{"id":"https://openalex.org/W2119109679","doi":"https://doi.org/10.1587/elex.11.20140315","title":"A low noise sigma-delta microaccelerometer interface circuit","display_name":"A low noise sigma-delta microaccelerometer interface circuit","publication_year":2014,"publication_date":"2014-01-01","ids":{"openalex":"https://openalex.org/W2119109679","doi":"https://doi.org/10.1587/elex.11.20140315","mag":"2119109679"},"language":"en","primary_location":{"id":"doi:10.1587/elex.11.20140315","is_oa":true,"landing_page_url":"https://doi.org/10.1587/elex.11.20140315","pdf_url":"https://www.jstage.jst.go.jp/article/elex/11/12/11_11.20140315/_pdf","source":{"id":"https://openalex.org/S207433681","display_name":"IEICE Electronics Express","issn_l":"1349-2543","issn":["1349-2543","1349-9467"],"is_oa":true,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4320800604","host_organization_name":"Institute of Electronics, Information and Communication Engineers","host_organization_lineage":["https://openalex.org/P4320800604"],"host_organization_lineage_names":["Institute of Electronics, Information and Communication Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEICE Electronics Express","raw_type":"journal-article"},"type":"article","indexed_in":["crossref"],"open_access":{"is_oa":true,"oa_status":"diamond","oa_url":"https://www.jstage.jst.go.jp/article/elex/11/12/11_11.20140315/_pdf","any_repository_has_fulltext":false},"authorships":[{"author_position":"first","author":{"id":"https://openalex.org/A5100390760","display_name":"Xiaowei Liu","orcid":"https://orcid.org/0000-0002-3071-5467"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Xiaowei Liu","raw_affiliation_strings":["MEMS center, Harbin Institute of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS center, Harbin Institute of Technology","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100546256","display_name":"Honglin Xu","orcid":null},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Honglin Xu","raw_affiliation_strings":["MEMS center, Harbin Institute of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS center, Harbin Institute of Technology","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5101616979","display_name":"Liang Yin","orcid":"https://orcid.org/0000-0003-4811-5053"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Liang Yin","raw_affiliation_strings":["MEMS center, Harbin Institute of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS center, Harbin Institute of Technology","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"middle","author":{"id":"https://openalex.org/A5100612875","display_name":"Zhiqiang Gao","orcid":"https://orcid.org/0000-0002-6160-1147"},"institutions":[{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Zhiqiang Gao","raw_affiliation_strings":["MEMS center, Harbin Institute of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS center, Harbin Institute of Technology","institution_ids":["https://openalex.org/I204983213"]}]},{"author_position":"last","author":{"id":"https://openalex.org/A5103121380","display_name":"Mingyuan Ren","orcid":null},"institutions":[{"id":"https://openalex.org/I100188998","display_name":"Harbin University of Science and Technology","ror":"https://ror.org/04e6y1282","country_code":"CN","type":"education","lineage":["https://openalex.org/I100188998"]},{"id":"https://openalex.org/I204983213","display_name":"Harbin Institute of Technology","ror":"https://ror.org/01yqg2h08","country_code":"CN","type":"education","lineage":["https://openalex.org/I204983213"]}],"countries":["CN"],"is_corresponding":false,"raw_author_name":"Mingyuan Ren","raw_affiliation_strings":["MEMS center, Harbin Institute of Technology","School of Software, Harbin University of Science and Technology","MEMS Center, Harbin Institute of Technology"],"raw_orcid":null,"affiliations":[{"raw_affiliation_string":"MEMS center, Harbin Institute of Technology","institution_ids":["https://openalex.org/I204983213"]},{"raw_affiliation_string":"School of Software, Harbin University of Science and Technology","institution_ids":["https://openalex.org/I100188998"]},{"raw_affiliation_string":"MEMS Center, Harbin Institute of