://openalex.org/I203899302","display_name":"Universiti Teknologi Petronas","ror":"https://ror.org/048g2sh07","country_code":"MY","type":"education","lineage":["https://openalex.org/I203899302"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Muhammad U. Mian","raw_affiliation_strings":["Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS","institution_ids":["https://openalex.org/I203899302"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5031357175","display_name":"John Ojur Dennis","orcid":"https://orcid.org/0000-0002-4489-649X"},"institutions":[{"id":"https://openalex.org/I203899302","display_name":"Universiti Teknologi Petronas","ror":"https://ror.org/048g2sh07","country_code":"MY","type":"education","lineage":["https://openalex.org/I203899302"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"John O. Dennis","raw_affiliation_strings":["Department of Fundamental and Applied Sciences, Universiti Teknologi PETRONAS"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Fundamental and Applied Sciences, Universiti Teknologi PETRONAS","institution_ids":["https://openalex.org/I203899302"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5065863396","display_name":"Mohd Haris Md Khir","orcid":"https://orcid.org/0000-0002-6083-6462"},"institutions":[{"id":"https://openalex.org/I203899302","display_name":"Universiti Teknologi Petronas","ror":"https://ror.org/048g2sh07","country_code":"MY","type":"education","lineage":["https://openalex.org/I203899302"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Mohd H. B. M. Khir","raw_affiliation_strings":["Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS","institution_ids":["https://openalex.org/I203899302"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5023322903","display_name":"Mawahib Gafare Ahmed","orcid":"https://orcid.org/0000-0002-5651-9747"},"institutions":[{"id":"https://openalex.org/I203899302","display_name":"Universiti Teknologi Petronas","ror":"https://ror.org/048g2sh07","country_code":"MY","type":"education","lineage":["https://openalex.org/I203899302"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Mawahib G. A. Ahmed","raw_affiliation_strings":["Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS","institution_ids":["https://openalex.org/I203899302"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5051448566","display_name":"Almur A. S. Rabih","orcid":"https://orcid.org/0000-0002-1395-2241"},"institutions":[{"id":"https://openalex.org/I203899302","display_name":"Universiti Teknologi Petronas","ror":"https://ror.org/048g2sh07","country_code":"MY","type":"education","lineage":["https://openalex.org/I203899302"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Almur A. S. Rabih","raw_affiliation_strings":["Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS","institution_ids":["https://openalex.org/I203899302"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5034034713","display_name":"Tong Boon Tang","orcid":"https://orcid.org/0000-0002-5721-6828"},"institutions":[{"id":"https://openalex.org/I203899302","display_name":"Universiti Teknologi Petronas","ror":"https://ror.org/048g2sh07","country_code":"MY","type":"education","lineage":["https://openalex.org/I203899302"]}],"countries":["MY"],"is_corresponding":false,"raw_author_name":"Tong Boon Tang","raw_affiliation_strings":["Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS","institution_ids":["https://openalex.org/I203899302"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":1,"corresponding_author_ids":[],"corresponding_institution_ids":["https://openalex.org/I203899302"],"apc_list":null,"apc_paid":null,"fwci":0.3564,"has_fulltext":true,"cited_by_count":3,"citation_normalized_percentile":{"value":0.64794883,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":90,"max":95},"biblio":{"volume":"13","issue":"18","first_page":"20160773","last_page":"20160773"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":0.9998000264167786,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9994999766349792,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12692","display_name":"Magnetic Field Sensors Techniques","score":0.9991999864578247,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/lorentz-force","display_name":"Lorentz force","score":0.8954331874847412},{"id":"https://openalex.org/keywords/resonator","display_name":"Resonator","score":0.8791409134864807},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.7979531288146973},{"id":"https://openalex.org/keywords/microelectromechanical-systems","display_name":"Microelectromechanical systems","score":0.7882293462753296},{"id":"https://openalex.org/keywords/magnetic-field","display_name":"Magnetic field","score":0.6429475545883179},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.6293653249740601},{"id":"https://openalex.org/keywords/sensitivity","display_name":"Sensitivity (control systems)","score":0.6096015572547913},{"id":"https://openalex.org/keywords/magnet","display_name":"Magnet","score":0.5324450731277466},{"id":"https://openalex.org/keywords/displacement","display_name":"Displacement (psychology)","score":0.5144484043121338},{"id":"https://openalex.org/keywords/voltage","display_name":"Voltage","score":0.5046044588088989},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.49515190720558167},{"id":"https://openalex.org/keywords/optics","display_name":"Optics","score":0.3769834637641907},{"id":"https://openalex.org/keywords/acoustics","display_name":"Acoustics","score":0.33796894550323486},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.31920263171195984},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.26469069719314575},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.18116316199302673},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.17151033878326416}],"concepts":[{"id":"https://openalex.org/C140190676","wikidata":"https://www.wikidata.org/wiki/Q172137","display_name":"Lorentz force","level":3,"score":0.8954331874847412},{"id":"https://openalex.org/C97126364","wikidata":"https://www.wikidata.org/wiki/Q349669","display_name":"Resonator","level":2,"score":0.8791409134864807},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.7979531288146973},{"id":"https://openalex.org/C37977207","wikidata":"https://www.wikidata.org/wiki/Q175561","display_name":"Microelectromechanical