Technology","institution_ids":["https://openalex.org/I204983213"]}]}],"institutions":[],"countries_distinct_count":1,"institutions_distinct_count":2,"corresponding_author_ids":[],"corresponding_institution_ids":[],"apc_list":null,"apc_paid":null,"fwci":1.4503,"has_fulltext":true,"cited_by_count":9,"citation_normalized_percentile":{"value":0.84802639,"is_in_top_1_percent":false,"is_in_top_10_percent":false},"cited_by_percentile_year":{"min":94,"max":98},"biblio":{"volume":"11","issue":"12","first_page":"20140315","last_page":"20140315"},"is_retracted":false,"is_paratext":false,"is_xpac":false,"primary_topic":{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},"topics":[{"id":"https://openalex.org/T10369","display_name":"Advanced MEMS and NEMS Technologies","score":1.0,"subfield":{"id":"https://openalex.org/subfields/2208","display_name":"Electrical and Electronic Engineering"},"field":{"id":"https://openalex.org/fields/22","display_name":"Engineering"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T11449","display_name":"Mechanical and Optical Resonators","score":0.9997000098228455,"subfield":{"id":"https://openalex.org/subfields/3107","display_name":"Atomic and Molecular Physics, and Optics"},"field":{"id":"https://openalex.org/fields/31","display_name":"Physics and Astronomy"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}},{"id":"https://openalex.org/T12564","display_name":"Sensor Technology and Measurement Systems","score":0.9994000196456909,"subfield":{"id":"https://openalex.org/subfields/1705","display_name":"Computer Networks and Communications"},"field":{"id":"https://openalex.org/fields/17","display_name":"Computer Science"},"domain":{"id":"https://openalex.org/domains/3","display_name":"Physical Sciences"}}],"keywords":[{"id":"https://openalex.org/keywords/delta-sigma-modulation","display_name":"Delta-sigma modulation","score":0.7353830337524414},{"id":"https://openalex.org/keywords/capacitive-sensing","display_name":"Capacitive sensing","score":0.6743016242980957},{"id":"https://openalex.org/keywords/cmos","display_name":"CMOS","score":0.6023797988891602},{"id":"https://openalex.org/keywords/capacitance","display_name":"Capacitance","score":0.590203583240509},{"id":"https://openalex.org/keywords/electronic-engineering","display_name":"Electronic engineering","score":0.5659341812133789},{"id":"https://openalex.org/keywords/noise","display_name":"Noise (video)","score":0.5511512160301208},{"id":"https://openalex.org/keywords/electrical-engineering","display_name":"Electrical engineering","score":0.5372353196144104},{"id":"https://openalex.org/keywords/sampling","display_name":"Sampling (signal processing)","score":0.49639469385147095},{"id":"https://openalex.org/keywords/chip","display_name":"Chip","score":0.4934491217136383},{"id":"https://openalex.org/keywords/interface","display_name":"Interface (matter)","score":0.47884392738342285},{"id":"https://openalex.org/keywords/bandwidth","display_name":"Bandwidth (computing)","score":0.42873528599739075},{"id":"https://openalex.org/keywords/figure-of-merit","display_name":"Figure of merit","score":0.42127490043640137},{"id":"https://openalex.org/keywords/engineering","display_name":"Engineering","score":0.40331828594207764},{"id":"https://openalex.org/keywords/materials-science","display_name":"Materials science","score":0.3049392104148865},{"id":"https://openalex.org/keywords/computer-science","display_name":"Computer science","score":0.2745450735092163},{"id":"https://openalex.org/keywords/optoelectronics","display_name":"Optoelectronics","score":0.24974662065505981},{"id":"https://openalex.org/keywords/physics","display_name":"Physics","score":0.22054418921470642},{"id":"https://openalex.org/keywords/telecommunications","display_name":"Telecommunications","score":0.09039482474327087},{"id":"https://openalex.org/keywords/detector","display_name":"Detector","score":0.07026517391204834}],"concepts":[{"id":"https://openalex.org/C68754193","wikidata":"https://www.wikidata.org/wiki/Q1184820","display_name":"Delta-sigma modulation","level":3,"score":0.7353830337524414},{"id":"https://openalex.org/C206755178","wikidata":"https://www.wikidata.org/wiki/Q1131271","display_name":"Capacitive sensing","level":2,"score":0.6743016242980957},{"id":"https://openalex.org/C46362747","wikidata":"https://www.wikidata.org/wiki/Q173431","display_name":"CMOS","level":2,"score":0.6023797988891602},{"id":"https://openalex.org/C30066665","wikidata":"https://www.wikidata.org/wiki/Q164399","display_name":"Capacitance","level":3,"score":0.590203583240509},{"id":"https://openalex.org/C24326235","wikidata":"https://www.wikidata.org/wiki/Q126095","display_name":"Electronic engineering","level":1,"score":0.5659341812133789},{"id":"https://openalex.org/C99498987","wikidata":"https://www.wikidata.org/wiki/Q2210247","display_name":"Noise (video)","level":3,"score":0.5511512160301208},{"id":"https://openalex.org/C119599485","wikidata":"https://www.wikidata.org/wiki/Q43035","display_name":"Electrical engineering","level":1,"score":0.5372353196144104},{"id":"https://openalex.org/C140779682","wikidata":"https://www.wikidata.org/wiki/Q210868","display_name":"Sampling (signal processing)","level":3,"score":0.49639469385147095},{"id":"https://openalex.org/C165005293","wikidata":"https://www.wikidata.org/wiki/Q1074500","display_name":"Chip","level":2,"score":0.4934491217136383},{"id":"https://openalex.org/C113843644","wikidata":"https://www.wikidata.org/wiki/Q901882","display_name":"Interface (matter)","level":4,"score":0.47884392738342285},{"id":"https://openalex.org/C2776257435","wikidata":"https://www.wikidata.org/wiki/Q1576430","display_name":"Bandwidth (computing)","level":2,"score":0.42873528599739075},{"id":"https://openalex.org/C130277099","wikidata":"https://www.wikidata.org/wiki/Q3676605","display_name":"Figure of merit","level":2,"score":0.42127490043640137},{"id":"https://openalex.org/C127413603","wikidata":"https://www.wikidata.org/wiki/Q11023","display_name":"Engineering","level":0,"score":0.40331828594207764},{"id":"https://openalex.org/C192562407","wikidata":"https://www.wikidata.org/wiki/Q228736","display_name":"Materials science","level":0,"score":0.3049392104148865},{"id":"https://openalex.org/C41008148","wikidata":"https://www.wikidata.org/wiki/Q21198","display_name":"Computer science","level":0,"score":0.2745450735092163},{"id":"https://openalex.org/C49040817","wikidata":"https://www.wikidata.org/wiki/Q193091","display_name":"Optoelectronics","level":1,"score":0.24974662065505981},{"id":"https://openalex.org/C121332964","wikidata":"https://www.wikidata.org/wiki/Q413","display_name":"Physics","level":0,"score":0.22054418921470642},{"id":"https://openalex.org/C76155785","wikidata":"https://www.wikidata.org/wiki/Q418","display_name":"Telecommunications","level":1,"score":0.09039482474327087},{"id":"https://openalex.org/C94915269","wikidata":"https://www.wikidata.org/wiki/Q1834857","display_name":"Detector","level":2,"score":0.07026517391204834},{"id":"https://openalex.org/C62520636","wikidata":"https://www.wikidata.org/wiki/Q944","display_name":"Quantum mechanics","level":1,"score":0.0},{"id":"https://openalex.org/C17525397","wikidata":"https://www.wikidata.org/wiki/Q176140","display_name":"Electrode","level":2,"score":0.0},{"id":"https://openalex.org/C55352822","wikidata":"https://www.wikidata.org/wiki/Q5558978","display_name":"Gibbs isotherm","level":3,"score":0.0},{"id":"https://openalex.org/C42360764","wikidata":"https://www.wikidata.org/wiki/Q83588","display_name":"Chemical engineering","level":1,"score":0.0},{"id":"https://openalex.org/C58226133","wikidata":"https://www.wikidata.org/wiki/Q1324199","display_name":"Pulmonary surfactant","level":2,"score":0.0},{"id":"https://openalex.org/C115961682","wikidata":"https://www.wikidata.org/wiki/Q860623","display_name":"Image (mathematics)","level":2,"score":0.0},{"id":"https://openalex.org/C154945302","wikidata":"https://www.wikidata.org/wiki/Q11660","display_name":"Artificial intelligence","level":1,"score":0.0}],"mesh":[],"locations_count":1,"locations":[{"id":"doi:10.1587/elex.11.20140315","is_oa":true,"landing_page_url":"https://doi.org/10.1587/elex.11.20140315","pdf_url":"https://www.jstage.jst.go.jp/article/elex/11/12/11_11.20140315/_pdf","source":{"id":"https://openalex.org/S207433681","display_name":"IEICE Electronics Express","issn_l":"1349-2543","issn":["1349-2543","1349-9467"],"is_oa":true,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4320800604","host_organization_name":"Institute of Electronics, Information and Communication Engineers","host_organization_lineage":["https://openalex.org/P4320800604"],"host_organization_lineage_names":["Institute of Electronics, Information and Communication Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEICE Electronics