systems","level":2,"score":0.7882293462753296},{"id":"https://openalex.org/C115260700","wikidata":"https://www.wikidata.org/wiki/Q11408","display_name":"Magnetic field","level":2,"score":0.6429475545883179},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.6293653249740601},{"id":"https://openalex.org/C21200559","wikidata":"https://www.wikidata.org/wiki/Q7451068","display_name":"Sensitivity (control systems)","level":2,"score":0.6096015572547913},{"id":"https://openalex.org/C16389437","wikidata":"https://www.wikidata.org/wiki/Q11421","display_name":"Magnet","level":2,"score":0.5324450731277466},{"id":"https://openalex.org/C107551265","wikidata":"https://www.wikidata.org/wiki/Q1458245","display_name":"Displacement (psychology)","level":2,"score":0.5144484043121338},{"id":"https://openalex.org/C165801399","wikidata":"https://www.wikidata.org/wiki/Q25428","display_name":"Voltage","level":2,"score":0.5046044588088989},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.49515190720558167},{"id":"https://openalex.org/C120665830","wikidata":"https://www.wikidata.org/wiki/Q14620","display_name":"Optics","level":1,"score":0.3769834637641907},{"id":"https://openalex.org/C24890656","wikidata":"https://www.wikidata.org/wiki/Q82811","display_name":"Acoustics","level":1,"score":0.33796894550323486},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.31920263171195984},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.26469069719314575},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.18116316199302673},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.17151033878326416},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C15744967","wikidata":"https://www.wikidata.org/wiki/Q9418","display_name":"Psychology","level":0,"score":0.0},{"id":"https://openalex.org/C542102704","wikidata":"https://www.wikidata.org/wiki/Q183257","display_name":"Psychotherapist","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1587/elex.13.20160773","is_oa":true,"landing_page_url":"https://doi.org/10.1587/elex.13.20160773","pdf_url":"https://www.jstage.jst.go.jp/article/elex/13/18/13_13.20160773/_pdf","source":{"id":"https://openalex.org/S207433681","display_name":"IEICE Electronics Express","issn_l":"1349-2543","issn":["1349-2543","1349-9467"],"is_oa":true,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4320800604","host_organization_name":"Institute of Electronics, Information and Communication Engineers","host_organization_lineage":["https://openalex.org/P4320800604"],"host_organization_lineage_names":["Institute of Electronics, Information and Communication Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEICE Electronics Express","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1587/elex.13.20160773","is_oa":true,"landing_page_url":"https://doi.org/10.1587/elex.13.20160773","pdf_url":"https://www.jstage.jst.go.jp/article/elex/13/18/13_13.20160773/_pdf","source":{"id":"https://openalex.org/S207433681","display_name":"IEICE Electronics Express","issn_l":"1349-2543","issn":["1349-2543","1349-9467"],"is_oa":true,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4320800604","host_organization_name":"Institute of Electronics, Information and Communication Engineers","host_organization_lineage":["https://openalex.org/P4320800604"],"host_organization_lineage_names":["Institute of Electronics, Information and Communication Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEICE Electronics Express","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","display_name":"Affordable and clean energy","score":0.8500000238418579}],"awards":[],"funders":[{"id":"https://openalex.org/F4320321784","display_name":"Kementerian Sains, Teknologi dan Inovasi","ror":"https://ror.org/012s3r374"}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2513265369.pdf","grobid_xml":"https://content.openalex.org/works/W2513265369.grobid-xml"},"referenced_works_count":11,"referenced_works":["https://openalex.org/W1968874912","https://openalex.org/W1971812257","https://openalex.org/W2027224973","https://openalex.org/W2035009540","https://openalex.org/W2041000665","https://openalex.org/W2064856940","https://openalex.org/W2073129665","https://openalex.org/W2091611570","https://openalex.org/W2161271483","https://openalex.org/W2175020792","https://openalex.org/W2262727781"],"related_works":["https://openalex.org/W2272290532","https://openalex.org/W3102847316","https://openalex.org/W2120483398","https://openalex.org/W1530711136","https://openalex.org/W3172386668","https://openalex.org/W2045392317","https://openalex.org/W2587892165","https://openalex.org/W2537716684","https://openalex.org/W2152087047","https://openalex.org/W2053577253"],"abstract_inverted_index":{"In":[0],"this":[1],"paper":[2],"a":[3,75,82],"Lorentz":[4,45],"force":[5,46],"driven":[6],"Micro":[7],"ELectro":[8],"Mechanical":[9],"Sytems":[10],"(MEMS)":[11],"resonator":[12,25],"fabricated":[13],"on":[14],"PolyMUMP":[15],"process":[16],"with":[17,74],"optical":[18],"and":[19,61,81,101,114],"capacitive":[20,102],"sensing":[21,103],"is":[22,26],"presented.":[23],"The":[24],"designed":[27],"by":[28],"combining":[29],"the":[30,40,43,58,62,108],"two":[31],"poly":[32],"layers":[33],"which":[34,54],"result":[35],"in":[36,39,93],"an":[37],"increase":[38],"thickness":[41],"of":[42,67,78,85,90],"resonator.":[44],"generates":[47],"lateral":[48],"displacements":[49],"at":[50],"low":[51],"driving":[52,83],"voltages":[53],"are":[55],"proportional":[56],"to":[57],"magnetic":[59,76],"field":[60,77],"input":[63],"current.":[64],"A":[65],"displacement":[66],"more":[68],"than":[69],"9.8":[70],"\u00b5m":[71],"was":[72,95],"achieved":[73],"0.12":[79],"T":[80],"current":[84],"27":[86],"mA.":[87],"Magnetic":[88],"sensitivity":[89,109],"1.41":[91],"V/T":[92],"air":[94],"experimentally":[96],"measured":[97],"using":[98],"permanent":[99],"magnets":[100],"circuitry.":[104],"Optical":[105],"results":[106],"demonstrate":[107],"values":[110],"between":[111],"0.090":[112],"\u00b5m/mT":[113],"0.074":[115],"\u00b5m/mT.":[116]},"counts_by_year":[{"year":2025,"cited_by_count":1},{"year":2019,"cited_by_count":1},{"year":2017,"cited_by_count":1}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}