Express","raw_type":"journal-article"}],"best_oa_location":{"id":"doi:10.1587/elex.11.20140315","is_oa":true,"landing_page_url":"https://doi.org/10.1587/elex.11.20140315","pdf_url":"https://www.jstage.jst.go.jp/article/elex/11/12/11_11.20140315/_pdf","source":{"id":"https://openalex.org/S207433681","display_name":"IEICE Electronics Express","issn_l":"1349-2543","issn":["1349-2543","1349-9467"],"is_oa":true,"is_in_doaj":false,"is_core":true,"host_organization":"https://openalex.org/P4320800604","host_organization_name":"Institute of Electronics, Information and Communication Engineers","host_organization_lineage":["https://openalex.org/P4320800604"],"host_organization_lineage_names":["Institute of Electronics, Information and Communication Engineers"],"type":"journal"},"license":null,"license_id":null,"version":"publishedVersion","is_accepted":true,"is_published":true,"raw_source_name":"IEICE Electronics Express","raw_type":"journal-article"},"sustainable_development_goals":[{"id":"https://metadata.un.org/sdg/7","score":0.7400000095367432,"display_name":"Affordable and clean energy"}],"awards":[{"id":"https://openalex.org/G3371986592","display_name":null,"funder_award_id":"61204121","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"},{"id":"https://openalex.org/G3494127084","display_name":null,"funder_award_id":"2013AA041107","funder_id":"https://openalex.org/F4320335773","funder_display_name":"National High-tech Research and Development Program"},{"id":"https://openalex.org/G4243412236","display_name":null,"funder_award_id":"863 Program","funder_id":"https://openalex.org/F4320321001","funder_display_name":"National Natural Science Foundation of China"}],"funders":[{"id":"https://openalex.org/F4320321001","display_name":"National Natural Science Foundation of China","ror":"https://ror.org/01h0zpd94"},{"id":"https://openalex.org/F4320324787","display_name":"Peking University","ror":"https://ror.org/02v51f717"},{"id":"https://openalex.org/F4320335773","display_name":"National High-tech Research and Development Program","ror":null}],"has_content":{"pdf":true,"grobid_xml":true},"content_urls":{"pdf":"https://content.openalex.org/works/W2119109679.pdf","grobid_xml":"https://content.openalex.org/works/W2119109679.grobid-xml"},"referenced_works_count":9,"referenced_works":["https://openalex.org/W1974526631","https://openalex.org/W1986018212","https://openalex.org/W1986639213","https://openalex.org/W2034618373","https://openalex.org/W2092984849","https://openalex.org/W2119985792","https://openalex.org/W2140717033","https://openalex.org/W2144637390","https://openalex.org/W2145154079"],"related_works":["https://openalex.org/W2348740411","https://openalex.org/W2051563071","https://openalex.org/W1966596465","https://openalex.org/W2337947459","https://openalex.org/W4386858602","https://openalex.org/W2505169246","https://openalex.org/W2118205267","https://openalex.org/W2126912594","https://openalex.org/W1988444705","https://openalex.org/W4292622326"],"abstract_inverted_index":{"A":[0],"closed-loop":[1,88],"sigma-delta":[2],"(\u03a3\u0394)":[3],"capacitive":[4],"microaccelerometer":[5],"interface":[6,39],"circuit":[7,35,40],"is":[8,36,41,52,69,104],"proposed":[9,30],"in":[10,43,86],"this":[11],"work":[12],"based":[13],"on":[14],"the":[15,29,49,66,77,96,107],"time":[16],"shared":[17],"multiplexing":[18],"electrostatic":[19],"feedback":[20],"and":[21,48,65,95],"correlated-double-sampling":[22],"(CDS)":[23],"techniques.":[24],"The":[25,38,55,72],"noise":[26,32,81],"analysis":[27],"of":[28,83,99],"low":[31],"capacitance":[33],"detection":[34],"presented.":[37],"fabricated":[42],"a":[44,61,80,87,91],"standard":[45],"CMOS":[46],"process":[47],"active":[50],"area":[51],"13":[53],"mm2.":[54],"chip":[56],"consumes":[57],"20":[58],"mW":[59],"from":[60],"5":[62],"V":[63],"supply":[64],"sampling":[67],"frequency":[68],"250":[70],"kHz.":[71],"measured":[73],"results":[74],"show":[75],"that":[76],"sensor":[78],"achieves":[79],"floor":[82],"6":[84],"\u00b5g/Hz1/2":[85],"operation":[89],"over":[90],"1.5":[92],"kHz":[93],"bandwidth,":[94],"achieved":[97],"figure":[98],"merit":[100],"(FOM,":[101],"53":[102],"pW/Hz)":[103],"better":[105],"than":[106],"previously":[108],"reported":[109],"\u03a3\u0394":[110],"interfaces.":[111]},"counts_by_year":[{"year":2018,"cited_by_count":2},{"year":2017,"cited_by_count":3},{"year":2015,"cited_by_count":4}],"updated_date":"2025-11-06T03:46:38.306776","created_date":"2025-10-10T00:00:00"}
